JPH10309588A - Water treatment method, water treatment device and pure water production device - Google Patents
Water treatment method, water treatment device and pure water production deviceInfo
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- JPH10309588A JPH10309588A JP9118123A JP11812397A JPH10309588A JP H10309588 A JPH10309588 A JP H10309588A JP 9118123 A JP9118123 A JP 9118123A JP 11812397 A JP11812397 A JP 11812397A JP H10309588 A JPH10309588 A JP H10309588A
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- Prior art keywords
- water
- ozone
- toc
- pure water
- oxidation
- Prior art date
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- Separation Using Semi-Permeable Membranes (AREA)
- Treatment Of Water By Ion Exchange (AREA)
- Physical Water Treatments (AREA)
- Treatment Of Water By Oxidation Or Reduction (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、処理水中のＴＯＣ
（全有機体炭素）を現状より大幅に低減化することがで
きる水処理方法、水処理装置及び純水製造装置に関す
る。TECHNICAL FIELD The present invention relates to a TOC in treated water.
The present invention relates to a water treatment method, a water treatment device, and a pure water production device capable of significantly reducing (total organic carbon) from the current state.
【０００２】[0002]
【従来の技術】従来、市水、地下水、工水等の原水から
超純水を製造する超純水製造システムは、基本的に、図
２に示す如く、前処理装置１、一次純水製造装置２及び
二次純水製造装置（サブシステム）３から構成される。
このうち、前処理装置１は、凝集、加圧浮上（沈殿）、
濾過装置等で構成される。一次純水製造装置２は、逆浸
透（ＲＯ）膜分離装置、イオン交換純水装置（２床３塔
式又は４床５塔式）及び脱気装置で構成され、また、二
次純水製造装置３は、紫外線（ＵＶ）酸化装置、混床式
イオン交換装置及び限外濾過（ＵＦ）膜分離装置で構成
される。2. Description of the Related Art Conventionally, an ultrapure water production system for producing ultrapure water from raw water such as city water, groundwater and industrial water basically includes a pretreatment device 1 and a primary pure water production system as shown in FIG. It comprises a device 2 and a secondary pure water production device (subsystem) 3.
Among them, the pretreatment device 1 includes coagulation, pressure flotation (sedimentation),
It is composed of a filtration device and the like. The primary pure water production device 2 is composed of a reverse osmosis (RO) membrane separation device, an ion exchange pure water device (two-bed three-column type or four-bed five-column type) and a deaeration device. The apparatus 3 includes an ultraviolet (UV) oxidizing apparatus, a mixed-bed ion exchange apparatus, and an ultrafiltration (UF) membrane separation apparatus.
【０００３】これらの各装置単位において、原水中のＴ
ＯＣ成分を分離、吸着、分解等の手段で低減化するもの
は、ＲＯ膜分離装置、イオン交換純水装置、ＵＶ酸化装
置であるが、原水中には、ＲＯ膜分離装置やイオン交換
純水装置では除去が困難なＴＯＣ成分が相当量含まれて
いるため、これを除去するために、サブシステム３にお
いて高価なＵＶ酸化装置を多数基設置する必要があっ
た。[0003] In each of these units, the T
Devices that reduce OC components by means such as separation, adsorption, and decomposition are RO membrane separators, ion-exchange pure water systems, and UV oxidizers. Raw water contains RO membrane separators and ion-exchange pure water. Since the apparatus contains a considerable amount of TOC components that are difficult to remove, it was necessary to install a large number of expensive UV oxidizers in the subsystem 3 to remove the TOC components.
【０００４】この問題を解決するために、オゾン添加手
段とＵＶ酸化装置を設け、ＵＶ酸化に先立ちオゾンを添
加し、ＵＶ酸化装置におけるＴＯＣ分解能を高める方法
（以下、このオゾン添加とＵＶ酸化とを組み合せたシス
テムを「Ｏ3 −ＵＶシステム」と称す。）が提案されて
いる（特開平２−１５２５８９号公報）。Ｏ3 −ＵＶシ
ステムを採用することにより、サブシステムへのＴＯＣ
負荷を低減し、サブシステムに設置するＵＶ酸化装置の
基数を低減可能であることが予想される。In order to solve this problem, a method of providing ozone adding means and a UV oxidizing apparatus, adding ozone prior to UV oxidation, and increasing the TOC resolution in the UV oxidizing apparatus (hereinafter, this ozone adding and UV oxidizing is called the combined system referred to as "O 3 -UV system".) has been proposed (JP-a-2-152589). Adopting O 3 -UV system, TOC to subsystem
It is expected that the load can be reduced and the number of UV oxidizers installed in the subsystem can be reduced.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、Ｏ3 −
ＵＶシステムではＴＯＣ分解能を十分に高めることはで
きず、期待するほどの効果は得られていない。However, O 3 −
In a UV system, the TOC resolution cannot be sufficiently increased, and the effect as expected is not obtained.
