JPH10256349A - Pickup device - Google Patents

Abstract

(57) [Summary] [PROBLEMS] To sufficiently peel an adhesive sheet from pellets using a stick-up top. SOLUTION: A protruding upper surface 22 forming a horizontal plane is formed in the center of the upper end surface of a rising top 21, and an inclined surface inclined outward and downward with respect to the protruding upper surface 22 around the upper end surface of the rising top 21. 23 are formed. The inclined surface 23 is formed so that the shape of the protruding upper surface 22 in a plan view is a symmetrical and horizontally long hexagon. [Effect] Since the portion of the adhesive sheet adhered to the peripheral portion of the pellet can be peeled from the four corners of the pellet and the peeling area can be increased, the adhesive force of the adhesive sheet to the pellet can be reduced. Since the peeling force of the pellet from the pressure-sensitive adhesive sheet by the needle can be set small, it is possible to prevent the needle from causing a rising mark or crack in the pellet at the time of pushing up.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pickup technique, and more particularly, to a technique for picking up a small article adhered to an adhesive sheet from the adhesive sheet. Hereafter, the present invention relates to a technique that is effective in utilizing a pellet (hereinafter simply referred to as a pellet) from an adhesive sheet.

[0002]

2. Description of the Related Art In a semiconductor device manufacturing process, Japanese Patent Application Laid-Open No. 2-78244 discloses a pickup device for picking up pellets from an adhesive tape (referred to as an adhesive sheet).
There is a semiconductor pellet take-out device described in Japanese Patent Application Laid-Open Publication No. HEI 10-202, 1988. The semiconductor pellet take-out device has a projecting top having a projecting upper surface for pushing up a pellet and an inclined surface for holding another pellet adjacent to the pellet at a predetermined inclination angle. A pressure-sensitive adhesive sheet adsorbing means for adsorbing the pressure-sensitive adhesive sheet is provided on the surface.

According to this semiconductor pellet take-out apparatus, the distance between the upper side of the pellet pushed up by the protruding upper surface and the inclined surface of the upright piece and the upper side of the other pellet adjacent thereto is widened, so that the other pellets adjacent to the pellet are separated. A predetermined pellet can be taken out without damaging the pellet. Also, by adhering the pressure-sensitive adhesive sheet to the protruding upper surface and the inclined surface of the push-up piece, it is not necessary to apply tension to the pressure-sensitive adhesive sheet, so that the accuracy of the fixing position of each pellet on the pressure-sensitive adhesive sheet can be improved. As a result, take-out failures can be reduced.

[0004]

However, in the above-described pickup device, not only the structure is complicated, but also consideration is not given to the relationship between the shape of the projecting upper surface and the inclined surface of the projecting piece and the shape of the pellet. Since the pellets pushed up by the push-up pieces are insufficient, the peeling area of the pressure-sensitive adhesive sheet is insufficient, and the push-up force when the pellets are forcibly peeled off from the pressure-sensitive adhesive sheet by the push-up needles increases. Top marks and cracks may occur. In particular, the present inventor has found that rectangular pellets used in memories have a high incidence of bumps and cracks.

An object of the present invention is to provide a pickup device having a simple structure capable of sufficiently peeling an adhesive sheet from a pellet by using a protrusion top.

The above and other objects and novel features of the present invention will become apparent from the description of the present specification and the accompanying drawings.

[0007]

The outline of a typical invention among the inventions disclosed in the present application is as follows.

That is, a protruding upper surface is formed at the center of the upper end surface of the top-up piece to form a plane perpendicular to the pushing-up direction. An inclined surface that is inclined downward and outward is formed, and the inclined surface has a bilaterally symmetric shape in plan view of the protruding upper surface, and a position corresponding to a square of a quadrangle of the semiconductor pellet is an oblique side or a curved side. It is characterized in that it is formed to have a bent shape.

