JPH1048252A - Pattern inspection equipment - Google Patents

Abstract

(57) [Problem] The present invention can easily inspect various kinds of substrates having different electrode patterns by changing the substrate direction, shortening the transport path of the substrate in the inspection section as much as possible, and improving the inspection efficiency. It is another object of the present invention to provide an inspection apparatus capable of easily adjusting and responding to a position of a probe in accordance with an electrode pattern of a substrate to be inspected. SOLUTION: The present invention moves a substrate by reciprocating between a first pattern inspection unit 31 and a second pattern inspection unit 32 and conveys a substrate that is horizontally rotatably provided and changes the direction of the substrate. A table 45, a first transporter 36 provided near the load unit 30 for transporting the substrate on the load unit from the load unit to the transport table 45 located in the first pattern inspection unit 31, and the second pattern A second transporter 37 is provided near the inspection unit 32 and transports a substrate from the transport table 45 located in the second pattern inspection unit 32 to the outside thereof.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for inspecting an electrode pattern formed on a substrate.

[0002]

2. Description of the Related Art FIGS. 8 to 10 show a conventional apparatus for inspecting a substrate having an electrode pattern made of a conductive film.
This conventional inspection apparatus J unloads a loader unit 2 provided with a large number of transport rollers 1 for transporting substrates, an inspection unit 3 provided subsequent to the loader unit 2, and a substrate inspected by the inspection unit 3. Therefore, an unloader unit 4 provided in parallel with the loader unit 2 is mainly configured. The inspection unit 3 includes:
The guide member 6 and the rail member 7 shown in FIG. 9 are movable in the left-right direction (the length direction of the inspection device: X direction) in FIG.
A movable table 10 is provided by a guide member 8 and a rail member 9 so as to be movable in a direction perpendicular to the paper surface of FIG. 9 (the width direction of the inspection apparatus: Y direction), and is conveyed to the movable table 10 from the loader unit 2. The inspection unit 3 shown in FIG.
(Direction) while performing inspection.

In the inspection section 3, a portion close to the loader section 2, that is, a portion on the rear side of the loader section 2 is an introduction section 11 of the inspection section 3, and as shown in FIG. A camera 12 for confirming the position of the substrate on the moving table 10 located at the introduction section 11;
13 and their cameras 12, 1 in FIG.
On the right side of 3 (on the rear side of the introduction section 11), a needle holder 16 provided with a plurality of probe needles 15 for substrate inspection is provided.
The area where the needle holder 16 is provided is used as a first inspection section 17, and a portion adjacent to the first inspection section 17 is extended from the unloader section 4 in the lengthwise direction of the unloader section 4 and separated from the second unloader section 4. An inspection unit 18 is provided.
The second inspection unit 18 is provided with a needle holder 21 having a plurality of probe needles 20 whose directions are different from the probe needles 15 by 90 °. Further, a defective product storage section 22 is provided further rearward of the first inspection section 17 provided on the rear side of the loader section 2.

In the case of inspecting a substrate K using the inspection apparatus J having the above-described configuration, the steps described below with reference to FIG. Inspection of K ₁ and K ₂ is performed. The two substrates herein, FIG. 10 (B), the ones that arranging a large number of electrodes 25 of parallel straight conductive film to the short side of the first substrate K ₁ rectangular two rows the first substrate K ₁ where transistors are provided so as to, first and second arrayed formed as the substrate K ₂ those arranging a large number of electrodes 26 of parallel straight conductive film in the long side becomes three columns 2 is a substrate K _2. Therefore, in the first substrate K ₁ and the second substrate K ₂ , the electrodes 25 and the electrodes 26 are arranged so that the directions of the electrodes 25 and 26 are different by 90 °.