【０００６】本発明は上記従来の問題点を解決し、原水
中のＴＯＣを効率的に分解除去してＴＯＣが著しく低減
された水を得ることができる水処理方法及び水処理装
置、並びに、ＴＯＣを効率的に分解除去することで、後
段のサブシステムにおけるＵＶ酸化装置の設置基数の低
減が可能な純水製造装置を提供することを目的とする。The present invention solves the above-mentioned conventional problems, and provides a water treatment method and a water treatment apparatus capable of efficiently decomposing and removing TOC in raw water to obtain water with a significantly reduced TOC. It is an object of the present invention to provide a pure water production apparatus capable of reducing the number of installed UV oxidation apparatuses in a downstream subsystem by efficiently decomposing and removing the water.
【０００７】[0007]
【課題を解決するための手段】請求項１の水処理方法
は、原水に臭化アルカリとオゾンを添加した後、紫外線
を照射して原水中の有機物を分解することを特徴とす
る。According to a first aspect of the present invention, there is provided a water treatment method comprising adding alkali bromide and ozone to raw water, and irradiating the raw water with ultraviolet rays to decompose organic substances in the raw water.
【０００８】請求項２の水処理装置は、原水に臭化アル
カリとオゾンを添加する手段と、臭化アルカリとオゾン
が添加された水に紫外線を照射して該水中の有機物を酸
化分解する紫外線照射手段とを備えてなることを特徴と
する。According to a second aspect of the present invention, there is provided a water treatment apparatus, comprising: means for adding alkali bromide and ozone to raw water; and ultraviolet light for irradiating ultraviolet light to water to which alkali bromide and ozone are added to oxidatively decompose organic substances in the water. Irradiating means.
【０００９】本発明者らは、上記目的を達成すべく、ま
ず、ＲＯ膜分離装置及びイオン交換純水装置では除去し
得ずに残留するＴＯＣ成分（このＴＯＣ成分はＲＯ膜分
離装置及びイオン交換純水装置で除去できないものであ
るから、分子量数百以下でかつ非イオン性の物質であ
る。）について同定を行い、種々の研究により、この物
質は尿素（ＮＨ2 −ＣＯ−ＮＨ2 ）に似た窒素化合物で
あることをつきとめた。原水中に含有される本物質は、
合成された純粋の尿素とは若干異なるが、特性としては
かなり近似していることが判明した。In order to achieve the above object, the present inventors firstly set a TOC component which cannot be removed by an RO membrane separation apparatus and an ion-exchange pure water apparatus (the TOC component is a RO membrane separation apparatus and an ion exchange pure water apparatus). It is a non-ionic substance having a molecular weight of several hundreds or less and is non-ionic because it cannot be removed by a pure water apparatus.) According to various studies, this substance was converted into urea (NH 2 —CO—NH 2 ). It was found that they were similar nitrogen compounds. This substance contained in raw water
Although slightly different from the synthesized pure urea, it was found that the properties were quite similar.
【００１０】従って、処理水中のＴＯＣを効率的に低減
するためには、この尿素類似物質を効率的に分解すれば
良い。Therefore, in order to efficiently reduce the TOC in the treated water, the urea-like substance should be efficiently decomposed.
【００１１】従来、尿素の分解法としては、臭化ナトリ
ウム（ＮａＢｒ）と酸化剤（Ｏ3 ，ＮａＣｌＯ等）とを
併用し、ＮａＢｒの酸化で生成する次亜臭素酸ナトリウ
ム（ＮａＢｒＯ）による分解法や、ウレアーゼを使用す
る酵素分解法が知られている。Conventionally, as a method for decomposing urea, sodium bromide (NaBr) and an oxidizing agent (O 3 , NaClO, etc.) are used in combination, and sodium hypobromite (NaBrO) generated by oxidation of NaBr is used. Also, an enzymatic decomposition method using urease is known.
