JPH10186196A - Optical element support device, optical apparatus having the same, and exposure apparatus - Google Patents

Abstract

(57) [Summary] [PROBLEMS] When deformation of a supporting device main body is transmitted to an optical element,
The optical characteristics of the optical element deteriorate. SOLUTION: In an optical element supporting apparatus for housing an optical element 1 in a support frame 6 and positioning the optical element in the optical axis direction, a holding member 2 attached to the optical element, and the holding member 2 Holding (pinching or suction) by allowing relative movement in a direction other than the direction (for example, a direction perpendicular to the optical axis)
And the base member 3 is accommodated and held in a support frame.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a support device for positioning an optical element such as a lens or a mirror at a predetermined position in an optical axis direction, and to an optical apparatus and an exposure apparatus having the support device.

[0002]

2. Description of the Related Art As a supporting device as described above, there is a lens barrel for holding an optical element by so-called ball pushing, throwing, etc. For example, FIG. 15 shows a lens barrel of a ball pushing holding type. In this figure, reference numeral 112 denotes a lens constituting a refraction type projection optical system, and reference numeral 113 denotes these lenses.
2 is a lens barrel main body that holds the lens barrel 2. Each lens 112 is ground in advance to have an outer diameter having a predetermined coaxiality with the lens optical axis, and these outer diameter dimensions are measured with a predetermined accuracy. Each lens 112 is provided on the inner circumference of the lens barrel body 113.
The lens installation portions 113a to 113c corresponding to the outer diameter of are formed. In addition, these lens installation parts 113a-11
The position of the optical axis 3c in the optical axis direction is determined so that a predetermined clearance is formed between the lenses 112 when the lenses 112 are installed.

In this lens barrel, the lower surface in the vicinity of the outer periphery of each lens 112 is brought into contact with a corner of each of the lens contact portions 113a to 113c, and is screwed into a screw portion formed above each of the lens mounting portions 113a to 113c. The lens 112 is fixed by pressing the lens 112 with the dowel ring 114.

[0004]

However, in the above-mentioned lens barrel, the lens barrel body is deformed by the pressing force of the holding ring 114 or an external force applied to the lens barrel body, and this deformation is transmitted to the lens, When stress is generated based on the difference in the amount of thermal deformation of each member when the lens barrel body expands or contracts due to heat, etc., the surface shape and refractive index of the lens change, and the optical characteristics deteriorate. There is.

In the above-mentioned lens barrel, the lens installation section 113 is provided.
Although a to 113c are in direct contact with the lens 112, the shape of the lens 112 and the shape of the lens installation portions 113a to 113c rarely match exactly, and the lens 112 and the lens installation portions 113a to 113c have multiple points. Often comes in contact with. In this case, the weight of the lens and the holding ring 11
The lens is pressed by the lens mounting portions 113a to 113a-1
There is also a problem that the optical characteristics are deteriorated due to deformation following the shape of 13c.

Therefore, in the present invention, the lens can be supported without being deformed even if the supporting device main body is deformed, the amount of thermal deformation of each member is different, or the shape of the supporting device main body is inconsistent with the lens shape. It is an object of the present invention to provide an optical element support device as described above, an optical device including the same, and an exposure device.

[0007]

In order to achieve the above object, according to the present invention, there is provided an optical element supporting apparatus for housing an optical element in a support frame and positioning the optical element in an optical axis direction. The attached holding member and holding (holding or sucking) the holding member by allowing relative movement in a direction other than the optical axis direction (for example, a direction orthogonal to the optical axis).
And a base member that accommodates and holds the base member in a support frame.

That is, according to the present invention, the base member and the holding member are relatively movable in a plane orthogonal to the optical axis or the like, so that the optical element is positioned at a predetermined position in the optical axis direction and the base member is held at a predetermined position. The deformation is prevented from being transmitted to the holding member and the optical element.

More specifically, as shown in the first embodiment below, a holding force (a holding force or a suction force) by a base member acts on a holding member attached to the outer periphery of an optical element in the optical axis direction. Then, the holding member and the base member are slid to allow the holding member to move in a direction other than the optical axis direction so that the holding force is not affected on the optical element. It is desirable to be able to carry out the design without being bound by the optical design.

When the base member sucks the holding member, the suction force may be generated by a magnetic force.

Further, the holding member is provided with means for restricting the degree of freedom of movement of the holding member in a direction other than the optical axis direction so as to allow relative movement between the base member and the holding member. It is desirable that the positions of the holding member and the optical element can be maintained within a predetermined range such as in an orthogonal plane.