[0005] First, to check the substrate K _1, as shown the front substrate K ₁ which is transported to the loader section 2 as indicated by an arrow a shown in FIG. 10 (A) from step from the loader section 2 in the arrow b The board K ₁ is moved to the introduction section 11 side of the inspection section 3, and the substrate K ₁ is set on the moving table 10 located at the introduction section 11. Provides accurate positioning of the substrate K ₁ by the camera 12, 13 provided above the moving table 10, where the movable table 1
Substrate K by a chuck mechanism (not shown) built in
₁ is fixed on the moving table 10. Then arrows moving table 10 c, is moved to the first inspection unit 17 as shown in d fixed, probe 1 more probe to the electrode 25 · on the substrate K ₁
5 are inspected for defects such as disconnection or short circuit of the electrodes 25. The inspection is moved obliquely brought close to the unloader section 4 to indicate moving table 10 if the substrate K ₁ is determined that there is no defect in the nondefective arrow e in FIG. 10 by, from which as shown by the arrow f the unloader section 4 to move the substrate K ₁ to be conveyed to a subsequent step. Further, it accommodated by carrying the substrate K ₁ to the defective equipment container 22 as shown by the arrow g if any defects in the substrate K ₁ Inspection of the are determined is found to be defective.

[0006] Then, the inspecting a substrate K _2, the front substrate is carried into the loader unit 2, as shown from step arrow A K ₂
Arrow B → C → D as moved to the second inspection unit 18 of the fixed plurality of probe to electrodes 26 ... on the substrate K ₂ stylus 20 ...
Are inspected for defects such as disconnection or short circuit of the electrodes 26. If it is determined by this inspection that the substrate ₂ is non-defective and has no defect, the moving table 10 is moved as shown by the arrow E to approach the unloader section 4, and the substrate K is then moved to the unloader section 4 as shown by the arrow F. ₂ is moved and transported to the next process. If any defect is found by the above-mentioned inspection and is determined to be defective, the substrate K ₂
Is transported to and stored in the defective product storage section 22 as shown by an arrow G → g.

Next, the electrode pattern on the substrate is shown in FIG.
Since there are various types other than the two types shown in (B), in the inspection apparatus S, for example, the needle holders 16 and 2 are used.
In FIG. 1, a plurality of slits 26 are formed as shown in FIG. 7 (B), and a plurality of probe needles 15 or probe needles 20 are fixed to these slits 26 by bolts, respectively. The position of the probe 15 or the probe 20 is adjusted in accordance with the electrode pattern described above, so that it is possible to cope with the inspection of substrates having various electrode patterns.

[0008]

According to the above-described inspection apparatus J, as shown in FIG. 10 (A), as shown in FIG.
It is possible to inspect the substrates K ₁ and K ₂ shown in FIG. However, the In the inspection apparatus, an arrow b in begins to inspect one of the substrates K ₁ at a time, substrate K ₁ in FIG. 10 (A)
→ c → To further moved as indicated by arrow e in an oblique direction from the move d, likely the longer it takes for the transport of the substrate K1, then the standby time in the load unit 2 of the substrate K ₁ to be inspected There was a problem that was long. Moreover, this situation is the same when inspecting the substrate K _2, the substrate K ₂ arrow B
In addition to the operation of moving linearly in the direction and then moving diagonally as shown by arrow C, the moving time becomes longer, and
After the inspection in the inspection unit 18, the first
Since it is necessary to move a long distance along the side of the inspection unit 11, the return time of the moving table 10 to the introduction unit 11 tends to be slow, and the time of the entire inspection becomes long. Was.

In the inspection apparatus J having the above configuration,
While one substrate K ₁ is being fixed to the moving table 10 for inspection, the next inspection substrate K ₁ needs to be in the loader unit 2. That is, there is a problem that is moved from the table 10 the substrate K ₁ of completion of the inspection to the unloader section 4 or defective housing portion 22 is not from unable examines the next substrate K1, is to increase the testing efficiency more could not. Further, when inspecting substrates having different electrode patterns, the conventional inspection apparatus J requires the probe needles 15 and 20 bolted to the needle holders 16 and 21.
However, since the pattern of the electrodes on the substrate is extremely fine, it takes time to adjust the positions of the probes 15 and 20 and changes the setup when inspecting a substrate having different electrodes. In addition, there is a problem that the inspection takes time and the inspection efficiency is reduced.