【００１２】本発明者らは、前述のＯ3 −ＵＶシステム
において、ＮａＢｒ等の臭化アルカリを併用したとこ
ろ、ＴＯＣを著しく効率的に分解除去できることを見出
し、本発明を完成させた。The present inventors have found that when the above-mentioned O 3 -UV system is used together with an alkali bromide such as NaBr, TOC can be remarkably efficiently decomposed and removed, and the present invention has been completed.
【００１３】臭化アルカリとオゾンを添加した後ＵＶ酸
化を行う本発明の水処理方法及び水処理装置によれば、
ＲＯ膜分離装置やイオン交換純水装置では除去し得ない
ＴＯＣ成分を効率的に分解除去することができ、処理水
のＴＯＣを著しく低減することができる。According to the water treatment method and the water treatment apparatus of the present invention in which UV oxidation is performed after adding alkali bromide and ozone,
TOC components that cannot be removed by the RO membrane separation device or the ion exchange pure water device can be efficiently decomposed and removed, and the TOC of treated water can be significantly reduced.
【００１４】請求項３の純水製造装置は、このようなＴ
ＯＣ分解システムを採用したものであって、原水を脱塩
処理するＲＯ膜分離装置と、該ＲＯ膜分離装置の透過水
に臭化アルカリとオゾンを添加する手段と、該臭化アル
カリとオゾンが添加された水にＵＶを照射して該水中の
有機物を酸化分解するＵＶ照射装置と、該ＵＶ照射装置
で酸化分解処理された水を脱気処理する脱気装置と、該
脱気装置の脱気処理水をイオン交換処理するイオン交換
装置とを備えてなることを特徴とする。The pure water producing apparatus according to claim 3 has such a T
An RO decomposition apparatus for desalinating raw water, a means for adding alkali bromide and ozone to permeated water of the RO membrane separation apparatus, wherein the alkali bromide and ozone are used. A UV irradiator for irradiating the added water with UV to oxidatively decompose organic matter in the water, a deaerator for degassing water oxidatively decomposed by the UV irradiator, and a deaerator for the deaerator. And an ion exchange device for performing ion exchange treatment on the gas-treated water.
【００１５】この純水製造装置によれば、ＲＯ膜分離装
置及びイオン交換純水装置によりＴＯＣを除去すると共
に、これらの装置では除去し得ないＴＯＣ成分をＵＶ酸
化により効率的に除去することで、著しくＴＯＣが低減
された純水を製造することができ、後段のサブシステム
のＵＶ酸化装置の設置基数を低減することが可能とな
る。According to this pure water producing apparatus, TOC is removed by the RO membrane separation apparatus and the ion exchange pure water apparatus, and TOC components which cannot be removed by these apparatuses are efficiently removed by UV oxidation. Thus, pure water with significantly reduced TOC can be produced, and the number of UV oxidation devices installed in the downstream subsystem can be reduced.
【００１６】[0016]
【発明の実施の形態】以下に本発明の実施の形態を詳細
に説明する。Embodiments of the present invention will be described below in detail.
【００１７】本発明において、臭化アルカリとしては、
ＮａＢｒ，ＫＢｒ等を用いることができ、このような臭
化アルカリは適当な濃度、例えば、１〜１０重量％の水
溶液として添加するのが好ましい。In the present invention, the alkali bromide includes:
NaBr, KBr and the like can be used, and such an alkali bromide is preferably added as an aqueous solution having an appropriate concentration, for example, 1 to 10% by weight.
【００１８】本発明におけるオゾン及び臭化アルカリの
添加量は原水中の前記尿素類似物質によるＴＯＣ濃度に
よっても異なるが、一般的には、各々数１０ｐｐｂ以上
であれば十分な効果を得ることができる。オゾン、臭化
アルカリの好ましい添加量は、各々、１〜５０ｐｐｍ程
度である。The amount of ozone and alkali bromide added in the present invention varies depending on the TOC concentration of the urea-like substance in the raw water, but in general, sufficient effects can be obtained if each is several tens ppb or more. . The preferable addition amounts of ozone and alkali bromide are each about 1 to 50 ppm.
【００１９】オゾン及び臭化アルカリは、ＵＶ酸化装置
の入口側に添加すれば良く、同一の添加箇所から同時に
添加しても別々に添加しても良い。Ozone and alkali bromide may be added to the inlet side of the UV oxidizer, and may be added simultaneously from the same addition site or separately.
【００２０】オゾン及び臭化アルカリを添加した後は、
ＵＶ酸化装置でＵＶ照射することによりＴＯＣを分解す
るが、このオゾン及び臭化アルカリを添加後、オゾンと
臭化アルカリの反応を促進するための滞留時間を確保す
るためにＵＶ酸化装置の前段に反応塔を設け、この反応
塔で所定時間滞留させた後、ＵＶ酸化装置に送給するよ
うにしても良い。ただし、ＵＶ酸化装置内の滞留時間
も、この反応時間に寄与するため、反応塔は必ずしも必
要とされない。反応塔を設ける場合、反応塔の滞留時間
は１〜１０分程度とするのが好ましい。After adding ozone and alkali bromide,
TOC is decomposed by UV irradiation with a UV oxidizer, but after adding this ozone and alkali bromide, it is placed in front of the UV oxidizer to secure a residence time for promoting the reaction between ozone and alkali bromide. A reaction tower may be provided, and after the reaction tower is kept in the reaction tower for a predetermined time, the reaction tower may be fed to a UV oxidation device. However, the residence time in the UV oxidizer also contributes to the reaction time, and thus a reaction tower is not necessarily required. When a reaction tower is provided, the residence time of the reaction tower is preferably about 1 to 10 minutes.
【００２１】オゾン及び臭化アルカリが添加された水に
ＵＶ照射するＵＶ酸化装置は、出力０．０１〜０．５Ｋ
ＷＨ／ｍ3 で波長１８０〜１９０ｎｍのＵＶを照射する
ものが好ましく、このＵＶ酸化装置の滞留時間は０．１
〜１０分程度とするのが好ましい。A UV oxidizer for irradiating water to which ozone and alkali bromide are added with UV has an output of 0.01 to 0.5K.
Irradiation with UV at a wavelength of 180 to 190 nm at WH / m 3 is preferred.
It is preferably set to about 10 minutes.
【００２２】このＵＶ酸化により、添加されたオゾンは
殆どが分解され、ＵＶ酸化装置の流出水中には、オゾン
の残留は殆どないが、後段にイオン交換純水装置を設置
する場合には、イオン交換樹脂のオゾン劣化を防止する
ために、亜硫酸ナトリウム（Ｎａ2 ＳＯ3 ）、亜硫酸水
素ナトリウム（ＮａＨＳＯ3 ）等の還元剤を添加して残
留オゾンを完全に分解除去するのが好ましい。この場
合、これらの還元剤の好適な添加量は０．１〜５ｐｐｍ
程度である。Most of the added ozone is decomposed by the UV oxidation, and almost no ozone remains in the effluent of the UV oxidizing apparatus. In order to prevent ozone deterioration of the exchange resin, it is preferable to add a reducing agent such as sodium sulfite (Na 2 SO 3 ) or sodium hydrogen sulfite (NaHSO 3 ) to completely decompose and remove residual ozone. In this case, a suitable addition amount of these reducing agents is 0.1 to 5 ppm.
It is about.
【００２３】次に、本発明の純水製造装置を採用した超
純水製造システムを示す図１を参照して本発明の純水製
造装置を説明する。Next, the pure water production apparatus of the present invention will be described with reference to FIG. 1 showing an ultrapure water production system employing the pure water production apparatus of the present invention.
【００２４】前処理装置１を経た水は、まずＲＯ膜分離
装置で脱塩処理する。この透過水にオゾン及びＮａＢｒ
等の臭化アルカリを添加して反応塔で所定時間滞留させ
た後、ＵＶ酸化装置でＴＯＣを分解ないしイオン化し、
その後、脱気装置でＴＯＣ分解で生成したＣＯ2 を除去
する。なお、この脱気装置を設けることで、ＵＶ酸化後
にオゾンが残留している場合でも、残留オゾンは脱気除
去されるため、その後のＮａＨＳＯ3 等の還元剤は添加
不要とすることができる。The water that has passed through the pretreatment device 1 is first subjected to a desalination treatment in an RO membrane separation device. Ozone and NaBr are added to this permeated water.
After adding an alkali bromide and the like and keeping it in the reaction tower for a predetermined time, TOC is decomposed or ionized by a UV oxidizer,
Thereafter, CO 2 generated by TOC decomposition is removed by a deaerator. By providing this deaerator, even if ozone remains after UV oxidation, residual ozone is deaerated and removed, so that it is not necessary to add a reducing agent such as NaHSO 3 thereafter.
【００２５】脱気処理水は必要に応じてＮａＨＳＯ3 等
の還元剤を添加した後、イオン交換純水装置でイオン交
換処理してＵＶ酸化でイオン化されたＴＯＣを除去し、
一次純水を得る。To the degassed water, if necessary, a reducing agent such as NaHSO 3 is added, and ion-exchange treatment is performed with an ion-exchange pure water apparatus to remove TOC ionized by UV oxidation.
Obtain primary pure water.
【００２６】得られた一次純水は、従来と同様にサブシ
ステム３で処理されて純度が高められ、超純水が製造さ
れる。The obtained primary pure water is treated in the subsystem 3 in the same manner as in the prior art to increase the purity and produce ultrapure water.
【００２７】[0027]
【実施例】以下に具体的な実施例及び比較例を挙げて本
発明をより詳細に説明する。The present invention will be described below in more detail with reference to specific examples and comparative examples.
【００２８】実施例１ 厚木市水（平成８年７月１日〜平成８年１０月３０日）
を原水として、まず、ＲＯ膜分離装置で脱塩処理し、得
られた透過水（ＲＯ処理水）にオゾン１ｐｐｍ（Ｏ3 と
して）とＮａＢｒ１ｐｐｍ（ＮａＢｒとして）を注入し
た後、反応塔で滞留させ、その後ＵＶ酸化装置でＵＶ照
射し、ＵＶ酸化装置の流出水（ＵＶ処理水）にＮａＨＳ
Ｏ3 を０．５ｐｐｍ（ＮａＨＳＯ3 として）添加した
後、イオン交換純水装置でイオン交換処理し、処理水
（ＭＢ処理水）を得た。この処理における各装置の処理
水のＴＯＣは表１に示す通りであった。Example 1 Atsugi City Water (July 1, 1996 to October 30, 1996)
Is used as raw water, first, it is subjected to desalting treatment by an RO membrane separation apparatus, and 1 ppm of ozone (as O 3 ) and 1 ppm of NaBr (as NaBr) are injected into the obtained permeated water (RO-treated water), and then retained in a reaction tower. Then, UV irradiation is carried out by a UV oxidizer, and NaHS
After adding 0.5 ppm of O 3 (as NaHSO 3 ), ion-exchange treatment was performed with an ion-exchange pure water apparatus to obtain treated water (MB treated water). The TOC of the treated water of each apparatus in this treatment was as shown in Table 1.
【００２９】なお、用いた装置の仕様及び処理条件は下
記の通りである。The specifications and processing conditions of the apparatus used are as follows.
【００３０】 ＲＯ膜分離装置：日東電工（株）製「ＮＴＲ−７５９ＨＲ−Ｓ４」 通水圧力１５ｋｇ／ｃｍ2 反応塔：滞留時間１０分 ＵＶ酸化装置：栗田工業（株）製ＵＬＵＶOX 出力 ０．０５ＫＷＨ／ｍ3 滞留時間 ０．５分 イオン交換純水装置：非再生型混床式イオン交換装置 通水ＳＶ３０ｈｒ-1 比較例１ 実施例１において、ＮａＢｒを添加せずＯ3 のみを添加
してＵＶ酸化処理したこと以外は同様にして処理を行
い、各装置の処理水のＴＯＣを表１に示した。RO membrane separation device: “NTR-759HR-S4” manufactured by Nitto Denko Corporation Water pressure 15 kg / cm 2 Reaction tower: residence time 10 minutes UV oxidation device: ULUV OX output manufactured by Kurita Kogyo Co., Ltd. 05 KWH / m 3 Residence time 0.5 min Ion exchange pure water apparatus: Non-regenerating type mixed bed type ion exchange apparatus Water passing SV 30 hr -1 Comparative Example 1 In Example 1, only O 3 was added without adding NaBr. The treatment was performed in the same manner except that the UV oxidation treatment was performed, and the TOC of the treated water of each apparatus is shown in Table 1.