Further, according to the present invention, in an optical element supporting device for housing an optical element in a support frame and positioning the optical element in the optical axis direction, the optical element can be elastically deformed only in a direction other than the optical axis direction. A movable holding member, which is held via an elastic member and accommodated and held in a support frame, is provided.

That is, in the present invention, even if there is a difference in the amount of thermal deformation between the optical element and the elastic member holding the optical element, the elastic member is elastically deformed in a direction to absorb the difference, so that the stress acting on the lens is reduced. Is reduced, and changes in the surface shape and refractive index of the lens can be suppressed.

Preferably, a cylindrical member having a peripheral wall which is elastically deformable in the radial direction is used as the elastic member, and an optical element is attached to an end of the cylindrical member in the optical axis direction. Notches or slits may be formed in the peripheral wall to increase the degree of freedom of deformation or increase the allowable deformation.

Further, according to the present invention, in an optical element supporting apparatus for supporting an optical element and positioning the optical element in an optical axis direction, the optical element is interposed via an intermediate member deformed according to the shape of the optical element. And support them.

That is, in the present invention, even when the shape of the optical element does not match the shape of the base member serving as a support base of the optical element, an intermediate member plastically deformed to match the shape of the optical element is interposed. Thus, the optical element is supported by a line or a surface to prevent deformation of the optical element.

The intermediate member may be attached to the base member by bonding or the like, or may be formed by vapor deposition on the base member.

According to the present invention, the provision of such an optical element supporting device makes it possible to realize an optical apparatus or an exposure apparatus in which the optical characteristics are hardly changed due to the deformation of the optical element.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION

(First Embodiment) FIG. 1 shows a lens barrel (optical element support device) for a refraction type projection optical system according to a first embodiment of the present invention. In this figure, Z is the optical axis,
The direction of gravity is the -Z direction.

Reference numeral 1 denotes a lens (optical element), and reference numeral 2 denotes a holding ring attached to an outer peripheral portion of the lens 1. Note that the lens 1 is caulked at the periphery of the ring 2 with a predetermined coaxiality.

Reference numeral 3 denotes a ring-shaped holding base for holding the lens 1 and the ring 2, and a peripheral wall 3a and the peripheral wall 3
and a bottom surface portion 3b that protrudes radially inward from the lower portion of a. Ball members (steel balls in the present embodiment) 4 are buried in the bottom surface 3b at three locations in the circumferential direction (every 120 degrees) so as to expose substantially the upper half. Further, a clamp 5 for holding the ring 2 between the steel member 4 and the ball member 4 is provided at a position corresponding to a position where the steel ball 4 is embedded in the upper part of the peripheral wall portion 3a.

Reference numeral 6 denotes a lens barrel main body, and a projection 6a projecting radially inward is formed at the lowermost portion. Inside the lens barrel body 6, six lens sets each including the above-described lens 1, the holding ring 2, and the holding base 3 are accommodated in a state of being overlapped. Then, the lower surface of the holding base 3 in the lowermost lens set is brought into contact with the upper surface of the overhang portion 6a, and the holding ring 7 is screwed into a female screw portion formed on the upper inner periphery of the lens barrel main body 6. By tightening the holding base 3, the positioning of each lens set in the optical axis direction is performed.

Further, by fitting the outer circumference of the holding base 3 of each lens set to the inner circumference of the lens barrel main body 6, each lens set is positioned in a plane (XY plane) orthogonal to the optical axis direction. The lens 1 is arranged coaxially with a predetermined accuracy.

Here, the force of the clamp 5 pressing the ring 2 is N, the coefficient of static friction between the ball member 4 and the ring 2 is μ,
The component force required to hold the ring 2 in the predetermined position in the XY plane is F ₀ , and the ring 2 is moved in the XY plane against friction due to expansion due to heat or stress during assembly of the optical system. Assuming that the force acting on the surface is F, a relationship of F>μN> F ₀ holds between them. For this reason, if the static friction coefficient μ is reduced in a range satisfying μN> F ₀ , the ring 2 moves with respect to the holding base 3 even if the force F acting on the ring 2 is small. Therefore, in order to improve the slidability between the ball member 4 and the ring 2, it is desirable to lubricate them with oil, molybdenum disulfide or the like so that the coefficient of static friction μ is reduced as much as possible.

