JPH10328519A - Field-free air cleaning method and device therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an air cleaning method extremely high in efficiency in which water is atomized, this water particulates are changed in a single pole to combine it with particulates such as dirt and dust contained in air to make it water droplets having a larger particle size and the water droplets are separated from the air to purify the air and also to make it field-free. SOLUTION: In this field-free air cleaning method, to air entering an air flow path 2 from an air feeding port 4 of a device body 1, a microsol consisting of water particulates is sprayed by a first nozzle 5 or the like, the microsol particulate is charged in a single pole in the air and particles such as dirt and dust in the air and the single-pole charged microsol are made to attract each other and combine them. The air containing those coagulated particles is passed through a particle separator such as a first particle separator 7 to collect the particle whose the particle size is made large, to remove other particulate in the air and thereby to clean the air.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air cleaning method and an air cleaning method for removing air from a room such as a clean room, a hospital, a food factory, a semiconductor factory, a hotel, and the like and eliminating the electric field.

[0002]

2. Description of the Related Art Conventionally, a clean room handling semiconductors and chemicals uses a paper filter formed of a fine mesh on four side walls and a ceiling, etc., and air is sucked through the filter into this clean room to filter fine particles of 2 to 3 μm or more. Filtered.

[0003]

However, in order to obtain cleaner air, this filter has to collect fine particles having a smaller particle size, and therefore has to reduce the mesh size. In this way, the mesh is clogged with the fine particles collected in a few months, and when the mesh is clogged, the temperature rises and the saturation point of the water rises. Therefore, the passing air contains a large amount of moisture, and dew condensation occurs at the filter location. Therefore, the filters become unusable in a few months and must be replaced with new ones, which is extremely costly. Therefore, fine particles having a small particle size cannot be collected, and there is a limit to cleanliness.

[0004] The present invention has been made in view of these points, and water is made finer, the fine particles of water are monopolarly charged, and combined with fine particles such as dust and dust contained in air to form a larger particle. It is an object of the present invention to provide an extremely efficient air cleaning method and an apparatus for separating water droplets having a particle size, separating the air from the air, purifying the air and eliminating an electric field, and solving the above problems.

[0005]

Therefore, according to the first aspect of the present invention, a micro sol composed of fine particles of water is sprayed onto air introduced from an air inlet of the apparatus main body by a suction apparatus. Thereby, the air is cooled by adiabatic expansion by atomization and a cooling effect by heat of vaporization. In addition, the air becomes supersaturated with water. The fine particles of these sprayed water microsols have a particle size of about 50μ
As a result, monopolar charging is likely to occur at + -equivalent amounts. On the other hand, particles such as dust and dust in the air are also charged by electrostatic induction. Therefore, these particles such as dust and dust and the microsol charged unipolarly on the opposite pole are mutually attracted and combined to form water droplets having a large particle diameter. Although the water microsol fine particles may not be monopolarly charged, particles such as dust and dust are often charged, and are attracted to these charged particles and aggregate.

[0006] Air containing these aggregated particles or water droplets having a large particle diameter is passed through a particle separator to collect these particles and remove the fine particles from the air to clean the air. And a method of eliminating an electric field. In the above-described particle separation device, a water film to which water easily adheres is provided, and the particles or water droplets having a large particle diameter due to aggregation adhere to the water film and are separated from air. Here, the micro sol is composed of water particles, and preferably, pure water having a particle size of about 50 μm or less and an electric resistance of about 10 ⁵ to 10 ¹⁰ Ω is more monopolar. Cheap.

According to a second aspect of the present invention, the air introduced from the air inlet of the apparatus main body by the suction device is mixed with steam formed by heating water. Mixing the air and the steam lowers the temperature and increases the particle size of the steam. Since the fine particles of the vapor are fine particles having a high purity in a supersaturated state and have a particle size of about 50 μm or less, they are easily unipolarly charged to + -equivalent amounts. On the other hand, particles such as dust and dust in the air are also charged as described above. Thus, the particles such as dust and dust are attracted and combined with each other by the unipolarly charged fine particles on the opposite pole to increase the particle size. Further, the vapor fine particles may not be monopolarly charged, but in many cases, particles such as dust and dust are charged, and are attracted to these charged particles and aggregate. The air containing these aggregated particles or water droplets having a large particle diameter is passed through a particle separation device to collect these particles and remove the fine particles from the air to clean the air and to reduce the electric field. Was adopted. This particle separation device is the same as that of the first aspect of the present invention.

According to a third aspect of the present invention, a micro sol composed of fine particles of water is sprayed on air entered from an air inlet of the apparatus main body by a suction device. Thereby, the air is cooled by adiabatic expansion by atomization and a cooling effect by heat of vaporization. In addition, the air becomes supersaturated with water. The fine particles of these sprayed water microsols have a particle size of about 50 μm or less during suspension due to vaporization or the like, and are likely to be unipolarly charged to + -equivalent amounts. On the other hand, particles such as dust and dust in the air are also charged as described above. Then, the charged particles such as dust and dust in the air and the monopolarly charged microsol on the opposite pole are mutually attracted and combined to form water droplets having a large particle diameter. Although the water microsol fine particles may not be monopolarly charged, particles such as dust and dust are often charged, and are attracted to these charged particles and aggregate. The air containing these aggregated particles or water droplets having an increased particle size is passed through a particle separator. In this particle separation device, a plurality of plates are arranged in parallel with each other at an interval in parallel with the air insertion direction, and the interval between these plates is set to a width at which a two-layer flow is generated. Fine particles were collected by a particle separator, and the air was cleaned by removing the fine particles in the air, and the method was applied to eliminate the electric field.

According to a fourth aspect of the present invention, the air introduced from the air inlet of the apparatus main body by the suction device is mixed with steam formed by heating water. Since the vapor particles are fine particles of high purity in a supersaturated state, and have a particle size of about 50 μm or less, they are easily monopolarly charged to + -equivalent amounts, and are charged particles such as dust and dust in the air. And the monopolar charged particles are mutually attracted and combined to increase the particle size. Further, the vapor fine particles may not be monopolarly charged, but in many cases, particles such as dust and dust are charged, and are attracted to these charged particles and aggregate. The air containing these aggregated particles having an increased particle size is passed through a particle separator. In this particle separation device, a plurality of plate members are arranged in parallel with each other at an interval in parallel with the air insertion direction, and the interval between these plate members is set to a width at which a two-layer flow is generated. Fine particles were collected by a particle separator, and the air was cleaned by removing the fine particles in the air, and the method was applied to eliminate the electric field.

According to a fifth aspect of the present invention, there is provided a nozzle for spraying water into a room following an air insertion port of a hollow apparatus main body,
Following the spray chamber, a particle separator chamber for separating water droplets or particles in the air from the air is provided, and the particle separator chamber is provided with a water film to which water easily adheres. One or more pairs of separation device chambers were provided, and a suction device was provided in the device main body or behind the outlet of the device main body.

According to a sixth aspect of the present invention, a mixing chamber for mixing water formed by heating water is provided in a room following an air insertion port of a hollow apparatus main body. Providing a particle separation device chamber for separating water droplets or particles from air, the particle separation device room is provided with a water film to which water easily adheres, and one or more pairs of these mixing rooms and particle separation device rooms are provided, An electric field-free air-cleaning device was provided with a suction device in the apparatus main body or behind the discharge port of the apparatus main body.

The invention according to claim 7 is provided with a nozzle for spraying water into a room following the air insertion port of the hollow apparatus main body,
Following the spray chamber, a particle separation device chamber for separating water droplets or particles in the air from the air is provided, and a plurality of plates are spaced apart from each other in the particle separation device room in parallel with the direction of air flow. And a space between these plates is set to a width at which a two-layer flow is generated, and a pair or a plurality of pairs of the spray chambers and the particle separation device chambers are provided. An electric field-free air clean device provided with a suction device behind.

According to the invention of claim 8, a mixing chamber for mixing steam formed by heating water is provided in a room following the air insertion port of the hollow apparatus main body. A particle separation device chamber for separating water droplets or particles from air is provided, and a plurality of plate bodies are arranged in this particle separation device room in parallel with each other in parallel with the flow direction of air at intervals. The interval between each plate is the width at which a two-layer flow occurs,
One or more pairs of the mixing chamber and the particle separating apparatus chamber were provided, and a suction device was provided in the apparatus main body or behind the discharge port of the apparatus main body, to form an electric field-free air clean apparatus.

[0014]

Embodiments of the present invention will be described below with reference to the drawings. First, FIG.
The air flow passage 2 is provided in a meandering shape at the upper part of the apparatus main body 1, and a water tank 3 is provided at the lower part. An air insertion port 4 is provided at one end of the air flow passage 2, and a first spray chamber 6 having a first nozzle 5 for spraying water is connected to the air insertion port 4.
Following the spray chamber 6, a first particle separation device chamber 7 is provided.

Further, a second spray chamber 9 having a second nozzle 8 for spraying pure water is provided, followed by a second particle separation device chamber 10. Further, a third particle separation chamber 11, and an air exhaust port 12 are provided after the second particle separation chamber 10. The tank 3 is divided into a first tank 3a and a second tank 3b. Pure water having an electric resistance of about 10 ⁵ to 10 ¹⁰ Ω is injected into the first tank 3a from the liquid inlet 13. Then, pure water is pulled up from the first tank 3a by the pump 14 through the filter 14a, and the pure water is pulled up by the second nozzle 8
Thus, the micro sol having a particle diameter of 50 μm or less and having a uniform particle diameter is sprayed into the second spray chamber 9.

The second tank 3b is provided with a drain from the first spray chamber 6, the first particle separator chamber 7, the second spray chamber 9, the second particle separator chamber 10, and the third particle separator chamber 11, respectively. Discharge pipes 15a, 15b, 15c are introduced,
It consists of collecting drains in each room. Then, water is pulled up from the second tank 3b by a pumping pipe 16 via a pump (not shown), and the micro sol is sprayed from the first nozzle 5 to the first spray chamber 6. A blower 17 is provided following the air exhaust port 12 of the apparatus main body 1, and the blower 17 creates an air flow in the air flow passage 2. Following the blower 17, a diffusion box 18 for uniformizing air is provided.

As shown in FIG. 2, the particle separators in each of the particle separator chambers 7, 10, 11 are provided with a number of thin plates 19 which are substantially parallel to the direction in which air flows and are arranged opposite to each other at intervals. The distance between these adjacent thin plates 19 is made extremely small to make a two-layer flow. These thin plates 19
As shown in FIG. 3, when air flows between the thin plates 19, a fixed layer 20 is formed along the surface of each thin plate 19 in the flow of air, and a fluidized layer 21 is formed between these. The fixed layer 20 has a high viscosity, and the fine particles in the fluidized bed 21 hit these fixed layers 20 and are decelerated. As a result, when the air passes through each particle separating device, a part of the solid fine particles in the air comes into contact with the fixed layer 20, decelerates, and falls downward. The material of the thin plate 19 of this particle separation device is a wooden plate, a metal plate, a plate made of an organic material, a plate made of an inorganic material such as carbon fiber,
There is a plate made of wood ceramic, and the like.

As a result, a plurality of particle separation chambers 7, 1
When passing through 0 and 11, fine particles in the air are separated from the air.

Next, the method of the present invention will be described. The suction force of the blower 17 causes the air inlet 4
And the air enters the first spray chamber 6. There, water pumped from the second tank 3b is sprayed by the first nozzle 5 as a microsol having a particle size of about 50 μm or less and having a uniform particle size. The air in the first spray chamber 6 is cooled by the adiabatic expansion by the atomization and the cooling effect by the heat of vaporization. In addition, the inside of the first spraying chamber 6 is in a supersaturated state of water, and the particles of the microsol in the water are +
-Unipolar charging to an equal amount. Then, the monopolar charged particles such as dust and dust in the air and the monopolar charged microsol on the opposite pole are mutually attracted and combined to form a water droplet having a large particle diameter. Not all of these particles are charged, for example, when water is made into a microsol having a particle size of 50 μm or less or when pure water containing a surfactant is similarly made into a microsol. However, the fine particles to be filtered, such as dust, are charged to either the positive or negative pole, so that the water microsol particles are sucked by these.

The air containing the water droplets having a large particle diameter due to the aggregation is passed through the first particle separation device chamber 7, where the fine particles are collected as described above, and the fine particles in the air are removed. Then, when the air further enters the second spray chamber 9, the pure water pumped from the first tank 3a is sprayed again from the second nozzle 8 as a microsol having a particle diameter of about 50 μm or less and a uniform particle diameter. . As a result, the air in the second spray chamber 9 is further cooled as described above, and becomes in a supersaturated state of water. Further, the particles of the microsol in the water are monopolarly charged to + -equivalent amounts. Therefore, particles such as dust and dust in the air that could not be removed in the first particle separation device chamber 7 are also monopolarly charged. The sol and the sol mutually suck and combine to form water droplets having a large particle size. Then, the air containing the water droplets enters the second particle separation device chamber 10 and the third particle separation device room 11, and the water droplets are dropped and separated, and only the clean air containing no fine particles is supplied to the air exhaust port 12.
And is discharged through a blower 17 and a diffusion box 18.

In the above embodiment, water or pure water is sprayed as microsol having a particle diameter of about 50 μm or less at two places in the air flow path 2 and fine particles are separated through a particle separation device in each case. However, the present invention is not limited thereto, and the spraying and the removal of the fine particles by the particle separating device may be repeated as appropriate. Also, if the discharged air is too high in humidity, use a refrigerator to lower the temperature of the air and dehydrate,
This may be released to a clean room or the like. In addition, we pass through many particle separation devices and raise temperature by friction,
It can also reduce humidity. In the case of heating, it is also possible to raise the temperature of the water to be microsol by a heater or the like, spray this as microsol, and raise the temperature of the air to discharge.

In the above embodiment, a two-layer flow type particle separator is used as a method for removing water droplets or fine particles in air. However, the present invention is not limited to this.
An appropriate particle separation device such as a particle separation device that passes air through a pile of spheres or blocks such as stones may be used. In addition, if this method is repeatedly and continuously performed in each of these particle separation devices, a humid air passes through each particle separation device, so that a water film is formed. Alternatively, water may be constantly or intermittently applied to each particle separation device to form a water film. This makes it easier for water droplets in the air to adhere, making it easier to collect fine particles. in this case,
The surface tension is controlled so that water easily forms a film. For this purpose, there are a case where a surfactant is added to water to be made into a microsol and a case where a surfactant is applied to the surface of the particle separation plate itself to control the surface tension.
In the final stage of this apparatus, air comes out in a state of supersaturated humidity. Therefore, in the terminal particle separation apparatus, dehumidification can be performed efficiently by using a separation plate or the like having a super-hydrophobic surface treatment. By forming a film of fluorine, a silicon-based compound or a copolymer thereof on the surface of the super-water-repellent material, it is difficult to form a water film on the surface of the separation plate, etc. You may make it drop a water drop, and it may make it dehumidify air and exhaust it outside.

In the above embodiment, water is sprayed in the form of a micro sol. This includes a method of converting water into mist using high-pressure air, a method of forming mist using water pressure of a pump, An appropriate method such as a method of forming mist using the inflow air pressure and the flow velocity can be used. Alternatively, there is a method in which water is heated to form steam, which is then mixed with air and sent. In any case, when encountering particles such as dust and dust in the air, the water
When the thickness is 0 μm or less, monopolar charging is liable to occur, and it is preferable to be in this state.

[0024]

According to the first and fifth aspects of the present invention, water is atomized into fine particles, and the fine particles of water are monopolarly charged. Fine particles combine with these to form larger sized water droplets.
The water droplets having the large particle diameter are passed through a particle separation device to be separated from air, so that it is not necessary to reduce the size of the filter network in order to remove the fine particles as in the related art. Moreover, since fine particles of any particle size are collected as large-sized fine particles, collection or removal is extremely easy and reliable.
Therefore, clogging of the particle separation device does not occur. In addition, bacteria, fungi, bacteria, bacterium and the like adhere to fine particles such as dust and dirt, and these can be separated and removed by this method. Further, the water fine particles are monopolarly charged and combined with fine particles such as dust and dust charged to the opposite polarity as described above, so that they are in a non-charged state. Therefore, it is an extremely efficient method of purifying air and eliminating an electric field. When water is further sprayed, the air is cooled by the temperature drop due to adiabatic expansion and the cooling effect by the heat of vaporization in the atomized state. Therefore, the discharged air is cleaned and cooled at the same time.

According to the second and sixth aspects of the present invention, since water is vaporized by heating to form fine particles, the fine particles of water are monopolarly charged in the air. Combined with this, water droplets of a larger particle size are formed, and the water droplets of the larger particle size are passed through a particle separation device and separated from air, and as in the conventional case, the mesh of the filter is reduced to remove fine particles. No need. Moreover, since fine particles of any particle size are collected as large-sized fine particles, collection or removal is extremely easy and reliable. Therefore, clogging of the particle separation device does not occur. Bacteria, fungi, bacteria, virus, etc. attached to the microparticles are killed by the heated steam mixed with air, but bacteria not killed by this are separated,
It can be removed by removal. Further, the water fine particles are monopolarly charged and combined with fine particles such as dust and dust charged to the opposite polarity as described above, so that they are in a non-charged state. Therefore, it is an extremely efficient method of purifying air and eliminating an electric field.

According to the third and seventh aspects of the present invention, in addition to the effect of the first aspect of the present invention, a thin plate is passed through a two-layer flow type particle separation device arranged in parallel with the flow of air. Unlike the filter according to (1), clogging is less likely to occur, and no special pressure needs to be applied to pass through the mesh.

According to the fourth and eighth aspects of the present invention, in addition to the effect of the second aspect of the present invention, a thin plate is passed through a two-layer flow type particle separation device arranged in parallel with the flow of air. Unlike the filter according to (1), clogging is less likely to occur, and no special pressure needs to be applied to pass through the mesh.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of an embodiment of the present invention.

FIG. 2 is a perspective view of a two-layer flow type particle separation device of the present invention.

FIG. 3 is a functional principle diagram of the two-layer flow type particle separation device of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Apparatus main body 2 Air flow path 3 Tank 4 Air insertion port 5 1st nozzle 6 1st spray chamber 7 1st particle separation device room 8 2nd nozzle 9 2nd spray room 10 2nd particle separation device room 11 3rd particle separation Equipment room 12 Air exhaust port 17 Blower 19 Thin plate 20 Fixed layer 21 Fluidized bed

Claims (8)

[Claims] 1. A microsol composed of fine particles of water is sprayed on air entering from an air insertion port of an apparatus main body, and the microsol fine particles are monopolarly charged in the air, and dust or the like in the air is charged. Particles and the above monopolarly charged microsol are mutually sucked and combined, and the air containing these aggregated particles is passed through a particle separator to collect the particles having an increased particle diameter, and the air is collected in the air. The feature is to clean the air by removing fine particles,
Electric field-free air clean method. 2. An air inlet through an air inlet of the apparatus main body and steam formed by heating water are mixed, and fine particles of the steam are monopolarly charged, and particles such as dust and dust in the air are mixed with the air. The charged particles are attracted and combined with each other, and the air containing these agglomerated particles is passed through a particle separator to collect the particles having a larger particle size and remove the fine particles from the air. An electric field-free air clean method, characterized by cleaning. 3. A microsol composed of fine particles of water is sprayed on air entering through an air inlet of the apparatus main body, and the fine particles of the microsol are monopolarly charged in the air, and dust, dust and the like in the air are sprayed. Particles and the above-mentioned monopolarly charged microsol are mutually attracted and combined, and air containing these aggregated particles is opposed to each other at intervals of a plurality of plates in parallel with the direction of insertion of the air. The two plates are separated and passed through a particle separator with the width of the two-layer flow generated, and the particles having a larger particle size are collected by the two-layer flow particle separator, and are collected in air. An electric field-free air cleaning method characterized in that air is cleaned by removing fine particles. 4. An air inlet through an air inlet of the apparatus main body and steam formed by heating water are mixed, and fine particles of the steam are monopolarly charged, and particles such as dust and dust in the air are mixed with the air. The finely charged particles are mutually attracted and combined, and the air containing these agglomerated particles is arranged face to face with a plurality of plates spaced in parallel with the direction of insertion of the air. The gap between the plates is passed through a particle separator that has a width that produces a two-layer flow, and the particles having a larger particle size are collected by the two-layer flow particle separator, and the fine particles in the air are removed to remove air. An electric field-free air clean method, characterized by cleaning. 5. A nozzle for spraying water is provided in a chamber following the air insertion port of the hollow apparatus main body, and a particle separation apparatus chamber for separating water droplets or particles in the air from the air is provided following the spray chamber. An electric field-free air-cleaning apparatus characterized in that a pair or a plurality of pairs of the spray chamber and the particle separation apparatus chamber are provided, and a suction device is provided in the apparatus main body or behind the outlet of the apparatus main body. 6. A mixing chamber for mixing steam formed by heating water is provided in a chamber following an air insertion port of a hollow apparatus main body, and water droplets or particles in the air are mixed with the air after the mixing chamber. A non-electric field characterized by providing a particle separation device chamber for separation, providing one or more pairs of the mixing chamber and the particle separation device room, and providing a suction device in the device main body or behind the outlet of the device main body. Air clean equipment. 7. A nozzle for spraying water is provided in a chamber following the air insertion port of the hollow apparatus main body, and a particle separation apparatus chamber for separating water droplets or particles in the air from the air is provided following the spray chamber. In this particle separation device chamber, a plurality of plates are arranged in parallel with each other at an interval in parallel with the air flow direction, and the interval between these plates is set to a width at which a two-layer flow is generated. A plurality of spray chambers and a plurality of particle separation apparatus chambers, and a suction device provided in the apparatus main body or behind the outlet of the apparatus main body. 8. A mixing chamber for mixing steam and air formed by heating water is provided in a chamber following an air insertion port of a hollow apparatus main body. After the mixing chamber, water droplets or particles in the air are removed from the air. A plurality of plate bodies are arranged in parallel in the direction of air flow in the particle separation apparatus room so as to face each other with an interval therebetween. A width in which a two-layer flow is generated, a pair or a plurality of pairs of the mixing chamber and the particle separation apparatus chamber, and a suction device provided in the apparatus main body or behind the discharge port of the apparatus main body. Air clean equipment.