JPH1032456A - Oscillator - Google Patents

Abstract

(57) [Problem] To provide a vibrator having a configuration that is easy to handle in manufacturing even when a vibrating part is thinned with the increase in frequency. A vibrating plate provided with a vibrating part in an opening of a reinforcing plate is covered with first and second covers.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrator such as a crystal used for various electronic devices and communication devices.

[0002]

2. Description of the Related Art Conventionally, as a vibrator such as a crystal, a vibrator described in Japanese Patent Application Laid-Open No. Hei 7-226649 is known. The vibrator is shown in FIG.
First and second covers 26, 2 which cover the front and rear surfaces of the diaphragm 25 and sandwich the diaphragm 25 at the outer periphery thereof.
The vibration plate 25 has a tongue-shaped vibrating portion 28 inside a portion sandwiched by the first and second covers 26 and 27, and an excitation is provided on the front and back surfaces of the vibrating portion 28. Electrode 29,
30 and the excitation electrodes 29 and 3 on the front and rear surfaces thereof are formed.
0, the lead electrodes 32, 33 are respectively pulled out through the base portion 31 of the vibrating portion 28, and one of the lead electrodes 32, 33 on the front and back sides is passed through the one lead electrode 33 side. , Extending to the free end side of the vibrating portion 28 through the side of the excitation electrode 30, and penetrating the second cover 27 at the free end side, and the first and second ends respectively.
Was electrically connected to the external electrodes.

[0003]

In the above conventional example, if the diaphragm 25 is made thinner in accordance with the increase in the frequency, there is a problem that the handling in manufacturing becomes difficult, and the productivity is not improved.

An object of the present invention is to eliminate the above-mentioned conventional disadvantages and to provide a vibrator which can be easily handled in manufacturing even if the vibrating plate is made thin.

[0005]

In order to solve the above-mentioned problems, a vibrator according to the present invention comprises a vibrating plate having a vibrating portion in an opening of a reinforcing plate; A first and a second cover which sandwich the outer periphery of the vibrating portion of the vibrating plate. A lead electrode is drawn out from each of these excitation electrodes, and the front and rear lead electrodes are electrically connected to external electrodes provided on the outer surface thereof through through holes provided in the second cover. is there.

According to this configuration, even if the thickness of the vibrating portion is reduced with the increase in frequency, the thickness of the diaphragm becomes sufficiently large if the thickness of the reinforcing plate is increased. Is easy to handle and has high productivity.

[0007]

DETAILED DESCRIPTION OF THE INVENTION The invention according to a first aspect of the present invention is directed to a diaphragm having a vibrating portion in an opening of a reinforcing plate, and covering the front and back surfaces of the diaphragm and having the outer peripheral portion at the outer periphery thereof. First and second covers sandwiching the outer periphery of the vibrating portion. The vibrating plate has excitation electrodes formed on the front and rear surfaces, respectively, inside the opening of the reinforcing plate and inside the portion sandwiched by the second cover. The lead electrodes are pulled out from the respective electrodes, and the front and rear lead electrodes are electrically connected to external electrodes provided on the outer surface thereof through through holes provided in the second cover. Has the effect of easy handling.

According to a second aspect of the present invention, the vibration plate is formed by laminating a base plate having a vibrating portion and a reinforcing plate provided with an opening at a position in contact with the vibrating portion of the base plate. It has an effect that a concave diaphragm can be manufactured.

According to a third aspect of the present invention, the base plate and the reinforcing plate are made of quartz, and have an effect of being strong against thermal stress because the linear expansion coefficients between the members are the same.

According to a fourth aspect of the present invention, there is provided the vibration plate, the first,
The second cover is composed of a quartz AT plate, and the vibration mode is A
It utilizes the fundamental wave of the T-plate, and has the effect of producing a vibrator that is strong against thermal stress and has good temperature characteristics because the coefficients of linear expansion between members are the same.

According to a fifth aspect of the present invention, two grooves parallel to the vibrating portion of the base plate are provided to make the vibrating portion independent. Since the vibrating portion is independent, it is strong against external force. It has the action of:

According to a sixth aspect of the present invention, there is provided an oscillation preventing means using front and rear lead electrodes, thereby reducing an electric field generated between the front and rear lead electrodes and suppressing oscillation of the lead electrode portion. It has the action of:

According to a seventh aspect of the present invention, the lead electrodes on the front and rear sides are pulled out in directions away from each other.
This has the effect of reducing the electric field generated between the back lead electrodes and suppressing oscillation of the lead electrode section.

