JPH10325762A - Micro force evaluation device - Google Patents

Abstract

(57) [Problem] To provide an apparatus for accurately measuring a small force, particularly a force of 0.1 mgw (≒ 1 μN) or less. A micro force evaluation device includes a sample holder that supports a sample, a detection unit that detects a force acting on the sample, a stage device that supports the detection unit, a monitor device that monitors a position of the sample, and a sample device. And an evaluation processor for evaluating the relationship between the position of the sample and the force acting on the sample. The evaluation processing device inputs the output of the detection unit and the output of the monitor device and supplies a control signal to the stage device. As a result, the position of the detecting unit changes.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an evaluation device for measuring and evaluating a force acting on an object, and more particularly to a micro force evaluation device for precisely measuring and evaluating a micro force of 1 μN or less.

[0002]

2. Description of the Related Art In recent years, micromachining technology has been used in a wide range of fields such as semiconductor manufacturing technology and medical treatment. In micromachining technology, a minute driving force is used by an actuator or the like.

Therefore, with the development of the micromachining technology, there is an increasing need to accurately measure a minute force, particularly a force of 0.1 mgw (≒ 1 μN) or less.

[0004]

Heretofore, load cells have been widely known as devices for measuring force or stress. Load cells are configured to measure stress or force by detecting distortion of an elastic body, and it has been difficult to accurately measure minute force.

The resolution of the load cell is the highest, for example, about 0.1 mgw (≒ 1 μN). Therefore 0.1m
It is difficult to accurately measure a force of gw (≒ 1 μN) or less. In micromachine actuators,
Electrostatic force or electromagnetic force may be used as the driving force. Heretofore, there has been no appropriate method for accurately measuring such non-contact minute force.

In view of the above, an object of the present invention is to provide an apparatus for accurately measuring a small force, particularly a force of 0.1 mgw (ｍｇ1 μN) or less.

SUMMARY OF THE INVENTION In view of the foregoing, an object of the present invention is to provide an apparatus for precisely measuring a noncontact small force such as an electrostatic force or an electromagnetic force.

[0008]

According to the present invention, there is provided a micro force evaluation apparatus, comprising: a detecting section; and a stage for supporting the detecting section so as to be capable of linear displacement in three orthogonal directions and rotational displacement about three orthogonal axes. A monitoring device for monitoring the position of the sample, and an output from the monitoring device and an output from the detection unit, and the relationship between the position of the sample and the force acting on the sample is detected. An evaluation processing device that outputs a control signal for adjusting the position.

The detecting section includes a sample holder for supporting the sample, a pendulum that can be displaced by a force acting on the sample, a displacement detecting device for detecting the displacement of the pendulum, a torquer for generating a force for displacing the pendulum, A feedback circuit for supplying a command signal to the Toruca so that the displacement of the pendulum becomes zero based on a signal from the detection device, and configured to measure a force acting on the sample by the command signal to the Toruca. ing.

The sample holder has a first sample stage for supporting a first sample and a second sample stage for supporting a second sample, and the pendulum has an electrostatic or electromagnetic force acting between the two samples. Can be measured.

The first sample stage is mounted on a pendulum, and the second sample stage is supported on an arm mounted on a base plate.

The detection unit can use the principle and main parts of a conventional servo-type accelerometer. For example, the pendulum may be cantilevered to the frame via a flex joint. The torquer may be configured to include a torquer coil mounted on a pendulum and a permanent magnet and a pole piece mounted on a frame. The displacement detection device may be configured to include a light emitting element provided on one side of the pendulum and a light receiving element provided on the other side.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first example of a micro force evaluation apparatus according to the present invention will be described with reference to FIG. According to the present example, the micro-force evaluation device includes a detection unit 100, a mounting tool 104 mounted below the detection unit 100, a stage 105 supporting the detection unit 100 via the mounting tool 104, and the evaluation processing device 30.
0 and a monitor device 302. A base plate 106 is mounted below the stage 105.
Is installed on the ground via the vibration isolator 107.

As shown, an X-axis and a Y-axis (the Y-axis is perpendicular to the plane of the paper) are taken along a horizontal plane, and the Z-axis is taken vertically above.
The stage 105 has a mechanism for generating a linear displacement along the X, Y, and Z axis directions and a rotational displacement around the X, Y, and Z axes. Therefore, the detection unit 1 mounted on the stage 105
00 is a linear displacement along X, Y, and Z axis directions and X, Y,
Rotational displacement about the Z axis is possible.