According to the above-described means, the pressure-sensitive adhesive sheet can be largely peeled from the four corners of the semiconductor pellet by pushing up the semiconductor pellet with the stick-up piece sandwiching the pressure-sensitive adhesive sheet. And the semiconductor pellet can be picked up from the adhesive sheet with a small force.

[0010] By reducing the pick-up force of the pressure-sensitive adhesive sheet against the semiconductor pellet, it is possible to prevent the occurrence of protrusion marks and cracks when picking up with the needle.

[0011]

FIG. 1 shows a pickup device according to an embodiment of the present invention, wherein FIG.
(B) is a plan view along the line bb of (a), and (c) is a view taken along the line cc of (b). 2 and 3 are enlarged partial cross-sectional views for explaining the operation.

In the present embodiment, a pickup device according to the present invention is configured to pick up one diced pellet from an adhesive sheet one by one in a semiconductor device manufacturing process. An adhesive sheet with a group of pellets (hereinafter, sometimes referred to as a work) 1 as a work in the pickup device 10 is manufactured and supplied to the pickup device 10 as follows.

In a so-called pre-process in the manufacturing process of the semiconductor device, a wafer (not shown) in which transistors, diodes, semiconductor integrated circuit devices, optical semiconductor devices, etc. are formed for each of the pellets 2 is subjected to an electric test in a wafer inspection process. Pellets are sorted into non-defective and defective pellets by physical property tests and appearance inspection. At this time, a mark is attached to the defective pellet.

In the sheet adhesion step, an adhesive sheet 3 is adhered to the main surface on the back side of the inspected wafer. The pressure-sensitive adhesive sheet 3 includes a sheet base material 4 formed of a resin having elasticity and formed in a thin film shape having a diameter larger than that of a wafer, and an appropriate pressure-sensitive adhesive material is applied to one main surface of the sheet base material 4. Thus, the adhesive layer 5 is formed.

In the dicing step, the wafer is cut into individual pellets 2 as small articles. At this time, since the adhesive sheet 3 adhered to the back surface of the wafer is not cut by dicing, the pellets 2 are not separated but are grouped together. In the present embodiment, each pellet 2 is formed in a rectangular thin plate shape corresponding to a memory or the like.

In the jig mounting step, the ring 6 is mounted on the outer peripheral portion of the adhesive sheet 3. The ring 6 is made of a rigid material such as stainless steel and is formed in a circular ring shape having a larger diameter than the wafer. After the adhesive sheet 3 is arranged so as to face the inside of the frame of the ring 6, it is stretched radially outward, and its outer peripheral portion is fixed to the ring 6. At this time, the adjacent pellets 2 are separated from each other as the adhesive sheet 3 elongates.

The pickup device 10 has a machine base 11, and a table 1 for holding a work 1 is mounted on the machine base 11.
Two are equipped. The table 12 holds the work 1
Can be moved in the XYZ and θ directions by a driving device. Further, on the machine base 11, a top and a needle elevating device (hereinafter, referred to as an elevating device) 1
3 is provided so as to face the work 1 held on the table 12. The lifting device 13 includes a frame 14 having a substantially channel steel shape.
1 is mounted on the upper surface. The guide rail 1 is provided on an inner surface of a side wall of one side (hereinafter, referred to as a left side) of the frame 14.
5 is laid in the vertical direction, and a lift 16 is provided on the guide rail 15 so as to be slidable in the vertical direction. A support frame 17 is fixed to the lift 16.

On the other hand, a stepping motor 18 is installed on the inner surface of the right side wall of the frame 14 so as to face leftward in the horizontal direction.
9 are fixed so as to be orthogonal. A cam follower 20 formed on the support frame 17 is in contact with the outer peripheral surface of the cam 19 from above. Accordingly, the support frame 17 is supported by the cam 19 and is moved up and down following the rotation of the cam 19.

