JPH10185454A5 - - Google Patents

Info

Publication number
JPH10185454A5
JPH10185454A5 JP1996340950A JP34095096A JPH10185454A5 JP H10185454 A5 JPH10185454 A5 JP H10185454A5 JP 1996340950 A JP1996340950 A JP 1996340950A JP 34095096 A JP34095096 A JP 34095096A JP H10185454 A5 JPH10185454 A5 JP H10185454A5
Authority
JP
Japan
Prior art keywords
nitrogen
gas
enriched
oxygen
enriched gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996340950A
Other languages
English (en)
Japanese (ja)
Other versions
JP3963512B2 (ja
JPH10185454A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP34095096A priority Critical patent/JP3963512B2/ja
Priority claimed from JP34095096A external-priority patent/JP3963512B2/ja
Publication of JPH10185454A publication Critical patent/JPH10185454A/ja
Publication of JPH10185454A5 publication Critical patent/JPH10185454A5/ja
Application granted granted Critical
Publication of JP3963512B2 publication Critical patent/JP3963512B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP34095096A 1996-12-20 1996-12-20 熱処理炉用炉内雰囲気ガスの調製方法および装置 Expired - Fee Related JP3963512B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34095096A JP3963512B2 (ja) 1996-12-20 1996-12-20 熱処理炉用炉内雰囲気ガスの調製方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34095096A JP3963512B2 (ja) 1996-12-20 1996-12-20 熱処理炉用炉内雰囲気ガスの調製方法および装置

Publications (3)

Publication Number Publication Date
JPH10185454A JPH10185454A (ja) 1998-07-14
JPH10185454A5 true JPH10185454A5 (fr) 2004-10-21
JP3963512B2 JP3963512B2 (ja) 2007-08-22

Family

ID=18341807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34095096A Expired - Fee Related JP3963512B2 (ja) 1996-12-20 1996-12-20 熱処理炉用炉内雰囲気ガスの調製方法および装置

Country Status (1)

Country Link
JP (1) JP3963512B2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4834490B2 (ja) * 2006-08-21 2011-12-14 大陽日酸株式会社 浸炭用雰囲気ガス発生装置及び発生方法
JP5607453B2 (ja) * 2010-08-02 2014-10-15 日本エア・リキード株式会社 熱処理雰囲気ガスの供給装置および供給方法
CN104344725B (zh) * 2014-11-07 2016-10-05 苏州工业园区姑苏科技有限公司 一种炉封气氛净化装置

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