JPH10335359A - Manufacture of electronic component - Google Patents
Manufacture of electronic componentInfo
- Publication number
- JPH10335359A JPH10335359A JP14631897A JP14631897A JPH10335359A JP H10335359 A JPH10335359 A JP H10335359A JP 14631897 A JP14631897 A JP 14631897A JP 14631897 A JP14631897 A JP 14631897A JP H10335359 A JPH10335359 A JP H10335359A
- Authority
- JP
- Japan
- Prior art keywords
- sealing resin
- stencil
- flip chip
- supply passage
- storage chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 239000011347 resin Substances 0.000 claims abstract description 47
- 229920005989 resin Polymers 0.000 claims abstract description 47
- 238000007789 sealing Methods 0.000 claims abstract description 35
- 239000000758 substrate Substances 0.000 claims abstract description 21
- 238000007639 printing Methods 0.000 claims abstract description 13
- 239000007788 liquid Substances 0.000 claims abstract description 11
- 238000003860 storage Methods 0.000 claims description 25
- 238000004891 communication Methods 0.000 claims description 15
- 238000005192 partition Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 abstract description 9
- 230000004888 barrier function Effects 0.000 abstract 1
- 238000012856 packing Methods 0.000 abstract 1
- 238000005520 cutting process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 238000010329 laser etching Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、フリップチップを
搭載するタイプの電子部品の製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing an electronic component on which flip chips are mounted.
【0002】[0002]
【従来の技術】上記電子部品の製造に際し、フリップチ
ップの実装は、フリップチップの電極と基板の電極とを
バンプを介して接続することにより行われ、基板と該基
板上に搭載されたフリップチップとの間にはバンプに基
づく間隙が生ずる。この間隙内には熱サイクル寿命の向
上を目的として封止樹脂が充填される。2. Description of the Related Art In manufacturing the above electronic components, mounting of a flip chip is performed by connecting electrodes of the flip chip and electrodes of the substrate via bumps, and the substrate and the flip chip mounted on the substrate are mounted. And a gap based on the bump is generated between them. This gap is filled with a sealing resin for the purpose of improving the thermal cycle life.
【0003】従来、このような封止樹脂の充填は、液状
封止樹脂を注射器様の容器に充填し吐出させながらフリ
ップチップの側部に描画供給し、しかる後、該樹脂を上
記間隙内に毛細管現象を利用してしみ込ませるという方
法により行われているが、この供給法は次の通りの問題
点があった。Conventionally, such a sealing resin is filled by filling a liquid-like sealing resin into a syringe-like container and drawing and supplying it to the side of the flip chip while discharging the resin. It is performed by a method of impregnating using a capillary phenomenon, but this supply method has the following problems.
【0004】イ 吐出量が一定せず位置精度も悪いた
め、液状封止樹脂の拡がりにむらを生じ易い。(A) Since the discharge amount is not constant and the positional accuracy is poor, the spread of the liquid sealing resin tends to be uneven.
【0005】ロ 描画するため、上記封止樹脂の供給に
時間がかかる。(2) Since drawing is performed, it takes time to supply the sealing resin.
【0006】ハ 多数個を同時に作業できない。(C) A large number cannot be worked simultaneously.
【0007】ニ チップの大きさの違うものが混載され
た基板の場合、作業が困難である。In the case of a substrate on which chips having different sizes are mixed, the operation is difficult.
【0008】[0008]
【発明が解決しようとする課題】本発明者等は上記吐出
描画による樹脂供給法の問題点を解消するべくCOBや
TAB,BGAといったチップの表面及び側面を樹脂封
止する場合に実施されている孔版印刷手段による樹脂供
給法をフリップチップに適用することを試みた。The inventor of the present invention has practiced resin sealing of the surface and side surfaces of a chip such as a COB, TAB, or BGA in order to solve the problem of the resin supply method using the discharge drawing. An attempt was made to apply a resin supply method using stencil printing means to flip chips.
【0009】因みに、図10は電子部品の構造説明図、
図11は上記孔版印刷に適用した孔版の一例を示す説明
図、図12〜14は孔版印刷手段適用による上記封止樹
脂の供給から充填までの状況を工程順に示す説明図であ
る。FIG. 10 is an explanatory view of the structure of an electronic component.
FIG. 11 is an explanatory view showing an example of a stencil applied to the stencil printing, and FIGS. 12 to 14 are explanatory views showing a state from supply to filling of the sealing resin by applying the stencil printing means in the order of steps.
【0010】尚、フリップチップaは通常上面の樹脂封
止は行わないので、図11に示すように、上記孔版1′
に備えられているフリップチップaの収納室2′の上端
は閉じられ下端のみが開放されている。更に封止樹脂の
供給通路3′と上記収納部2′とは隔壁4′により隔離
され、上記供給通路3′は上記チップaの一側辺に沿っ
て設けられている。Since the flip chip a is not usually sealed with a resin on the upper surface, as shown in FIG.
The upper end of the storage chamber 2 'of the flip chip a provided in the above is closed and only the lower end is opened. Further, the supply path 3 'for the sealing resin and the storage section 2' are separated by a partition 4 ', and the supply path 3' is provided along one side of the chip a.
【0011】上記孔版印刷手段による樹脂供給法は上記
従来法の問題点イ〜ニを一掃できるが、図14(イ)に
示すように基板がフラットな状態にあるときは特に問題
はないが、同図(ロ)に示すように、基板bにそりがあ
ったり或いは基板に傾きが生じている場合には、スキー
ジfの作動により供給通路3′を通じ供給された封止樹
脂eが上記チップaと接触せず、バンプcに基づく間隙
d内に充填されない場合が生ずることが判明した。Although the resin supply method using the stencil printing means can eliminate the problems a to d of the conventional method, there is no particular problem when the substrate is in a flat state as shown in FIG. As shown in FIG. 2B, when the substrate b is warped or tilted, the sealing resin e supplied through the supply passage 3 'by the operation of the squeegee f causes the chip a It has been found that there is a case where the gap d based on the bump c is not filled and the gap d is not filled.
【0012】本発明者等は上記問題点を一掃するべく更
に鋭意研究を重ねた結果、ここに本発明を完成するに至
ったものである。The present inventors have conducted further intensive studies to eliminate the above problems, and as a result, have completed the present invention.
【0013】[0013]
【課題を解決するための手段】本発明は、基板上にフリ
ップチップをバンプを介し搭載した後に、上記フリップ
チップの周りの少なくとも一部に液状封止樹脂を供給
し、該封止樹脂を上記基板とフリップチップとの間のバ
ンプにもとづく間隙内に毛細管現象を利用して充填する
電子部品の製造方法に於いて、上記フリップチップの周
りへの上記封止樹脂の供給を孔版印刷手段を適用して行
い、この際、孔版として、上記フリップチップを収納す
るための下端開放,上端閉塞の収納室と、スキージの作
動をして上記封止樹脂が押し込まれる供給通路と、収納
室と供給通路間を隔離していて下端部にこれら両者を連
通させるための連絡通路を有する隔壁を備えた構成のも
のを用いることにより、上記封止樹脂を供給通路から連
絡通路を経て収納室内に直接供給することを特徴とする
電子部品の製造方法に係る。According to the present invention, after a flip chip is mounted on a substrate via a bump, a liquid sealing resin is supplied to at least a part of the periphery of the flip chip, and the sealing resin is supplied to the substrate. In a method of manufacturing an electronic component that fills a gap based on a bump between a substrate and a flip chip by utilizing a capillary phenomenon, a stencil printing means is used to supply the sealing resin around the flip chip. At this time, as a stencil, a storage chamber with an open lower end and a closed upper end for storing the flip chip, a supply passage into which the sealing resin is pushed by operating a squeegee, a storage chamber and a supply passage By using a partition provided with a partition having a communication passage for communicating the two with the lower end thereof, the sealing resin is supplied from the supply passage via the communication passage to the storage chamber. The present invention relates to a method for manufacturing an electronic component, which is directly supplied to an electronic component.
【0014】[0014]
【発明の実施の形態】以下に本発明の一実施形態を添付
図面に基づき説明すると次の通りである。DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the accompanying drawings.
【0015】図1は本発明製造方法に適用される孔版の
一例を示し、該孔版1は樹脂封止対象のフリップチップ
aをバンプcを含めて収納するための下端開放,上端閉
塞の収納室2と、該収納室2の一辺に沿って形成された
樹脂の供給通路3と、該供給通路3を収納室2から隔離
するための隔壁4とを備え、該隔壁4の下端は供給通路
3の下端より少し手前で終結し、該隔壁4の下端下方に
は連絡通路5が形成され、該連絡通路5を介し供給通路
3と収納室2内とは連通されている。FIG. 1 shows an example of a stencil applied to the manufacturing method of the present invention. The stencil 1 is a storage chamber with an open lower end and a closed upper end for storing a flip chip a to be sealed with a resin including a bump c. 2, a resin supply passage 3 formed along one side of the storage chamber 2, and a partition 4 for isolating the supply passage 3 from the storage chamber 2. The communication passage 5 is formed below the lower end of the partition wall 4, and the supply passage 3 is communicated with the inside of the storage chamber 2 through the communication passage 5.
【0016】而して孔版印刷時には、図2に示すように
スキージfの作動により供給通路3内に押し込まれた
封止樹脂eは供給通路3の下端部から連絡通路5を通り
格納室2内に向けて浸入し、よって印刷後においては図
3に示すようにフリップチップaの側部に直接接触す
る。At the time of stencil printing, as shown in FIG. 2, the sealing resin e pushed into the supply passage 3 by the operation of the squeegee f passes through the communication passage 5 from the lower end of the supply passage 3 and enters the storage chamber 2. , So that, after printing, it comes into direct contact with the side of the flip chip a as shown in FIG.
【0017】従って、基板bに多少のそりがあったり或
いは基板bに多少傾きが生じているような場合(図14
ロ参照)であっても、供給された封止樹脂eがフリップ
チップaの側面に直接接触しているので、図4に示すよ
うに封止樹脂eを常法通り毛細管現象単独又は毛細管現
象と真空吸引手段との併用により、バンプcに基づく隙
間d内に支障なく充填することができる。Accordingly, in the case where the substrate b is slightly warped or the substrate b is slightly inclined (FIG. 14).
4), the supplied sealing resin e is in direct contact with the side surface of the flip chip a. Therefore, as shown in FIG. The gap d based on the bump c can be filled without any trouble by the combined use with the vacuum suction means.
【0018】以下に、本発明製造法に適用される孔版1
につき更に詳細に説明する。Hereinafter, a stencil 1 applied to the production method of the present invention will be described.
Will be described in more detail.
【0019】孔版1に備えられる収納室2はフリップチ
ップaの寸法誤差を補正吸収するために該チップaより
僅かに大きく形成され、通常は収納したフリップチップ
aとの間に0.01〜1mm程度の隙間が生ずる程度の大
きさに形成される。The storage chamber 2 provided in the stencil 1 is formed slightly larger than the flip chip a in order to correct and absorb the dimensional error of the flip chip a. It is formed in such a size that a gap is formed.
【0020】収納室2の上端を閉じる天面2a(図1参
照)の厚みは天面としての強度を保持できる範囲ででき
るだけ薄いことが孔版材料の消費の無駄を省くために有
利であり、通常は0.01〜1mm程度の範囲内から孔版
材料の材質等を考慮し適宜選択される。It is advantageous for the top surface 2a (see FIG. 1), which closes the upper end of the storage chamber 2, to be as thin as possible within a range that can maintain the strength as the top surface, in order to reduce waste of the stencil material. Is appropriately selected from the range of about 0.01 to 1 mm in consideration of the material of the stencil material and the like.
【0021】図5は図1の供給通路3の部分を示す平面
図であり、供給通路3を収納室2の一側辺に沿ってその
ほぼ全長に亘り形成した場合が示されている。FIG. 5 is a plan view showing a portion of the supply passage 3 in FIG. 1 and shows a case where the supply passage 3 is formed along one side of the storage chamber 2 over substantially the entire length thereof.
