JPH10321473A - Solid electrolytic capacitor and its manufacture - Google Patents

Solid electrolytic capacitor and its manufacture

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Publication number
JPH10321473A
JPH10321473A JP13242897A JP13242897A JPH10321473A JP H10321473 A JPH10321473 A JP H10321473A JP 13242897 A JP13242897 A JP 13242897A JP 13242897 A JP13242897 A JP 13242897A JP H10321473 A JPH10321473 A JP H10321473A
Authority
JP
Japan
Prior art keywords
layer
electrolytic capacitor
conductive polymer
polymer layer
polyaniline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13242897A
Other languages
Japanese (ja)
Inventor
Koichi Mitsui
紘一 三井
Takashi Mizuguchi
隆 水口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nichicon Corp
Original Assignee
Nichicon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nichicon Corp filed Critical Nichicon Corp
Priority to JP13242897A priority Critical patent/JPH10321473A/en
Publication of JPH10321473A publication Critical patent/JPH10321473A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a highly reliable solid electrolytic capacitor having a large capacitance and an excellent impedance characteristic, by using conductive high polymers for its solid electrolyte. SOLUTION: In a solid electrolytic capacitor in which a dielectric oxide film 1a is formed on the surface of a capacitor element 1 composed of a metal 1b serving as a valve which becomes an anode and a conductive high polymer layer is formed on the surface of the film 1a, the conductive high polymer layer is composed of a first conductive high polymer layer 2 which is formed by heating a solution in which polyaniline or its derivative is dissolved, and a second conductive high polymer layer 3 formed by electrolyzing and polymerizing polyaniline or its derivative. In a method for manufacturing the capacitor, the layer 2 is formed by heating a solution prepared by dissolving polymeric- aniline in a solvent containing water.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は導電性高分子化合物
を固体電解質とする固体電解コンデンサ及びその製造方
法に関するものであって、特に近年の小型化、高容量化
に伴い微細化された粉末粒子からなるコンデンサ素子に
おいても容量が大きく、周波数特性に優れ、かつ信頼性
にも優れた固体電解コンデンサを提供するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid electrolytic capacitor using a conductive polymer compound as a solid electrolyte and a method for producing the same. The present invention also provides a solid electrolytic capacitor having a large capacitance, excellent frequency characteristics, and excellent reliability even in a capacitor element comprising:

【0002】[0002]

【従来の技術】従来、導電性高分子を電解コンデンサの
固体電解質に利用し、高周波領域でのインピーダンスの
低減を図った固体電解コンデンサが種々提案されてい
る。図3は従来の固体電解コンデンサの一例の断面図で
ある。陽極となる弁作用金属1bからなるコンデンサ素
子1の表面に陽極酸化により誘電体皮膜1aが形成さ
れ、その上に固体電解質となる導電性高分子層2が形成
され、その上にカーボン層4、銀層5が形成され、更に
エポキシ樹脂8で外装されている。上記コンデンサ素子
1の陽極側に陽極リード6が接続され、銀層5には陰極
リード7が接続される。
2. Description of the Related Art Conventionally, various solid electrolytic capacitors have been proposed in which a conductive polymer is used as a solid electrolyte of an electrolytic capacitor to reduce impedance in a high frequency range. FIG. 3 is a sectional view of an example of a conventional solid electrolytic capacitor. A dielectric film 1a is formed by anodic oxidation on the surface of a capacitor element 1 made of a valve metal 1b serving as an anode, a conductive polymer layer 2 serving as a solid electrolyte is formed thereon, and a carbon layer 4 is provided thereon. A silver layer 5 is formed, and is further covered with an epoxy resin 8. An anode lead 6 is connected to the anode side of the capacitor element 1, and a cathode lead 7 is connected to the silver layer 5.

【0003】上記固体電解コンデンサの固体電解質に使
用する導電性高分子としては、ポリアセチレン、ポリピ
ロール、ポリアニリン、ポリチオフェン及びポリパラフ
ェニレン等が知られているが、そのうち、特にポリピロ
ール及びポリチオフェン、ポリアニリンは導電率が高
く、熱安定性にも優れているので、使用されることが多
い。
[0003] Polyacetylene, polypyrrole, polyaniline, polythiophene, polyparaphenylene, and the like are known as conductive polymers used for the solid electrolyte of the above-mentioned solid electrolytic capacitor. Among them, polypyrrole, polythiophene, and polyaniline are particularly conductive polymers. And it is often used because of its excellent thermal stability.

【0004】例えば、特開平4−48710号公報には
誘電体酸化皮膜上にまずポリピロールを化学重合により
導電性高分子層を形成した後、電解重合によりポリピロ
ールの導電性高分子層を新たに形成して2層からなる導
電性高分子層を固体電解質として用いる固体電解コンデ
ンサが開示されているが、化学重合によるポリピロール
層は均一な層の形成が困難でかつ焼結体凹部やエッチン
グピットのような微細部分には形成され難く、製品容量
の減少や、インピーダンスの上昇といった好ましくない
結果をもたらす。
For example, Japanese Patent Application Laid-Open No. 4-48710 discloses that a conductive polymer layer is first formed on a dielectric oxide film by chemical polymerization of polypyrrole, and then a conductive polymer layer of polypyrrole is newly formed by electrolytic polymerization. Although a solid electrolytic capacitor using a two-layer conductive polymer layer as a solid electrolyte is disclosed, it is difficult to form a uniform layer of a polypyrrole layer by chemical polymerization, and it is difficult to form a uniform layer such as a concave portion of a sintered body or an etching pit. It is hard to be formed in a very fine part, resulting in undesired results such as a reduction in product capacity and an increase in impedance.

【0005】また、誘電体皮膜表面にあらかじめ重合し
たポリアニリンの溶液を塗布し乾燥する方法によって、
ポリアニリンの薄膜を形成し、固体電解質とする固体電
解コンデンサが提案されている(特開平3−35516
号公報)。ところがこの方法では、ポリアニリン溶液の
粘度が高く、微細化された粉末粒子からなるタンタル焼
結体凹部やアルミ箔上の酸化皮膜凹部に浸透せず、その
結果容量が著しく小さなコンデンサしか製造できないと
いう欠点があった。
Further, a method of applying a solution of polyaniline which has been polymerized in advance on the surface of a dielectric film and drying it,
A solid electrolytic capacitor in which a polyaniline thin film is formed and used as a solid electrolyte has been proposed (JP-A-3-35516).
No.). However, this method has the disadvantage that the viscosity of the polyaniline solution is high and does not penetrate into the recesses of the tantalum sintered body composed of finely divided powder particles or the recesses of the oxide film on the aluminum foil. was there.

【0006】[0006]

【発明が解決しようとする課題】本発明は、微細化され
た粉末粒子からなるコンデンサ素子においても容量を大
きく維持することができ、かつ高周波領域でのインピー
ダンス特性に優れたコンデンサを得ることを課題として
いる。
SUMMARY OF THE INVENTION An object of the present invention is to provide a capacitor which can maintain a large capacitance even in a capacitor element made of fine powder particles and has excellent impedance characteristics in a high frequency range. And

【0007】更に、アルミニウム箔、あるいはタンタル
焼結体等のコンデンサ素子表面に導電性高分子層を形成
した場合、従来法では、樹脂外装時の応力でコンデンサ
の漏れ電流増加や、信頼性低下を生じるため、コンデン
サ素子表面に、均一な厚さの導電性高分子層を形成し、
機械的強度の向上を図ることをも目的としている。
Further, when a conductive polymer layer is formed on the surface of a capacitor element such as an aluminum foil or a tantalum sintered body, in the conventional method, an increase in leakage current of the capacitor and a decrease in reliability due to a stress at the time of resin sheathing. Because it occurs, a conductive polymer layer of uniform thickness is formed on the capacitor element surface,
It is also intended to improve mechanical strength.