In the lens barrel configured as described above, even if the holding base 3 is deformed due to the tightening of the holding ring 7 or the deformation of the lens barrel when assembling the optical system, or the optical system expands and contracts due to heat. When the relationship of the forces acting on the ring 2 satisfies the relationship of the above expression, the holding base 3 (the ball member 4 and the clamp 5) and the ring member 2 relatively move in the XY plane, so that the lens 1 and the ring 2 The external force that deforms hardly acts on them. Therefore, it is possible to reliably prevent the optical characteristics of the present lens barrel from changing due to deformation of the holding base 3 or the like.

In the above embodiment, the case where the steel ball is buried in the holding base 3 has been described. However, the ball member 4 to be buried is made of ceramic or the like, and dust is generated from the contact portion with the holding ring 2. You may make it suppress.

Further, in the above embodiment, the case where the ball member 4 is brought into contact with the bottom surface (flat portion) of the ring 2 has been described, but the shape of each contact portion is not limited to a sphere and a flat surface. For example,
As shown in FIG. 2, the cylindrical members 8 may be arranged at the contact portions between the ring 2 and the holding base 3, and the outer peripheral portions of the cylindrical members 8 may be brought into contact.

Further, in the above embodiment, the case where the holding ring 2 is sandwiched between the clamp 5 and the ball member 4 has been described. However, as shown in FIG. 3, one of the ball member 4 and the ring 2 is magnetized. Alternatively, the other may be made of a magnetic material, and the ball member 4 and the ring 2 may be attracted and held by a magnetic force. By adopting such a suction holding method, the rotation of the ring 2 around the X-axis and the Y-axis is not restricted as in the case where the ring 2 is sandwiched by clamps separated in the circumferential direction. It is possible to prevent the deformation of the holding base 3 from being transmitted to the ring 2 and the lens 1.

(Second Embodiment) FIGS. 4 and 5 show a lens barrel (optical element support device) for a refraction type projection optical system according to a second embodiment of the present invention. Note that, in the present embodiment, the same components as those of the lens barrel of the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

4 and 5, reference numeral 12 denotes the lens 1
Is a holding ring attached to the outer peripheral portion of. As shown in detail in FIG. 5, a conical hole 12b is formed in one of the contact portions of the lower surface of the holding ring 12 with the three ball members 4. The other contact portion has a V-groove 1 extending linearly in the radial direction (X-axis direction).
2d is formed. The other contact portion is a flat surface 12c. The hole 12b and the V-groove 12
The ball member 4 is fitted to d, and the ball member 4 contacts the flat surface 12c.

In the lens barrel configured as described above, the ring 2 is held as described below, and the six degrees of freedom are positioned without excessive restraint.

[0032] For this reason, even if the holding member 3 is deformed due to the tightening of the holding ring 7 or the lens barrel 6 is deformed when assembling the optical system,
When the ball member 4 slides in the V-groove 12b and the plane surface 12c, almost no external force for deforming the lens 1 acts on the lens 1, and the state when the lens 1 is joined to the ring 2 is maintained regardless of the external force. be able to. Moreover, the lens 1 can be easily held in a desired position range in the XY plane. (Third Embodiment) FIGS. 6 and 7 show a lens barrel (optical element support device) for a refraction projection optical system according to a third embodiment of the present invention. Note that, in the present embodiment, the same components as those of the lens barrel of the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

In FIG. 6, reference numeral 22 denotes a holding ring attached to the outer peripheral portion of the lens 1. As shown in detail in FIG. 7, contact portions of the lower surface of the holding ring 22 with the three ball members 4 are provided in the radial directions (the X-axis direction and the direction opened by 120 degrees with respect to the X-axis), respectively. A V groove 22e extending linearly is formed.

In the lens barrel configured as described above, the holding base 3 is deformed by the tightening of the holding ring 7,
Even if the lens barrel 6 is deformed during assembly of the optical system, the V-groove 22e
When the ball member 4 slides inside, the lens 1 hardly receives an external force for deforming the lens 1 and the lens 1 is connected to the ring 2.
Can be maintained regardless of external force. Moreover, the lens 1 can be easily held in a desired position range in the XY plane.

When the optical system expands or contracts due to heat or the like, the distortion caused by the difference between the linear expansion coefficients of the lens 1, the ring 2, the holding base 3 and the lens barrel main body 6 is caused by the spherical member 4 Since it is absorbed by moving in the radial direction in e, the lens 1 can be prevented from being decentered.