【0022】供給通路3は図1に示すように孔版1を貫
通している。供給通路3の開口幅D(図5参照)は封止
樹脂の供給量を確保し得る範囲であれば特に制限されな
いが、あまり大きすぎると高密度実装というフリップチ
ップの目的に合わなくなるので、0.1〜3mm程度の範
囲内から適宜選択される。The supply passage 3 penetrates the stencil 1 as shown in FIG. The opening width D of the supply passage 3 (see FIG. 5) is not particularly limited as long as the supply amount of the sealing resin can be ensured. However, if it is too large, it will not meet the purpose of the flip chip of high-density mounting. It is appropriately selected from a range of about 1 to 3 mm.
【0023】また連絡通路5の上下幅はあまり小さすぎ
ると連絡の機能を果たさなくなり、一方大きすぎると封
止樹脂の過剰浸入により該樹脂がフリップチップの天面
側にまわりこみ天面を汚す恐れがあるので、0.01〜
1mm程度の範囲内より、供給通路3の開口幅D等を考慮
し適宜選択される。If the vertical width of the communication path 5 is too small, the function of communication is not fulfilled. On the other hand, if it is too large, the sealing resin may enter the top surface of the flip chip due to excessive infiltration of the flip chip and contaminate the top surface. Because there is 0.01 ~
It is appropriately selected from the range of about 1 mm in consideration of the opening width D of the supply passage 3 and the like.
【0024】供給通路3は図1,5に示すように収納室
2の少なくとも一辺に沿って形成されていればよいが、
場合によっては収納室2の4辺の内の複数辺に沿って形
成するようにしてもよい。The supply passage 3 may be formed along at least one side of the storage chamber 2 as shown in FIGS.
In some cases, it may be formed along a plurality of sides of the four sides of the storage room 2.
【0025】図6は供給通路3を収納室2(図7参照)
の4辺の全てに沿って設けた場合を示し、各辺の供給通
路3,3の間には間隔がとられ、該間隔部6により、図
6に示すように4辺の供給通路3を基準に孔版2は内,
外部2A,2Bが一体に接続している。FIG. 6 shows the supply passage 3 in the storage chamber 2 (see FIG. 7).
This shows a case in which the supply passages 3 are provided along all four sides. A space is provided between the supply passages 3 on each side, and the supply passages 3 on the four sides are formed by the space portions 6 as shown in FIG. The stencil 2 is the inside,
External parts 2A and 2B are integrally connected.
【0026】図8は図7の8−8線に沿う断面図であ
り、収納室2周りの4辺の隔壁4は間隔部6に於いて一
体に接続している。FIG. 8 is a sectional view taken along the line 8-8 in FIG. 7, and the partition walls 4 on the four sides around the storage chamber 2 are integrally connected at the space 6.
【0027】隔壁4下端の連絡通路5は供給通路2ごと
に独立していてもよいし或いは全体が連通していてもよ
い。後者の場合には、間隔部6の下端部が連絡通路5の
連通のために切除される。図1,7に於いて、符号7は
供給通路3の外側に形成された下端から上向きに凹入す
る凹みであって、該凹み7は毛管現象による液状封止樹
脂の孔版1への裏回りを防止するためのものである上記
孔版1の材質はステンレス,アルミ,銅などの金属、プラ
スチック類、ガラス、セラミックなどの無機質など任意
である。The communication passage 5 at the lower end of the partition wall 4 may be independent for each supply passage 2 or may be entirely connected. In the latter case, the lower end of the space 6 is cut off for communication with the communication passage 5. In FIGS. 1 and 7, reference numeral 7 denotes a recess formed on the outside of the supply passage 3 and recessed upward from the lower end thereof. The recess 7 is behind the liquid sealing resin to the stencil 1 by capillary action. The material of the stencil 1 for preventing the stencil is arbitrary, such as metals such as stainless steel, aluminum and copper, plastics, and inorganic materials such as glass and ceramic.
【0028】孔版の孔部,凹部等の加工は常法に従えば
よく、例えば、金属には切削,レーザーなどの物理的加
工、薬液などによるエッチング加工が、またプラスチッ
ク類には切削,レーザーなどの物理的加工や注型,射出な
どの成型加工が、また無機質には切削,レーザーなどの
物理加工や焼結等の成型加工が適用される。Processing of the holes and recesses of the stencil may be carried out in accordance with a conventional method. For example, cutting, laser or other physical processing, etching with a chemical solution, etc. for metals, and cutting, laser, etc. for plastics, etc. For example, physical processing such as casting, injection, and injection molding, and physical processing such as cutting and laser, and molding processing such as sintering are applied to inorganic materials.
【0029】孔版1が金属製の場合には、図9に示すよ
うに、上中下1a,1b,1cの3層構造とすることによ
り、切削、レザー切断、エッチングなどの加工手段を適
用して容易に製造することができる。When the stencil 1 is made of metal, as shown in FIG. 9, the stencil 1 has a three-layer structure of upper, middle, lower, 1a, 1b, and 1c, so that processing means such as cutting, laser cutting, and etching can be applied. And can be easily manufactured.
【0030】[0030]
【発明の効果】本発明によれば、電子部品の基板に傾斜
がない場合はもとより傾斜がある場合であっても、孔版
印刷手段適用によるフリップチップに対する樹脂供給か
らパンプに基づく間隙内への樹脂充填までの工程を支障
なく行うことができる電子部品の製造方法を提供するこ
とができる。According to the present invention, even when the substrate of the electronic component has no inclination or not, the resin is supplied from the resin supply to the flip chip by the stencil printing means into the gap based on the pump. It is possible to provide a method of manufacturing an electronic component that can perform a process up to filling without any trouble.
【図1】本発明製造方法に適用される孔版の一例を示す
縦断面図である。FIG. 1 is a longitudinal sectional view showing an example of a stencil applied to the production method of the present invention.
【図2】本発明製造方法における孔版印刷手段適用によ
る液状封止樹脂の供給状況を示す縦断面図である。FIG. 2 is a longitudinal sectional view showing a supply state of a liquid sealing resin by applying a stencil printing means in the manufacturing method of the present invention.
【図3】フリップチップに対する液状封止樹脂の供給状
況を示す縦断面図である。FIG. 3 is a longitudinal sectional view showing a state of supplying a liquid sealing resin to a flip chip.
【図4】同、液状封止樹脂の充填状況を示す縦断面図で
ある。FIG. 4 is a longitudinal sectional view showing a filling state of the liquid sealing resin.
【図5】収納室と供給通路の形成位置関係を概略的に示
す平面図である。FIG. 5 is a plan view schematically showing a positional relationship between a storage chamber and a supply passage.
【図6】孔版の他の実施形態を示す平面図である。FIG. 6 is a plan view showing another embodiment of a stencil.
【図7】図6の縦断面図である。FIG. 7 is a longitudinal sectional view of FIG.
【図8】図7の8−8線に沿う縦断面図である。FIG. 8 is a longitudinal sectional view taken along line 8-8 in FIG. 7;
【図9】3層構造の本発明孔版の一例を示す縦断面図で
ある。FIG. 9 is a longitudinal sectional view showing an example of a stencil of the present invention having a three-layer structure.
【図10】フリップチップ搭載の電子部品の説明図であ
る。FIG. 10 is an explanatory diagram of an electronic component mounted with a flip chip.
【図11】本発明で検討した孔版の説明図である。FIG. 11 is an explanatory view of a stencil studied in the present invention.
【図12】図11に示す孔版を使用して液状封止樹脂の
供給を行っている状況を示す説明図である。FIG. 12 is an explanatory view showing a situation in which a liquid sealing resin is supplied using the stencil shown in FIG. 11;
【図13】樹脂の供給後の状況を示す説明図である。FIG. 13 is an explanatory diagram showing a situation after the resin is supplied.
【図14】供給された樹脂の充填状況を基板に傾斜がな
い場合とある場合とに分けて示す説明図である。FIG. 14 is an explanatory diagram showing the state of filling the supplied resin in a case where the substrate has no inclination and in a case where the substrate is not inclined.
1 孔版 2 収納室 3 供給通路 4 隔壁 5 連絡通路 6 間隔部 7 凹み DESCRIPTION OF SYMBOLS 1 Stencil 2 Storage room 3 Supply passage 4 Partition wall 5 Communication passage 6 Interval 7 Depression
Claims (4)
載した後に、上記フリップチップの周りの少なくとも一
部に液状封止樹脂を供給し、該封止樹脂を上記基板とフ
リップチップとの間のバンプにもとづく間隙内に毛細管
現象を利用して充填する電子部品の製造方法に於いて、
上記フリップチップの周りへの上記封止樹脂の供給を孔
版印刷手段を適用して行い、この際、孔版として、上記
フリップチップを収納するための下端開放,上端閉塞の
収納室と、スキージの作動をして上記封止樹脂が押し込
まれる供給通路と、収納室と供給通路間を隔離していて
下端部にこれら両者を連通させるための連絡通路を有す
る隔壁を備えた構成のものを用いることにより、上記封
止樹脂を供給通路から連絡通路を経て収納室内に直接供
給することを特徴とする電子部品の製造方法。After a flip chip is mounted on a substrate via a bump, a liquid sealing resin is supplied to at least a part of the periphery of the flip chip, and the sealing resin is supplied between the substrate and the flip chip. In a method of manufacturing an electronic component that fills a gap based on a bump by utilizing a capillary phenomenon,
The supply of the sealing resin around the flip chip is performed by applying a stencil printing means. At this time, as a stencil, a lower-end open, upper-end closed storage chamber for storing the flip chip, and operation of a squeegee By using a supply passage into which the sealing resin is pushed, and a partition having a communication passage for isolating the storage chamber and the supply passage and communicating the lower end with the supply passage, And supplying the sealing resin directly from the supply passage to the storage chamber via the communication passage.
刷手段適用による液状封止樹脂の供給に使用される孔版
であって、電子部品の基板上にバンプを介し搭載された
フリップチップを収納するための下端開放,上端閉塞の
収納室と、スキージの作動をして液状封止樹脂が押し込
まれる供給通路と、供給通路と収納室間を隔離していて
下端部にこれら両者を連通させるための連絡通路を備え
た隔壁とを備えていることを特徴とする孔版。2. A stencil used for supplying a liquid sealing resin by applying a stencil printing means, wherein the flip chip is mounted on a substrate of an electronic component via a bump. A storage chamber with an open lower end and a closed upper end for storing the squeegee, a supply passage into which the liquid sealing resin is pushed by operating the squeegee, and a space between the supply passage and the storage chamber, which are connected to the lower end. A stencil provided with a communication passage for causing the stencil to have a stencil.
に沿ってほぼ全長に亘り形成されていることを特徴とす
る請求項2記載の孔版。3. The stencil according to claim 2, wherein said supply passage is formed along at least one side of the storage chamber over substantially the entire length.
連絡通路の上下幅が0.01〜1mmであることを特徴と
する請求項2又は3記載の孔版。4. The supply passage has an opening width of 0.1 to 3 mm,
4. The stencil according to claim 2, wherein a vertical width of the communication passage is 0.01 to 1 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14631897A JP2899749B2 (en) | 1997-06-04 | 1997-06-04 | Electronic component manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14631897A JP2899749B2 (en) | 1997-06-04 | 1997-06-04 | Electronic component manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10335359A true JPH10335359A (en) | 1998-12-18 |
| JP2899749B2 JP2899749B2 (en) | 1999-06-02 |
Family
ID=15404965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14631897A Expired - Fee Related JP2899749B2 (en) | 1997-06-04 | 1997-06-04 | Electronic component manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2899749B2 (en) |
-
1997
- 1997-06-04 JP JP14631897A patent/JP2899749B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2899749B2 (en) | 1999-06-02 |
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