JPH10279070A - Substrate transfer fingers - Google Patents

Abstract

(57) Abstract: A substrate transfer finger capable of adsorbing and transferring a substrate while securely contacting each support point is provided. Kind Code: A1 A substrate transport finger for sucking and transporting a substrate, comprising: a flat finger body; and at least four finger bodies disposed on the finger body and having the same height for supporting the substrate. One supporting member 2 and an adsorbing member 3 for adsorbing a substrate disposed at a substantially central portion between the supporting members 2
And at least four support members 2 and at least one suction member 3 having a different height.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer finger for sucking and transferring a substrate such as a glass substrate for a liquid crystal display device.

[0002]

2. Description of the Related Art Conventionally, as a finger for transporting a glass substrate, Japanese Patent Application Laid-Open No. Hei 8-208 filed by the present applicant has been used.
No. 003 is known.

In this conventional example, the glass substrate transfer finger supports and sucks at a minimum necessary support point so as not to damage the glass substrate surface after keeping the cleanness.

[0004]

However, in the above-mentioned conventional example, the height of each support point varies in the machining accuracy and may not be uniform. There is a problem that a tapping sound is generated due to vibration of a portion of the glass substrate that is not used, and a suction error may occur.

SUMMARY OF THE INVENTION Accordingly, the present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a substrate transfer finger capable of adsorbing and transferring a substrate while securely contacting each support point. It is to be.

[0006]

Means for Solving the Problems The above-mentioned problems are solved,
In order to achieve the object, a substrate transfer finger according to the present invention is a substrate transfer finger for sucking and transferring a substrate, a flat plate-shaped finger body, and disposed on the finger body, At least four supporting members having the same height for supporting the substrate, and an adsorbing member for adsorbing the substrate disposed at a substantially central portion between the supporting members, wherein the at least four supporting members are provided. And at least one suction member having a different height.

Further, in the substrate transfer finger according to the present invention, the finger is horizontally and cantileverly fixed to the transfer robot.

Further, in the substrate transfer finger according to the present invention, three of the suction members are arranged side by side on a center line between the support members.

Further, in the substrate transport finger according to the present invention, the height of the upper surface of the suction member is set higher than the height of the upper surface of the at least four support members by a predetermined value.

Further, in the substrate transfer finger according to the present invention, if the vertical length of the rectangular substrate supported by the support member is A and the horizontal length is B, the support member is It is characterized by being arranged at a position inside by 0.21 × A from the horizontal side and at a position inside by 0.21 × B from the vertical side.

Further, in the substrate transfer finger according to the present invention, the at least four support members are arranged so as to be adjustable in height with respect to the finger body.

Further, in the substrate transfer finger according to the present invention, the at least four support members are arranged so as to be adjustable in height with respect to the finger body by a spacer.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a perspective view of a finger body of a substrate transfer finger according to an embodiment of the present invention as viewed from above. 2 is a perspective view of the finger main body of FIG. 1 as viewed from the back, and FIGS. 3 to 5 are cross-sectional views of the finger main body of FIG. 1 along AA, CC, and BB, respectively.

The finger body 1 has a first shape portion 1a having a cross-sectional shape A shown in FIG. 3 and a second shape portion 1b having a cross-sectional shape B shown in FIG. 5, and a plurality of (four in FIG. 1) substrates. And an overhang portion 1c (see FIG. 4). The overhang portion 1c is provided with a support member 2 for supporting a substrate (not shown).

On the center line of the first shape portion 1a, suction pads 3 for sucking the substrate are provided (three positions in FIG. 1). As shown in FIG. 2, on the back surface of the finger main body 1, a piping section 4 for guiding suction air for sucking a substrate is provided. Specifically, a groove 4 is cut in the finger main body 1, a band-like member 5 is later bonded with an adhesive or the like, and the groove 4 is sealed to form a piping path. Of course, a round hole may be formed with a long drill or the like. The groove 4 is shown in FIG.
In the suction pad portion, and penetrates through the hole 3a of the suction pad 3.

A mounting bolt hole 7 and a suction air supply hole 6 are formed in a portion where the finger 1 is fixed to a robot or the like. The finger configured as described above is fixed to a robot 101 (a detailed view is not shown) as shown in FIG. 6, and for example, a glass substrate 103 is stored in a cassette 102 or a glass substrate 104 is taken out from the cassette. Used for

Next, regarding the position of the substrate support member 2, FIG.
Assuming that the dimensions of the substrate 103 are P × Q and the distances from each side of the substrate supporting member 2 are p and q, as is known, p1 = 0.21P, q1 = 0.21Q (1) When the values of p and q are roughly determined so as to be as described above, the deflection amount of the substrate is minimized.

Next, the height relationship between the substrate support member 2 and the suction pad 3, which is a characteristic part of the present invention, will be described.

FIG. 8B shows the deformation of the glass substrate 103 when the glass substrate 103 is supported in the state shown in FIG. 7, and the deformation of the substrate 103 at the glass substrate suction portions a, b, and c. It is shown by an XX section and a YY section, respectively, and when the deformation amounts are v1 and v2, there is a relation of v1 <v2. That is, the glass substrate 103 corresponding to the suction portion b
Is larger in deformation amount than the portion of the glass substrate 103 corresponding to the suction portions a and c.

Next, as shown in FIG.
Glass substrate 10 when sucked and supported by only three suction portion pads 3 (that is, with substrate support member 2 removed)
The deformation of No. 3 is as shown in FIG. 9B, and the deformation at the positions a ′, b ′, c ′, d ′ corresponding to the glass substrate support is shown by the X′-X ′ cross section. Let the deformation amount be v1 '.

Further, when the amount of deflection is compared with the case where the glass substrate 103 is supported as shown in FIG.
There is a relationship v1 <v2 <v1 '. That is, when the glass substrate 103 is supported only by the suction pad, the amount of deflection of the glass substrate 103 is the largest.

For example, in FIG. 7, Q = 360 mm,
P = 465 mm, q1 = 75 mm, p1 = 97.5 mm
Then, the deformation amount of each part of the glass substrate having the thickness t = 1.1 mm and t = 0.7 mm is as shown in FIG.

As a matter of course, the larger the thickness of the glass substrate 103, the smaller the amount of deformation during support.

Depending on whether the glass substrate 103 is supported by the four support portions on the outside as shown in FIG. 8 or by the three suction pads 3 as shown in FIG. And the required accuracy (allowable tolerance) for the difference between the heights of the upper surfaces and the heights of the upper surfaces of the three suction pads 3.

In other words, the glass substrate 103 is placed on the outside 4
In the case where the substrate is supported by the two substrate support members 2, if the height of the suction pad 3 is the same as that of the substrate support member 2, or if the height is lower than the height of the glass substrate 103 by its own weight deformation at the center of the glass substrate 103, When the glass substrate 103 is sucked by the suction pad 3, the glass substrate 103 does not float from the support member 2, and the suction pad 3 cannot suck the glass substrate 103. That is, the allowable tolerance required for the difference between the height of the support member 2 and the height of the suction pad 3 is (height of the support member 2) and (height of the support member 2−deflection amount due to deformation of the glass substrate by its own weight). Between. The same applies to the case where the glass substrate 103 is supported by the three suction pads 3. The allowable tolerance required for the difference between the height of the support member 2 and the height of the suction pad 3 is (the height of the support member 2). (The height of the support member 2−the amount of deflection of the glass substrate due to its own weight deformation).

More specifically, as shown in FIG. 8, with reference to the upper surfaces of the four outer support members 2, 360 × 465 mm, t =
When trying to hold a 1.1 mm glass substrate 103,
The tolerance of the difference between the height of the upper surface of the support member 2 and the height of the three suction pads 3 (in this case, the upper surface of the suction pad 3 is lower than the upper surface of the support member 2) 0.
05 mm or less, and 0.17 mm or less in part b. When the difference between the height of the support member 2 and the height of the suction pad 3 is within these values, the glass substrate 103 contacts all the support points and the suction surface. If the difference in height is larger than this, no contact is made with the suction surface, and suction becomes impossible. This is the middle concave grip of the glass substrate.

On the other hand, as shown in FIG.
360 × 465 mm, t = 1.1 m based on the upper surface of
When trying to grip the glass substrate 103 of m
The tolerance of the difference between the height of the upper surface of the support member 2 and the height of the upper surface of the suction pad 3 (in this case, the upper surface of the suction pad 3 is higher than the upper surface of the support member 2) is 0.2 mm or less. As in the case of FIG. 8, when the difference between the height of the support member 2 and the height of the suction pad 3 is within this value, the glass substrate 103 contacts all the support points and the suction surface. If the difference in height is larger than this, no contact is made with the suction surface, and suction becomes impossible.
This is the middle convex grip of the glass substrate.

From the above, it can be seen that the central convex grip has a greater tolerance in the difference in height between the support member 2 and the suction pad 3, so that the precision in manufacturing the substrate transport finger is reduced, which is advantageous. (X in FIG. 10). Also, actually, the glass substrate 103 has an initial warp,
The crossing range is slightly larger or smaller due to deformation due to the process (step).

Further, in order to facilitate variation due to machining accuracy, spacers are arranged on the finger mounting surface side of the four outer supporting members 2 so as to adjust the height of the supporting members 2 as shown in FIG. Good to keep. It is not preferable to adjust the spacer on the suction pad 3 side because vacuum air is likely to leak.

As described above, in the above embodiment, by setting the height of the suction pad slightly higher than the height of the support member, the difference between the height of the support member and the height of the suction pad is allowed. The tolerance is increased, and the manufacture of the substrate transfer finger is facilitated.

It should be noted that the present invention can be applied to a modification or modification of the above embodiment without departing from the gist thereof.

[0033]

As described above, according to the present invention,
The following effects can be obtained. (1) It is possible to provide a substrate transfer finger capable of reliably sucking and holding a glass substrate. (2) The glass substrate can be stably gripped and transported. (3) It is possible to provide a substrate transfer finger that is easy to manufacture because of its machining accuracy. (4) The height of the support point can be easily adjusted.

[0034]

[Brief description of the drawings]

FIG. 1 is a top perspective view of a finger according to an embodiment of the present invention.

FIG. 2 is a bottom perspective view of the finger of FIG. 1;

FIG. 3 is a sectional view taken along line AA of the finger of FIG. 1;

FIG. 4 is a sectional view taken along line CC of the finger of FIG. 1;

FIG. 5 is a sectional view of the finger of FIG. 1 taken along line BB.

FIG. 6 is a diagram showing a state where the finger of FIG. 1 is mounted on a robot.

FIG. 7 is a view showing a substrate supporting position in the finger of FIG. 1;

FIG. 8 is a diagram illustrating deformation of a substrate when the substrate is supported only by four substrate support members.

FIG. 9 is a diagram illustrating deformation of a substrate when supported by only three suction pads.

FIG. 10 is a diagram illustrating a height relationship between four upper surfaces of a substrate support member and three upper surfaces of a suction pad of the finger of FIG. 1;

FIG. 11 is a diagram showing the relationship between the thickness of the substrate and the amount of deflection due to the weight of the substrate.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Finger main body 1a 1st shape part 1b 2nd shape part 2 Substrate support member 3 Substrate suction pad 3a Suction pad hole 4 Suction air piping (groove) 5 Air piping cover 6 Suction air supply hole 7 Finger fixing hole 10 Spacer 11 Finger fixed position (Finger fixed end) 101 Robot 102 Cassette 103 Glass substrate 104 Substrate stored in cassette

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁶ Identification code FI H01L 21/68 H01L 21/68 B

Claims (7)

[Claims] 1. A finger for transporting a substrate for sucking and transporting a substrate, comprising: a plate-shaped finger main body; and at least an equal height provided on the finger main body and supporting the substrate. Four supporting members, and an adsorbing member for adsorbing the substrate arranged at a substantially central portion between the supporting members, wherein the at least four supporting members and at least one adsorbing member having different heights are provided. A finger for transporting a substrate, comprising: 2. The substrate transfer finger according to claim 1, wherein the finger is horizontally and cantileverly fixed to a transfer robot. 3. The substrate transfer finger according to claim 1, wherein three suction members are arranged side by side along a center line between the support members. 4. The substrate transfer finger according to claim 1, wherein the height of the upper surface of the suction member is set higher than the height of the upper surface of the at least four support members by a predetermined value. 5. Assuming that the vertical length of the rectangular substrate supported by the support member is A and the horizontal length is B, the support member is 0.21 × A from the horizontal side of the substrate. 2. The substrate transfer finger according to claim 1, wherein the finger is disposed inside and at a position inside the vertical side by 0.21 * B. 6. The substrate transfer finger according to claim 1, wherein the at least four support members are provided so as to be adjustable in height with respect to the finger body. 7. The substrate transfer finger according to claim 6, wherein the at least four support members are arranged so as to be height-adjustable with respect to the finger body by a spacer.