【００３１】[0031]
【表１】 [Table 1]
【００３２】表１より、本発明によれば、ＴＯＣを著し
く低減できることがわかる。即ち、本発明では、ＵＶ酸
化により、ＴＯＣが効率的に分解されてイオン化されて
いるために、これがイオン交換純水装置で極低濃度にま
で除去され、ＴＯＣは著しく低減される。Table 1 shows that the present invention can significantly reduce TOC. That is, in the present invention, since TOC is efficiently decomposed and ionized by UV oxidation, the TOC is removed to an extremely low concentration by the ion exchange pure water apparatus, and TOC is significantly reduced.
【００３３】実施例２ 図１に示す超純水製造システムにより厚木市水（平成８
年７月１日〜平成８年１０月３０日）を原水として超純
水の製造を行った。なお、前処理装置としては、原水と
して市水を用いたため、凝集・加圧浮上（沈澱）・濾過
装置は省略した。Example 2 Atsugi City Water (Heisei 8) using the ultrapure water production system shown in FIG.
Ultra-pure water was produced from July 1, 1996 to October 30, 1996) as raw water. As the pretreatment device, city water was used as raw water, so that a coagulation, pressure flotation (sedimentation), and filtration device were omitted.
【００３４】用いた各装置の仕様及び処理条件は次の通
りである。The specifications and processing conditions of each device used are as follows.
【００３５】一次純水製造装置 ＲＯ膜分離装置：日東電工（株）製「ＮＴＲ−７５９ＨＲ−Ｓ４」 通水圧力１５ｋｇ／ｃｍ2 オゾン注入量：１ｐｐｍ（ａｓＯ3 ） ＮａＢｒ注入量：１ｐｐｍ（ａｓＮａＢｒ） 反応塔：滞留時間１０分 ＵＶ酸化装置：栗田工業（株）製ＵＬＵＶOX 出力 ０．０５ＫＷＨ／ｍ3 滞留時間 ０．５分 脱気装置：窒素脱気装置 水：ガス＝１：１（体積比） ＮａＨＳＯ3 注入量：０．５ｐｐｍ（ａｓＮａＨＳＯ3 ） イオン交換純水装置：非再生型混床式イオン交換装置 通水ＳＶ３０ｈｒ-1 サブシステム ＵＶ酸化装置：栗田工業（株）製ＵＬＵＶOX 出力 ０．１５ＫＷＨ／ｍ3 滞留時間 ０．５分 混床式イオン交換装置：通水ＳＶ６０ｈｒ-1 ＵＦ膜分離装置：外圧中空糸型ＵＦ膜 得られた超純水の水質を表２に示す。 Primary pure water production apparatus RO membrane separation apparatus: "NTR-759HR-S4" manufactured by Nitto Denko Corporation Water passing pressure 15 kg / cm 2 Ozone injection amount: 1 ppm (asO 3 ) NaBr injection amount: 1 ppm (asNaBr) Reaction tower: residence time 10 minutes UV oxidizer: ULUV OX output manufactured by Kurita Kogyo Co., Ltd. 0.05 kWH / m 3 residence time 0.5 minute Deaerator: nitrogen deaerator Water: gas = 1: 1 (volume ratio) NaHSO 3 injection amount: 0.5 ppm (asNaHSO 3 ) Ion exchange pure water apparatus: Non-regenerative mixed-bed type ion exchange apparatus Pass-through SV30hr- 1 subsystem UV oxidation apparatus: ULUV OX output manufactured by Kurita Kogyo Co., Ltd. 15 KWH / m 3 Residence time 0.5 min Mixed bed type ion exchange device: Water passing SV 60 hr -1 UF membrane separation device: External pressure hollow fiber type UF membrane The water quality of the obtained ultrapure water is shown in Table 2.
【００３６】[0036]
【表２】 [Table 2]
【００３７】表２より、本発明の純水製造装置によれ
ば、著しく高水質の超純水を製造することができること
がわかる。Table 2 shows that the pure water production apparatus of the present invention can produce ultrapure water of extremely high quality.