(Fourth Embodiment) FIG. 8 shows a fourth embodiment of the present invention.
1 illustrates a lens barrel (optical element support device) used in a refractive projection optical system according to an embodiment. In this figure, Z is the optical axis, and the direction of gravity is the -Z direction.

Reference numeral 31 denotes a lens (optical element);
9 is a holding cylinder made of an elastic material, as shown in FIG.
2a is bonded or welded to the outer peripheral portion of the lens 31. 33 is a holding base, and this holding base 33 is
It has a peripheral wall portion 33a and a bottom surface portion 33b projecting radially inward from a lower portion of the peripheral wall portion 33a. The lower end 32 of the holding cylinder 32 is provided at the inner end of the upper surface of the bottom portion 33b.
b is bonded or welded.

Reference numeral 34 denotes a lens barrel main body, and at the lowermost portion, a projecting portion 34a projecting radially inward is formed. Inside the lens barrel body 34, a lens set including the above-described lens 31, the holding cylinder 32, and the holding base 33 is provided.
They are housed in an overlapping state. Then, the lower surface of the holding base 33 in the lowermost lens set is brought into contact with the upper surface of the overhang portion 34a, and the holding ring 35 is screwed into a female screw portion formed on the upper inner periphery of the lens barrel main body 34, and each lens set By tightening the holding base 33, the positioning of each lens set in the optical axis direction is performed.

Further, by fitting the outer circumference of the holding base 33 of each lens set to the inner circumference of the lens barrel main body 34, each lens set is positioned in a plane (XY plane) orthogonal to the optical axis direction. The lens 31 is arranged coaxially with a predetermined accuracy.

In the lens barrel configured as described above, the holding cylinder 32 is flexible only for uniform deformation in the radial direction, and when the lens 31 expands or contracts due to heat or the like, the holding cylinder 32 is connected to the holding cylinder 32. The stress acting on the lens 31 due to the difference in the amount of thermal deformation from the holding cylinder 32 is reduced by the elastic deformation of the ends 32a and 32b of the cylinder 2 in the radial direction. Therefore, changes in the surface shape and the refractive index of the lens 31 can be suppressed.

Note that the peripheral wall of the holding cylinder 32 is
By forming the notch 32c that extends in the optical axis direction and opens at the upper end as shown in (2), the degree of freedom of elastic deformation of the peripheral wall portion may be increased, and the allowable deformation amount may be increased.

The allowable amount of deformation of the holding cylinder 32 in the radial direction increases as the length of the cylinder 32 in the optical axis direction increases, but a sufficient length in the optical axis direction due to a layout problem of the optical system or the like is required. If it cannot be ensured, a slit 32c 'may be formed in the peripheral wall as shown in FIG. 11 to secure a necessary deformation allowance.

(Fifth Embodiment) Next, referring to FIG.
A stepper (exposure device) using the lens barrel described in the first to fourth embodiments will be described. FIG. 12 shows a case where the lens barrel described in the fourth embodiment is used.

In FIG. 12, reference numeral 66 denotes an illumination light source.
Reference numeral 67 denotes a reticle which is an original of a transfer pattern. Reference numeral 68 denotes a reticle stage for holding the reticle 67. Reference numeral 9 denotes a surface plate for setting the lens barrel 30 at a predetermined position of the exposure apparatus main body. Reference numeral 70 denotes a wafer on which the pattern of the reticle 67 is transferred by light from the illumination light source 66, and reference numeral 71 denotes a wafer stage that holds the wafer 70.

In the stepper thus constructed, the lens 31 and the holding cylinder 32 which have been irradiated with light from the illumination light source 66 are thermally deformed. The difference in the amount of thermal deformation is caused by the elastic deformation of the cylinder 2. Because it is absorbed, the lens 31
There is no change in the surface shape or refractive index of the. Therefore, accurate pattern transfer to the wafer 70 can be performed.

(Sixth Embodiment) FIG. 13 shows a lens barrel (optical element support device) for a refractive projection optical system according to a sixth embodiment of the present invention. In this figure, Z is the optical axis, and the direction of gravity is the -Z direction.

Reference numeral 81 denotes a lens (optical element), and reference numeral 82 denotes a holding base serving as a support base for the lens 81. The holding base 82 has a peripheral wall portion 82a and a bottom surface portion 82b projecting radially inward from a lower portion of the peripheral wall portion 82a. Between the upper surface of the bottom portion 82b and the lens 81,
A thin intermediate ring 83 is interposed. The intermediate ring 83 is made of a relatively easily deformable metal such as gold, indium, or lead, and a contact surface of the intermediate ring 83 with the lens 81 before the lens barrel is assembled.
The shape of the peripheral portion of the lens 81 is transferred by being pressed against the peripheral portion of the lens 81. The intermediate ring 83 is bonded to the bottom surface portion 82b after the transfer, and further receives the bonding of the lens 81.

When the shape of the peripheral portion of the lens 81 is transferred to the intermediate ring 83, if the lens contact surface of the intermediate ring 83 is chamfered in advance to a shape close to the curvature of the peripheral portion of the lens 1, the lens The contact area between 81 and the intermediate ring 83 can be made wider.

Reference numeral 84 denotes a lens barrel main body, and a projection 84a projecting radially inward is formed at the lowermost portion. Inside the lens barrel body 84, a lens set including the above-described lens 81, holding base 82, and intermediate ring 83 is provided.
They are housed in an overlapping state. Then, the lower surface of the holding base 82 in the lowermost lens set is brought into contact with the upper surface of the overhang portion 84a, and the holding ring 85 is screwed into a female screw portion formed on the upper inner circumference of the lens barrel main body 84, so that each lens set By tightening the holding base 82, the positioning of each lens set in the optical axis direction is performed.

Further, by fitting the outer periphery of the holding base 82 of each lens set to the inner periphery of the lens barrel main body 84, each lens set is positioned in a plane (XY plane) orthogonal to the optical axis direction. The lens 81 is arranged coaxially with a predetermined accuracy.

In the lens barrel configured as described above, the lens 81 is connected to the lens 81 via the intermediate ring 82 which is in close contact with the lens surface.
Is supported, it is possible to prevent the lens surface from being deformed following the shape of the holding base 82 (the bottom surface portion 82b) due to the weight of the lens 81 as in the case where the intermediate ring 82 is not interposed. Can be prevented from becoming worse.

In the above embodiment, the intermediate ring 83
As described above, the case where a metal that can be deformed following the lens surface shape by pressing with a force that does not damage the lens 81 has been described, but the intermediate member in the present invention is a material that causes plastic flow and Any material may be used as long as it retains its shape after being deformed according to the surface shape of. For example, a member such as gypsum that can be cured while maintaining its shape from a state of high fluidity may be used.

In the above embodiment, the case where the intermediate ring 83 pressed and deformed against the lens surface is used has been described. However, the fluidity is increased by changing the state quantity of the atmosphere such as temperature and humidity. After being deformed in accordance with the lens surface shape, an intermediate ring may be used in which the atmosphere is returned to a normal state to maintain the deformed shape. For example, a method of transferring the lens surface shape by melting the metal by high heat, returning the temperature to room temperature, and curing the metal surface is conceivable.In such a case, the lens surface shape is controlled so that the lens is not damaged by heat. It is preferable to use a dummy member which is processed with high precision according to the above and has a higher melting point than the intermediate ring, instead of the lens. Furthermore, in this embodiment, the intermediate ring 83 is bonded to the holding base 82, but may be formed by depositing a metal such as gold or indium on the holding base 82 with a predetermined thickness.

(Seventh Embodiment) Next, referring to FIG.
A stepper (exposure device) using the lens barrel described in the sixth embodiment will be described. In this figure, reference numeral 96 denotes an illumination light source, and reference numeral 97 denotes a reticle which is an original of a transfer pattern. Reference numeral 98 denotes a reticle stage for holding the reticle 97.

Reference numeral 99 denotes a surface plate for installing the lens barrel 80 at a predetermined position of the main body of the exposure apparatus. Also, 100
Reference numeral denotes a wafer on which the pattern of the reticle 97 is transferred by light from the illumination light source 96, and 101 denotes a wafer stage for holding the wafer 100.

In the stepper thus constructed, the lens 81 of the lens barrel 80 is not deformed by its own weight following the shape of the holding base 82, and the surface shape and the refractive index of the lens 81 do not change. In addition, accurate pattern transfer to the wafer 100 can be performed.

In the fifth and seventh embodiments,
Although the case where the lens barrel described in the first to fourth and sixth embodiments is used for the stepper has been described, the optical element support device of the present invention can be used for optical devices other than the stepper.

[0058]

As described above, according to the present invention, the optical element is movably supported in a plane perpendicular to the optical axis, and even if the main body of the supporting device is deformed, the deformation is applied to the optical element. Since it is configured not to be transmitted, changes in the surface shape and refractive index of the optical element can be suppressed, and deterioration of optical characteristics can be reliably prevented.

If means for restricting the degree of freedom of movement of the optical element in a direction other than the optical axis direction is provided, the optical element can be easily held in a predetermined position range within an orthogonal plane or the like.

Further, in the present invention, if there is a difference in the amount of thermal deformation between the optical element and the elastic member holding the optical element, the difference is absorbed by the elastic member. Can be reduced, and changes in the surface shape and refractive index of the lens can be suppressed.

Further, according to the present invention, the optical element is supported via the intermediate member deformed according to the shape of the optical element. Deformation due to its own weight can be prevented, and deterioration of optical characteristics can be prevented.

According to the invention of the present application, by providing such an optical element supporting device, it is possible to realize an optical apparatus or an exposure apparatus in which the change in optical characteristics due to the deformation of the optical element is small.

[Brief description of the drawings]

FIG. 1 is a sectional view of a lens barrel according to a first embodiment of the present invention.

FIG. 2 is a modified example of the lens barrel of the first embodiment.

FIG. 3 is a modified example of the lens barrel of the first embodiment.

FIG. 4 is a sectional view of a lens barrel according to a second embodiment of the present invention.

FIG. 5 is a bottom perspective view of a holding ring of the lens barrel according to the second embodiment.

FIG. 6 is a sectional view of a lens barrel according to a third embodiment of the present invention.

FIG. 7 is a bottom perspective view of a holding ring of the lens barrel according to the third embodiment.

FIG. 8 is a sectional view of a lens barrel according to a fourth embodiment of the present invention.

FIG. 9 is a partial perspective view of the lens barrel of the fourth embodiment.

FIG. 10 is a modified example of the lens barrel of the fourth embodiment.

FIG. 11 is a modified example of the lens barrel of the fourth embodiment.

FIG. 12 is a schematic configuration diagram of a stepper according to a fifth embodiment of the present invention.

FIG. 13 is a sectional view of a lens barrel according to a sixth embodiment of the present invention.

FIG. 14 is a schematic configuration diagram of a stepper according to a seventh embodiment of the present invention.

FIG. 15 is a sectional view of a conventional lens barrel.

[Explanation of symbols]

 1, 31, 81, 112 Lens 2, 12 Holding ring 3, 33, 82 Holding base 4 Ball member 5 Clamp 6, 34, 84, 113 Lens barrel body 7, 35, 85, 114 Holding ring 12b, 22e V groove 12c plane 12d conical hole

Claims (13)

[Claims] 1. An optical element supporting apparatus for accommodating an optical element in a support frame and positioning the optical element in an optical axis direction, wherein: a holding member attached to the optical element; An optical element supporting device, comprising: a base member that allows and holds a relative movement in a direction other than the axial direction, wherein the base member is housed and held in a support frame. 2. The optical element supporting device according to claim 1, wherein the base member holds the holding member. 3. The optical element supporting device according to claim 2, wherein the base member sucks the holding member. 4. The optical element supporting device according to claim 3, wherein the base member attracts the holding member by a magnetic force. 5. The holding member according to claim 1, further comprising means for restricting a degree of freedom of movement of the holding member in a direction other than the optical axis direction. Optical element support device. 6. An optical element supporting apparatus for housing an optical element in a support frame and positioning the optical element in an optical axis direction, wherein the optical element is elastically deformable only in a direction other than the optical axis direction. An optical element supporting device, comprising: a movable holding member that is held by a member and accommodated and held in the support frame. 7. The optical element supporting device according to claim 6, wherein the elastic member is a cylindrical member having a peripheral wall that can be elastically deformed. 8. The optical element supporting device according to claim 7, wherein a notch or a slit is formed in a peripheral wall of the tubular member. 9. An optical element supporting device for supporting an optical element and positioning the optical element in the optical axis direction, wherein the optical element is supported via an intermediate member deformed according to the shape of the optical element. An optical element support device, characterized in that: 10. The optical element supporting device according to claim 9, further comprising a base member serving as a support base for the optical element, wherein the intermediate member is attached to the base member. 11. The optical element supporting device according to claim 9, further comprising a base member serving as a support base for the optical element, wherein the intermediate member is deposited on the base member. 12. An optical apparatus comprising the optical element supporting device according to claim 1. Description: 13. An exposure apparatus comprising the optical element support device according to claim 1. Description: