JPH10332020A - Gas control valve - Google Patents

Abstract

(57) [Summary] (with correction) [PROBLEMS] To provide a gas control valve having an orifice that can be easily replaced and adjusted and that can adjust a gas flow rate. SOLUTION: A valve seat 59 is provided from a valve base connecting surface 63b.
The first flow path hole 65 penetrating the inside and outside of the ring
A valve seat member 63 having a flow passage hole 66;
6 and a valve seat connecting surface 63 b of the valve seat member 63 and a valve seat member connecting surface 16 a of the valve base 16, which are arranged in a double ring shape. 21 and an inner sealing gasket 6 for sealing between these and the second passage hole 66 and the second port passage 22.
1, an outer sealing gasket 62 that communicates with the second flow path hole 66 and the second port flow path 22 and seals the outside.
And The inner seal gasket 61 has an orifice 61a on the inner peripheral surface, and can adjust the gas flow rate. Further, the inner seal member 61 can be easily replaced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas control valve having a poppet type valve, and more preferably to a gas control valve for controlling the flow of a gas such as a process gas used in a semiconductor manufacturing process. It is.

[0002]

2. Description of the Related Art In recent years, in the semiconductor manufacturing process, as to the processing of wafers such as silicon, the number of cases of performing a single processing for processing one wafer at a time in addition to a single-wafer processing for simultaneously processing several wafers is increasing. ing. Accordingly, it is required to reduce the size of various processing apparatuses, and a small gas control valve for controlling the flow of a process gas such as an etching gas used for processing is also required.

[0003]

Some of the process gases, such as hydrogen gas, need to be controlled in flow rate (gas concentration), such as hydrogen gas. As shown in (1), a flow control valve 300 is installed between the piping system HH 'and the open / close valve (gas control valve) 200 to limit the flow rate. in this case,
Normally, the flow control valve 300
By adjusting the micro head 302, the opening degree of a valve (not shown) in the adjustment valve main body 301 is adjusted, and thereafter, the gas is often controlled only by operating the on-off valve 200 (opening / closing the valve). That is, the micro head 3 of the flow control valve 300
In most cases, adjustment using 02 was performed only at the beginning of installation. On the other hand, in such a system, an expensive flow control valve 3 is used.
The use of 00 increases the price of the entire apparatus, consumes space for the flow control valve, and contradicts the demand for miniaturization. In addition, it takes time to connect the flow control valve to the piping system and to perform a leak test.

In view of this, an orifice is formed by reducing the diameter of a part or the whole of a through hole (flow passage) penetrating through the ring of the ring-shaped valve seat, and the gas control valve itself has a function of controlling the flow rate. It is possible. However, in such a structure, it is necessary to disassemble the valve and replace the entire valve seat when it is desired to adjust the flow rate to a desired value.Depending on the structure, it is necessary to remove the valve body or the entire valve from the piping system. Adjustment (exchange) is troublesome.

It is also conceivable that an orifice plate having an orifice formed in the flow path is disposed between the seal ring and the valve seat or the orifice retainer, and the valve seat or the orifice retainer is screwed in and fixed. The orifice cannot be replaced or adjusted unless the seat and orifice retainer are removed. Further, it is necessary to take out the valve seat and the orifice plate from the gas control valve already attached to the piping system. However, as described above, the size of the entire processing apparatus is reduced and other equipment is installed at a close position. In such a case, it is particularly difficult to replace the battery.

The present invention has been made in view of such a problem, and an object of the present invention is to provide a gas control valve having a flow rate adjusting function and easily adjusting orifice replacement.

[0007]

According to a first aspect of the present invention, there is provided a poppet valve in which a valve body and a ring-shaped valve seat are configured to be able to contact and separate from each other. A gas control valve having an orifice communicating with a first flow path hole opened in a ring of a ring-shaped valve seat and disposed near the ring-shaped valve seat, wherein a valve seat member holding the ring-shaped valve seat is provided. A valve seat member having the first flow passage hole penetrating the valve seat member from the valve base connecting surface to the inside of the ring of the ring-shaped valve seat; and a valve seat member connection for connecting to the valve seat member. A valve base having a surface and a first port flow passage opening to the valve seat member connection surface; and a ring disposed between the valve base connection surface of the valve seat member and the valve seat member connection surface of the valve base. Seal member, wherein the first passage hole It communicates with the first port passage,
And a seal member having the orifice formed on an inner peripheral surface thereof.

According to the present invention, since the orifice is formed on the inner peripheral surface of the seal member, it is not necessary to replace a valve seat or the like to change the diameter of the orifice for flow rate adjustment, and it is sufficient to replace the seal member. Also, since the seal member in which the orifice is formed is disposed between the valve seat member and the valve base, it is not necessary to remove the entire gas control valve from the piping system, and it is possible to remove the valve seat member from the valve base. Thus, the seal member can be easily replaced. As the material of the seal member, a material which is not affected by the gas used and whose diameter of the orifice does not change with time may be selected. Specific examples include metals such as stainless steel and nickel, and fluorine-based resins such as PCTFE. Also, the diameter of the orifice may be appropriately selected in consideration of the required flow rate, pressure, and the like. If seal members having several orifice diameters are prepared in advance, the adjustment becomes easy.

It is more preferable that the valve seat member is fastened to the valve base with a bolt through a through hole formed in the valve seat member, since the valve seat member can be removed from the valve base by removing the bolt. In this case, the bolts may be tightened from the surface opposite to the valve base connection surface. The bolts can be tightened and removed regardless of the presence or absence of the gas control valve and other devices arranged adjacently, so that the gas control valve and other devices can be arranged adjacently at a high density, and these devices were used. This is because the size of the device can be reduced.

[0010] In order to further achieve the above object, a second aspect is provided.
The means described in (1), wherein the seal member is sealed by being pressed between the valve base connecting surface of the valve seat member and the valve seat member connecting surface of the valve base. The gist is the gas control valve described in (1).

According to the present invention, since the seal member is sandwiched and pressed between the valve seat member and the valve base, the seal can be reliably performed, and the gas does not leak to the outside or another flow path.

In order to further achieve the above object, a third aspect is provided.
Means, wherein the valve seat member has a second flow passage hole passing through the valve seat member from the valve base connection surface to outside the ring of the ring-shaped valve seat, and the valve base is provided with the valve There is at least one second port passage opening to the seat member connection surface, and the seal member is an inner ring between the valve base connection surface of the valve seat member and the valve seat member connection surface of the valve base. A ring-shaped seal member arranged in a concentric double ring shape, comprising: an outer seal member that communicates the second flow path hole and the second port flow path and seals between the second flow path hole and the second port flow path. The gist of the present invention is a gas control valve according to claim 1 or 2.

According to the present invention, the second flow passage hole is formed in the valve seat member, the second port flow passage is formed in the valve base, and the outer seal is formed radially outside the seal member having the orifice formed therein. The members are arranged in a concentric double ring shape to communicate the second channel hole and the second port channel. Therefore, it is not necessary to remove the second flow path from the pipe, and the valve seat member can be removed from the valve base, so that the replacement of the seal member having the orifice is further facilitated. Further, since the seal member and the outer seal member are arranged in a concentric double ring shape, even when a plurality of second port flow paths are formed in the valve base, the valve seat member, the seal member, and the outer seal member are formed. Since there is no need to change the members, it can be used for various types of valve bases.

Preferably, when the valve seat member is removed from the valve base, the seal member is also removed together with the valve seat member. After removing the valve seat member, there is no need to take out the seal member left on the valve seat member connection surface of the valve base connected to the piping system, and after removing the removed valve seat member to another place, Since the seal member may be detached from the valve seat member, it is not necessary to replace the seal member in a narrow place, and the seal member can be easily replaced. Further, it is preferable that the outer seal member can be removed together with the valve seat member because the outer seal member can be easily replaced.

Further, the seal member is a ring-shaped resin having an orifice on an inner peripheral surface and a part of which is press-fitted into a seal-shaped concave portion provided in a ring shape on a valve base connection surface of a valve seat member. Is preferred. Since the seal member is partially pressed into the seal member recess, the valve seat member can be removed and the seal member can be removed. Further, since the seal member is made of resin, the seal member can be easily attached to and detached from the seal member recess, and the seal member can be easily replaced. In addition, since the sealing member is made of resin, the deformability is large and the sealing can be reliably performed. Specifically, a fluorine-based resin, for example, PCTFE (ethylene chloride trifluoride resin), PTFE (ethylene tetrafluoride resin) and the like are mentioned, and these are preferable because of high corrosion resistance.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a longitudinal sectional view of a pilot type gas control valve according to an embodiment of the present invention. The gas control valve 10 includes a gas control valve body 10a and a valve base 16. The gas control valve body 10a includes a valve seat member 63, an intermediate member 57, a pilot valve cylinder 51, and the like. On the other hand, the valve base 16 has a first port 21 opening on the right side in the drawing and a second port 22 opening on the left side in the figure, and the first port vertical flow path portion 21a and the second port vertical flow path portion 22a It is open to the base upper surface (valve seat member connection surface) 16a.

The valve seat connection surface 1 of the valve base 16
The valve seat member 63 is connected to 6a. In this example,
The valve seat member 63 is fastened to the valve base 16 by a bolt 64 inserted through a through hole (not shown) penetrating the valve seat member 63 in the vertical direction in the figure. The first flow passage hole 65 formed substantially at the center of the valve seat member 63 and the second flow passage hole
The passage holes 66 communicate with the first port vertical passage portion 21a and the second port vertical passage portion 22a of the valve base 16, respectively.

The valve seat member connection surface 1 of the valve base 16
A ring-shaped inner sealing gasket 61 and an outer sealing gasket 62 concentrically disposed between the first port flow path 21 and the first flow path 21 are disposed between the first gas passage 6a and the valve base connection surface 63b of the valve seat member 63. The seal between the two ports and the outside is maintained while the hole 65 and the second port flow path 22 communicate with the second flow path hole 66. That is, the valve base 16 and the valve seat member 63 are connected to the gaskets 61 and 6 by the bolts 64.
2, the gaskets 61, 62
And the lower surfaces of the gaskets 61 and 62 and the valve seat member connecting surface 16a are in close contact with each other to maintain airtightness. Therefore, the first port flow path 2
Leakage of gas between the first and second port flow paths 22 (so-called back leakage) is also prevented, and leakage of gas in the second port flow path 22 to the outside is also prevented.

Further, the inner seal gasket 61 is
As shown in FIG. 2, the inner diameter of the inner peripheral surface on the upper side in the figure is reduced to form the orifice 61a. That is, the orifice 61a is inserted between the first port passage 21 and the first passage hole 65, and the orifice 61a allows the first port passage 21 and the first passage hole 6 to be inserted.
5 is limited. The required gas flow rate can be adjusted by the size of the diameter d of the orifice. For example, if the inner seal member 61 having three stages of large, medium, and small diameters d is prepared, it is necessary to replace the seal member 61. The flow rate can be adjusted. The orifice 61a is provided with a valve seat 5 to be described later in order to reduce the volume of the first passage hole 65.
9 is arranged. This is to minimize the overshoot of the gas flow rate immediately after the valve is opened.

On the upper surface of the valve seat member 63, a projecting portion 63a formed in a substantially cylindrical shape with a bottom is formed.
A first flow path hole 65 and a second flow path hole 66 are opened at the bottom inside. A ring-shaped valve seat 59 is provided at the bottom of the protrusion 63a.
The first flow path hole 65 is opened in the ring of the valve seat 59, and the second flow path hole 66 is opened outside the ring. It is trying to block.

Above the valve seat 59, the diaphragm 5
The valve body 58 is held so as to be able to abut or separate from the valve seat 59 via 4 to form a poppet valve type diaphragm valve body. Further, a diaphragm fixing bracket 56 pressed downward in the figure by an intermediate member 57 screwed into a female screw formed on the inner periphery of the protruding portion 63a, and a valve seat member 6
3, the outer periphery of the diaphragm 54 is fixed. This prevents the gas flowing between the first and second flow path holes from leaking upward.