An L-shaped arm 90 is provided above the detecting section 100.
, And a counterweight 91 is attached to the tip of the L-shaped arm 90.

A first sample stage 101 for supporting a first sample 201 and a second sample stage 102 for supporting a second sample 202 are arranged above the detecting section 100. Sample stage 101,
Reference numeral 102 is made of an insulating material. Two samples 2
01 and 202 are spaced apart from each other in this example. Second
Sample stage 102 is supported by an L-shaped arm 102A, and this arm 102A
6 is attached.

The monitor device 302 has two samples 20.
1, 202 may be configured to monitor the position and may include a suitable video camera, an imaging device such as an IR scope, and a display device. The evaluation processing device 300 receives the monitor signal M supplied from the monitor device 302 and the small force signal MF supplied from the detection unit 100, outputs a small data signal DG to the outside, and outputs the stage control signal S
C is output to the stage 105. The feedback system including the evaluation processing device 300 will be described later with reference to FIG.

A description will be given with reference to FIG. In this example, an electrostatic force or an electromagnetic force acting between the two samples 201 and 202 is measured. First, a case where the electrostatic force is measured will be described with reference to FIG. 2A. The first sample 201 is made of a conductive material such as a metal, and the second sample 202 is made up of a substrate made of a non-conductive material such as glass and an electrode 202A mounted on the substrate. The electrode 202A has an appropriate shape and may be formed by a metal thin film.

First sample 201 and second sample 2
The capacitor 202 is formed by the electrode 202A of No. 02. When a voltage V is applied to the capacitor, an electrostatic attractive force acts between the first sample 201 and the electrode 202A. This electrostatic attraction force F _Z is expressed as follows.

[0020]

## EQU1 ## F _Z = CV ² / 2δ = εSV ² / 2δ ²

Where C is the capacitance of the capacitor, V is the voltage applied to the capacitor, δ is the gap between the capacitors,
S is the area of the capacitor, and ε is the dielectric constant.

Next, the case of measuring the electromagnetic force will be described with reference to FIG. 2B. The first sample 201 is made of a conductive material such as a metal, and the second sample 202 is made of a substrate made of a non-conductive material such as glass and a coil 2 mounted on the substrate.
02A.

When an alternating current I ₁ is applied to the coil 202 A mounted on the second sample 202, a periodically changing magnetic field is formed, and an eddy current I ₂ is generated in the first sample 201. The magnetic field generated by the eddy current I ₂ has a phase opposite to that of the magnetic field generated by the coil 202A, so that the two magnetic fields repel each other. The electromagnetic repulsion _FZ is expressed as follows per unit length of the coil.

[0024]

F _z = (2I ₁ I ₂ / δ) × 10 ^-7 [N / m]

Here, δ is the distance between the coil 202A and the eddy current generated in the first sample 201.

Referring to FIG. 3, evaluation processing apparatus 30 of the present invention
An example of the configuration and operation of 0 will be described. The evaluation processing device 300 of this example includes a relative position recognition unit 300-1, a stage control unit 300-2, and a data storage unit 300-3.
The relative position recognition unit 300-1 receives the monitor signal M output from the monitor device and receives two samples 201 and 202.
To detect the relative positional relationship between. Two samples 20
The detection of the relative positional relationship between 1, 202 may be made using image processing techniques that process video signals to recognize images.

The signal indicating the relative positional relationship output from the relative position recognition unit 300-1 is supplied to the stage control unit 300-2. Stage control unit 3
00-2 is a position setting signal and a relative position recognition unit 300-1.
And outputs the relative position relationship instruction signal output from the controller and generates a stage control signal SC. The position setting signal has a set value of the relative positional relationship between the two samples 201 and 202, and is stored or held in the evaluation processing device 300 in advance.

Therefore, the stage control signal SC
Indicates a deviation between the set value of the relative positional relationship between the two samples 201 and 202 and the current value. The stage control signal SC is supplied to the stage 105. The stage 105 adjusts the position of the detection unit 100 based on the stage control signal SC. As described above, the stage 105 linearly displaces the detection unit 100 in the three orthogonal axes and rotationally displaces the detection unit 100 about the three orthogonal axes.

The monitoring device 302, the evaluation processing device 300, and the detection unit 100 constitute a feedback loop, and the feedback loop is composed of two samples 20.
1, 202 are set at predetermined positions and operate so that the stage control signal SC becomes zero.

The data storage section 300-3 receives the position setting signal and the small force signal MF output from the detection section 100 and stores them. The values of the small force signal MF with respect to various values of the position setting signal are formed as a data group DG and output.

According to this embodiment, various data can be obtained by the evaluation processing device 300. For example, two samples 2
01 and 202 while adjusting the relative position between them.
By recording the small force signal MF output from 00, the force acting between the two samples 201, 202 can be measured as a function of the relative position between the two samples 201, 202.

For example, the relationship between the distance and the force between the two samples 201 and 202 and the relationship between the parallelism and the force between the two samples 201 and 202 are obtained. Further, it is possible to measure the force acting between the two samples 201 and 202 when the relative position between the two samples 201 and 202 is in an optimum state.

The details of the detection section 100 will be described with reference to FIGS. The detection unit 100 of this example uses a part of the principle and mechanism of a servo accelerometer. An example of a servo-type accelerometer used in the detection unit 100 of the present example is disclosed in Japanese Patent Application No. 6-326914 filed on Dec. 28, 1994 by the same applicant as the present applicant. Something was done. See the same application for details.

The detecting section 100 includes a frame 10 and a flexible joint 2 mounted on the mounting section 10a of the frame 10.
0 and a rod-shaped pendulum 30 attached to the other end of the flexible joint 20. The flexible joint 20 is attached by a screw 19 via a holding plate 18. Frame 10
A disc-shaped permanent magnet 36 and a column-shaped pole piece 38 are mounted in the concave portion 10e.

A cylindrical torcab bobbin 32 having one end opened is mounted on the pendulum 30.
A Toruca coil 34 is mounted on the outer cylindrical surface.
The cylindrical portion of the torcab bobbin 32 is separated from the permanent magnet 36 and the pole piece 38.

The frame 10 is made of soft magnetic iron and functions as a yoke (return path) to form a magnetic circuit from the pole piece 38 to the frame 10 through the permanent magnet 36. These cooperate with the torquer coil 34 to reduce torque. provide.

An L-shaped arm 90 and a first stage 101 are mounted on the other end of the torcab bobbin 32. L
A counterweight 91 is attached to the tip of the arm 90 having a U-shape. On the first stage 101, a first sample 201 is mounted. In addition, a projection 32A for attaching the L-shaped arm 90 may be provided on the circular end surface of the torcab bobbin 32.

At the tip end of the pendulum 30, there is disposed a displacement detecting device including a light emitting element 40A and a light receiving element 40B which are spaced apart therefrom. Although not shown, a pair of stoppers may be disposed at the distal end of the pendulum 30 and spaced apart therefrom.
The amplitude of 0 is limited.

A reference surface 10c is provided on a flange portion 10b of the frame 10, and a hole 10 as shown in FIG.
d is formed. By attaching such a reference surface 10c to the corresponding reference surface of the fixture 104 (FIG. 1) and inserting an appropriate fastener, for example, a screw into the hole 10d, the detection unit 100 is fixed to the fixture 104.

The pendulum 30 and the flexible joint 20 are cantilevered at the mounting portion 10a of the frame 10.
A suitable flexure 20a is formed in the flexure joint 20 so that the pendulum 30 can be rotated about the axis of rotation O through the flexure 20a.
Can swing around -O. When the pendulum 30 swings, the parts 32, 34, 90, 91,
101 and 201 also swing. Flexure portion 2 of flexure joint 20
5a, for example, as shown in FIG. 5, a rectangular hole 20e may be formed in the flexible joint 20 and thin portions may be formed in the two columns on both sides thereof.

The operation of the detector 100 will be described with reference to FIG. FIG. 6 shows a main part of the detection unit 100, that is, the bending joint 20 and a rod-shaped pendulum 30 mounted on the bending joint 20.
And a torcab bobbin 32 attached to the pendulum 30, and displacement detection devices 40A and 40 disposed at the tip of the pendulum 30.
B, 40B. Here, as shown in FIG.
The direction along the center axis of 0 is the X axis, and the Z axis is perpendicular to the X axis and along the center axis of the torque bobbin 32.

The central axis of the detector 100, i.e., the force F _Z to be measured is applied along the Z-axis, the pendulum 30 is rotated in the rotational axis O-O around through the flexures 20a, the tip minute Displace. The amount of light emitted by the light emitting element 40A and received by the light receiving element 40B changes, and a minute displacement of the tip of the pendulum 30 is detected.