【００３８】なお、同程度の水質の超純水を図２に示す
従来の超純水製造システムで製造する場合のサブシステ
ムのＵＶ酸化装置の必要出力は０．３ＫＷＨ／ｍ3 以上
であり、本発明の純水製造装置によれば、サブシステム
のＵＶ酸化装置の出力（設置基数）を低減して設置コス
ト、運転コストの低減を図ることができることがわか
る。When the ultrapure water having the same water quality is produced by the conventional ultrapure water production system shown in FIG. 2, the required output of the UV oxidizer of the subsystem is 0.3 KWH / m 3 or more. According to the pure water production apparatus of the present invention, it can be seen that the output (the number of installation bases) of the UV oxidation apparatus of the subsystem can be reduced to reduce the installation cost and operation cost.
【００３９】[0039]
【発明の効果】以上詳述した通り、本発明の水処理方法
及び水処理装置によれば、ＴＯＣが著しく低減された処
理水を得ることができる。また、本発明の純水製造装置
によれば、市水、地下水、工業用水を原水として純水を
製造するに当り、得られる純水に含まれるＴＯＣを著し
く低減し、極めて純度の高い純水を製造することが可能
とされ、これにより、後段のサブシステムにおけるＵＶ
酸化装置の設置基数を低減し、設置コスト、電力コスト
の低減を図ることができる。As described in detail above, according to the water treatment method and the water treatment apparatus of the present invention, treated water with significantly reduced TOC can be obtained. Further, according to the pure water production apparatus of the present invention, in producing pure water using city water, groundwater, and industrial water as raw water, TOC contained in the obtained pure water is significantly reduced, and pure water having extremely high purity is obtained. Can be manufactured, which allows the UV in the subsequent subsystem to be manufactured.
The number of oxidizers to be installed can be reduced, and installation costs and power costs can be reduced.
【図１】本発明の実施の形態に係る超純水製造システム
を示す系統図である。FIG. 1 is a system diagram showing an ultrapure water production system according to an embodiment of the present invention.
【図２】従来の超純水製造システムを示す系統図であ
る。FIG. 2 is a system diagram showing a conventional ultrapure water production system.
１ 前処理装置 ２ 一次純水製造装置 ３ 二次純水製造装置（サブシステム） 1 Pretreatment device 2 Primary pure water production device 3 Secondary pure water production device (subsystem)
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 ＦＩ Ｃ０２Ｆ 1/76 Ｃ０２Ｆ 1/76 Ｚ 1/78 1/78 9/00 ５０２ 9/00 ５０２Ｆ ５０２Ｊ ５０２Ｎ ５０２Ｒ ５０２Ｚ ５０３ ５０３Ｂ ５０４ ５０４Ｂ ──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. 6 Identification symbol FI C02F 1/76 C02F 1/76 Z 1/78 1/78 9/00 502 9/00 502F 502J 502N 502R 502Z 503 503B 504 504B
Claims (3)
後、紫外線を照射して原水中の有機物を分解することを
特徴とする水処理方法。1. A water treatment method comprising adding alkali bromide and ozone to raw water, and then irradiating ultraviolet rays to decompose organic substances in the raw water.
手段と、臭化アルカリとオゾンが添加された水に紫外線
を照射して該水中の有機物を酸化分解する紫外線照射手
段とを備えてなる水処理装置。2. Means for adding alkali bromide and ozone to raw water, and ultraviolet irradiation means for irradiating ultraviolet light to water to which alkali bromide and ozone are added to oxidatively decompose organic substances in the water. Water treatment equipment.