The present invention has been made in view of the above circumstances, and it is possible to easily inspect a variety of substrates having different electrode patterns by freely changing the direction of the substrate, and to inspect the substrate in an inspection unit. The purpose of the present invention is to provide an inspection apparatus which can increase the inspection efficiency by shortening the transport path of the probe as much as possible, and can easily adjust and respond to the position of the probe in accordance with the electrode pattern of the substrate to be inspected. .

[0011]

In order to solve the above-mentioned problems, the present invention is directed to a first substrate having a plurality of parallel first electrode patterns formed thereon, and a plurality of parallel first electrode patterns orthogonal to the first electrode pattern. A load portion capable of individually carrying a second substrate on which a second electrode pattern to be formed is formed, and a first probe having a plurality of first probes and contacting the first probe with the first electrode pattern. A first pattern inspection unit for inspecting an electrode pattern;
A plurality of second probes arranged opposite to the probe,
A second pattern inspection unit for inspecting the second electrode pattern by bringing a second probe into contact with the second electrode pattern is arranged in series, and is disposed between the first pattern inspection unit and the second pattern inspection unit. A transfer table provided to reciprocate to move the substrate and to be horizontally rotatable to change the direction of the substrate; and a substrate provided in the vicinity of the load unit to move the substrate on the load unit from the load unit to the first pattern. A first transporter for transporting to a transport table located at an inspection section, and transporting a substrate to the outside from a transport table provided near the second pattern inspection section and located at the second pattern inspection section. A second transporter is provided.

According to this configuration, the substrate is transferred to the first pattern inspection unit or the second pattern inspection unit by changing the direction of the transfer table for transferring the substrate by 90 ° in accordance with the electrode pattern of the substrate carried into the load unit. The substrate can be transported to inspect the electrode pattern of each substrate. Therefore, even if the substrates have different electrode patterns, the electrode pattern inspection can be performed by appropriately selecting the first pattern inspection unit or the second pattern inspection unit. In addition, since the loading unit, the first pattern inspection unit, and the second pattern inspection unit are arranged in series, the transport path of the substrate can be minimized, and efficient inspection with less wasteful transport time during substrate transport can be performed. .

Next, in the present invention, a substrate provided outside the second pattern inspection unit and transported by the second transporter is installed and is provided rotatably along a horizontal plane to carry out the substrate. An unloading section having a carry-out table for changing the direction and a defective substrate storage device connected to the unloading section and storing a defective substrate on the unloading section may be provided. With this configuration, a good substrate and a defective substrate determined in the inspection can be sent out in different directions, the defective substrate can be stored in the defective substrate storage device, and the non-defective substrate can be sent to the next step.

Further, in the present invention, the transfer device includes a pair of support claws for supporting the substrate by contacting the lower surface of the end of the substrate, and moving the support claws vertically and horizontally to move the support claws from the vicinity of the transfer table. It may be configured to have a transport mechanism for moving it to the vicinity of one pattern inspection unit. With this configuration, the substrate can be transported from the loading section to the transport table of the first pattern inspection section, and the substrate can be carried out of the second pattern inspection section after moving the transport table to the second pattern inspection section.