At the upper end of the support frame 17, a projecting piece 21 for pushing up the pellet 2 to be picked up is detachably mounted by a bolt so as to move integrally. The push-up piece 21 is formed in a cylindrical shape having an upper end closed and a lower end opened. A protruding upper surface 22 orthogonal to the cylinder core and an inclined surface 23 inclined with respect to the cylinder core are formed on the upper end surface of the upper end closing wall of the protrusion top 21. The protruding upper surface 22 is arranged at the center of the upper end surface, and is formed so as to form a plane orthogonal to the cylinder core, that is, a horizontal plane. Eight inclined surfaces 23 are arranged around the upper end surface.
Is set to 25 degrees. As shown in FIG. 1B, the protruding upper surface 22 is formed in a horizontally symmetric horizontally long hexagon by the eight inclined surfaces 23 as shown in FIG. 1B, and the horizontally long hexagon is to be picked up. It corresponds to the rectangle of the pellet 2. That is, a total of four inclined surfaces 23 forming a pair of oblique sides forming an acute angle of a horizontally long hexagon are respectively opposed to the four corners of the pellet 2 (see the imaginary line in FIG. 1B). .

The projecting piece 21 has four guide holes 24, and four inclined surfaces 2 each of which forms a pair of oblique sides which are rectangular quadrilaterals smaller than the outer diameter of the pellet 2 and form a horizontally long acute angle.
3 and are opened so as to extend in the vertical direction. Needles 25 are inserted through the respective guide holes 24 slidably in the vertical direction. The four needles 25 slidably inserted into each guide hole 24,
The pellets 2 are supported by a push-up table 26 so that the pellets 2 can be evenly pushed up from the lower side in the vertical direction and lifted horizontally.

A raising table 26 is slidably fitted in the support frame 17 in the vertical direction.
7 is suspended by a tension coil spring (hereinafter, referred to as a spring) 27 whose upper end is locked. That is, the push-up table 26 is in a state of being floatingly supported by the spring 27. On the bottom wall of the support frame 17, a voice coil motor (hereinafter, referred to as VCM) 28 which is a linear DC motor is provided. The VCM (hereinafter referred to as a needle VCM) 28 is configured to move the needle 25 up and down by moving the protrusion 26 up and down with respect to the support frame 17. That is, the stator 29 composed of the magnet of the needle VCM 28 is installed vertically upward on the bottom wall of the support frame 17, and the voice coil 30 constituting the moving body (slider) is mounted on the lower surface of the protrusion 26. Fixed. A needle VCM control circuit (not shown) is electrically connected to the voice coil 30.

An XY table 3 is provided at the right end on the machine base 11.
A stand 32 for holding a collet elevating device 33 is erected vertically on an XY table 31. The collet elevating device 33 includes a support beam 34, and the support beam 34 is mounted on the upper end of the stand 32 so as to protrude leftward in the horizontal direction. A guide rail 35 is laid vertically on the left side wall surface of the stand 32, and an elevating table 36 is slidably provided on the guide rail 35 in the vertical direction. The support arm 3 is mounted on the lift 36
7 is extended horizontally and fixed to the left, and a collet 38 is supported at the left end of the support arm 37 vertically downward. One end of a negative pressure supply path 39 is fluidly connected to the collet 38, and the other end of the negative pressure supply path 39 is connected to a negative pressure supply unit 40.

The support arm 37 is suspended by a tension coil spring (hereinafter referred to as a spring) 41 whose upper end is locked to the support beam 34. That is, the collet 38 is floatingly supported by the spring 41. A collet VCM 42 is provided at the left end of the support beam 34 in a vertical direction, and the collet VCM 42 moves the support arm 37 up and down with respect to the support beam 34 to move the collet 38 up and down. . That is, the stator 43 composed of the magnet of the collet VCM 42 is installed vertically downward on the lower surface of the support beam 34, and the voice coil 44 constituting the moving body is fixed to the upper surface of the support arm 37. Although not shown, the voice coil 44 has a needle V
A collet VCM control circuit (not shown) similar to the CM control circuit is electrically connected.

