JPH1047914A - 移動鏡支持機構 - Google Patents

移動鏡支持機構

Info

Publication number
JPH1047914A
JPH1047914A JP8221753A JP22175396A JPH1047914A JP H1047914 A JPH1047914 A JP H1047914A JP 8221753 A JP8221753 A JP 8221753A JP 22175396 A JP22175396 A JP 22175396A JP H1047914 A JPH1047914 A JP H1047914A
Authority
JP
Japan
Prior art keywords
movable mirror
mirror
bolt
moving
support mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8221753A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1047914A5 (fr
Inventor
Toshiya Otomo
俊弥 大友
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP8221753A priority Critical patent/JPH1047914A/ja
Priority to US08/826,381 priority patent/US6012697A/en
Priority to KR1019970013309A priority patent/KR100467262B1/ko
Publication of JPH1047914A publication Critical patent/JPH1047914A/ja
Priority to US09/428,540 priority patent/US6264165B1/en
Publication of JPH1047914A5 publication Critical patent/JPH1047914A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP8221753A 1996-04-12 1996-08-05 移動鏡支持機構 Pending JPH1047914A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP8221753A JPH1047914A (ja) 1996-08-05 1996-08-05 移動鏡支持機構
US08/826,381 US6012697A (en) 1996-04-12 1997-04-09 Stage and supporting mechanism for supporting movable mirror on stage
KR1019970013309A KR100467262B1 (ko) 1996-04-12 1997-04-10 스테이지및스테이지로의이동경지지기구
US09/428,540 US6264165B1 (en) 1996-04-12 1999-10-28 Stage and supporting mechanism for supporting movable mirror on stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8221753A JPH1047914A (ja) 1996-08-05 1996-08-05 移動鏡支持機構

Publications (2)

Publication Number Publication Date
JPH1047914A true JPH1047914A (ja) 1998-02-20
JPH1047914A5 JPH1047914A5 (fr) 2004-08-19

Family

ID=16771676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8221753A Pending JPH1047914A (ja) 1996-04-12 1996-08-05 移動鏡支持機構

Country Status (1)

Country Link
JP (1) JPH1047914A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010206066A (ja) * 2009-03-05 2010-09-16 Taiheiyo Cement Corp Ｘｙステージのスライダ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010206066A (ja) * 2009-03-05 2010-09-16 Taiheiyo Cement Corp Ｘｙステージのスライダ

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