In the above structure, a needle holder provided with a plurality of probe needles at predetermined intervals for contacting the electrode patterns on the substrate is individually provided on the transfer table moving area of the first pattern inspection unit and the second pattern inspection unit. A plurality of needle holders provided with probe needles corresponding to individual patterns of a plurality of types of substrates having different pattern intervals to be inspected by the first pattern inspection unit or the second pattern inspection unit. Each of the pattern inspection section and the second pattern inspection section is detachably attached. According to this configuration, by changing the needle holder according to the pattern of the substrate to be inspected, the inspection can be performed according to the electrode pattern of the substrate. Also, rather than fixing the needle holder and exchanging and replacing many types of probe with it, prepare a plurality of needle holders with the probe fixed in a predetermined position in advance, and match them to the substrate to be inspected. Since it is easier to perform the work of exchanging a plurality of probe needles for each needle holder, it is easy to change the setup when the test substrate is changed, and the workability is improved.

[0016]

Embodiments of the present invention will be described below with reference to the drawings. FIGS. 1 to 6 show an example of an inspection apparatus according to the present invention. As shown in FIG. 1, an outline of an inspection apparatus S according to the present invention is shown in FIG. A first pattern inspection unit 31 and a second pattern inspection unit 32 sequentially arranged in series with the unit 30
, An unloading section 33, and a first transporting machine 3 provided between the loading section 30 and the side of the first pattern inspection section 31.
6 and a second transporter 37 provided on the side of the second pattern inspection unit 32 and the unloading unit 33. In addition, in the inspection device S of this example,
The direction in which the loading unit 30, the first pattern inspection unit 31, the second pattern inspection unit 32, and the unloading unit 33 are arranged in series is defined as the substrate transport direction, which is defined as the longitudinal direction (X direction) of the inspection device S. Is defined as the width direction (Y direction).

The loading section 30 has a plurality of transport rollers 40 aligned in the longitudinal direction of the inspection device S,
The unloading section 33 includes rollers 39 aligned in the width direction of the inspection device S. The unloading section 33 is loaded on the loading section 30 or on the unloading section 33 so that a substrate to be described later can be set on the loading section 30. Inspection device S
The substrate set on the unloading section 33 can be transported in the width direction (Y direction) of the inspection device S in the longitudinal direction (X direction) of the inspection apparatus S. The unloading section 33 has a carry-out table 38 that is rotatably provided in a horizontal direction.
Is configured to be able to be conveyed in the L direction or the M direction.
On the M direction side in FIG. 2 of the unloading section 33, a recovery device 90 for a defective substrate is provided. Further, the loading unit 30
Is slightly smaller than the width of the substrate K carried into the load unit 30.

Next, rail members 42 and 43 are laid along the longitudinal direction of the inspection apparatus S in a portion between the loading unit 30 and the unloading unit 33, and these rail members 42 and 43 are laid.
A transfer table 45 is provided on the rail 43 so as to be movable along the rail members 42, 43, and a portion between the rail members 42, 43 is driven to rotate by a motor 46 as shown in FIG. A screw shaft 47 is provided. The screw shaft 47 is screwed into a nut member provided at a lower portion of the transfer table 45 so that the transfer table 45 is rotated by the screw shaft 47 in the first pattern inspection unit 3.
It is configured to be able to reciprocate between the first and second pattern inspection units 32.

Next, on the side of the loading section 30 and the first pattern inspection section 31, along the longitudinal direction of the inspection apparatus S, FIG.
A transfer rail member 50 showing a detailed structure is provided. The transfer rail member 50 is provided with an arm member 51 movably in the longitudinal direction of the inspection apparatus S along the transfer rail member 50, and provided on the transfer rail member 50. The arm device 51 is configured to be able to reciprocate between a position above the load unit 30 and a position above the first pattern inspection unit 31 by a cylinder device (rodless cylinder) 52. As shown in FIG. 4, a support hand 55 is provided at a distal end of the arm member 51 so as to be vertically movable via a cylinder device 53. This support hand 55
Support plate 56 attached to the lower end of cylinder device 53
And support claws 58, 58 attached to both ends of the support plate 56 to hold the substrate K to be transported from both sides in the width direction. The spacing between the support claws 58 is slightly smaller than the width of the substrate K so that the substrate K can be held from both sides. The transfer rail member 50 and the arm member 51
, Cylinder device 52, cylinder device 53, and support hand 5
5, a support plate 56, and support claws 58, 58 to form a first transfer device 36, and a transfer mechanism is formed by the transfer rail member 50, the arm member 51, the cylinder device 52, and the cylinder device 53. .

With these constructions, the support hand 55 can be reciprocated between the load section 30 and the first inspection section 31 by the operation of the cylinder device 52, and the support hand 55 can be moved by the cylinder device 53. The height of the support claws 56, 56 is adjusted to be lower than the transfer table 45, and the support plate 56 is positioned slightly above the transfer table 45. 3
By moving the support hand 55 to the first side, the substrate K whose both ends are supported by the support claws 58, 58 can be transported onto the transport table 45 as shown in FIG. The second pattern inspection unit 32 and the unload unit 33
The second transfer device 37 provided on the side of the first transfer device 36 has the same configuration as that of the first transfer device 36, and moves the arm member 51 to unload the substrate located in the second pattern inspection unit 32. 33.

Next, as shown in FIG. 6, the transfer table 45 is horizontally and rotatably supported on a base 60 provided below the transfer table 45, and is transferred between the transfer table 45 and the base 60. A rotation motor 61 such as a step motor for horizontally rotating the table 45 by 90 ° is provided. Next, a base table 62 is provided below the base 60, and transport rails 63 are laid on the base table 62 in the width direction (Y direction) of the inspection apparatus S. Is supported at the time of movement in the Y direction by a guide member 64 provided on the lower surface thereof and engaged with the transport rail 63.
Further, the aforementioned rail members 42 and 43 are laid on the base B below the base table 62, and the base table 6
The base table 62 is supported movably in the length direction (X direction) of the inspection device S by engaging guide members 65, 65 attached to the lower surface of the second unit 2 with the rail members 42, 43. With the above configuration, the transfer table 45 is
It is rotatably supported by 0 ° and is supported at the time of movement in each of the X direction and the Y direction.

The transfer table 45 is formed in a substantially square shape, has a width smaller than the substrate K, and is slightly smaller than an interval between the support claws 58 of the first transfer device 36. On the upper surface of the transfer table 45,
As shown in FIG. 5, a suction groove 66 having a flat rectangular shape is formed. When the suction groove 66 is connected to a vacuum suction device (not shown) and the substrate K is set on the upper surface of the transfer table 45, the suction groove 66 is formed. By depressurizing the internal space, the substrate K placed on the transfer table 45 can be fixed by vacuum suction.

Next, in the portion between the first pattern inspection unit 31 and the second pattern inspection unit 32, which is above the passing position of the transport table 45, the width direction (Y
Direction)), rod-shaped needle holders 70, 71 are installed, and these needle holders 70, 71 are provided in FIG.
As shown in (A), a plurality of needle members 73 for inspection are attached. These needle holders 70, 7
7A, a plurality of locking grooves 74 are formed, and a needle member 73 is formed in a through hole 75 formed in each locking groove 74 by using a bolt (not shown). Are detachably fixed. Further, the needle holders 70 and 71 themselves are also attached to the inspection device S by bolting through through holes 70A formed at both ends thereof, and specifically, the first pattern inspection unit 31 of the inspection device S Support member 8 provided at the boundary with second pattern inspection unit 32
2... Are detachably attached by bolting.

Each of these needle members 73 has a probe 76, and these probes 76 are connected to an energization test device separately provided in the inspection device S. A short-circuit defect, a disconnection defect, or the like of the electrode on the substrate K can be inspected by bringing the electrode into contact with the conductive film electrode of the substrate K and conducting an electric current test. Note that these wiring inspection operations are performed by the needle holders 70 and 7.
The plurality of needle members 73 are intermittently brought into contact with the electrodes of the substrate K by the up and down movement of the up and down movement devices 80 and 81 supporting the first member 1.

The needle holder 70 has various forms other than those shown in the drawings.
A plurality of locking grooves 73 having different numbers and intervals are prepared, and the positions of the locking grooves and the number of needle members 73 to be set are set so as to match the electrode pattern of the substrate K to be inspected. It is attached to the inspection device S so that it can be replaced according to the electrode pattern of the substrate to be inspected. The substrate K to be inspected here
Is equivalent to the substrates K ₁ and K ₂ that have been inspected by the conventional inspection apparatus S described earlier with reference to FIG. 10, for example, a liquid crystal display having a large number of electrodes such as linear electrodes. It is a substrate for the device.

In the inspection apparatus S, a camera is disposed above a boundary between the first pattern inspection unit 31 and the second pattern inspection unit 32 so as to be horizontally movable along a guide member 95 that is horizontally installed. Positioning unit 9 with 96
7 is provided, and the substrate K in the first pattern inspection unit 31 is provided.
Or the position of the substrate K in the second pattern inspection unit 32 can be confirmed.

In order to inspect the substrate K ₁ using the inspection apparatus S having the above-described configuration, first, the substrate K ₁ processed in the previous step is transported to the loading unit 30 and the substrate K _{1 located} in the loading unit 30 is transported. K ₁ is lifted up by the support claws 58 of the first transporter 36, moved to the transport table 45 located in the first pattern inspection unit 31, and set on the transport table 45.
Substrate is carried into the loading section 30 K ₁ has its both end portions from both ends of the load section 30 is the state in which some protrude, loading unit 3 of the supporting pawls 58 of the first conveyor 36
The substrate K on the load unit 30 can be lifted by raising the support claws 58 and 58 on both sides of the substrate 0.

Next, next, the suction groove 6 of the transfer table 45 will be described.
Fixing the substrate K ₁ to the conveying table 45 in 6 in vacuo,
Next, the transport table 45 is intermittently moved at a predetermined speed in the length direction (X direction) of the inspection apparatus S while confirming the position of the transport table 45 by the position confirmation unit 97. A plurality of probe stylus 7 of the needle holder 70 which is vertically moved together with the intermittent movement of the substrate K ₁
6 the conduction inspection of the electrode substrate K ₁ by performing the energizing test by sequentially contacting the necessary portions of the electrode substrate K _1, disconnection inspection, it is possible to perform short-circuit inspection. Once completed the inspection of the substrate K ₁ by moving the first pattern inspection section 31,
The conveying table 45 is passed through a second pattern inspection unit 32 moves the substrate K ₁ in front part of the unloading unit 33,
Here to release the vacuum suction of the substrate K _1, then raised suffer substrate K ₁ is moved to the unloading section 33 by the supporting pawls 58, 58 of the second conveyor 37. Note here, if the substrate K ₁ are those that pass the inspection, the feed to the next step by conveying the substrate K ₁ in the direction of arrow L in FIG. 2 by the roller 39, ... of the unloading unit 33, the substrate K _{If 1} does not pass the inspection, it is sent in the direction of arrow M in FIG.

Next, when inspecting the substrate K ₂ , the substrate K ₂ loaded into the loading section 30 is moved to the transport table 45 by the first transporter 36 and, if the substrate K ₂ is attracted and fixed on the transport table 45, the transport is performed. By rotating the table 45 by 90 °, the substrate K
₂ is changed by 90 °, and the first pattern inspection unit 31 is further changed.
Is passed to the second pattern inspection unit 32 and is conveyed to the second pattern inspection unit 32, where the position of the substrate K is confirmed by the position confirmation unit 97 while the plurality of needle holders 71 that are vertically moved while passing through the second pattern inspection unit 32 it can be inspected of the electrode substrate K ₂ by probe stylus 76. As described above, for two types of substrates K ₁ and K _{2 having} different wiring circuit patterns,
This can be handled by changing the direction of the transfer table 45 by 90 °, and two types of substrates K ₁ , K ₂
Can be easily tested.