【0008】[0008]

【課題を解決する為の手段】本発明は陽極となる弁作用
金属1bからなるコンデンサ素子1の表面に誘電体酸化
皮膜1aを形成し、該誘電体酸化皮膜1a表面に導電性
高分子層を形成してなる固体電解コンデンサにおいて、
該導電性高分子層がポリアニリンまたはその誘導体の溶
解液を加熱して形成する第1の導電性高分子層2と、ポ
リアニリンまたはその誘導体を電解重合して形成する第
2の導電性高分子層3からなることを特徴とする固体電
解コンデンサである。
According to the present invention, a dielectric oxide film 1a is formed on the surface of a capacitor element 1 made of a valve metal 1b serving as an anode, and a conductive polymer layer is formed on the surface of the dielectric oxide film 1a. In the formed solid electrolytic capacitor,
A first conductive polymer layer 2 formed by heating a solution of polyaniline or a derivative thereof, and a second conductive polymer layer formed by electrolytic polymerization of polyaniline or a derivative thereof 3 is a solid electrolytic capacitor.

【0009】また、上記固体電解コンデンサにおいて、
第1の導電性高分子層2は水を含有する溶媒にポリマー
状のアニリンを溶解させた溶液中で加熱して形成したこ
とを特徴とする固体電解コンデンサの製造方法である。
In the above solid electrolytic capacitor,
The first conductive polymer layer 2 is a method for manufacturing a solid electrolytic capacitor, wherein the first conductive polymer layer 2 is formed by heating in a solution in which a polymeric aniline is dissolved in a solvent containing water.

【0010】[0010]

【発明の実施の形態】本発明は、2層の導電性高分子化
合物を固体電解質として使用することにより上記の課題
を解決するもので、第1の導電性高分子を水を含有する
溶媒に溶解させて、水の浸透作用によりコンデンサ素子
の誘電体皮膜の細孔内部まで容易に浸透させ、導電率が
高いポリアニリンまたはその誘導体を水を含有する溶媒
にアニリンまたはその誘導体を溶解させた溶液を加熱し
て形成する。その上に第2の導電性高分子層として、機
械的に強度の高いポリアニリンまたはその誘導体層を電
解重合により形成するものである。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention solves the above-mentioned problems by using a two-layer conductive polymer compound as a solid electrolyte. The first conductive polymer is converted into a solvent containing water. Dissolve, easily penetrate into the pores of the dielectric film of the capacitor element by the permeation of water, and dissolve aniline or its derivative in a solvent containing water with high conductivity polyaniline or its derivative. It is formed by heating. A mechanically strong polyaniline or its derivative layer is formed thereon by electrolytic polymerization as a second conductive polymer layer.

【0011】本発明の固体電解コンデンサにおいて、弁
作用金属にはタンタル、アルミニウム、ニオブ、チタ
ン、ジルコニウム、マグネシウムなどが使用できる。ま
た、これら弁作用金属は、圧延箔及び微粉末焼結物など
の形態で用いることができる。この弁作用金属を電解溶
液中で陽極酸化し、誘電体酸化皮膜を形成するが、使用
する電解質及び溶媒は特に限定されず、公知のものが使
用できる。また、陽極酸化の方法として定電圧法、ある
いは定電流法を適用することができ、電圧、電流の上げ
方、定電圧となった後の保持時間、さらに温度等は限定
されず必要に応じて設定することができる。
In the solid electrolytic capacitor of the present invention, tantalum, aluminum, niobium, titanium, zirconium, magnesium and the like can be used as the valve metal. Further, these valve action metals can be used in the form of a rolled foil, a fine powder sintered material, or the like. The valve metal is anodized in an electrolytic solution to form a dielectric oxide film. The electrolyte and solvent used are not particularly limited, and known materials can be used. In addition, a constant voltage method or a constant current method can be applied as a method of anodic oxidation, and the voltage, the method of increasing the current, the holding time after the voltage becomes constant, the temperature, and the like are not limited, and if necessary Can be set.

【0012】更に、本発明の固体電解コンデンサにおい
て、コンデンサの容量値、インピーダンス値等の特性を
改善するために誘電体が設けられた弁作用金属を所定温
度と所定雰囲気において熱処理したり、また弁作用金属
に種々の表面処理を施すこともできる。
Further, in the solid electrolytic capacitor of the present invention, a valve metal provided with a dielectric for improving characteristics such as a capacitance value and an impedance value of the capacitor is heat-treated at a predetermined temperature and a predetermined atmosphere. Various surface treatments can also be applied to the working metal.

【0013】本発明の固体電解コンデンサの細孔内部に
第1の導電性高分子層を形成するポリアニリンまたはそ
の誘導体は、重合終了後または重合途中のポリマーを、
水を含有する溶媒に溶解させ、皮膜形成金属の多孔質体
に導入し、しかる後に加熱乾燥を行う方法により導電性
高分子形成後、水または酸化剤が易溶な溶媒により、コ
ンデンサ素子を洗浄し、導電性に寄与しない酸化剤を除
去する。
The polyaniline or the derivative thereof forming the first conductive polymer layer inside the pores of the solid electrolytic capacitor of the present invention is obtained by polymerizing the polymer after or during the polymerization.
After dissolving in a solvent containing water, introducing into a porous body of a film-forming metal, and then heating and drying to form a conductive polymer, the capacitor element is washed with a solvent in which water or an oxidizing agent is easily soluble. Then, an oxidizing agent that does not contribute to conductivity is removed.

【0014】コンデンサ素子表面に第2の導電性高分子
層を形成するポリアニリンまたはその誘導体は、電解重
合にて形成させる。
The polyaniline or its derivative forming the second conductive polymer layer on the surface of the capacitor element is formed by electrolytic polymerization.

【0015】電解質として導電性高分子を形成した後、
必要に応じて乾燥を行い、その上にグラファイト層、銀
塗料層を形成し公知の方法で引出し電極を設けてコンデ
ンサに組立てる。尚、本発明においてグラファイト層及
び銀塗料層は特に限定されず従来公知のものを使用する
ことが出来る。
After forming a conductive polymer as an electrolyte,
Drying is performed as necessary, and a graphite layer and a silver paint layer are formed thereon, and an extraction electrode is provided by a known method, and assembled into a capacitor. In the present invention, the graphite layer and the silver paint layer are not particularly limited, and conventionally known layers can be used.

【0016】[0016]

【実施例】図1は、本発明の一実施例の製造工程を説明
するフローチャートである。図2は本発明の固体電解コ
ンデンサの基本構造を示す断面図であり、陽極となる弁
作用金属1bがタンタル微粉末の焼結体で構成され、陽
極酸化により誘電体皮膜1aが形成されている。このタ
ンタルペレット1の細孔内部に固体電解質となる導電性
高分子の第1層2が形成され、この上に導電性高分子の
第2層3が形成され、更にその上にカーボン層4、銀層
5が順次形成される。そして陽極リード6がタンタルペ
レットに接続され、陰極リード7が銀層5に接続され、
これらを外装エポキシ樹脂8で被覆している。
FIG. 1 is a flow chart for explaining a manufacturing process according to an embodiment of the present invention. FIG. 2 is a cross-sectional view showing the basic structure of the solid electrolytic capacitor of the present invention, in which a valve action metal 1b serving as an anode is formed of a sintered body of fine tantalum powder, and a dielectric film 1a is formed by anodic oxidation. . A first layer 2 of a conductive polymer to be a solid electrolyte is formed inside the pores of the tantalum pellet 1, a second layer 3 of a conductive polymer is formed thereon, and a carbon layer 4 is further formed thereon. Silver layers 5 are sequentially formed. Then, the anode lead 6 is connected to the tantalum pellet, the cathode lead 7 is connected to the silver layer 5,
These are covered with an exterior epoxy resin 8.

【0017】〔実施例〕直径1.1mm、高さ1.2m
m、グラム当たりの粉末CV値(容量と化成電圧の積)
が30000μF・V/gの円柱状タンタル微粉末焼結
体素子を、0.05wt%リン酸水溶液中で20Vで陽
極酸化し、洗浄及び乾燥した後、水溶性ポリアニリン
(日東化学社製PAS)を浸漬の上、100℃で10分
間乾燥させる工程を6回繰り返してポリアニリンスルホ
ン酸を形成した。その後、形成したポリアニリンスルホ
ン酸層上に、アニリン0.1mol/l、硫酸0.1m
ol/lを含む水溶液で1mAの電流を5時間通電して
電解重合によるポリアニリン層を形成した。次に純水洗
浄、エタノール洗浄を行った後、100℃で5分間乾燥
した。生成した導電性ポリアニリン層の上にグラファイ
ト層、銀塗料層を順次形成した。得られたコンデンサ素
子に陽極リードを溶接する一方、陰極リードを導電性接
着剤で接合した後、トランスファーモールドで樹脂外装
して、コンデンサを完成し、電気特性を測定した。
[Example] Diameter 1.1 mm, height 1.2 m
m, powder CV value per gram (product of capacity and formation voltage)
Was anodized at 20 V in a 0.05 wt% aqueous solution of phosphoric acid, washed and dried, and then water-soluble polyaniline (PAS manufactured by Nitto Chemical Co., Ltd.) was used. The process of immersion and drying at 100 ° C. for 10 minutes was repeated six times to form polyanilinesulfonic acid. Thereafter, on the formed polyaniline sulfonic acid layer, aniline 0.1 mol / l, sulfuric acid 0.1 m
A current of 1 mA was passed for 5 hours with an aqueous solution containing ol / l to form a polyaniline layer by electrolytic polymerization. Next, after washing with pure water and ethanol, drying was performed at 100 ° C. for 5 minutes. A graphite layer and a silver paint layer were sequentially formed on the generated conductive polyaniline layer. While the anode lead was welded to the obtained capacitor element, the cathode lead was joined with a conductive adhesive, and then covered with a resin by transfer molding to complete the capacitor, and the electrical characteristics were measured.

【0018】(比較例)実施例1と同じ焼結体素子を実
施例1と同様の方法で陽極酸化した後、重合した可溶性
ポリアニリンとN−メチルピロリドンを重量比で5:9
5の割合で含有するポリアニリン溶液に浸漬後、100
℃で5分間乾燥して脱ドープ状態のポリアニリン層を形
成した。次に硫酸水溶液に含浸して、ポリアニリン層へ
のドーピングを行い酸洗浄およびエタノール洗浄を行っ
た後100℃で5分間乾燥し、ポリアニリンを導電性高
分子層として形成した。以下、実施例と同様にリードを
導出してコンデンサを完成した。
Comparative Example After the same sintered element as in Example 1 was anodized in the same manner as in Example 1, polymerized soluble polyaniline and N-methylpyrrolidone were added in a weight ratio of 5: 9.
After immersion in a polyaniline solution containing 5
Drying was performed at 5 ° C. for 5 minutes to form a polyaniline layer in a undoped state. Next, the resultant was impregnated with an aqueous sulfuric acid solution, and the polyaniline layer was doped, washed with acid and ethanol, and dried at 100 ° C. for 5 minutes to form polyaniline as a conductive polymer layer. Hereinafter, leads were led out in the same manner as in the example to complete the capacitor.

【0019】上記実施例および比較例におけるコンデン
サのはんだ耐熱性試験(260℃−10秒間浸漬)前後
の容量比(C/C。、電解質溶液中の容量をC。とす
る)、漏れ電流値(LC、6.3V印加1分後)および
100kHzでのインピーダンス(Z)を次の表1に示
す。
The capacitance ratio (C / C., The capacity in the electrolyte solution is C) before and after the solder heat resistance test (immersion at 260 ° C. for 10 seconds) of the capacitors in the above Examples and Comparative Examples, and the leakage current value ( LC, 1 minute after applying 6.3 V) and impedance (Z) at 100 kHz are shown in Table 1 below.

【0020】[0020]

【表1】 [Table 1]

【0021】表1に示す通り、本発明の実施例は何れも
容量比、インピーダンス特性に優れ、またはんだ耐熱性
試験後も、漏れ電流の増加が少ない良好な結果を示し
た。
As shown in Table 1, all of the examples of the present invention exhibited excellent capacity ratio and impedance characteristics, and showed good results with little increase in leakage current even after the heat resistance test.

【0022】[0022]

【発明の効果】以上説明したように、本発明による、第
1の導電性高分子化合物のポリマー状アニリン溶液を加
熱することにより形成するポリアニリンまたはその誘電
体と、第2の導電性高分子化合物の電解重合により形成
するポリアニリンまたはその誘導体とを組合わせた2層
構造の固体電解質を有する固体電解コンデンサは、容量
を大きく維持することができ、インピーダンス特性に優
れ、信頼性が良好な固体電解コンデンサを提供すること
ができる。
As described above, according to the present invention, polyaniline or a dielectric thereof formed by heating a polymer aniline solution of a first conductive polymer compound, and a second conductive polymer compound. A solid electrolytic capacitor having a two-layered solid electrolyte in combination with polyaniline or a derivative thereof formed by electrolytic polymerization of a solid electrolytic capacitor can maintain a large capacity, has excellent impedance characteristics, and has excellent reliability. Can be provided.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の固体電解コンデンサの製造方法を示す
フローチャートである。
FIG. 1 is a flowchart showing a method for manufacturing a solid electrolytic capacitor of the present invention.

【図2】本発明の固体電解コンデンサの基本構造を示す
断面図である。
FIG. 2 is a sectional view showing a basic structure of the solid electrolytic capacitor of the present invention.

【図3】従来の固体電解コンデンサの断面図である。FIG. 3 is a sectional view of a conventional solid electrolytic capacitor.

【符号の説明】[Explanation of symbols]

1 コンデンサ素子 1a 誘電体酸化皮膜 1b 弁作用金属 2 導電性高分子(第1層) 3 導電性高分子(第2層) 4 カーボン層 5 銀層 6 陽極リード 7 陰極リード 8 エポキシ樹脂 REFERENCE SIGNS LIST 1 capacitor element 1 a dielectric oxide film 1 b valve metal 2 conductive polymer (first layer) 3 conductive polymer (second layer) 4 carbon layer 5 silver layer 6 anode lead 7 cathode lead 8 epoxy resin

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 陽極となる弁作用金属(1b)からなる
コンデンサ素子(1)の表面に誘電体酸化皮膜(1a)
を形成し、該誘電体酸化皮膜(1a)表面に導電性高分
子層を形成してなる固体電解コンデンサにおいて、 該導電性高分子層がポリアニリンまたはその誘導体をポ
リマー状のアニリンまたはその誘導体の溶液を加熱する
ことにより形成する第1の導電性高分子層(2)と、ポ
リアニリンまたはその誘導体を電解重合して形成する第
2の導電性高分子層(3)からなることを特徴とする固
体電解コンデンサ。
1. A dielectric oxide film (1a) on a surface of a capacitor element (1) made of a valve metal (1b) serving as an anode.
And a conductive polymer layer formed on the surface of the dielectric oxide film (1a), wherein the conductive polymer layer is a solution of polyaniline or a derivative thereof in the form of a solution of polymer aniline or a derivative thereof. Characterized by comprising a first conductive polymer layer (2) formed by heating a polymer and a second conductive polymer layer (3) formed by electrolytic polymerization of polyaniline or a derivative thereof. Electrolytic capacitor.
【請求項2】 上記請求項1に記載の固体電解コンデン
サにおいて、 第1の導電性高分子層(2)は、水を含有する溶媒にポ
リマー状のアニリンまたはその誘導体を溶解させた溶液
中で加熱して形成したことを特徴とする固体電解コンデ
ンサの製造方法。
2. The solid electrolytic capacitor according to claim 1, wherein the first conductive polymer layer (2) is formed by dissolving a polymer aniline or a derivative thereof in a solvent containing water. A method for manufacturing a solid electrolytic capacitor, characterized by being formed by heating.
JP13242897A 1997-05-22 1997-05-22 Solid electrolytic capacitor and its manufacture Pending JPH10321473A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13242897A JPH10321473A (en) 1997-05-22 1997-05-22 Solid electrolytic capacitor and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13242897A JPH10321473A (en) 1997-05-22 1997-05-22 Solid electrolytic capacitor and its manufacture

Publications (1)

Publication Number Publication Date
JPH10321473A true JPH10321473A (en) 1998-12-04

Family

ID=15081155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13242897A Pending JPH10321473A (en) 1997-05-22 1997-05-22 Solid electrolytic capacitor and its manufacture

Country Status (1)

Country Link
JP (1) JPH10321473A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12462986B2 (en) 2021-04-15 2025-11-04 Panasonic Intellectual Property Management Co., Ltd. Electrolytic capacitor and method for producing same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12462986B2 (en) 2021-04-15 2025-11-04 Panasonic Intellectual Property Management Co., Ltd. Electrolytic capacitor and method for producing same

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