JPH10321498A5 - - Google Patents
Info
- Publication number
- JPH10321498A5 JPH10321498A5 JP1997125204A JP12520497A JPH10321498A5 JP H10321498 A5 JPH10321498 A5 JP H10321498A5 JP 1997125204 A JP1997125204 A JP 1997125204A JP 12520497 A JP12520497 A JP 12520497A JP H10321498 A5 JPH10321498 A5 JP H10321498A5
- Authority
- JP
- Japan
- Prior art keywords
- projection
- optical system
- exposure apparatus
- magnification
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9125204A JPH10321498A (ja) | 1997-05-15 | 1997-05-15 | 投影露光装置及び該装置を使用した露光方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9125204A JPH10321498A (ja) | 1997-05-15 | 1997-05-15 | 投影露光装置及び該装置を使用した露光方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10321498A JPH10321498A (ja) | 1998-12-04 |
| JPH10321498A5 true JPH10321498A5 (2) | 2005-08-04 |
Family
ID=14904487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9125204A Abandoned JPH10321498A (ja) | 1997-05-15 | 1997-05-15 | 投影露光装置及び該装置を使用した露光方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10321498A (2) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005243725A (ja) * | 2004-02-24 | 2005-09-08 | Tadahiro Omi | スキャン型露光装置 |
| WO2007026390A1 (ja) * | 2005-08-30 | 2007-03-08 | Tadahiro Ohmi | スキャン型露光装置 |
| JP2010109220A (ja) * | 2008-10-31 | 2010-05-13 | Nikon Corp | マスクレス露光装置およびマスクレス露光方法 |
| US10139735B2 (en) | 2014-06-23 | 2018-11-27 | Asml Netherlands B.V. | Lithographic apparatus and method |
-
1997
- 1997-05-15 JP JP9125204A patent/JPH10321498A/ja not_active Abandoned
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