JPH10259396A5 - - Google Patents

Info

Publication number
JPH10259396A5
JPH10259396A5 JP1997067852A JP6785297A JPH10259396A5 JP H10259396 A5 JPH10259396 A5 JP H10259396A5 JP 1997067852 A JP1997067852 A JP 1997067852A JP 6785297 A JP6785297 A JP 6785297A JP H10259396 A5 JPH10259396 A5 JP H10259396A5
Authority
JP
Japan
Prior art keywords
glycol
water
cutting fluid
soluble
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997067852A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10259396A (ja
JP3869520B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP6785297A priority Critical patent/JP3869520B2/ja
Priority claimed from JP6785297A external-priority patent/JP3869520B2/ja
Publication of JPH10259396A publication Critical patent/JPH10259396A/ja
Publication of JPH10259396A5 publication Critical patent/JPH10259396A5/ja
Application granted granted Critical
Publication of JP3869520B2 publication Critical patent/JP3869520B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP6785297A 1997-03-21 1997-03-21 ワイヤソー用水溶性切削液 Expired - Fee Related JP3869520B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6785297A JP3869520B2 (ja) 1997-03-21 1997-03-21 ワイヤソー用水溶性切削液

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6785297A JP3869520B2 (ja) 1997-03-21 1997-03-21 ワイヤソー用水溶性切削液

Publications (3)

Publication Number Publication Date
JPH10259396A JPH10259396A (ja) 1998-09-29
JPH10259396A5 true JPH10259396A5 (2) 2005-05-26
JP3869520B2 JP3869520B2 (ja) 2007-01-17

Family

ID=13356912

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6785297A Expired - Fee Related JP3869520B2 (ja) 1997-03-21 1997-03-21 ワイヤソー用水溶性切削液

Country Status (1)

Country Link
JP (1) JP3869520B2 (2)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3296781B2 (ja) * 1998-04-21 2002-07-02 信越半導体株式会社 水性切削液、その製造方法、ならびにこの水性切削液を用いた切削方法
JP2002080883A (ja) * 2000-06-20 2002-03-22 Neos Co Ltd ワイヤソ−用水溶性加工液
CN101804670B (zh) * 2003-10-16 2012-06-27 日立金属株式会社 工件切断装置和工件切断方法
JP4474495B2 (ja) 2008-04-30 2010-06-02 パレス化学株式会社 水溶性切断液組成物、水溶性切断液及びその水溶性切断液を用いた切断方法
ATE520763T1 (de) * 2008-10-23 2011-09-15 Klinger Wolfgang Kettensägefluid-zusammensetzung
JP5698147B2 (ja) * 2008-12-20 2015-04-08 キャボット マイクロエレクトロニクス コーポレイション ワイヤーソー切断のための切断用流体組成物
JP5420498B2 (ja) * 2010-08-03 2014-02-19 ユシロ化学工業株式会社 固定砥粒ワイヤソー用水溶性加工液
JP6039935B2 (ja) * 2012-06-29 2016-12-07 出光興産株式会社 水性加工液
CN103409222A (zh) * 2013-08-08 2013-11-27 陕西省石油化工研究设计院 低粘度研磨切割液
JP7443808B2 (ja) * 2020-02-19 2024-03-06 住友金属鉱山株式会社 圧電性酸化物単結晶基板の製造方法

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