JPH10273399A - Assemblable wafer boat and its mounting jig - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an assembling type wafer boat and a jig for mounting the same, which are screw-fixed, easy to assemble, hardly generate particles, and can improve the yield of wafers. SOLUTION: A holding rod 1 provided with a groove 12 for mounting a wafer.
1 and a fixing plate 21 provided with a mounting hole 22 for fixing the holding rod, in the assembling type semiconductor wafer boat, screw portions 14 and 16 are formed at the end of the holding rod 11 and the entire cylinder is formed. The holding rod 11 is attached to the fixing plate 21 by using a round nut 31 having a screw portion 32 corresponding to the screw portions 14 and 16 of the holding rod and having a small hole 33 for rotation on the end surface. An assembling wafer boat in which each member 11, 21, 31 is formed of silicon, quartz glass, or silicon carbide. A mounting jig having small projections 42 corresponding to the small holes 33 for rotation of the round nut 31 and made of silicon, quartz glass, or silicon carbide.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an assembly type semiconductor wafer boat and a jig for mounting the same.

[0002]

2. Description of the Related Art In recent years, semiconductors have been highly integrated, and higher reliability of device characteristics has been required. For this reason, a wafer boat used in the heat treatment step is required to have a higher performance.

As a material for a wafer boat, a material having excellent high-temperature strength, high purity and not releasing pollutants is used. Materials such as silicon, quartz glass, and silicon carbide are generally used.

[0004] In particular, silicon has the advantage that it does not react with the semiconductor wafer because it is made of the same material as the semiconductor wafer, and that it is easy to obtain high-purity silicon. However, silicon is a hard and brittle material, and it is difficult to fuse parts with each other.

For this reason, in the horizontal wafer supporting apparatus disclosed in Japanese Utility Model Publication No. 59-40443, a holding rod and a pair of fixing plates provided with holding rod mounting holes are formed by U-shaped or I-shaped wedges. It is designed to be detachably assembled.

[0006] The advantage of a prefabricated boat is that in the event of a localized damage, only the part concerned can be replaced and the other parts can continue to be used.

[0007]

However, the system disclosed in Japanese Utility Model Publication No. 59-40443 is not suitable for a vertical boat. Because, in this boat, the handle portion of the holding rod protrudes from the fixed plate, and in order to use this as a vertical boat, a boat table on which the vertical boat is mounted has a complicated shape for accommodating the protrusion. It is necessary to do so.

Further, in the boat disclosed in Japanese Utility Model Publication No. 59-40443, stress is easily concentrated on the wedge, so that the wedge is easily damaged, and particles are generated from the damaged portion.

On the other hand, Japanese Utility Model Publication No. 3-14048 discloses a horizontal assembling type carrier boat of a screw fixing type.

This carrier boat is a carrier for use in carrying wafers and chemical processing, and the holding rod is made of a flexible material such as Teflon, which is easy to process. Therefore, this boat cannot be used for heat treatment of wafers.

In view of the above problems of the prior art, an object of the present invention is to provide an assembling type wafer boat which is easy to assemble with screws and hardly generates particles, and a jig for mounting the same. I have.

[0012]

According to a first aspect of the present invention, a holding rod (11) having a groove (12) for mounting a wafer and a fixing plate (22) having a mounting hole (22) for fixing the holding rod are provided. 21) In the assembling type semiconductor wafer boat configured to assemble with (21), screw portions (14, 16) are formed at the end of the holding rod (11);
The holding rod (11) is attached to the fixing plate (21) by using a round nut (31) having a small hole for rotation (33) on the end surface as a whole, and the members (11, 12) are provided.
1, 31) is made of a material selected from silicon, quartz glass, and silicon carbide.

The second invention of the present application is a mounting jig for rotating the round nut (31) according to the first aspect, and corresponds to a small hole (33) for rotation of the round nut (31). The gist of the invention is a mounting jig having a small projection (42) and being made of a material selected from silicon, quartz glass, and silicon carbide.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A prefabricated wafer boat according to the present invention is a prefabricated semiconductor boat having a structure in which a holding rod having a groove for mounting a wafer and a fixing plate having a mounting hole for fixing the holding rod are assembled. In the wafer boat, a screw portion is formed at the end of the holding rod, and the holding rod is attached to the fixing plate by using a round nut having a small hole for rotation on the end surface as a whole,
Each member is formed of a material selected from silicon, quartz glass, and silicon carbide.

When the holding rod is fixed with the round nut, it is preferable that the whole round nut is substantially accommodated in the mounting hole of the fixing plate.

Further, the mounting hole of the fixing plate has a double structure consisting of a circular hole and a rectangular hole, and an engaging portion corresponding to the rectangular hole is formed at the base of the screw portion of the holding rod. In some cases, it is preferable to adopt a configuration in which the engaging portion of the holding rod and the rectangular hole are engaged.

The mounting jig of the present invention is a mounting jig for rotating the above-mentioned round nut, which has a small projection corresponding to a small hole for rotation of the round nut, and is made of silicon, quartz glass. , And silicon carbide.

[0018]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an assembly view showing the vicinity of a lower fixing plate of an assembling type vertical boat for wafers according to the present invention.

The wafer boat 10 has four holding rods 11
, Lower fixing plate 21, upper fixing plate (not shown), holding rod 1
1 comprises a round nut 31 for fixing. The holding rod 11, the fixing plate 21, and the round nut 31 are formed of a material selected from silicon, quartz glass, and silicon carbide. Since these materials are hard and brittle, corners and protrusions are appropriately rounded or chamfered in order to prevent chipping or cracking, but only some of them are shown in the drawings.

The present invention is particularly suitable for an assembling type boat made of only silicon single crystal having high brittleness.

FIGS. 2 to 5 show the holding rod 11, the fixing plate 21, the round nut 31, and the nut rotating tool 41, respectively.

The holding rod 11 has a generally rod-like shape having a rectangular cross section, and a large number of grooves 12 for mounting a wafer are formed at regular intervals. At the upper and lower ends of the holding rod 11, cylindrical portions 17, 15 are provided.
Are provided, and screw portions 16 and 14 are formed therein. At the base of the screw portion 14 at the lower end, the engaging portion 1 having a rectangular section is provided.
3 are formed. The diameter of the screw portion 14 is smaller than the short side of the engagement portion 13.

The lower fixing plate 21 has a disk shape as a whole,
It has four mounting holes 22. The mounting holes 22 are arranged at an interval of about 70 ° toward one side along the circumference.

The mounting hole 22 has a double structure including a circular hole 24 and a rectangular hole 23. Rectangular hole 23
Corresponds to the engaging portion 13 at the root of the screw portion 14 of the holding rod 11. The circular hole 24 corresponds to the round nut 31 and is configured to receive the round nut 31 when fixed.

A through hole 26 is formed in the center of the lower fixing plate 21 and has a function of reducing thermal stress. FIG. 3 shows a specific example.

Although the upper fixing plate is not shown, it is the same as the lower fixing plate 21 except that the rectangular hole of the mounting hole is a circular hole having a small diameter.

The round nut 31 has a thin cylindrical shape as a whole, and has a thread portion 32 corresponding to the thread portions 14 and 16 of the holding rod formed on the inner periphery thereof. Two small holes 33 for rotation are formed in the end face of the round nut 31. The rotation small hole 33 is a circular hole.

The outer diameter and thickness of the round nut 31 correspond to the diameter and depth of the circular hole 24 of the mounting hole of the lower fixing plate.

The nut rotating tool 41 has a long cylindrical shape as a whole, and a plane portion 44 is formed on a side surface thereof at a symmetrical position. This flat portion 44 serves to apply a rotational force. Two small cylindrical projections 42 are formed on the distal end surface of the nut rotating tool 41. The position and shape of the small projections 42 correspond to the small holes 33 for rotation of the round nut 31.

The two small projections 42 of the nut rotating tool 41 are inserted into the small holes 33 for rotation of the round nut 31 and the tool 41 is rotated.
By applying a rotational force while gripping the side surface of the nut, the round nut 31 can be rotated in a desired direction.

When a general hexagonal nut shape is adopted instead of the above-mentioned circular nut, problems such as difficulty in fine adjustment of the tightening of a spanner for tightening the nut and easy breakage of the corner are confirmed. Was. Furthermore, in this case, the retaining rod engaging holes of the upper and lower fixing plates must be enlarged by the amount of insertion of the spanner, so that a gap is formed between the hexagon nut and the engaging holes, and contamination during cleaning is performed. It becomes easy to stick. On the other hand, a slit was formed in the round nut and an attempt was made to tighten it with a silicon screwdriver. However, it was found that the corner of the slit was easily damaged, which also caused particles.

[0032]

According to the assembling type wafer boat of the present invention, since the round nut screw fixing method is employed, the nut is not easily chipped and the generation of particles can be suppressed, so that the yield of wafers can be improved. .

Further, when the whole round nut is accommodated in the mounting hole as described in the second aspect, there is no gap to which contamination adheres, so that the yield of the wafer can be further improved. Also, since there is no projecting portion from the fixing plate, the vertical setting of the vertical boat can be easily performed.

Further, by using the nut rotating tool according to the fourth aspect, fine tightening adjustment can be performed.
The damage of the screw thread can be prevented.

Note that the present invention is not limited to the above-described embodiment showing the optimum example. For example, the assembled wafer boat of the present invention is applicable to a horizontal boat. There may be three or more small holes for rotation of the round nut. Further, the number of holding rods is not limited to four, and may be three or five or more.
Further, the holding rod may be in the shape of a pipe having a circular or annular cross section as a whole, and the fixing plate may be in the shape of a rectangular plate.

[Brief description of the drawings]

FIG. 1 is an assembly view showing the vicinity of a lower fixing plate of an assembling type vertical boat for wafers according to the present invention.

FIG. 2 is a view showing the holding rod of FIG. 1, (A) is a side view,
(B) is a bottom view, (C) is a top view, (D) is a side view,
(E) is an enlarged sectional view showing a groove.

FIG. 3 is a view showing the fixing plate of FIG. 1, wherein (A) is a top view,
(B) is a MON sectional view of (A), (C) is an enlarged view showing a mounting hole, and (D) is an enlarged sectional view of a mounting hole.

4A and 4B are views showing the round nut of FIG. 1, wherein FIG. 4A is a top view and FIG.

5A and 5B are views showing a nut rotating tool for rotating the round nut of FIG. 1, wherein FIG. 5A is a side view, FIG. 5B is a top view, and FIG.
Is an axial sectional view.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Assembled wafer boat 11 Holding rod 12 Groove 13 Engagement part 14, 16 Screw part 21 Lower fixing plate 22 Mounting hole 23 Rectangular hole part 24 Circular hole part 31 Round nut 32 Screw part 33 Small hole for rotation 41 Nut rotating tool 42 Small protrusion

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Tetsuro Tamura 6-861-5 Higashiko, Seirocho, Kitakanbara-gun, Niigata 6-13-25-203 Ishiyama, Niigata City (72) Inventor Hiroyuki Katata 4-10-14 Yoneyama, Niigata City, Niigata Prefecture

Claims (4)

[Claims] An assembling type semiconductor having a configuration in which a holding rod (11) provided with a groove (12) for mounting a wafer and a fixing plate (21) provided with a mounting hole (22) for fixing the holding rod are provided. In the wafer boat, a screw (1) is attached to the end of the holding rod (11).
4, 16) are formed, and the holding rod (11) is attached to the fixing plate (21) by using a round nut (31) having a small hole (33) for rotation on the end surface which is entirely cylindrical. The respective members (11, 21, 31) are made of silicon, quartz glass,
And an assembling type boat made of a material selected from silicon carbide. 2. When the holding rod (11) is fixed by the round nut (31), the whole round nut is substantially fixed to the fixing plate (2).
2. An assembling wafer boat according to claim 1, wherein the boat is accommodated in the mounting hole of (1). 3. A mounting hole (2) of at least one fixed plate (21) of two fixed plates engaged with both ends of the holding rod.
2) has a double structure consisting of a circular hole (24) and a rectangular hole (23), and a rectangular hole at the base of the screw (14) at the end of the holding rod engaged with the hole. An engaging portion (13) corresponding to (23) is formed, and the engaging portion (1
3. The assembling type boat boat according to claim 1, wherein the rectangular hole (23) is engaged with the hole (3). 4. A mounting jig for rotating a round nut (31) according to claim 1, wherein the round nut (3) is provided.
Small protrusions (42) corresponding to the small holes for rotation (33) in 1).
And a jig made of a material selected from silicon, quartz glass, and silicon carbide.