In the case of the inspection apparatus S having the above-described configuration, for example, the substrate K ₁ or K ₂ is sent just before the unloading section 33 and the support claws 58, 58 of the second transporter 37 use the substrate K ₁ or K _2. When K ₂ is lifted and moved from the transfer table 45, the transfer table 45 can be immediately moved straight back to the first pattern inspection unit 31 side and returned. In this way, after moving closer unloading section 33 in conjunction with completion of the inspection the substrate K ₁ or K _2, since it restored by linear movement of the conveyor table 45 to the loading unit 30 close a short time, for the next inspection it can be the substrate K ₁ or K ₂ fixed is conveyed to the conveying table 45 from without waste loading section 30 of the time. In the inspection apparatus S having the above-described configuration, the transport table 45 only reciprocates linearly along the length direction of the inspection apparatus S. Since the substrate transport path can be simplified as compared with the apparatus that has performed the above, unnecessary traveling time can be omitted, and the inspection time can be shortened. In the conventional inspection apparatus J shown in FIGS. 8 to 10, it took about 60 seconds to inspect one substrate, but the inspection apparatus S of this example requires three seconds.
Inspection can be performed in about 0 seconds.

Next, in the inspection apparatus S having the above configuration,
It is possible to inspect the substrate of different patterns to other substrate K ₁ and K _2. For this purpose, various types of needle holders having a plurality of locking grooves provided at positions different from the needle holder 71 shown in FIG. 7A are prepared in advance, and dedicated needle holders are provided in accordance with various electrode patterns on the substrate. Needless to say, it is sufficient to replace the needle holder. By doing so, it becomes possible to inspect each of the substrates having various types of electrode patterns, and even in the case where the type of the inspection substrate changes and the setup is changed, it is prepared in advance according to the substrate. It is possible to cope with a change in the setup by simply changing the needle holder, and the efficiency of the inspection process can be increased.

[0032]

As described above, according to the present invention, the direction of the transfer table for transferring a substrate is changed by 90 ° in accordance with the electrode pattern of the substrate carried into the load section, thereby enabling the first pattern inspection section to change the substrate. Alternatively, the substrate can be transported to the second pattern inspection unit to inspect the electrode pattern of each substrate. Therefore, even if the substrates have different electrode patterns, the first
The electrode pattern can be inspected by appropriately selecting the pattern inspection unit or the second pattern inspection unit. Further, according to the present invention, since the loading unit, the first pattern inspection unit, and the second pattern inspection unit are arranged in series, the transport route of the substrate can be minimized, and the transport table reciprocates along the transport route. Since it can be dealt with only by linear movement, the useless time of the transfer table at the time of transferring the substrate can be reduced, and the inspection can be performed with good transfer efficiency and with less waste.

Next, in the present invention, the unloading section is provided with a carry-out table for changing the board transfer direction, so that a good board and a bad board determined in the inspection can be sent out in different directions. Can be sent to and stored in the defective substrate storage device, and the non-defective substrate can be sent to the next process by changing the transport direction. In addition, the transfer device moves the support claws supporting the substrate up and down and horizontally.

In the above configuration, a plurality of needle holders having probe needles corresponding to individual patterns of a plurality of types of substrates having different pattern intervals to be inspected by the first pattern inspection section or the second pattern inspection section are provided. If the first pattern inspection unit and the second pattern inspection unit are configured to be detachably attached to each of the first pattern inspection unit and the second pattern inspection unit, a predetermined needle holder prepared according to the pattern of the substrate to be inspected is exchanged to change the electrode pattern of the substrate. The combined inspection can be performed. Therefore, by preparing a needle holder provided with a probe corresponding to the electrode pattern of the substrate to be inspected, it is possible to deal with any type of substrate by replacing the needle holder. Also, rather than fixing the needle holder and exchanging and replacing many types of probe with it, prepare a plurality of needle holders with the probe fixed in a predetermined position in advance, and match them to the substrate to be inspected. Since it is easier to perform the work of exchanging a plurality of probes for each needle holder, it is easy to change the setup when the test board is changed, and the workability is improved.

[Brief description of the drawings]

FIG. 1 is a plan view showing a schematic structure of an example of an inspection apparatus according to the present invention.

FIG. 2 is a plan view showing a detailed structure of the inspection device.

FIG. 3 is a side view showing a detailed structure of the inspection device.

FIG. 4 is a side view showing a structure of a first transporter and a transport table of the inspection device.

FIG. 5 is a plan view of the transfer table.

FIG. 6 is a side view showing a drive mechanism of the transport table.

FIG. 7A is a side view showing an example of a needle holder applied to the present invention, and FIG. 7B is a side view showing a conventional needle holder.

FIG. 8 is a plan view showing a conventional inspection device.

FIG. 9 is a side view showing a conventional inspection device.

FIG. 10A is a plan view showing an operation state of a conventional inspection device, and FIG. 10B is a plan view showing two examples of substrates inspected by the conventional inspection device.

[Explanation of symbols]

S inspection device K ₁ (first) substrate K ₂ (second) substrate 25, 26 electrode 30 loader unit 31 first pattern inspection unit 32 second pattern inspection unit 33 unloader unit 36 first transporter 37 second transporter 38 Unloading tables 39, 40 Rollers 45 Transfer tables 58 Supporting claws 70 Needle holders 73 Needle members 76 Probes 90 Defective substrate collecting device

Claims (4)

[Claims] 1. A first substrate on which a plurality of parallel first electrode patterns are formed and a second substrate on which a plurality of parallel second electrode patterns orthogonal to the first electrode pattern are formed. And a plurality of first probes, the first probe being brought into contact with the first electrode pattern, and
A first pattern inspection unit for inspecting an electrode pattern; and a plurality of second probes arranged opposite to the first probe, wherein a second probe is brought into contact with the second electrode pattern. A second pattern inspection unit for inspecting the second electrode pattern is arranged in series, and reciprocates between the first pattern inspection unit and the second pattern inspection unit to move the substrate and rotate horizontally. A transfer table that is freely provided and changes the direction of the substrate; and a first transfer table that is provided near the load unit and transfers the substrate on the load unit from the load unit to the transfer table located in the first pattern inspection unit. And a second transporter provided near the second pattern inspection unit and transporting the substrate to the outside from a transport table located in the second pattern inspection unit. Pattern inspection equipment. 2. A substrate having an unloading table provided outside the second pattern inspection unit and provided with a substrate transported by the second transporter and rotatably provided along a horizontal plane. 2. The apparatus according to claim 1, further comprising: an unloading section for changing a carry-out direction of the unloading section; and a defective substrate storage device connected to the unloading section for storing a defective substrate on the unloading section. Pattern inspection device. 3. The first pattern inspection from the loading section, wherein the transporter contacts a lower surface of an end portion of the substrate and supports the substrate by supporting a pair of at least one support claw, and vertically moves and horizontally moves the support claw. The pattern inspection apparatus according to claim 1, further comprising a transport mechanism that moves near the unit or outside the second pattern inspection unit. 4. A needle holder provided with a plurality of probe needles for making contact with an electrode pattern on a substrate at predetermined intervals is individually provided on a transfer table moving area of the first pattern inspection unit and the second pattern inspection unit. A plurality of needle holders having probe needles corresponding to individual patterns of a plurality of types of substrates having different pattern intervals to be inspected by the first pattern inspection unit or the second pattern inspection unit are provided. The pattern inspection apparatus according to any one of claims 1 to 3, wherein the pattern inspection apparatus is detachably attached to each of the two pattern inspection units.