JPH10247717A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPH10247717A JPH10247717A JP9048664A JP4866497A JPH10247717A JP H10247717 A JPH10247717 A JP H10247717A JP 9048664 A JP9048664 A JP 9048664A JP 4866497 A JP4866497 A JP 4866497A JP H10247717 A JPH10247717 A JP H10247717A
- Authority
- JP
- Japan
- Prior art keywords
- signal terminal
- semiconductor device
- lead frame
- package
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/40—Leadframes
- H10W70/411—Chip-supporting parts, e.g. die pads
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W42/00—Arrangements for protection of devices
- H10W42/20—Arrangements for protection of devices protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons
- H10W42/261—Arrangements for protection of devices protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons characterised by their shapes or dispositions
- H10W42/265—Shielding wires, e.g. constant potential wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/541—Dispositions of bond wires
- H10W72/5449—Dispositions of bond wires not being orthogonal to a side surface of the chip, e.g. fan-out arrangements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/931—Shapes of bond pads
- H10W72/932—Plan-view shape, i.e. in top view
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink
Landscapes
- Lead Frames For Integrated Circuits (AREA)
Abstract
(57)【要約】
【課題】 半導体装置のパッケージを小型化し、かつ、
信号端子電極の電気的分離性を向上させる。
【解決手段】 半導体装置のパッケージ1の中央部にリ
ードフレーム2、周辺部に信号端子電極3ないし信号端
子電極7を配設し、リードフレーム2上に半導体チップ
8を搭載し、信号端子電極4および信号端子電極5の間
に接地電位を有する接地電極16、信号端子電極5およ
び信号端子電極6の間に接地電位を有する接地電極17
をそれぞれ配設する。
[PROBLEMS] To reduce the size of a semiconductor device package, and
Improve the electrical isolation of the signal terminal electrode. SOLUTION: A lead frame 2 is provided at a central portion of a package 1 of a semiconductor device, a signal terminal electrode 3 to a signal terminal electrode 7 are provided at a peripheral portion, a semiconductor chip 8 is mounted on the lead frame 2, and a signal terminal electrode 4 is provided. And a ground electrode 16 having a ground potential between the signal terminal electrodes 5, and a ground electrode 17 having a ground potential between the signal terminal electrodes 5 and 6.
Are arranged respectively.
Description
【0001】[0001]
【発明の属する技術分野】本発明は、高周波デバイスを
格納したパッケージを有する半導体装置に関するもので
ある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device having a package containing a high-frequency device.
【0002】[0002]
【従来の技術】近年、携帯電話、PHSをはじめとする
移動体通信端末の小型化が要望されている。そのため、
移動体通信端末に使用される半導体装置のパッケージを
縮小化することが考えられる。2. Description of the Related Art In recent years, there has been a demand for miniaturization of mobile communication terminals such as portable telephones and PHSs. for that reason,
It is conceivable to reduce the size of a semiconductor device package used for a mobile communication terminal.
【0003】まず、従来の半導体装置について説明す
る。図5は、高周波で動作する半導体チップを格納した
6ピンミニパッケージを有する従来の半導体装置の平面
図である。図5においてパッケージ1上の中央部には、
リードフレーム2、周辺部には信号端子電極3ないし信
号端子電極7が配設され、リードフレーム2上には半導
体チップ8が搭載されている。また、半導体チップ8上
に設けられたチップ電極9ないしチップ電極13は、ワ
イヤー15によって信号端子電極3ないし信号端子電極
7にそれぞれ接続され、半導体チップ8上に設けられた
チップ電極14は、ワイヤー15によってリードフレー
ム2に接続されている。隣接する信号端子電極4と信号
端子電極5との間隔および信号端子電極5と信号端子電
極6との間隔はそれぞれ0.5mmである。First, a conventional semiconductor device will be described. FIG. 5 is a plan view of a conventional semiconductor device having a 6-pin mini-package storing a semiconductor chip operating at a high frequency. In FIG. 5, in the central part on the package 1,
A signal terminal electrode 3 to a signal terminal electrode 7 are arranged on the lead frame 2 and a peripheral portion, and a semiconductor chip 8 is mounted on the lead frame 2. The chip electrodes 9 to 13 provided on the semiconductor chip 8 are respectively connected to the signal terminal electrodes 3 to 7 by wires 15, and the chip electrodes 14 provided on the semiconductor chip 8 are connected to wires 15 is connected to the lead frame 2. The distance between the adjacent signal terminal electrodes 4 and 5 and the distance between the signal terminal electrodes 5 and 6 are each 0.5 mm.
【0004】[0004]
【発明が解決しようとする課題】上記従来の半導体装置
において、パッケージの大きさを縮小化するためには、
信号端子電極4および信号端子電極5のように、隣接す
る2つの信号端子電極どうしの間隔を狭くすることが考
えられる。In the above-mentioned conventional semiconductor device, in order to reduce the size of the package,
As in the case of the signal terminal electrode 4 and the signal terminal electrode 5, it is conceivable to reduce the distance between two adjacent signal terminal electrodes.
【0005】一方、半導体装置を高周波で動作させる場
合、信号端子電極どうしの電気的分離性、すなわちアイ
ソレーションを高く保つことが必要であるので、隣接す
る信号端子電極どうしの間隔を一定値以上としなければ
ならない。−30dBのアイソレーションを得るために
は、信号端子電極どうしの間隔を0.5mm以上とする
必要がある。On the other hand, when the semiconductor device is operated at a high frequency, it is necessary to maintain high electrical isolation between signal terminal electrodes, that is, high isolation. Therefore, the interval between adjacent signal terminal electrodes is set to a certain value or more. There must be. In order to obtain an isolation of −30 dB, the interval between the signal terminal electrodes needs to be 0.5 mm or more.
【0006】したがって、上記半導体装置においては、
パッケージの小型化と信号端子電極のアイソレーション
の向上とを同時に満たすことができなかった。Therefore, in the above semiconductor device,
The miniaturization of the package and the improvement of the isolation of the signal terminal electrode cannot be satisfied at the same time.
【0007】本発明は、パッケージのサイズが小さく、
かつ、信号端子電極のアイソレーションが高い半導体装
置を提供することを目的とする。According to the present invention, the package size is small,
It is another object of the present invention to provide a semiconductor device having high isolation of signal terminal electrodes.
【0008】[0008]
【課題を解決するための手段】本発明の半導体装置は、
パッケージ上の中央部にリードフレーム、パッケージ上
の周辺部に複数の信号端子電極がそれぞれ配設され、リ
ードフレーム上に半導体チップが搭載され、隣り合う2
つの信号端子電極の間に、接地電位を有する接地電極が
配設されたもの、およびパッケージ上の中央部にリード
フレーム、パッケージ上の周辺部に複数の信号端子電極
がそれぞれ配設され、リードフレーム上に半導体チップ
が搭載され、リードフレーム上の中央部に、接地電位を
有する架橋状の導電線が、半導体チップ上を横切るよう
に配設されているものであり、これにより、信号端子電
極どうしが互いに電気的に遮蔽される。According to the present invention, there is provided a semiconductor device comprising:
A lead frame is provided at a central portion on the package, a plurality of signal terminal electrodes are provided at a peripheral portion on the package, and a semiconductor chip is mounted on the lead frame.
A ground electrode having a ground potential is provided between two signal terminal electrodes, and a lead frame is provided at a central portion on the package, and a plurality of signal terminal electrodes are provided at a peripheral portion on the package, respectively. A semiconductor chip is mounted on the semiconductor chip, and a bridge-shaped conductive line having a ground potential is disposed in a central portion on the lead frame so as to cross over the semiconductor chip. Are electrically shielded from each other.
【0009】[0009]
【発明の実施の形態】以下、本発明の実施の形態につい
て説明する。Embodiments of the present invention will be described below.
【0010】(実施の形態1)図1は、本発明の実施の
形態1における半導体装置の平面図である。(First Embodiment) FIG. 1 is a plan view of a semiconductor device according to a first embodiment of the present invention.
【0011】図1において、パッケージ1上の中央部に
は、リードフレーム2、周辺部には、信号端子電極3な
いし信号端子電極7が配設され、リードフレーム2上に
は半導体チップ8が搭載されている。また、半導体チッ
プ8上にはチップ電極9ないしチップ電極14が設けら
れており、チップ電極9ないしチップ電極13は、ワイ
ヤー15によって信号端子電極3ないし信号端子電極7
にそれぞれ接続され、チップ電極14はワイヤー15に
よってリードフレーム2に接続されている。信号端子電
極4と信号端子電極5との間には、接地電位を有し、リ
ードフレーム2と一体形成された接地電極16が配設さ
れている。同様に、信号端子電極5と信号端子電極6と
の間には、接地電極17が配設されている。In FIG. 1, a lead frame 2 is provided at a central portion on a package 1, a signal terminal electrode 3 to a signal terminal electrode 7 are provided at a peripheral portion, and a semiconductor chip 8 is mounted on the lead frame 2. Have been. Further, chip electrodes 9 to 14 are provided on the semiconductor chip 8, and the chip electrodes 9 to 13 are connected to the signal terminal electrodes 3 to 7 by wires 15.
, And the chip electrode 14 is connected to the lead frame 2 by a wire 15. A ground electrode 16 having a ground potential and formed integrally with the lead frame 2 is provided between the signal terminal electrode 4 and the signal terminal electrode 5. Similarly, a ground electrode 17 is provided between the signal terminal electrode 5 and the signal terminal electrode 6.
【0012】次に、上記半導体装置の動作について説明
する。信号端子電極4から入力された信号はワイヤー1
5およびチップ電極10を伝搬し、半導体チップ8内で
増幅、減衰などの処理を受け、チップ電極11およびワ
イヤー15を経由して信号端子電極5から出力される。
このとき、信号端子電極4と信号端子電極5との間に、
接地電位を有する接地電極16が配設されているため
に、信号端子電極4から発生する電磁波が遮蔽され、信
号端子電極5は、信号端子電極4で発生する電磁波の影
響を受けにくい。同様に、信号端子電極5で発生する電
磁波も、接地電極16によって遮蔽される。この結果、
信号端子電極4と信号端子電極5とのアイソレーション
が良好になる。Next, the operation of the semiconductor device will be described. The signal input from the signal terminal electrode 4 is the wire 1
5, undergoes processing such as amplification and attenuation in the semiconductor chip 8, and is output from the signal terminal electrode 5 via the chip electrode 11 and the wire 15.
At this time, between the signal terminal electrode 4 and the signal terminal electrode 5,
Since the ground electrode 16 having the ground potential is provided, the electromagnetic wave generated from the signal terminal electrode 4 is shielded, and the signal terminal electrode 5 is hardly affected by the electromagnetic wave generated at the signal terminal electrode 4. Similarly, the electromagnetic wave generated at the signal terminal electrode 5 is also shielded by the ground electrode 16. As a result,
The isolation between the signal terminal electrode 4 and the signal terminal electrode 5 is improved.
【0013】図2は、従来の半導体装置(曲線a)およ
び実施の形態1における半導体装置(曲線b)の周波数
とアイソレーションとの関係を示したものである。図2
から明らかなように、接地電極16、17を有する実施
の形態1における半導体装置は、従来の半導体装置より
も電気的分離性が向上していることがわかる。FIG. 2 shows the relationship between the frequency and the isolation of the conventional semiconductor device (curve a) and the semiconductor device (curve b) in the first embodiment. FIG.
As is clear from FIG. 5, the semiconductor device according to the first embodiment having the ground electrodes 16 and 17 has improved electrical isolation compared to the conventional semiconductor device.
【0014】上記実施の形態1では、6端子のパッケー
ジの例について説明したが、さらに多端子化されたパッ
ケージについても同様の効果が得られる。In the first embodiment, an example of a package having six terminals has been described. However, a similar effect can be obtained with a package having more terminals.
【0015】(実施の形態2)図3は、本発明の実施の
形態2における半導体装置の平面図である。(Embodiment 2) FIG. 3 is a plan view of a semiconductor device according to Embodiment 2 of the present invention.
【0016】実施の形態2における半導体装置は、接地
電極16、17を有していない点およびリードフレーム
2上の中央部には、接地電位を有し、半導体チップ8の
上を横切るような架橋状の導電線である接地ワイヤー1
8が設けられている点で、実施の形態1における半導体
装置とは異なる。In the semiconductor device according to the second embodiment, a bridge having a ground potential and crossing over the semiconductor chip 8 is provided at a point where the ground electrodes 16 and 17 are not provided and at a central portion on the lead frame 2. Ground wire 1 that is a conductive wire
8 in that it is different from the semiconductor device in the first embodiment.
【0017】この半導体装置においては、接地ワイヤー
18が、信号端子電極3および信号端子電極7から発生
する電磁波を遮蔽するため、信号端子電極4ないし信号
端子電極6のアイソレーションが向上し、また逆に信号
端子電極3および信号端子電極7のアイソレーションも
向上する。In this semiconductor device, the ground wire 18 shields electromagnetic waves generated from the signal terminal electrode 3 and the signal terminal electrode 7, so that the isolation of the signal terminal electrodes 4 to 6 is improved and the reverse. In addition, the isolation between the signal terminal electrode 3 and the signal terminal electrode 7 is improved.
【0018】図4は、従来の半導体装置(曲線a)およ
び実施の形態2における半導体装置(曲線b)の周波数
とアイソレーションとの関係を示したものである。図4
から明らかなように、接地ワイヤー18を有する実施の
形態2における半導体装置は、従来の半導体装置よりも
アイソレーションが向上していることがわかる。FIG. 4 shows the relationship between the frequency and the isolation of the conventional semiconductor device (curve a) and the semiconductor device (curve b) in the second embodiment. FIG.
As is clear from FIG. 7, the semiconductor device according to the second embodiment having the ground wire 18 has improved isolation as compared with the conventional semiconductor device.
【0019】[0019]
【発明の効果】以上説明したように、本発明は、半導体
装置のパッケージ上の中央部にリードフレーム、周辺部
に複数の信号端子電極をそれぞれ配設し、リードフレー
ム上に半導体チップを搭載し、隣り合う2つの信号端子
電極の間に、接地電位を有する接地電極を配設すること
により、小型でかつ電気的干渉の少ない半導体装置を得
ることができる。As described above, according to the present invention, a lead frame is provided at a central portion on a package of a semiconductor device, a plurality of signal terminal electrodes are provided at a peripheral portion, and a semiconductor chip is mounted on the lead frame. By arranging a ground electrode having a ground potential between two adjacent signal terminal electrodes, it is possible to obtain a small-sized semiconductor device with little electrical interference.
【図1】本発明の実施の形態1における半導体装置の平
面図FIG. 1 is a plan view of a semiconductor device according to a first embodiment of the present invention.
【図2】同半導体装置および従来の半導体装置の周波数
特性を示す図FIG. 2 is a diagram showing frequency characteristics of the semiconductor device and a conventional semiconductor device.
【図3】本発明の実施の形態2における半導体装置の平
面図FIG. 3 is a plan view of a semiconductor device according to a second embodiment of the present invention;
【図4】同半導体装置および従来の半導体装置の周波数
特性を示す図FIG. 4 is a diagram showing frequency characteristics of the semiconductor device and a conventional semiconductor device.
【図5】従来の半導体装置の平面図FIG. 5 is a plan view of a conventional semiconductor device.
1 パッケージ 2 リードフレーム 3、4、5、6、7 信号端子電極 8 半導体チップ 9、10、11、12、13、14 チップ電極 15 ワイヤー 16、17 接地電極 18 接地ワイヤー DESCRIPTION OF SYMBOLS 1 Package 2 Lead frame 3, 4, 5, 6, 7 Signal terminal electrode 8 Semiconductor chip 9, 10, 11, 12, 13, 14 Chip electrode 15 Wire 16, 17 Ground electrode 18 Ground wire
Claims (2)
ム、前記パッケージ上の周辺部に複数の信号端子電極が
それぞれ配設され、前記リードフレーム上に半導体チッ
プが搭載され、隣り合う2つの前記信号端子電極の間
に、接地電位を有する接地電極が配設されていることを
特徴とする半導体装置。1. A lead frame is provided at a central portion on a package, a plurality of signal terminal electrodes are provided at a peripheral portion on the package, and a semiconductor chip is mounted on the lead frame, and two adjacent signal terminals are provided. A semiconductor device, wherein a ground electrode having a ground potential is provided between the electrodes.
ム、前記パッケージ上の周辺部に複数の信号端子電極が
それぞれ配設され、前記リードフレーム上に半導体チッ
プが搭載され、前記リードフレーム上の中央部に、接地
電位を有する架橋状の導電線が、前記半導体チップ上を
横切るように配設されていることを特徴とする半導体装
置。2. A lead frame is provided at a central portion on the package, a plurality of signal terminal electrodes are provided at a peripheral portion on the package, a semiconductor chip is mounted on the lead frame, and a central portion on the lead frame is provided. A cross-linked conductive line having a ground potential is provided so as to cross over the semiconductor chip.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9048664A JPH10247717A (en) | 1997-03-04 | 1997-03-04 | Semiconductor device |
| CNB981052975A CN1154182C (en) | 1997-03-04 | 1998-02-27 | Semiconductor device |
| US09/033,240 US6166429A (en) | 1997-03-04 | 1998-03-03 | Lead-frame package with shield means between signal terminal electrodes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9048664A JPH10247717A (en) | 1997-03-04 | 1997-03-04 | Semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH10247717A true JPH10247717A (en) | 1998-09-14 |
Family
ID=12809613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9048664A Pending JPH10247717A (en) | 1997-03-04 | 1997-03-04 | Semiconductor device |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6166429A (en) |
| JP (1) | JPH10247717A (en) |
| CN (1) | CN1154182C (en) |
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| JP2003168764A (en) * | 2001-11-30 | 2003-06-13 | Fujitsu Ltd | Semiconductor device |
| JP2007059884A (en) * | 2005-07-22 | 2007-03-08 | Marvell World Trade Ltd | Packaging for high-speed integrated circuits |
| JP2020096158A (en) * | 2018-12-12 | 2020-06-18 | 浜松ホトニクス株式会社 | Photo detector |
| WO2020121852A1 (en) * | 2018-12-12 | 2020-06-18 | 浜松ホトニクス株式会社 | Photodetector |
| US11513002B2 (en) | 2018-12-12 | 2022-11-29 | Hamamatsu Photonics K.K. | Light detection device having temperature compensated gain in avalanche photodiode |
| US12080822B2 (en) | 2018-12-12 | 2024-09-03 | Hamamatsu Photonics K.K. | Photodetector and method for manufacturing photodetector |
| US12113088B2 (en) | 2018-12-12 | 2024-10-08 | Hamamatsu Photonics K.K. | Light detection device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI252582B (en) * | 2001-02-27 | 2006-04-01 | Sanyo Electric Co | Switch circuit device |
| CN100382295C (en) * | 2003-06-10 | 2008-04-16 | 矽品精密工业股份有限公司 | Semiconductor package capable of improving grounding quality and lead frame thereof |
| US20080079124A1 (en) * | 2006-10-03 | 2008-04-03 | Chris Edward Haga | Interdigitated leadfingers |
| DE102006059534A1 (en) * | 2006-12-16 | 2008-06-26 | Atmel Germany Gmbh | Semiconductor component |
| CN102214632A (en) * | 2010-04-08 | 2011-10-12 | 无锡华润安盛科技有限公司 | Lead frame for replacing lead frame of fusion structure |
| US9147656B1 (en) | 2014-07-11 | 2015-09-29 | Freescale Semicondutor, Inc. | Semiconductor device with improved shielding |
| CN104505378A (en) * | 2014-12-15 | 2015-04-08 | 日月光封装测试(上海)有限公司 | Lead frame and semiconductor package |
| US9515032B1 (en) * | 2015-08-13 | 2016-12-06 | Win Semiconductors Corp. | High-frequency package |
| US9337140B1 (en) | 2015-09-01 | 2016-05-10 | Freescale Semiconductor, Inc. | Signal bond wire shield |
| CN105858588A (en) * | 2016-06-23 | 2016-08-17 | 中国科学院半导体研究所 | Packaging structure and application thereof |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05251621A (en) * | 1992-03-05 | 1993-09-28 | Mitsubishi Electric Corp | Semiconductor integrated circuit |
| JPH0786460A (en) * | 1993-09-17 | 1995-03-31 | Toshiba Corp | Semiconductor device |
| US5869898A (en) * | 1997-04-25 | 1999-02-09 | Nec Corporation | Lead-frame having interdigitated signal and ground leads with high frequency leads positioned adjacent a corner and shielded by ground leads on either side thereof |
-
1997
- 1997-03-04 JP JP9048664A patent/JPH10247717A/en active Pending
-
1998
- 1998-02-27 CN CNB981052975A patent/CN1154182C/en not_active Expired - Fee Related
- 1998-03-03 US US09/033,240 patent/US6166429A/en not_active Expired - Lifetime
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003168764A (en) * | 2001-11-30 | 2003-06-13 | Fujitsu Ltd | Semiconductor device |
| JP2007059884A (en) * | 2005-07-22 | 2007-03-08 | Marvell World Trade Ltd | Packaging for high-speed integrated circuits |
| JP2020096158A (en) * | 2018-12-12 | 2020-06-18 | 浜松ホトニクス株式会社 | Photo detector |
| WO2020121852A1 (en) * | 2018-12-12 | 2020-06-18 | 浜松ホトニクス株式会社 | Photodetector |
| CN113167638A (en) * | 2018-12-12 | 2021-07-23 | 浜松光子学株式会社 | Light detection device |
| US11513002B2 (en) | 2018-12-12 | 2022-11-29 | Hamamatsu Photonics K.K. | Light detection device having temperature compensated gain in avalanche photodiode |
| US11561131B2 (en) | 2018-12-12 | 2023-01-24 | Hamamatsu Photonics K.K. | Determination method and light detection device |
| US11901379B2 (en) | 2018-12-12 | 2024-02-13 | Hamamatsu Photonics K.K. | Photodetector |
| US11927478B2 (en) | 2018-12-12 | 2024-03-12 | Hamamatsu Photonics K.K. | Light detection device |
| CN113167638B (en) * | 2018-12-12 | 2024-06-11 | 浜松光子学株式会社 | Light detection device |
| US12080822B2 (en) | 2018-12-12 | 2024-09-03 | Hamamatsu Photonics K.K. | Photodetector and method for manufacturing photodetector |
| US12113088B2 (en) | 2018-12-12 | 2024-10-08 | Hamamatsu Photonics K.K. | Light detection device |
| US12322744B2 (en) | 2018-12-12 | 2025-06-03 | Hamamatsu Photonics K.K. | Photodetector and method for manufacturing photodetector |
Also Published As
| Publication number | Publication date |
|---|---|
| US6166429A (en) | 2000-12-26 |
| CN1192582A (en) | 1998-09-09 |
| CN1154182C (en) | 2004-06-16 |
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