The invention described in claim 8 is one in which a land for frequency measurement is provided on the lead electrode, and has the effect that frequency measurement can be performed without damaging the lead electrode with the diaphragm alone.

According to a ninth aspect of the present invention, the connecting portion of the lead electrode is extended beyond the position of the through hole provided in the second cover. This has the effect that the frequency can be measured without damaging it.

According to a tenth aspect of the present invention, there is provided means for preventing the deflection of the diaphragm due to the pressing force of the measuring pin when measuring the frequency of the diaphragm alone. It has the effect that measurement can be performed without performing.

According to an eleventh aspect of the present invention, the position of the lead electrode of the reinforcing plate corresponding to the land for frequency measurement is in contact with the base plate, and the diaphragm does not bend during frequency measurement. In addition, there is an effect that the measurement can be performed without breaking.

According to the twelfth aspect of the present invention, no capacitance is generated between the lead electrode of the front excitation electrode and the external electrode of the rear excitation electrode and between the lead electrode of the rear excitation electrode and the external electrode of the front excitation electrode. Such a means is provided, and has an effect of high reliability.

According to a thirteenth aspect of the present invention, the lead electrode of the excitation electrode on the front surface and the external electrode thereof, and the lead electrode of the excitation electrode on the rear surface and the external electrode are opposed to each other. Since no capacity is generated, the effect is that the reliability is high.

FIG. 1 shows an embodiment of the present invention.
This will be described with reference to FIG. (Embodiment 1) In FIG.
And a base plate 1b made of 20 μm quartz and having a vibrating portion. The outer surfaces of the reinforcing plate 1a and the base plate 1b have a thickness of 300 μm.
The first and second covers 2 and 3 made of m crystal plates are directly joined. Incidentally, reference numerals 4 and 5 in FIG. 1 denote external electrodes provided on the second cover 3.

The diaphragm 1, the first and second covers 2 and 3 are all made of a quartz AT plate, and the vibration mode uses the fundamental wave of the AT plate, and the coefficient of linear expansion between members is small. Since they are the same, a vibrator that is strong against thermal stress and has good temperature characteristics is formed.

As shown in FIGS. 2 to 6, the diaphragm 1 has a vibrating portion 7 in a portion located in a region within the opening 6 of the reinforcing plate 1a. Electrodes 8 and 9 are formed, and lead electrodes 10 and 11 are drawn out of these excitation electrodes 8 and 9 in directions away from them. As shown in FIGS. 2 to 6, the end of the lead electrode 10
b through the through hole 12, and then the connecting portion 1
3 is formed. Further, the lead electrode 11 forms a connection portion 14.

Then, they are connected to the external electrodes 4 and 5 via conductors 17 in through holes 15 and 16 formed in the second cover 3 corresponding to the connection portions 13 and 14, respectively. The opening 6 of the reinforcing plate 1a is formed large so as to be located outside the vibrating portion 7 and the lead electrode 10.
The first and second covers 2 and 3 sandwich the outer peripheral portion of the base plate 1b and the reinforcing plate 1a at their outer peripheral portions and are directly joined. As shown in FIG. 4, the second cover 3 is formed with a concave portion corresponding to the inside of the frame 18 to form the vibrating portion 7, the excitation electrode 9, and the connecting portions 13 and 14 of the diaphragm 1. ing.

It should be noted that the reinforcing plate 1a and the base plate 1b may be formed by processing from an integral quartz plate. This requires time for processing and there is difficulty in achieving processing accuracy,
The object of the present invention can be achieved.

Further, the connecting portion 1 of the lead electrodes 10 and 11
3 and 14 are formed so as to extend outward from the through holes 15 and 16 of the second cover 3, and frequency measurement is performed on the extended portions so that the lead electrodes 10 and 11 are not damaged.

The lead electrode 10 and the connecting portion 13 and the external electrode 5 are formed so that the lead electrode 11 and the connecting portion 14 and the external electrode 4 do not overlap each other in the vertical direction.
The positions where they are formed are determined so that no capacitance is generated between them. That is, the lead electrode 10 and the connection portion 13 are provided at a position facing the external electrode 4 to be electrically connected, and the lead electrode 11 and the connection portion 14 are provided at a position facing the external electrode 5 to be electrically connected. , So as to prevent generation of capacitance.

This is configured as means for preventing the frequency from fluctuating due to the generation of capacitance.

(Embodiment 2) Since Embodiment 2 of the present invention shown in FIGS. 7 to 9 is basically the same as Embodiment 1, the same components are denoted by the same reference numerals. Detailed description is omitted.

In FIG. 7, the diaphragm 1 is constructed by directly joining a reinforcing plate 1a made of a 150 μm quartz plate and a base plate 1b made of a 20 μm quartz plate and having a vibrating portion 7.
First and second covers 2 and 3 made of a quartz plate having a thickness of 300 μm are directly joined to the outer surfaces of the reinforcing plate 1a and the base plate 1b. Note that reference numerals 4 and 5 in FIG. 7 denote external electrodes provided on the second cover 3.

As shown in FIGS. 8 and 9, the diaphragm 1 has two parallel grooves 19 formed in a portion of the reinforcing plate 1a located in the area inside the opening 6, thereby forming the vibrating section 7. Have been. Since the vibrating part 7 is made independent by forming the groove 19,
Even if an external force is applied to the first and second covers 2 and 3, the external force is not easily transmitted to the vibrating portion 7, and thus a highly reliable vibrator can be formed. On the front and back surfaces of the vibrating part 7, the excitation electrodes 8,
9 are formed, and the lead electrodes 10 and 11 are pulled out from these excitation electrodes 8 and 9 in the direction away from each other.

(Embodiment 3) Embodiment 3 of the present invention shown in FIGS. 10 to 15 is basically the same as Embodiment 1, and the same components are denoted by the same reference numerals. Detailed description is omitted.

In FIG. 10, the diaphragm 1 is constituted by directly joining a reinforcing plate 1a made of a 150 μm quartz plate and a base plate 1b made of 20 μm quartz and having a vibrating portion.
First and second covers 2 and 3 made of a quartz plate having a thickness of 300 μm are directly joined to the outer surfaces of the reinforcing plate 1a and the base plate 1b. Incidentally, reference numerals 4 and 5 in FIG.
The external electrodes provided in FIG.

As shown in FIGS. 11 and 12, the diaphragm 1 has a U-shaped groove 20 formed in a portion of the reinforcing plate 1a located in the area inside the opening 6, thereby forming a tongue-shaped vibrating portion. 7 are formed. Thus, the U-shaped groove 20 is formed,
Since the vibrating section 7 is independent, the first and second covers 2 and 3
The external force is hardly transmitted to the vibrating part 7 even if external force is applied to the
Therefore, a highly reliable oscillator can be formed.

Excitation electrodes 8 and 9 are provided on the front and back surfaces of the vibrating section 7.
Are formed, and the lead electrodes 21 and 22 are respectively drawn out in a semicircular shape from the excitation electrodes 8 and 9 in a direction away from each other so that an electric field is generated between the lead electrodes 21 and 22 so as not to oscillate. . As shown in FIGS. 11 and 12, the end of the inner lead electrode 21 penetrates the base plate 1b through the through hole 12, then forms the connection portion 13, and further forms the land 23. The lead electrode 22 forms the connection portion 14 and further forms the land 24.

As shown in FIG. 13, the portion of the reinforcing plate 1a facing the land 23 is joined on the surface opposite to the land of the base plate 1b. Similarly, the portion of the reinforcing plate 1a facing the land 24 is The lands of the base plate 1b are joined on the opposite surface, and if the pins for frequency measurement are brought into contact with the lands 23 and 24, the lead electrodes 21 and 22 are not damaged.
Further, the frequency can be easily measured without the vibration part 7 being bent and broken.

[0036]

As described above, the present invention provides a diaphragm having a vibrating portion in a region inside an opening of a reinforcing plate, a table of the diaphragm,
A first cover and a second cover that cover the back surface and sandwich the outer periphery of the vibrating portion of the vibrating plate at the outer peripheral portion thereof are provided inside the reinforcing plate and inside the holding portion of the second cover, respectively. Excitation electrodes are formed on the front and back surfaces, lead electrodes are respectively drawn out of these excitation electrodes, and external electrodes are provided on the outer surface of the front and back lead electrodes via through holes provided in the second cover. Is electrically connected to the

With the above configuration, even if the vibrating portion becomes thinner as the frequency becomes higher, a vibrator which is easy to handle in manufacturing and has high productivity can be formed.

[Brief description of the drawings]

FIG. 1 is a perspective view of a vibrator according to an embodiment of the present invention.

FIG. 2 is an exploded perspective view thereof.

FIG. 3 is an exploded perspective view thereof.

FIG. 4 is a top view of the diaphragm.

FIG. 5 is a diagram A- of a vibrator in which a cover is joined to the diaphragm of FIG. 4;
A sectional view

FIG. 6 is a cross-sectional view of a vibrator in which a cover is joined to the vibrating plate of FIG.
B sectional view

FIG. 7 is a perspective view of a vibrator according to another embodiment of the present invention.

FIG. 8 is an exploded perspective view thereof.

FIG. 9 is an exploded perspective view thereof.

FIG. 10 is a perspective view of a vibrator according to another embodiment of the present invention.

FIG. 11 is an exploded perspective view thereof.

FIG. 12 is an exploded perspective view thereof.

FIG. 13 is a top view of the diaphragm.

FIG. 14 is a diagram showing a C of a vibrator in which a cover is joined to the vibrating plate of FIG.
-C sectional view

FIG. 15 is a diagram illustrating a D of a vibrator in which a cover is joined to the diaphragm of FIG. 4;
-D sectional view

FIG. 16 is an exploded perspective view of a conventional vibrator.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vibration plate 1a Reinforcement plate 1b Raw plate 2 Cover 3 Cover 4 External electrode 5 External electrode 6 Opening of reinforcement plate 7 Vibration part 8 Exciting electrode 9 Exciting electrode 10 Lead electrode 11 Lead electrode 12 Through hole 13 Connection part 14 Connection Part 15 through hole 16 through hole 17 conductor 19 groove 20 groove 21 lead electrode 22 lead electrode 23 land 24 land

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Yuji Yagi 1006 Kazuma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.

Claims (13)

[Claims] 1. A diaphragm having a vibrating portion in an opening of a reinforcing plate, and first and second diaphragms which cover front and back surfaces of the vibrating plate and sandwich the outer periphery of the vibrating portion of the vibrating plate at the outer peripheral portion. The diaphragm is provided in the opening of the reinforcing plate and in the second
Excitation electrodes are formed on the front and back surfaces, respectively, inside the sandwiched portion by the cover, and lead electrodes are respectively drawn from these excitation electrodes, and these front and back lead electrodes are inserted through through holes provided in the second cover. A vibrator electrically connected to external electrodes provided on the outer surface. 2. The vibrating plate according to claim 1, wherein the vibrating plate is formed by laminating a base plate having a vibrating portion and a reinforcing plate having an opening at a position in contact with the vibrating portion of the base plate. Child. 3. The vibrator according to claim 1, wherein the base plate and the reinforcing plate are made of quartz. 4. A vibrating plate and first and second covers are made of quartz
2. The vibrator according to claim 1, wherein the vibrator is constituted by a T plate, and a fundamental wave of the AT plate is used as a vibration mode. 5. The vibrator according to claim 1, wherein two vibrating portions are provided parallel to the vibrating portion of the base plate to make the vibrating portions independent. 6. The vibrator according to claim 1, wherein the vibrator is configured to prevent oscillation caused by the front and rear lead electrodes. 7. The vibrator according to claim 6, wherein the lead electrodes on the front and back sides are drawn out in directions away from each other. 8. The vibrator according to claim 1, wherein a land for frequency measurement is provided on the lead electrode. 9. The vibrator according to claim 1, wherein the connecting portion of the lead electrode is formed to extend beyond the position of the through hole provided in the second cover. 10. The vibrator according to claim 1, wherein the vibrating plate is configured to prevent bending and destruction of the vibrating plate due to a pressing force of a measuring pin when measuring the frequency of the vibrating plate alone. 11. The vibrator according to claim 10, wherein the position corresponding to the land for frequency measurement of the lead electrode of the reinforcing plate is a position where the reinforcing plate and the base plate are in contact with each other. 12. The method according to claim 1, wherein no capacitance is generated between the lead electrode of the front excitation electrode and the external electrode of the rear excitation electrode and between the lead electrode of the rear excitation electrode and the external electrode of the front excitation electrode. The described oscillator. 13. The vibrator according to claim 12, wherein the lead electrode of the excitation electrode on the front surface and the external electrode thereof, and the lead electrode of the excitation electrode on the rear surface and the external electrode face each other.