The signal indicating the minute displacement detected by the displacement detecting device is fed back to the Toruca coil 34, and the current flowing through the Toruca coil 34 is controlled so that the minute displacement becomes zero. Since such current or constraint current is proportional to the force F _Z, it is possible to measure the force F by detecting the constraint current.

Even if the force F _Z to be measured is applied to the detecting unit 100, the displacement of the pendulum 30 is always maintained at zero. the force F _Z can be accurately measured.

Referring again to FIG.
Function 1 will be described. The pendulum 30 has a tolcab bobbin 32
Is mounted, the torcab bobbin 32 has a torca coil 34,
A first stage 101, a first sample 201, an L-shaped arm 90, and a counterweight 91 are mounted. Accordingly, the flex joint 20 receives a bending moment M _C around the rotation axis OO (clockwise in FIG. 4) due to the weight of the pendulum 30 and the weight of these components mounted on the pendulum 30.

As a result, even when the force F _Z to be measured is not applied to the first sample 201, the pendulum 30 is rotationally displaced around the rotation axis OO, which causes an error.

The counterweight 91 is provided to generate the opposite direction of the bending moment M _W against arising bending moment M _C the weight of components mounted pendulum 30 and its. The counterweight 91
On the side opposite to the pendulum 30 with respect to the rotation axis OO,
It is mounted on the tip of an L-shaped arm 90.

The weight of the pendulum 30 and the components mounted thereon
Bending moment M _CAnd counterway
Bending moment M by site 91_WEqual in size
At this time, the rotational displacement of the pendulum 30 becomes zero. Counterau
Bending moment M by gate 91_WAdjusting the size of
Is the mass of the counterweight 91 or an L-shaped arm
This is done by changing the length of 90.

Referring to FIG. 7, a second example of the micro force evaluation device according to the present invention will be described. As shown, an X axis and a Y axis (the Y axis is perpendicular to the paper surface) are taken along a horizontal plane, and a Z axis is taken vertically above. The micro force evaluation device of this example is the first device shown in FIG.
Of the evaluation processing device 300 and the monitor device 302
And the detection unit 100, etc., but the evaluation processing device 300 and the monitor device 302 are the same as those in the first example shown in FIG. The detection unit 100 has the same structure as the detection unit 100 described with reference to FIGS. 4 and 5, but the detection unit of the present example is arranged in a different direction from the first example of FIG. 1.

In this example, the detecting unit 10 is arranged so that the central axis of the pendulum 30 is arranged in the vertical direction, that is, along the Z axis.
0 is attached to the fixture 104. Thus, the detection unit 100 mounted on the mounting tool 104 is supported by the stage 105 as in the first example of FIG.

An L-shaped arm 90 is mounted on the detection unit 100, and a first horizontal portion 90 A of the L-shaped arm 90 has a first
Sample stage 101 is mounted, and the first sample 201 is mounted on the first sample stage 101. Similarly, the second sample stage 102 is mounted on the L-shaped arm 102A mounted on the base plate 106, and the second sample 2 is mounted on the second sample stage 102.
02 is supported. The first sample 201 and the second sample 202 are separated from each other.

In this embodiment, the pendulum 30 is arranged below the flexible joint 20. Therefore, the bending moment around the rotation axis OO due to the weight of the pendulum 30 is zero,
The rotation axis O- based on the weight of the component mounted on the pendulum 30
The bending moment around O is extremely small. Therefore, in this example, there is no need to provide a counter weight.

Preferably, the first sample stage 10
1 and the first sample 201 attached thereto are arranged along the central axis of the pendulum 30, that is, the Z axis.

According to this example, the force F _X acting between the first sample 201 and the second sample 202 in the X-axis direction is measured. The pendulum 30 is caused by the force F _{X in the} X-axis direction.
Rotates around the rotation axis OO passing through the bending portion 20a, and its tip portion is slightly displaced. The displacement of the pendulum 30 is detected by the displacement detection devices 40A and 40B.

The signal indicating the minute displacement detected by the displacement detecting device is fed back to the Toruca coil 34, and the current flowing through the Toruca coil 34 is controlled so that the minute displacement becomes zero. Such current, or constrained current, is the force F
_Since it is proportional to _X , the force F _X can be measured by detecting this constraint current.