A through hole 57 formed in the center of the intermediate member 57
A piston rod 53 is inserted into and held in a in a vertically slidable manner. A piston 52 is attached to the piston rod 53, and both are integrated.

Above the intermediate member 57, a pilot valve cylinder 51 is screwed and fixed to the intermediate member 57.
Inside the pilot valve cylinder 51, a piston 52 and a return spring 55 for urging the piston rod 53 and the valve body 58 downward (to close the valve) via the piston 52 are attached. A driving air port 60 is formed along the central axis of the pilot valve cylinder 51 and opens to the upper surface in the figure. A rod center hole 53c is formed in the center axis of the piston rod 53 at a depth reaching below the rod bulging portion 53a from the upper end of the piston rod 53 in the drawing, and further, directly below the rod bulging portion 53a. Is a communication hole 53 that penetrates the piston rod 53 in the radial direction (left-right direction in the figure) and crosses the rod center hole 53c.
d is formed. As a result, the space V formed by the upper surface of the intermediate member 57 and the lower surface of the piston 52 becomes a communication hole 53d,
It is configured to communicate with the driving air port 60 through the rod center hole 53c.

The gas control valve 10 constructed as described above
When the compressed air is not sent from the drive air port 60, the valve is closed. That is, since the piston 52 and the piston rod 53 are urged downward (the valve closing direction) by the return spring 55, the piston rod 53 pushes the valve body 58 downward in the drawing, and the first or second port is opened. The valve element 58 is brought into contact with the valve seat 59 via the diaphragm 54 against the gas pressure of the process gas or the like. Therefore, the first
The port flow path 21 and the second port flow path 22 are shut off (sealed).

Next, when compressed air is sent from the driving air port 60 into the space V defined by the upper surface of the intermediate member 57 and the lower surface of the piston 52 through the rod center hole 53c and the communication hole 53d, the piston 52 and the piston 52 The rod 53 moves upward. Then, the diaphragm 54 and the valve body 58 are moved upward by the gas pressure of the process gas, the purge gas, or the like, and the valve is opened, so that the first port flow path 21 and the second port flow path 22 communicate with each other so that the first port flow path 21 and the second port flow path 22 communicate with each other. The gas circulates. By controlling the compressed air sent to the drive air port 60 in this manner, the diaphragm valve (diaphragm 54, valve 58) is opened and closed, and the gap between the first port flow path 21 and the second port flow path 22 is opened. Can be controlled. Moreover, the orifice 61a
Thus, the gas flow rate is controlled to be constant, and the gas flow rate can be limited without using a flow rate adjusting valve as described above.

After the gas control valve 10 is attached to the piping system HH 'shown by a broken line in the figure, if the diameter of the orifice 61a needs to be changed in order to change the gas flow rate, that is, the inner seal gasket 61 Suppose that a situation arises in which you want to replace the. In this case, by removing the bolt 64 that fastens the valve seat member 63 to the valve base 16, the valve seat member 63 is removed from the valve seat member connecting surface 16a.
Then, the intermediate member 57, the pilot valve cylinder 51, and the like, which are above the drawing, are removed. That is, the gas control valve 10 (gas control valve main body 10a) other than the valve base 16 is removed from the piping system HH '. Then, the inner sealing gasket 61 and the outer sealing gasket 62 are left on the valve seat member connecting surface 16a of the valve base 16. Therefore, the gasket 61 for inner sealing in which the orifice 61a is formed can be easily replaced.

Thereafter, if necessary, the outer sealing gasket 62 is replaced with a new one, and the removed gas control valve body 10a is connected to the valve base connecting surface 63b.
And the valve seat member connecting surface 16a are set on the valve base 16 so as to face each other via the gaskets 61 and 62, and the bolt 64 is tightened. This is the gas control valve 1
This means that the diameter of the zero orifice 61a can be changed.

Accordingly, the valve seat member 63 (gas control valve body 10a) can be removed without removing the valve base 16, that is, without removing the entire gas control valve 10 from the pipe HH '. It is possible to easily replace the inner sealing gasket 61 having the orifice 61a formed therein. In addition, there is no need to remove the valve seat or the orifice retainer. Further, the valve seat member 63 and the like can be removed from the valve base 16 simply by loosening and removing the bolt 64 from above in the figure, so that even if other devices are nearby, it can be easily removed. Further, the gas control valve body 1 for replacing or repairing the valve seat 59, etc.
In the case where it is desired to adjust the parts of the valve 0a, the gas control valve body 10a can be replaced after being transported to another place, so that the valve seat 59 and the like can be easily removed, and the first passage hole 65 and the like may be damaged. The nature also decreases. The valve base 16 has
Another gas flow path may be provided so that a plurality of gas control valve bodies 10a and other devices can be attached, so as to have a function as a so-called manifold.

Further, as shown in FIG.
6, two (22, 22 ') second port flow paths may be formed. In the valve base 16 shown in FIG. 3, two second port flow paths 22 and 22 'are formed at right angles to each other (rightward and upward in the figure), and the second port vertical flow path 22a is formed. , 22a 'open between the concentrically arranged inner sealing gasket 61 and outer sealing gasket 62, respectively. This allows
For example, the process gas flowing from the first port flow path 21 is controlled by the gas control valve 10 so that the second port flow path 22
Flow out and shut off, and another second port flow path 2
Inert gas (purge gas) from the second port flow path 2
2 can flow.

Thus, the two gaskets 61, 62
Are arranged in a concentric double ring shape, it is not necessary to change the shapes of the gaskets 61 and 62 and the valve seat member 63 even if a plurality of second port channels 22 are opened between them.
Therefore, the gaskets 61 and 62 and the valve seat member 63 (or the gas control valve main body 10a) can be made common, so that various types of valve bases 16 can be supported. In addition, in order to increase the number of types of the valve base 16, in addition to the case where the number and the position of the second port flow path are different, the case where the shape of the joint of each port is different such as a metal gasket joint or a double bite joint. and so on. In FIG. 3, at each corner,
A screw hole 16b for fastening with the bolt 64 is formed.

The gasket for the inner seal may be detachable as shown in FIG. That is, the valve seat member 63
Immediately below the first flow passage hole 65, a gasket recess 63d formed coaxially with the first flow passage hole 65 and formed slightly larger in diameter than the first flow passage hole is formed. . An inner sealing gasket 61 ′ made of PCTFE resin is press-fitted into the gasket recess 63 d, and is detachably integrated with the valve seat member 63. The inner peripheral surface of the inner sealing gasket 61 'is reduced in diameter at a substantially central portion in the axial direction to form an orifice 61a'. The gasket concave portion 63d is formed such that the upper side surface thereof is concave in a ring shape, and is engaged with the upper side surface portion of the inner sealing gasket 61 'which is formed so as to be slightly swelled. 'To make it difficult to get out.

In this manner, when the valve seat member 63 (gas control valve body 10a) is removed from the valve base 16, the inner sealing gasket 61 'also moves to the valve seat member 6.
3 can be removed. Next, the valve seat member 6
If the gasket 61 'is detached from 3, the orifice 61
a 'can be exchanged. Therefore, it is not necessary to take out the gasket from the valve base 16 connected to the piping system HH ', so that the orifice can be replaced more easily.

The outer sealing gasket may be made removable by a similar structure. Further, as shown in FIG. 4, for example, a ring-shaped gasket made of stainless steel having a substantially C-shaped cross section and having an opening formed on the outer peripheral side may be used for the outer seal gasket 62 '. In this case, by inserting the inner peripheral edge of the gasket retainer 70 into the opening, the gasket retainer 70 is engaged with and integrated with the retainer 70, and the spring portion is bent substantially U-shaped in the thickness direction of the gasket retainer 70, Valve base connection surface 63 of valve seat member 63
b into the retainer holding recess 63c. The gasket retainer 70 and the outer sealing gasket 62 ′ are detachably held on the valve seat member 63 by elastically engaging the concave portion 63 c and the spring portion.

In this manner, the inner seal gasket 6
1 'and the outer sealing gasket 62'
3, when the valve seat member 63 (gas control valve body 10b) is removed from the valve base 16, the gaskets 61 'and 62' together with the valve seat member 63.
Also, the gasket need not be removed from the valve seat member connection surface 16a as in the above-described embodiment,
Replacement of the gaskets 61 ', 62' becomes easier. The present invention is not limited to the above embodiment, and can be appropriately modified and applied without departing from the spirit of the invention.

[0035]

As described above in detail, according to the first aspect of the present invention, the seal member having the orifice can be removed without removing the valve base from the piping system. It will be easier. According to the second aspect of the present invention, since the seal member is sandwiched and pressed between the valve seat member and the valve base, the seal member can be securely sealed, and there is no back leakage or gas leakage to the outside. .

Further, according to the third aspect of the present invention,
The second flow path does not need to be removed from the pipe, and the valve seat member can be removed from the valve base, so that the replacement of the seal member having the orifice is further facilitated.
Also, it can correspond to various types of valve bases.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a pilot type gas control valve according to an embodiment.

FIG. 2 is a longitudinal sectional view of an inner seal member.

FIG. 3 is a plan view of a valve base.

FIG. 4 is a longitudinal sectional view of a pilot type gas control valve according to another embodiment.

FIG. 5 is a longitudinal sectional view of a conventional gas control valve.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Gas control valve 10a, 10b Gas control valve main body 16 Valve base 16a Valve seat member connecting surface 21 First port flow path 22 Second port flow path 21a First port vertical flow path part 22a Second port vertical flow path part 51 Pilot Valve cylinder 52 Piston 53 Piston rod 54 Diaphragm 55 Return spring 56 Diaphragm fixing bracket 57 Intermediate member 58 Valve element 59 Valve seat 60 Port for driving air 61, 61 'Gasket for inner seal 61a, 61a' Orifice 62, 62 'For outer seal Gasket 63 Valve seat member 63b Valve base connection surface 63c Retainer holding recess 63d Gasket recess 65 First flow path hole 66 Second flow path hole 70 Gasket Retainer H, H 'Piping system

Claims (3)

[Claims] The present invention has a poppet valve configured so that a valve body and a ring-shaped valve seat can be brought into contact with and separated from each other, and communicates with a first flow passage hole opened in a ring of the ring-shaped valve seat, and A gas control valve having an orifice disposed near a ring-shaped valve seat, comprising: a valve seat member for holding the ring-shaped valve seat, wherein the valve seat member is connected to a ring of the ring-shaped valve seat from a valve base connecting surface. A valve having a valve seat member having the first flow passage hole penetrating therethrough, a valve seat member connection surface for connecting to the valve seat member, and a first port flow passage opening to the valve seat member connection surface. A base, a ring-shaped seal member disposed between a valve base connection surface of the valve seat member and a valve seat member connection surface of the valve base, wherein the first flow passage hole and the first port flow passage are provided; And the orifice is formed on the inner peripheral surface. A gas control valve, comprising: a sealing member; 2. The seal according to claim 1, wherein the seal member is pressed by being sandwiched between a valve base connecting surface of the valve seat member and a valve seat member connecting surface of the valve base. A gas control valve as described. 3. The valve seat member has a second flow passage hole penetrating the valve seat member from a valve base connection surface to outside the ring of the ring-shaped valve seat, and the valve base includes the valve seat. At least one second port passage opening to the member connection surface, wherein the seal member is an inner ring between the valve base connection surface of the valve seat member and the valve seat member connection surface of the valve base. A ring-shaped seal member arranged in a double ring shape, wherein the outer seal member communicates with the second flow path hole and the second port flow path and seals between the second flow path hole and the second port flow path;
The gas control valve according to claim 1, further comprising: