JPH1020008A - Magnetic measuring method, magnetic detecting unit, magnetic detecting board, and magnetic measuring device - Google Patents

Abstract

(57) [Summary] [PROBLEMS] To reduce the work load of measuring the magnetic distribution in space and shorten the measurement time. SOLUTION: A magnetic detection board 20 in which a large number of magnetic detection units 10 for detecting magnetism and converting the light into light are arranged on a support plate is installed in a measurement target space, and a CCD camera 3 is remotely located.
At 0, the magnetic detection board 20 is imaged. The captured image is analyzed by the information processing device 50, the magnetic information of each magnetic detection unit 10 is extracted, and a magnetic distribution map is created from the magnetic information and the position information of each magnetic detection unit 10. [Effect] The work load on the operator can be reduced. The measurement time can be shortened and even if the state of the magnetic source changes over time,
The magnetic distribution in space can be measured accurately. It is easy to measure even magnetism in a space that is difficult for operators to enter.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic measuring method, a magnetic detecting unit, a magnetic detecting board, and a magnetic measuring device. More specifically, the present invention measures a magnetic field in a space inside a clean room and a magnetic field in a space around a particle accelerator. The present invention relates to a magnetic measurement method, a magnetic detection unit, a magnetic detection board, and a magnetic measurement device that are useful for:

[0002]

2. Description of the Related Art Conventionally, when measuring the magnetism in the internal space of a clean room V shown in FIG. 7, an operator positions a magnetic detector at a number of detection points P,. Is collecting magnetic information.

[0003]

Conventionally, as described above, the operator performs the work of collecting magnetic information by positioning the magnetic detector at each of the detection points P,..., But this work is very burdensome. But there is a serious problem. Also, all the detection points P,.
Since it takes a long time to collect the magnetic information, if the state of the magnetic source changes with time, there is a problem that the magnetic information cannot be measured accurately. For example, there are 45 detection points P,
Assuming that it takes about one minute to measure one point, it takes about 45 minutes to collect magnetic information of all the detection points P. If the state of the magnetic source changes during about 45 minutes, the obtained magnetic information will be inaccurate. In addition, the interior space of the clean room V and the space around the particle accelerator have a problem that it takes time and effort for people to enter and exit. Therefore, an object of the present invention is to provide a magnetic measurement method and a magnetic detection unit that can greatly reduce the work load on an operator, can significantly reduce the measurement time as a whole, and can also eliminate the trouble of entering and leaving a person. , A magnetic detection board and a magnetic measurement device.

[0004]

According to a first aspect, the present invention provides a magnetic detector and a light emitting means for emitting light containing magnetic information detected by the magnetic detector at a detection point. A magnetic measurement method is provided, wherein a light receiving means for receiving the light is installed at a light receiving point remote from the detection point, and magnetic information of the detection point is extracted from the received light. In the magnetic measurement method according to the first aspect, since the magnetic information at the detection point is remotely transmitted by light, the magnetic information at the detection point can be collected at a location remote from the detection point. Therefore, if the magnetic detector and the light emitting means are arranged at the detection point, the operator does not need to go to the detection point, so that the operator's work load can be greatly reduced and the overall measurement time can be greatly reduced. Can be shortened to Furthermore, there is no need for people to enter and exit. Since light is used, a long signal line is not required. In addition, the magnetism is not disturbed as in the case of using radio waves.

In a second aspect, the present invention provides a magnetic detector and a light emitting means for emitting light containing magnetic information detected by the magnetic detector at a plurality of detection points distributed in space. Then, an imaging unit for imaging a part or all of the plurality of light emitting units is installed at an imaging point remote from the detection point, and the light of each light emitting unit in the image captured by the imaging unit is extracted, A magnetic measurement method is provided, wherein magnetic information of the detection points is respectively extracted from the extracted light. In the magnetic measurement method according to the second aspect, the magnetic information at a plurality of detection points is transmitted remotely by light and received by the imaging means. Can be collected collectively. Therefore, if the magnetic detector and the light emitting means are arranged at each detection point, the operator does not need to go to each detection point, which can greatly reduce the work burden on the operator and the measurement time as a whole. Can be greatly reduced. Furthermore, there is no need for people to enter and exit. Since light is used, a long signal line is not required. In addition, the magnetism is not disturbed as in the case of using radio waves.

According to a third aspect of the present invention, a magnetic detector and light emitting means for emitting light containing magnetic information detected by the magnetic detector are provided at a plurality of detection points distributed in space. Then, an imaging unit for imaging a part or all of the plurality of light emitting units is installed at an imaging point remote from the detection point, and the light of each light emitting unit in the image captured by the imaging unit is extracted, A magnetic measurement method is provided, wherein magnetic information of the detection points is respectively extracted from the extracted light, and a magnetic distribution map of the space is created from the magnetic information of each detection point. In the magnetic measurement method according to the third aspect, the magnetic information at a plurality of detection points is transmitted remotely by light and received by the imaging means. Can be collected collectively. Therefore, if the magnetic detector and the light emitting means are arranged at each detection point, the operator does not need to go to each detection point, which can greatly reduce the work burden on the operator and the measurement time as a whole. Can be greatly reduced. In addition, there is no need to enter and exit people. Further, since light is used, a long signal line is not required, and the magnetic field is not disturbed as in the case of using radio waves. Further, since the magnetic distribution map of the space is created, the magnetic distribution of the space can be easily recognized visually.

According to a fourth aspect, the present invention provides a magnetic detection unit comprising a magnetic detector and light emitting means for emitting light containing magnetic information detected by the magnetic detector. I do. If the magnetic detection unit according to the fourth aspect is used, the magnetic measurement method according to the first to third aspects can be suitably performed.

According to a fifth aspect of the present invention, there is provided a magnetic detection unit including a magnetic detector and a light emitting means for emitting light containing magnetic information detected by the magnetic detector, the magnetic detection unit being provided on a non-magnetic support plate. And a magnetic detection board provided with a plurality of magnetic detection boards. If the magnetic detection unit according to the fifth aspect is used, the magnetic measurement methods according to the second and third aspects can be suitably performed.

In a sixth aspect, the present invention provides a magnetic detector comprising: a magnetic detector; and a plurality of magnetic detecting units each including a light emitting means for emitting light containing magnetic information detected by the magnetic detector;
Imaging means for imaging the magnetic detection units disposed at a plurality of detection points distributed in space, and extracting light from each light emitting means in an image taken by the imaging means, and extracting the light from the extracted light. There is provided a magnetism measuring device comprising: information processing means for respectively extracting magnetic information of a detection point. If the magnetic detection unit according to the sixth aspect is used, the magnetic measurement methods according to the second and third aspects can be suitably performed.

In the above configuration, it is preferable to use, as the magnetic detector, a three-dimensional magnetic detector that detects magnetism in each of three orthogonal axes. When a three-dimensional magnetic detector is used, the magnetism in any direction can be calculated by adding the detected magnetism in each direction to the load.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in more detail with reference to the embodiments shown in the drawings. Note that the present invention is not limited by this.

FIG. 1 is a configuration diagram of a magnetic detection unit according to one embodiment of the present invention. This magnetic detection unit 1
0 is an a-axis sensor Sa, b-axis sensor Sb, c which detects magnetism in each direction of the orthogonal a-axis, b-axis, and c-axis and converts it into a voltage.
An axis sensor Sc, an amplifier Aa that amplifies the voltage output from the a-axis sensor Sa, an a-axis light emitting diode La that emits light having an intensity proportional to the output of the amplifier Aa, and an output from the b-axis sensor Sb. Ab that amplifies the voltage to be applied
A b-axis light emitting diode Lb that emits light having an intensity proportional to the output of the amplifier Ab, an amplifier Ac that amplifies the voltage output from the c-axis sensor Sc, and an intensity proportional to the output of the amplifier Ac And a case C for accommodating them.

The a-axis sensor Sa and the b-axis sensor Sb, c
The axis sensor Sc has a magnetism of 1/100 of the geomagnetism (200 to
This is a high-sensitivity fluxgate sensor that responds to 300 nT).

FIG. 2 is a configuration diagram of a magnetic detection board according to one embodiment of the present invention. This magnetic detection board 20
Is a device in which nine magnetic detection units 10 are arranged on a plastic support plate B of, for example, a square of 1 m × 1 m. The light-emitting portions of the a-axis light-emitting diode La, the b-axis light-emitting diode Lb, and the c-axis light-emitting diode Lc are viewed from the case C of each magnetic detection unit 10.

One power supply may be provided for the magnetic detection board 20 or one power supply may be provided for each magnetic detection unit 10.

FIG. 3 is a configuration diagram of a magnetometer according to one embodiment of the present invention. This magnetic measuring device 100
A magnetic detection board 20; a CCD camera 30 for imaging the magnetic board 20;
An input device 40 for inputting posture information; extracting a-axis magnetic information, b-axis magnetic information, and c-axis magnetic information of each magnetic detection unit 10 from an image taken by the CCD camera 30; An information processing device 50 that calculates position information (position information of detection points) of each magnetic detection unit 10 from the / posture information and creates a magnetic distribution map;
And a display device 60 for displaying a magnetic distribution map.

FIG. 4 is an exemplary view of an image G captured by the CCD camera 30. The information processing device 50 generates windows W corresponding to the a-axis light-emitting diodes La, b-axis light-emitting diodes Lb, and c-axis light-emitting diodes Lc of each magnetic detection unit 10, and calculates a from the pixel value of each window W.
The axis magnetic information, the b axis magnetic information, and the c axis magnetic information are extracted.

FIG. 5A is an exemplary diagram of a magnetic distribution diagram based on a-axis magnetic information. FIG. 5B is an exemplary diagram of a magnetic distribution diagram based on b-axis magnetic information. FIG. 5 (c)
FIG. 4 is an exemplary diagram of a magnetic distribution map based on c-axis magnetic information.
FIG. 5D is an exemplary diagram of a magnetic distribution diagram based on a value obtained by squaring and adding the a-axis magnetic information, the b-axis magnetic information, and the c-axis magnetic information and taking the square root thereof. In addition, a-axis magnetic information and b
Since magnetic information in an arbitrary direction can be calculated by adding the weights of the axial magnetic information and the c-axis magnetic information, a magnetic distribution map of the magnetic information in an arbitrary direction can be created.

FIG. 6 is an explanatory diagram in the case where the magnetism in the internal space of the clean room V is measured by the magnetometer 100. First, the magnetic detection board 20 is installed at the first installation position a1 in the internal space V, and the magnetic detection board 20 is imaged by the CCD camera 30. Next, the second installation position a
2, the magnetic detection board 20 is moved, and the magnetic detection board 20 is imaged by the CCD camera 30. This is repeated until the last installation position (a5 in FIG. 6). Since a long signal line is not connected to the magnetic detection board 20, the magnetic detection board 20 can be easily moved.

For example, if there are five installation positions and it takes about 1 minute to measure each installation position, it takes about 5 minutes to collect magnetic information of all the installation positions. Since there are nine detection points at one installation position, magnetic information of a total of 45 detection points can be collected in about 5 minutes. If the state of the magnetic source changes during about 5 minutes, the obtained magnetic information will be inaccurate.
5 minutes) is much more accurate. Further, the operator needs to perform the installation and movement of the magnetic detection board 20 five times, but this work load is remarkably reduced as compared with the related art (45 times under the same conditions).

[0021]

According to the magnetic measuring method, the magnetic detecting unit, the magnetic detecting board and the magnetic measuring device of the present invention, the work load on the operator can be greatly reduced. In addition, the measurement time as a whole can be greatly reduced. Further, it is possible to eliminate the trouble of a person entering and leaving the space where the detection point is located.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a magnetic detection unit according to an embodiment of the present invention.

FIG. 2 is a configuration diagram showing a magnetic detection board according to one embodiment of the present invention.

FIG. 3 is a configuration diagram showing a magnetic measurement device according to an embodiment of the present invention.

FIG. 4 is an explanatory diagram of a captured image.

FIG. 5 is an exemplary diagram of a magnetic distribution diagram.

FIG. 6 is an explanatory diagram of a magnetic measurement of a clean room by the magnetic measurement device of FIG. 3;

FIG. 7 is an explanatory view of a conventional method for measuring a magnetic field in a clean room.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Magnetic detection unit 20 Magnetic detection board 30 CCD camera 40 Input device 50 Information processing device 60 Display device 100 Magnetic measurement device Sa, Sb, Sc Magnetic sensor La, Lb, Lc Light emitting diode B Support plate

Claims (6)

[Claims] 1. A magnetic detector and a light emitting means for emitting light containing magnetic information detected by the magnetic detector are disposed at a detection point, and a light receiving means for receiving the light is separated from the detection point. A magnetic measurement method, wherein the magnetic information is set at a light receiving point and magnetic information of the detection point is extracted from the received light. 2. A plurality of light emitting means, wherein a magnetic detector and light emitting means for emitting light containing magnetic information detected by the magnetic detector are arranged at a plurality of detection points distributed in space, respectively. An image pickup unit for picking up an image of a part or all of the light source is installed at an image pickup point distant from the detection point, and the light of each light emitting unit in the image picked up by the image pickup unit is extracted, and the detection point is extracted from the extracted light. A magnetic measurement method characterized by extracting magnetic information of each magnetic field. 3. A plurality of light emitting means, wherein a magnetic detector and light emitting means for emitting light containing magnetic information detected by the magnetic detector are arranged at a plurality of detection points distributed in space, respectively. An image pickup unit for picking up an image of a part or all of the light source is installed at an image pickup point distant from the detection point, and the light of each light emitting unit in the image picked up by the image pickup unit is extracted, and the detection point is extracted from the extracted light. And a magnetic distribution map of the space is created from the magnetic information of each detection point. 4. A magnetic detection unit comprising: a magnetic detector; and light emitting means for emitting light containing magnetic information detected by the magnetic detector. 5. A non-magnetic support plate comprising: a plurality of magnetic detection units each including a magnetic detector and light emitting means for emitting light containing magnetic information detected by the magnetic detector. And a magnetic detection board. 6. A plurality of magnetic detection units each including a magnetic detector and light emitting means for emitting light containing magnetic information detected by the magnetic detector, and respectively disposed at a plurality of detection points distributed in space. Imaging means for imaging the obtained magnetic detection unit, and information processing means for extracting light of each light emitting means in the image taken by the imaging means and extracting magnetic information of the detection point from the extracted light. A magnetic measuring device, comprising: