JPH10255958A - Heater control device - Google Patents

Abstract

(57) [Summary] A heating temperature of a plurality of heaters provided in an index table that rotates intermittently can be accurately detected. An index table that rotates intermittently is provided.
On the top 1, six heaters 12 are arranged at equal intervals in the circumferential direction, and each heater 12 is sequentially stopped at six stations. A current output from the heater control device 40 is supplied to the heater 12 stopped at a predetermined station via a contact 30. The current supplied to the heater 12 is
The current is supplied to the current detection unit 42 of the heater control device 40 via the contact 30. When the current detection unit 42 detects the peak current value, the temperature control unit 43 sets the heater 12 to the set temperature. And the current control unit 41 is controlled so that the peak current value becomes the set current value.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heating apparatus in which a plurality of heaters are provided on an index table which is intermittently rotated, and each heater stops at a station sequentially. The present invention relates to a heater control device for controlling a heater to a predetermined temperature when stopped at a station.

[0002]

2. Description of the Related Art In order to continuously bond a semiconductor chip to an appropriate component (work), a heating device provided with a plurality of heaters on an intermittently rotating index table is used. FIG. 7 shows a schematic configuration of such a heating device. In this heating device, six heaters 72 are arranged at equal intervals in the circumferential direction on an index table 71 that rotates intermittently.
It stops at six stations. At each station, the work is mounted on the heater 72, the work is heated by heating the heater 72, the semiconductor chip is mounted on the work heated by the heater 72, the semiconductor chip is bonded, and the semiconductor chip is bonded. The cooling of the work and the unloading of the work are performed in order.

In a heating station where each heater 72 is heated, each heater 72 located in the heating station is heated.
Are respectively temperature-controlled by the heater control device 75. Each of the heaters 72 and the heater control device 75 are brought into a conductive state by a slip ring 73 rotating integrally with the index table 71 and a brush 74 fixed to the heating station. The current from the heater control device 75 is supplied to 72.

Each of the heaters 72 is provided with a thermocouple 76 for detecting a heating temperature of the heater 72. The temperature of the heater 72 detected by the thermocouple 76 is controlled via a slip ring 73 and a brush 74. ,
It is provided to a heater control circuit 75.

A heater control circuit 75 includes a heater 72
The output of the thermocouple 76 provided in the
And a temperature detector 75a provided via a brush 74
Is provided, and an electric signal corresponding to the temperature of the heater 72 detected by the thermocouple 76 is output from the temperature detection section 75a to the temperature control section 75b. In the temperature control unit 75b, the temperature of the heater 72 heated in the heating station is set in advance,
From the temperature controller 75b, the set temperature and the thermocouple 76
A signal corresponding to the difference from the actual temperature of the heater 72 detected by the controller 72 is provided to the current controller 75c.
The current control unit 75c controls the DC current supplied from the DC voltage power supply based on the output signal from the temperature control unit 75b, and supplies the DC current to the heater 72 via the brush 74 and the slip ring 73. ing.

[0006]

In such a configuration of the heater control device 75, the temperature of each heater 72 provided in the index table 71 is detected by the thermocouple 76 and the electric signal output from the thermocouple 76 is detected. Is detected by a temperature detector 75 via a slip ring 73 and a brush 74.
a, the electric signal output from the thermocouple 76 may change due to the thermoelectromotive force generated by the sliding contact between the slip ring 73 and the brush 74. As a result, the actual heating temperature of the heater 72 cannot be accurately obtained, and therefore, the heating temperature of the heater may not be controlled to the set temperature.

Further, the thermocouples 76 provided corresponding to the respective heaters 72 must be arranged on the rotating index table 71. Therefore, each thermocouple 76 is attached to the slip ring 73 rotating with the index table 71. Electrical connection is required. Slip ring 7
3 is also electrically connected to each heater 72, and therefore, it is necessary to further provide an electrode for connection to each thermocouple 76 on the slip ring 73.
There is also a problem that the structure of the device becomes complicated.

Further, in the index table 71,
Although a plurality of heaters 72 are provided, the resistance values of the heaters 72 do not always match even if they have the same specifications, and therefore, the heaters 72 are sequentially turned on by the heater control device 75 at the heating station. , The heating temperature fluctuates for each heater 72,
There is a possibility that the temperature cannot be controlled to be constant.

The present invention has been made in order to solve such a problem, and an object of the present invention is to accurately detect the temperatures of a plurality of heaters provided on an index table which rotates intermittently. An object of the present invention is to provide a heater control device capable of precisely controlling each heater to a predetermined temperature. Another object of the present invention is to provide a heater control device capable of simplifying the configuration of a heating device. Still another object of the present invention is to provide a heater control device capable of controlling each heater to a predetermined temperature in order even when a plurality of heaters provided in an index table have different resistance characteristics. Is to provide.

[0010]

According to the heater control apparatus of the present invention, a plurality of heaters are arranged at equal intervals in a circumferential direction on an index table which rotates intermittently, and each heater is arranged at each station. In the heating device that is sequentially stopped, the current is sequentially controlled and supplied to each heater stopped at a predetermined station so that each heater is heated to a preset temperature. A current detection unit for detecting a current value supplied to the heater, and a temperature control unit for controlling a supply current to the heater based on the current value detected by the current detection unit. And characterized in that:

The temperature control section is provided with a calculation storage section for calculating and storing a supply current value of the heater corresponding to the set temperature when the heating temperature of the heater is set.

In the operation storage unit, the resistance value of each heater provided in the index table at 0 ° C. is set in advance, and the operation storage unit stores the set temperature of each heater based on the set resistance value. The resistance value when the heater is heated is calculated, and the current value for each heater is calculated and stored based on the calculated resistance value.

The arithmetic storage section calculates and displays the actual heating temperature of the heater based on the current value detected by the current detecting section.

[0014]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1A is a plan view of an index table provided with a heater control device according to the present invention.
(B) is a front view thereof. The heater control device of the present invention is provided in a heating device used when bonding a semiconductor chip on a predetermined component (work). This heating device has an index table 11 arranged horizontally, and this index table 11
Is intermittently rotated by １ ／ rotation by a driving device 13 (see FIG. 1B) disposed thereunder.

On the upper surface of the index table 11, six flat heaters 12 are arranged at equal intervals in the circumferential direction. Each heater 12 has a rectangular shape along the radial direction of the index table 11, and a work to be heated is mounted on each heater 12. Each heater 12 is sequentially rotated by rotating the index table 11 intermittently.
The first to sixth stations ST1 to ST6 are sequentially stopped.

A work to be heated is mounted on each heater 12 stopped at the first station ST1 by intermittently rotating the index table 11. An alloy or metal bonding material such as solder is attached to this work. The heaters 12 stopped at the second station ST2, the third station ST3, and the fourth station ST4 are each heated to a predetermined temperature.
T2, third station ST3, fourth station ST
4 is stopped, the current supplied from the heater control device 40 of the present invention disposed in each of the stations ST2 to ST4 is supplied to the index table 1.
Each of them is supplied and heated via a contact 30 provided underneath.

In the second station ST2, the heater 1
2 is heated to a predetermined temperature by the heater control device 40 provided in the second station ST2, and the heater 1 is heated.
The work mounted on 2 is preheated. In the third station ST3, the semiconductor chip is mounted on the work preheated on the heater 12, and the heater 12 is heated by the heater control device 40 provided in the third station ST3 in the second station ST2. The workpiece is heated to a higher temperature than the temperature, and the work is heated together with the semiconductor chip. Further, in the fourth station, the heater 1 is controlled by the heater control device 40 provided in the fourth station ST4.
2 is heated to a higher temperature than the heating temperature in the third station ST3, and the work is heated together with the semiconductor chip.

At the fifth station ST5 and the sixth station ST6, no current is supplied to the heaters 12 stopped at the respective stations ST5 and ST6, so that the heaters 12 are not heated,
The work on each heater 12 is cooled. This allows
The semiconductor chip is bonded to the work. And
The heater 12 on which the work is mounted is in the first station S
By moving to T1, the work to which the semiconductor chip is bonded is carried out of the heater 12, and a new work is mounted on the heater 12.

FIG. 2A shows the index table 11.
FIG. 2 is a schematic plan view of a contact 30 provided below
(B) is a schematic front view thereof. The contact 30
A cylindrical insulating body 31 which rotates in a unitary manner with the index table 11, and twelve movable electrodes provided on the outer peripheral surface of the cylindrical body 31 with upper and lower pairs corresponding to the heaters 12, respectively; Unit 32 and the second station S
T2, third station ST3, fourth station ST
4 and a pair of upper and lower fixed electrode portions 33 respectively arranged in the upper and lower portions. A pair of upper and lower movable electrode portions 32 provided on the outer peripheral surface of the cylindrical body 31 are electrically connected to the respective heaters 12 provided on the index table 11.

Each pair of fixed electrode sections 33 provided at the second station ST2, the third station ST3, and the fourth station ST4 is connected to the second station ST.
2, third station ST3, fourth station ST4
, And are electrically connected to the pair of movable electrode units 32 stopped at the stations ST2 to ST4, respectively. Thereby, each heater control device 40 provided in each station ST2 to ST4 is provided.
And the respective heaters 12 stopped in the stations ST2 to ST4 enter a conductive state. Then, each heater 1 stopped at the second to fourth stations ST2 to ST4.
2 is heated by the current supplied from the heater control device 40 provided in each of the second to fourth stations ST2 to ST4.

FIG. 3 shows the first to sixth stations ST.
It is a graph which shows the temperature state of one heater 12 in 1-ST6. The heater 12 is connected to the second station S
At T2, when heated to a predetermined temperature T1, in the third station ST3, it is heated to a temperature T2 higher than the heating temperature T2 in the second station ST2, and further, in the fourth station ST4, the third station ST4 The heating is performed to a temperature T3 higher than the heating temperature T3 in ST3. Then, in the fifth station ST5 and the sixth station ST6, the heater 12 is cooled without being heated, and the temperature of the heater 12 decreases sequentially.

FIG. 4 is a block diagram of a control system of each heater 12 provided in the index table 11. 2nd station ST2, 3rd station ST3, 4th station
Each pair of fixed electrode units 3 arranged in the station ST4
3 is a heater control device 4 having the same configuration.
0. Each heater control device 40
Is provided with a current control unit 41 for controlling a DC current of a predetermined voltage supplied from a DC voltage power supply 51. As shown in FIG. 5, the current control unit 41 uses a current of a predetermined voltage V input from the power supply 51 to each control circuit 40 as a heater heating current of a pulse signal that is turned on at a constant cycle, and uses one fixed electrode The second to fourth stations ST2 to ST are output to one of the second to fourth stations ST2 to ST4 via one of the movable electrode sections 32 located at the second to fourth stations ST2 to ST4.
Each heater 12 stopped at T4 is heated. The current control unit 41 includes a temperature control unit 43
, The ratio (duty ratio) between the ON time and the OFF time of the heater heating current to be output is changed based on the output signal from the controller, whereby the current value supplied to the heater 12 is changed. Thus, the heating temperature of the heater 12 is changed.

The heater heating current supplied from the current controller 41 to the heater 12 as a pulse signal is supplied to the heater 1
2 through the second to fourth stations ST2 to ST
4 is provided to the current detection unit 42 of the heater control device 40 via the other movable electrode unit 32 located at the position 4 and the fixed electrode unit 33 in contact with the movable electrode unit 32.

The current detector 42 of each heater control device 40
Is the peak value of the current flowing through each heater 12 stopped at each of the second to fourth stations ST2 to ST4,
That is, the peak current value Ip is detected. Peak current value Ip detected by current detection unit 42
Is a temperature controller 4 provided in each heater controller 40.
3 and are also converted into digital signals by an analog / digital (A / D) converter 52 and output to a CPU 61 of a computer 60 provided as an operation storage unit.

The computer 60 includes an input unit 62 for inputting data to the CPU 61, a storage unit 63 for storing data input at the input unit 62 or a calculation result of the CPU 61, and a second to a fourth unit. Station ST
And a display unit 64 for displaying the actual heating temperature of each heater 12 located at 2 to ST4.
The CPU 61 of the computer 60 includes the heaters 12 located at the second to fourth stations ST2 to ST4.
The preset temperatures T1 to T3 are input in advance by the input unit 62, and the CPU 61 determines the second to fourth stations ST2 to ST4 based on the preset temperatures T1 to T3.
Is calculated in advance to heat the heaters 12 located at the predetermined temperatures T1 to T3, respectively, and the calculated set current values Is are stored in the storage unit 6.
3 respectively. And C
The PU 61 reads out each set current value Is stored in the storage unit 63 corresponding to each of the second to fourth stations ST2 to ST4 in synchronization with the rotation of the index table 11, and reads out the set current value Is. The corresponding digital signal
Output to the digital / analog (D / A) converter 53.
The signals converted into analog signals by the D / A converter 53 are given to the temperature control units 43 of the respective heater control devices 40.

Second to fourth stations ST2 to ST
The temperature control unit 43 in each heater control device 40 provided in the CPU 4 compares the set current value Is respectively output from the CPU 61 with the peak current value Ip detected by the current detection unit 42, and 12 peak current values I
A predetermined signal corresponding to the difference between p and the set current value Is is output to the current control unit 41. Then, the current control unit 41 changes the duty ratio of the output heater heating current based on the signal output from the temperature control unit 43.

When calculating the set current value Is corresponding to the set temperature, the CPU 61 corrects the set current value Is based on the resistance characteristics of each heater 12 provided in the index table 11. . That is, the six heaters 1 provided in the index table 11
No. 2 does not always have the same resistance value even if they have the same specifications. As described above, if the resistance characteristics of the heaters 12 are different, the current values required to heat the heaters 12 to the set temperatures T1 to T3 in the second to fourth stations ST2 to ST4 are as follows: Each heater 12 may be different.

For example, assuming that the resistance value of each heater 12 at 0 ° C. is Ro and the temperature coefficient of resistance of each heater 12 is α, the resistance value R of the heater 12 when the heater 12 is heated to the set temperature T is given by the following equation. It is represented by (1).

R = Ro (1 + αT) (1) Accordingly, the resistance value Ro of each heater 12 at 0 ° C.
If different for each heater 12, the resistance value R at the set temperature T will also be different for each heater 12.

The current value (set current value) Is corresponding to the set temperature T of the heater 12 is represented by the following equation (2), where V is a DC voltage applied to the heater 12.

Is = V / R (2) Accordingly, the resistance R of the heater 12 at the set temperature T becomes
If different for each heater 12, the set current value Is corresponding to the set temperature of the heater 12 will also be different.

From the equations (1) and (2), the set current value Is is expressed by the following equation (3).

Is = V / {Ro (1 + αT)} (3) As described above, the set current value Is corresponding to the set temperature T of the heater 12 having the resistance value Ro at 0 ° C. is calculated based on the equation (3). Desired.

The CPU 61 of the computer 60
In each of the fourth to fourth stations ST2 to ST4, the set current value Is required to heat each heater 12 to the set temperatures T1 to T3 is calculated based on the resistance value Ro of each heater 12 at 0 ° C. It has become.

The CPU 61 of the computer 60 has six heaters 1 provided on the index table 11.
The resistance value Ro at 0 ° C. of each of No. 2 is previously input from the input unit 62 and stored in the storage unit 63. When the heating temperatures T1, T2, and T3 of the heaters 12 at the second to fourth stations are respectively set, the set temperatures T1, T2, and T3 and the resistance values of all the heaters 12 at 0 ° C. Based on Ro, the set current value Is required to heat each heater 12 to each set temperature T1, T2, T3 is calculated based on the above-described equation (3).
The calculation is performed for each heater 12.

The heater 12 having the resistance value Ro at 0 ° C. is set to a set current Is corresponding to the set temperature T by Is (T, R
o), and the resistance values at 0 ° C. of the respective heaters 12 of No. 1 to No. 6 sequentially arranged along the rotation direction of the index table 11 are denoted by Ro, respectively.
1, Ro2, Ro3, Ro4, Ro5, and Ro6, the second, third, and fourth stations ST2, ST4
3, the set current of each heater 12 with respect to the set temperatures T1, T2, and T3 set for each of ST4 is Is (Tn, Ro).
m). Here, n is an integer of 1 to 3, and m is 1 to
6 is an integer.

The CPU 61 calculates Is (Tn, Rom) (where n is an integer of 1 to 3 and m is an integer of 1 to 6).
Each time the motor 1 rotates, the set current Is of the three heaters 12 stopped at the second, third, and fourth stations ST2, ST3, and ST4 is stored as a set as a table shown in FIG. It has become. That is, in the situation of index number 1 (ID No. 1) in which the heater of No. 1 is stopped at the first station ST1, the No. 6 heater and the third station ST are added to the second station ST2.
No. 3 heater at No. 3 and No. 4 at the fourth station ST4
Since the heaters are located respectively, these three
The set current Is of two heaters 12 is stored as one set. Then, index number 2 (ID No.
In the situation 2), the No. 1 heater is in the second station ST2, the No. 6 heater is in the third station ST3,
Since the No. 5 heaters are located at the station ST4, the set current Is of these three heaters 12 is stored as one set.

Hereinafter, similarly, index number 6
(ID No. 6) corresponding to the respective situations up to the second, third and fourth stations, respectively.
The set current values Is of the two heaters 12 are stored as one set.

The CPU 61 of the computer 60
At the second to fourth stations ST2 to ST4,
The actual temperature of the heater 12 being heated is calculated and displayed on the display unit 63. That is, the peak current value Ip detected by the current detection unit 42 of each heater control device 40 is converted by the A / D converter 52 and
When input to U61, the CPU 61 calculates the actual temperature T of the heater 12 based on the following equation (4) obtained from the above-described equation (1).

T = V / (α · Ro · Is) −1 / α (4) Second to fourth stations S obtained in this manner
The actual temperature T of each heater 12 at T2 to ST4 is displayed by the display unit 63.

In the above embodiment, the heaters 12 of the index table and the heater control devices 4 provided in the second to fourth stations ST2 to ST4 are used.
Although 0 is set to a conductive state by the contact 30, each heater 12 and each heater control device 40 may be set to a conductive state using a slip ring and a brush.

[0043]

As described above, the heater control device of the present invention detects the temperature of each heater provided on the index table which rotates intermittently based on the current flowing through the heater. In addition, the temperature of each heater can be accurately detected. Therefore, the heater can be accurately operated at the predetermined heating temperature. In addition, since there is no need to provide a temperature sensor, the heating device can have a simple structure. Further, the heating temperature of each heater can be precisely controlled by correcting the current value necessary to heat the heater to the set temperature based on the resistance characteristics of each heater.

[Brief description of the drawings]

FIG. 1A is a schematic plan view showing an example of a heating device provided with a heat control device of the present invention, and FIG. 1B is a schematic front view thereof.

2A is a plan sectional view of a contact provided in the heating device, and FIG. 2B is a partially cutaway front view thereof.

FIG. 3 is a graph showing a temperature state in each station of a heater provided in the heating device.

FIG. 4 is a block diagram of a control system of the heating device.

FIG. 5 is a graph for explaining the operation of a power control unit provided in the heater control device of the present invention.

FIG. 6 is a table showing an example of data stored in a computer provided in the heater control device of the present invention.

FIG. 7 is a schematic configuration diagram of a conventional heater control device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Index table 12 Heater 13 Drive device 30 Contact 32 Movable electrode 33 Fixed electrode 40 Heater control device 41 Current control unit 42 Current detection unit 43 Temperature control unit 60 Computer 61 CPU 62 Input unit 63 Storage unit 64 Display unit

Claims (4)

[Claims] 1. A heating device in which a plurality of heaters are arranged at equal intervals in a circumferential direction on an index table which rotates intermittently, and each heater is sequentially stopped at each station. A heater controller that sequentially controls and supplies current to each heater stopped at a predetermined station so that each heater is heated to a preset temperature. Based on a current detection unit that detects the supplied current value, and a current value detected by the current detection unit,
And a temperature controller for controlling a current supplied to the heater. 2. The temperature control section is provided with a calculation storage section for calculating and storing a supply current value of the heater corresponding to the set temperature when the heating temperature of the heater is set. 2. The heater control device according to 1. 3. A resistance value at 0 ° C. of each heater provided in the index table is set in advance in the arithmetic storage unit, and the arithmetic storage unit stores each heater based on the set resistance value. 3. The heater control device according to claim 2, wherein a resistance value when heated to a set temperature is calculated, and a current value for each heater is calculated and stored based on the calculated resistance value. 4. The heater control device according to claim 2, wherein the calculation storage unit calculates and displays an actual heating temperature of the heater based on a current value detected by the current detection unit. .