と、 該逆浸透膜分離装置の透過水に臭化アルカリとオゾンを
添加する手段と、 該臭化アルカリとオゾンが添加された水に紫外線を照射
して該水中の有機物を酸化分解する紫外線照射装置と、 該紫外線照射装置で酸化分解処理された水を脱気処理す
る脱気装置と、 該脱気装置の脱気処理水をイオン交換処理するイオン交
換装置とを備えてなることを特徴とする純水製造装置。3. A reverse osmosis membrane separator for desalinating raw water, means for adding alkali bromide and ozone to permeated water of the reverse osmosis membrane separator, and water to which the alkali bromide and ozone are added. An ultraviolet irradiation device for irradiating ultraviolet rays to oxidize and decompose organic substances in the water; a degassing device for degassing water oxidatively decomposed by the ultraviolet irradiation device; An apparatus for producing pure water, comprising: an ion exchange apparatus for performing an ion exchange treatment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9118123A JPH10309588A (en) | 1997-05-08 | 1997-05-08 | Water treatment method, water treatment device and pure water production device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9118123A JPH10309588A (en) | 1997-05-08 | 1997-05-08 | Water treatment method, water treatment device and pure water production device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH10309588A true JPH10309588A (en) | 1998-11-24 |
Family
ID=14728613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9118123A Pending JPH10309588A (en) | 1997-05-08 | 1997-05-08 | Water treatment method, water treatment device and pure water production device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10309588A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1295631A3 (en) * | 2001-09-20 | 2003-05-07 | Nitto Denko Corporation | Method of treating reverse osmosis membrane element and reverse osmosis membrane module |
| JP2004057935A (en) * | 2002-07-29 | 2004-02-26 | Kurita Water Ind Ltd | Ultrapure water production system |
| JP2007098244A (en) * | 2005-10-03 | 2007-04-19 | Nippon Rensui Co Ltd | Reuse of ozone-containing wastewater |
| JP2008119658A (en) * | 2006-11-15 | 2008-05-29 | Kurita Water Ind Ltd | UV oxidation device and organic substance removal device |
| WO2009003572A1 (en) * | 2007-06-29 | 2009-01-08 | Christ Water Technology Ag | Treatment of water with hypobromite solution |
| WO2011105205A1 (en) * | 2010-02-24 | 2011-09-01 | 宇部興産株式会社 | Ultraviolet oxidation device, ultrapure water production device using same, ultraviolet oxidation method, and ultrapure water production method |
| JP2011183245A (en) * | 2010-03-04 | 2011-09-22 | Kurita Water Ind Ltd | Method and apparatus for producing ultrapure water |
| JP2011183274A (en) * | 2010-03-05 | 2011-09-22 | Kurita Water Ind Ltd | Water treatment method and process for producing ultrapure water |
| US8916048B2 (en) | 2010-03-05 | 2014-12-23 | Kurita Water Industries Ltd. | Water treatment method and method for producing ultrapure water |
-
1997
- 1997-05-08 JP JP9118123A patent/JPH10309588A/en active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6821430B2 (en) | 2001-09-20 | 2004-11-23 | Nitto Denko Corporation | Method of treating reverse osmosis membrane element, and reverse osmosis membrane module |
| EP1295631A3 (en) * | 2001-09-20 | 2003-05-07 | Nitto Denko Corporation | Method of treating reverse osmosis membrane element and reverse osmosis membrane module |
| JP2004057935A (en) * | 2002-07-29 | 2004-02-26 | Kurita Water Ind Ltd | Ultrapure water production system |
| JP2007098244A (en) * | 2005-10-03 | 2007-04-19 | Nippon Rensui Co Ltd | Reuse of ozone-containing wastewater |
| JP2008119658A (en) * | 2006-11-15 | 2008-05-29 | Kurita Water Ind Ltd | UV oxidation device and organic substance removal device |
| US8496830B2 (en) | 2007-06-29 | 2013-07-30 | Christ Water Technology Ag | Treatment of water with hypobromite solution |
| WO2009003572A1 (en) * | 2007-06-29 | 2009-01-08 | Christ Water Technology Ag | Treatment of water with hypobromite solution |
| WO2011105205A1 (en) * | 2010-02-24 | 2011-09-01 | 宇部興産株式会社 | Ultraviolet oxidation device, ultrapure water production device using same, ultraviolet oxidation method, and ultrapure water production method |
| CN102791636A (en) * | 2010-02-24 | 2012-11-21 | 宇部兴产株式会社 | Ultraviolet oxidation device, ultrapure water production device using same, ultraviolet oxidation method, and ultrapure water production method |
| JP5141846B2 (en) * | 2010-02-24 | 2013-02-13 | 宇部興産株式会社 | Ultraviolet oxidation apparatus, ultrapure water production apparatus using the same, ultraviolet oxidation method, and ultrapure water production method |
| JP2011183245A (en) * | 2010-03-04 | 2011-09-22 | Kurita Water Ind Ltd | Method and apparatus for producing ultrapure water |
| JP2011183274A (en) * | 2010-03-05 | 2011-09-22 | Kurita Water Ind Ltd | Water treatment method and process for producing ultrapure water |
| US8916048B2 (en) | 2010-03-05 | 2014-12-23 | Kurita Water Industries Ltd. | Water treatment method and method for producing ultrapure water |
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