Referring to FIG. 8, two samples 201,
An example of the force F _{X in} the X-axis direction generated during 202 will be described. FIG. 8 is a partially enlarged view of two samples 201 and 202. On the upper surface of the first sample 201, that is, the surface facing the second sample 202, a number of mutually parallel protruding electrode portions 20 extending in the Y-axis direction (perpendicular to the paper surface).
Form 1A. The width of each electrode part 201A in the X-axis direction is D
_1, the pitch of the X-axis direction is p _1.

Similarly, on the lower surface of the second sample 202, that is, the surface facing the first sample 201, a large number of parallel electrodes 20 extending in the Y-axis direction (perpendicular to the paper).
Form 2A. The width of each electrode 202A in the X-axis direction is D ₂ , and the pitch in the X-axis direction is p ₂ .

The width D _{1 of} the electrode portion 201A is equal to the width D _{2 of the} electrode 202A, and the pitch p ₁ of the electrode portion 201A and the width of the electrode 2
Pitch p ₂ of 02A may be equal. However, each electrode portion 201A is connected to the corresponding electrode 202A by X
It deviates by half D / 2 of the axial width D ₁ (= D ₂ = D). Therefore, a portion L where the electrode portion 201A and the electrode 202A overlap each other is a half D / 2 of the width D in the X-axis direction.

A portion L of the electrode portion 201A and the electrode 202A forms a capacitor. Thus, the first
By shifting the electrode 202A of the second sample 202 in the X-axis direction with respect to the electrode portion 201A of the sample 201, an electrostatic force in the X-axis direction is generated between the two. That is,
When a voltage V is applied between the electrode portion 201A and the electrode 202A, the first sample 201 receives a force F _X in the X-axis direction.

[0060]

F _X = CV ² / 2L = εSV ² / 2δL

Where C is the capacitance of the capacitor, V is the voltage applied to the capacitor, δ is the gap between the capacitors,
S is the area of the capacitor, L is the width of the capacitor in the X-axis direction, and ε is the dielectric constant.

When a voltage V is applied between the electrode portion 201A and the electrode 202A, an electrostatic force in the X-axis direction and an electrostatic force in the Z-axis direction are actually generated therebetween. However,
The electrostatic force F _{Z in the} Z-axis direction is not detected by the detection unit 100 of the present example.

As described above, the two samples 201, 2
Numeral 02 is arranged along the central axis of the pendulum 30. Therefore, the electrostatic force in the Z-axis direction generated by the electrode portion 201A and the electrode 202A acts along the central axis of the pendulum 30, and does not generate a moment about the rotation axis OO passing through the bending portion 20a. Thus the pendulum 30 by an electrostatic force force F _Z in the Z-axis direction is not rotationally displaced.

Although the embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that the present invention is not limited to the above-described embodiments and can adopt various other configurations without departing from the gist of the present invention. It will be easily understood.

Although the case where the electrostatic force or the electromagnetic force is measured by the device of the present invention has been described above, it is understood by those skilled in the art that the device of the present invention can measure a force other than the electrostatic force or the electromagnetic force. Will be understood. With the device of the present invention, a contact force (a force propagating between objects) other than a non-contact force (a force propagating in space) such as an electrostatic force or an electromagnetic force can be measured.

[0066]

According to the present invention, the position of the detecting section can be adjusted by the feedback circuit including the monitor device and the evaluation processing device, and thereby the relative position of the sample can be adjusted. It has the advantage that it can be measured as a function of the relative position of the sample.

According to the present invention, the position of the detection unit can be adjusted by the feedback circuit including the monitor device and the evaluation processing device, and thereby the relative position of the sample can be adjusted. This has the advantage that the force acting on the sample can be measured.

According to the present invention, there is an advantage that a force acting between two samples, for example, an electrostatic force, an electromagnetic force or the like can be measured. Further, there is an advantage that a force acting between two samples in any direction can be measured.

According to the present invention, a pendulum, a displacement detecting device,
The detector including the torquer and the feedback circuit has an advantage that the principle and main parts of the conventional servo accelerometer can be used.

According to the present invention, when measuring a small force,
Since the displacement of the pendulum is always kept at zero, there is an advantage that even when the pendulum is used for a long time, there is no change in diameter and the micro force can be measured accurately.

According to the present invention, since a flexible joint can be used as a sensor for detecting a small force, there is an advantage that manufacturing costs and material costs can be reduced.

According to the present invention, when measuring a small force,
Since the displacement of the pendulum is always maintained at zero and the bending amount of the flexible joint is always maintained at zero, the sensitivity of the sensor unit, that is, the flexible joint can be sufficiently increased, so that an extremely small force can be accurately measured. Have the advantage that you can.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram showing a first example of a micro force evaluation device of the present invention.

FIG. 2 is an explanatory diagram for explaining a method of generating a small force to be measured by the first example of the small force evaluation device of the present invention.

FIG. 3 is an explanatory diagram showing an example of an evaluation processing device of the micro force evaluation device of the present invention.

FIG. 4 is an explanatory diagram showing an example of a cross-sectional configuration of a detection unit of the micro force evaluation device of the present invention.

FIG. 5 is an explanatory diagram showing an example of a planar configuration of a detection unit of the micro force evaluation device of the present invention.

FIG. 6 is an explanatory diagram for explaining the principle of a detection unit of the micro force evaluation device of the present invention.

FIG. 7 is an explanatory diagram showing a main part of a second example of the micro force evaluation device of the present invention.

FIG. 8 is an explanatory diagram for explaining a method of generating a small force to be measured by the second example of the small force evaluation device of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Frame 10a Attachment part 10b Flange part 10c Reference surface 10d Hole 10e Concave part 18 Holding plate 19 Screw 20 Flex joint 20a Flexure part 20e Hole 30 Pendulum 32 Torcabobbin 34 Toruca coil 36 Permanent magnet 38 Pole piece 40A Light emitting element 90B Light emitting element 40B Arm 91 Balance weight 100 Detector 101, 102 Sample stage 104 Attachment 105 Stage 106 Base plate 107 Vibration isolator 201, 202 Sample

Claims (9)

[Claims] 1. A sample holder for supporting a sample,
A pendulum that can be displaced by a force acting on the sample, a displacement detection device that detects displacement of the pendulum, a torquer that generates a force that displaces the pendulum, and a pendulum of the pendulum based on a signal from the displacement detection device. A feedback circuit that supplies a command signal to the torquer so that the displacement becomes zero; and a detection unit configured to detect a force acting on the sample by the command signal. A stage device for supporting linear displacement in three axial directions and rotational displacement about three orthogonal axes, a monitor device for monitoring the position of the sample, an output of the monitor device, and an output of the detection unit, To evaluate the relationship between the position of the sample and the force acting on the sample, and output a control signal for adjusting the position of the detection unit to the stage device. Microforce evaluation device having an evaluation processing unit. 2. The micro force evaluation device according to claim 1, wherein the sample holder has a first sample stage supporting a first sample and a second sample stage supporting a second sample. The small force evaluation device, wherein the detection unit is configured to measure an electrostatic force or an electromagnetic force acting between the two samples. 3. The micro-force evaluation device according to claim 2, wherein the first sample stage is mounted on the pendulum,
The second sample stage is supported by an arm mounted on a base plate. 4. An apparatus according to claim 2, wherein an L-shaped arm is attached to said pendulum.
A counterweight is attached to an end of the U-shaped arm, and the counterweight can be configured to cancel the deflection of the pendulum due to the weight of the first sample stage, the L-shaped arm, and the pendulum. A small force evaluation device. 5. The micro-force evaluation device according to claim 2, wherein the first sample stage is mounted on the pendulum via an L-shaped arm, and the first sample stage is connected to the L-shaped arm with each other. A micro force which can be measured even when the direction of the force acting between the two samples is along one of the two surfaces by being mounted on one of the two orthogonal surfaces. Evaluation device. 6. The micro force evaluation device according to claim 2, wherein the evaluation processing device outputs a control signal to the stage device based on a position setting signal to set a positional relationship between the two samples. A small force evaluation device characterized in that it is configured to 7. The micro force evaluation device according to claim 6, wherein the evaluation processing device is configured to store the output from the detection unit and the position setting signal, and output the stored data. A small force evaluation device characterized by the above-mentioned. 8. The micro force evaluation apparatus according to claim 1, wherein the pendulum is cantilevered by a frame via a flexible joint. Force evaluation device. 9. The small force evaluation device according to claim 1, wherein the torquer is a torquer coil mounted on the pendulum, a permanent magnet mounted on a frame, and a permanent magnet mounted on a frame. A micro force evaluation device comprising a pole piece.