JPH10286759A5 - - Google Patents

Info

Publication number
JPH10286759A5
JPH10286759A5 JP1997110147A JP11014797A JPH10286759A5 JP H10286759 A5 JPH10286759 A5 JP H10286759A5 JP 1997110147 A JP1997110147 A JP 1997110147A JP 11014797 A JP11014797 A JP 11014797A JP H10286759 A5 JPH10286759 A5 JP H10286759A5
Authority
JP
Japan
Prior art keywords
substrate
polishing
polishing table
top ring
ring head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997110147A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10286759A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP11014797A priority Critical patent/JPH10286759A/ja
Priority claimed from JP11014797A external-priority patent/JPH10286759A/ja
Priority to US09/058,163 priority patent/US6116994A/en
Publication of JPH10286759A publication Critical patent/JPH10286759A/ja
Publication of JPH10286759A5 publication Critical patent/JPH10286759A5/ja
Pending legal-status Critical Current

Links

JP11014797A 1997-04-11 1997-04-11 基板の研磨装置 Pending JPH10286759A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11014797A JPH10286759A (ja) 1997-04-11 1997-04-11 基板の研磨装置
US09/058,163 US6116994A (en) 1997-04-11 1998-04-10 Polishing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11014797A JPH10286759A (ja) 1997-04-11 1997-04-11 基板の研磨装置

Publications (2)

Publication Number Publication Date
JPH10286759A JPH10286759A (ja) 1998-10-27
JPH10286759A5 true JPH10286759A5 (2) 2004-12-24

Family

ID=14528246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11014797A Pending JPH10286759A (ja) 1997-04-11 1997-04-11 基板の研磨装置

Country Status (1)

Country Link
JP (1) JPH10286759A (2)

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