Next, the operation will be described. When the work 1 is held and aligned on the table 12 with the pellet 2 on the upper side, the cam 19 is rotated by the driving of the stepping motor 18, and as shown in FIG. To be raised. With this rise, the upper end surface of the push-up top 21 lifts the adhesive sheet 3 of the work 1. At this time, since the center line of the top piece 21 is aligned with the center of the pellet 2 of the work 1 to be picked up, the top piece 21 uses only the aligned pellet 2 as an adhesive sheet. 3 is lifted.

Since the projecting upper surface 22 forming a horizontal plane is formed at the center of the projecting top 21, the pellet 2 is horizontally lifted by the projecting upper surface 22. On the other hand, since the inclined surface 23 is formed in the peripheral portion of the upright piece 21, the adhesive sheet 3 adhered to the peripheral portion of the pellet 2 in the state where the pellet 2 is lifted horizontally by the protruding upper surface 22 is projected. The upper frame 21 is not supported from below. Since the adhesive sheet 3 is in a state where a tensile force is urged, the portion of the adhesive sheet 3 adhered to the peripheral portion of the pellet 2 which is not supported from below by the protrusion pieces 21 is peeled from the lower surface of the pellet 2. It will be in the state that was done.

Here, if the pressure-sensitive adhesive sheet 3 is raised high, the pulling force of the pressure-sensitive adhesive sheet 3 can be increased. The adhesive sheet 3 adhered to the peripheral portion can be reliably peeled off with a large force. However, when the push-up piece 21 lifts the pellet 2 high with the adhesive sheet 3 interposed therebetween, the pellet 2 is not lifted horizontally but tilted because the tensile force of the adhesive sheet 3 is uneven. However, in the present embodiment, since the projecting upper surface 22 of the projecting top 21 is widely formed in a horizontal plane, even if the pellet 2 is raised high with the adhesive sheet 3 interposed therebetween, the pellet 2 can be reliably lifted horizontally. In other words, in the present embodiment, the portion of the pressure-sensitive adhesive sheet 3 adhered to the peripheral portion of the pellet 2 can be strongly and reliably peeled off by lifting the push-up piece 21 horizontally high.

Furthermore, since the inclined surface 23 is formed so that the shape of the protruding upper surface 22 in a plan view is a horizontally long hexagon corresponding to the rectangle of the pellet 2, the peripheral portion of the adhesive sheet 3 around the pellet 2 is adhered. The removed portion is stably peeled off. That is, since each inclined surface 23 corresponding to the four oblique sides of the horizontally long hexagon is formed so as to intersect the diagonal of the rectangle of the pellet 2, the portion of the adhesive sheet 3 adhered to the periphery of the pellet 2 is Pellet 2
From the four corners. When the pressure-sensitive adhesive sheet 3 starts peeling from the corner, the peeling progresses so as to gradually increase along the included angle, so that the pressure-sensitive adhesive sheet 3 is stably peeled without interruption.

Moreover, if the inclined surface 23 is formed such that the shape of the protruding upper surface 22 in a plan view is a horizontally long hexagon corresponding to the rectangle of the pellet 2, it is separated from the peripheral portion of the pellet 2 in the adhesive sheet 3. The area to be performed is larger than when the peripheral portion of the pellet 2 is peeled to a constant width.
That is, the adhesive sheet 3 is formed by the inclined surface 23 so that the pellet 2
Is peeled along the diagonal line of, the total length of the peeling is increased, and the peeled area is increased by the lengthened portion. Since the adhesive strength of the adhesive sheet 3 to the pellet 2 is inversely proportional to the size of the adhesive area, if the area of the adhesive sheet 3 peeled from the pellet 2 is large, the adhesive strength of the adhesive sheet 3 to the pellet 2 is small.

As described above, when the pellet 2 is lifted horizontally across the adhesive sheet 3 by the push-up piece 21 and the peripheral portion of the pellet 2 in the adhesive sheet 3 is peeled off, the control of the needle VCM control circuit is performed. As a result, the needle VCM 28 is raised, and the push-up table 26 is raised in the support frame 17 as shown in FIG. The four needles 25 are evenly raised with respect to the top piece 21 by the rise of the top stand 26, and the upper ends of the needles 25 are evenly projected upward from the top piece 21. Due to the protrusion of the tip of the needle 25, the portion of the adhesive sheet 3 protruded by the needle 25 is pierced by the needle 25, and four pellets 2 adhered to the upper surface of the pierced adhesive sheet 3 And is peeled off from the adhesive sheet 3 by the needle 25.

At this time, since the pellet 2 lifted by the push-up piece 21 is horizontally supported from below by the protrusion upper face 22, the four needles 25 lift the pellet 2 horizontally without tilting. To peel off. Further, since the inclined surface 23 is formed in the peripheral portion of the push-up piece 21, the pellet 2 pushed up by the needle 25 is located higher than the four-sided pellet 2. Nothing.

In addition, the above-described inclined surface 2 of the top piece 21
Since the peeling area of the adhesive sheet 3 adhered to the pellet 2 is increased by the peeling action of the pellet 3, the four needles 25 easily peel the pellet 2 from the adhesive sheet 3 with a small thrust force. be able to. Therefore, when pushing up, the four needles 25
Does not cause protrusion marks or cracks in the pellets 2.

Since the force required to peel the pellet 2 from the adhesive sheet 3 can be set small, the needle 2 for peeling the pellet 2 from the adhesive sheet 3 can be set.
5 is carried out by the needle VCM 28, whereby the pellet 2 is removed from the adhesive sheet 3 by the needle 2.
5 and the pellet 2 and the needle 25
Can be more reliably prevented from being damaged. That is, when the pellet 2 is separated from the adhesive sheet 3 by the needle 25, the voice coil 30 for raising the needle 25 is in a state of being urged upward by magnetic force, but mechanically floats in the air. In this state, the impact when the needle 25 hits the pellet 2 can be spatially absorbed. In addition, since the inertia (mass × acceleration) of the voice coil 30 is much smaller than that of the stepping motor, the impact itself when the needle 25 hits the pellet 2 is suppressed to be extremely small.

On the other hand, in the collet lifting device 33,
Work table 1 with pellet 2 on top
XY table 31
As a result, the collet 38 is positioned directly above the predetermined pellet 2. Subsequently, the collet VCM 42 is lowered by the control of the collet VCM control circuit, and the collet 3
8 is approached to the work 1. At this time, when the pellet 2 is lifted horizontally by the needle 25, the collet 38 holds the pellet 2 by vacuum suction.

The collet 38 which has received the pellet 2 is transferred from a position directly above the needle 25 to a predetermined position (not shown) such as a tray or a tab of a lead frame by moving the XY table 31, where the pellet 2 is transferred. Transfer to a tray or tab. The collet 38 that has delivered the pellet 2 is returned to a position directly above the needle 25, and waits for the next pickup operation.

On the other hand, when the needle 25 transfers the pellet 2 to the collet 38, the needle VCM 28 is lowered by the needle VCM control circuit, and
Is lowered in the support frame 17. When the needle 25 is lowered and retracted into the support frame 17 by the lowering of the push-up table 26, and the support frame 17 is entirely lowered by the stepping motor 18, the table 12 is appropriately moved in the XYZ directions. The pellet 2 to be picked up is disposed directly above the needle 25 so as to face the same.

Thereafter, by repeating the above operation, one pellet 2 is sent from the adhesive sheet 3 of the work 1 to
Going picked up.

According to the above embodiment, the following effects can be obtained. A projecting upper surface 22 that forms a horizontal plane is formed at the center of the upper end surface of the rising top 21, and an inclined surface 23 that slopes outward and downward with respect to the projecting upper surface 22 is formed around the upper end surface of the rising top 21. At the same time, the inclined surface 23 is formed such that the shape of the protruding surface in plan view is bilaterally symmetrical and becomes a horizontally long hexagon, so that the pellet 2 is lifted horizontally by the protruding surface 22. Since the pressure-sensitive adhesive sheet 3 adhered to the peripheral portion of the pellet 2 is not supported from below by the protrusions 21, the peripheral portion of the pellet 2 not supported from below by the protrusions 21 in the pressure-sensitive adhesive sheet 3 to which the pulling force is applied. From the lower surface of the pellet 2.

By forming the projecting upper surface 22 of the projecting piece 21 in a horizontal plane, the pellet 2 can be lifted horizontally even if the pellet 2 is lifted high with the adhesive sheet 3 interposed therebetween. As a result, the portion of the adhesive sheet 3 adhered to the periphery of the pellet 2 can be strongly and reliably peeled off.

By forming the inclined surface 23 so that the shape of the protruding upper surface 22 in a plan view is a horizontally long hexagon corresponding to the rectangle of the pellet 2, the portion of the adhesive sheet 3 adhered to the periphery of the pellet 2 can be removed. Since the peeling can be started from the four corners of the pellet 2, the peeling can be performed stably without interruption.

By forming the inclined surface 23 so that the shape of the protruding upper surface 22 in plan view is a horizontally long hexagon corresponding to the rectangle of the pellet 2, the area of the adhesive sheet 3 separated from the peripheral portion of the pellet 2 Therefore, the adhesive force of the adhesive sheet 3 to the pellets 2 can be reduced.

By reducing the adhesive force of the adhesive sheet 3 to the pellet 2, the peeling force of the pellet 2 from the adhesive sheet 3 by the four needles 25 can be set to be small. Can prevent a phenomenon in which pellets 2 cause bump marks or cracks.

The incidence rate of microcracks and scratches was compared by using the top piece according to the above-described embodiment and the top piece whose top face is a convex spherical surface under the same conditions. Is 45%, whereas the incidence in the former case has been reduced to 0.8%.

Although the invention made by the inventor has been specifically described based on the embodiment, the invention is not limited to the embodiment, and various modifications can be made without departing from the gist of the invention. Needless to say.

For example, the inclined surface formed so as to be inclined downward and outward with respect to the projecting upper surface at the periphery of the upper end surface of the projecting top is such that the shape of the projecting surface in a plan view is bilaterally symmetrical and horizontally long. As shown in FIG. 4, the shape of the protruding surface in plan view is not limited to a hexagon, and the position corresponding to the four corners of the pellet is a hypotenuse or a curved side, as shown in FIG. 4. What is necessary is just to form so that it may become the shape which became.

The inclined surface 23A shown in FIG.
Are formed such that the shape of the protruding upper surface 22A in a plan view is a symmetrical elliptical shape.

The inclined surface 23B shown in FIG.
Are formed such that the shape of the protruding upper surface 22B in a plan view is a rhombus, which is an example of a horizontally symmetric horizontally-long even-numbered polygon.

The inclined surface 23C shown in FIG.
Are formed such that the shape of the protruding upper surface 22C in a plan view is a symmetrical regular hexagon.

The inclined surface 23D shown in FIG.
Are formed such that the shape of the protruding upper surface 22D in a plan view becomes a perfect circle.

The inclined surface 23E shown in FIG.
Are formed so that the shape of the protruding upper surface 22E in a plan view is a square which is an example of an even-numbered regular polygon which is bilaterally symmetric.

Needles for peeling the pellets pushed up by the push-up pieces from the adhesive sheet are omitted when the area of the projecting upper surface is small, or when the adhesive strength of the adhesive sheet is reduced by ultraviolet irradiation or the like. be able to.

In the above description, the case where the invention made by the present inventor is mainly applied to the pickup technique of a rectangular semiconductor pellet such as a memory, which is the background of application, has been described. Instead, the present invention can be applied to all pickup techniques for square semiconductor pellets such as MPUs, CPUs, and CCDs.

[0052]

The effects obtained by typical aspects of the invention disclosed in the present application will be briefly described as follows.

By pushing up the semiconductor pellet with the stick-up piece with the adhesive sheet interposed therebetween, the adhesive sheet can be largely peeled from the four corners of the semiconductor pellet, so that the adhesive force of the adhesive sheet to the semiconductor pellet can be reduced. The semiconductor pellet can be picked up from the adhesive sheet with a small force.

By reducing the pick-up force of the pressure-sensitive adhesive sheet against the semiconductor pellets, it is possible to prevent the occurrence of protrusion marks and cracks when picking up with the needle.

[Brief description of the drawings]

FIGS. 1A and 1B show a pickup device according to an embodiment of the present invention, wherein FIG. 1A is a front sectional view, FIG. 1B is a plan view taken along line bb of FIG. 1A, and FIG. Is c- of (b)
It is an arrow c view.

FIG. 2 is an enlarged partial sectional view showing the operation of a push-up top.

FIG. 3 is an enlarged partial sectional view showing the operation of the needle.

FIGS. 4 (a), (b), (c), (d), and (e) are plan views each showing a modification of the embodiment of the protruding surface and the inclined surface.

[Explanation of symbols]

1 ... Work (adhesive sheet with pellet), 2 ... Pellet,
3 ... adhesive sheet, 4 ... sheet base material, 5 ... adhesive layer, 6 ...
Ring, 10: Pickup device, 11: Machine stand, 12:
Table, 13 ... Top piece and needle elevating device, 1
4 ... frame, 15 ... guide rail, 16 ... elevator, 1
7 ... support frame, 18 ... stepping motor, 19 ... cam,
20: Cam follower, 21: Top-up piece, 22, 22A
２２22E: protruding upper surface, 23, 23A〜23E: inclined surface, 2
4: Guide hole, 25: Needle, 26: Raised stand, 27:
Extension coil spring, 28 Voice coil motor (VCM for needle), 29 Stator, 30 Voice coil, 31 XY table, 32 Stand, 33
Collet elevating device, 34: support beam, 35: guide rail, 36: elevating table, 37: support arm, 38: collet, 3
9: negative pressure supply path, 40: negative pressure supply unit, 41: tension coil spring, 42: VCM for collet, 43
... stator, 44 ... voice coil.

Claims (8)

[Claims] 1. An adhesive sheet in which a plurality of square semiconductor pellets are arranged side by side on one side and adhered, are pushed upward from below predetermined semiconductor pellets by a stick-up piece, and are pushed up together with the adhesive sheet. Is picked up from the pressure-sensitive adhesive sheet by being held by the collet, wherein a projecting upper surface forming a plane perpendicular to the pushing-up direction is formed at the center of the upper end surface of the projecting top, A pickup device, wherein an inclined surface which is inclined outward and downward with respect to the protruding upper surface is formed in a peripheral portion of an upper end surface of the upper coma. 2. The inclined surface is formed such that the shape of the projecting upper surface in plan view is bilaterally symmetrical, and a position corresponding to a quadrangle of the quadrangle of the semiconductor pellet is an oblique side or a curved side. 2. The method according to claim 1, wherein
A pickup device according to claim 1. 3. The pickup device according to claim 2, wherein the inclined surface is formed such that the shape of the protruding upper surface in plan view is a horizontally long hexagon which is symmetrical. 4. The pickup device according to claim 2, wherein the inclined surface is formed such that a shape of the projecting upper surface in a plan view is an elliptical shape that is symmetrical in the left-right direction. 5. The pickup device according to claim 2, wherein the inclined surface is formed such that a shape of the protruding upper surface in a plan view is an even-numbered polygon that is symmetrical and horizontally long. . 6. The pickup device according to claim 2, wherein the inclined surface is formed such that the shape of the projecting upper surface in plan view is a symmetrical regular hexagon. 7. The pickup device according to claim 2, wherein the inclined surface is formed such that the shape of the projecting upper surface in plan view is a perfect circle. 8. The pickup device according to claim 2, wherein the inclined surface is formed such that the shape of the projecting upper surface in plan view is an even regular symmetrical polygon.