JPH1068620A - Method and equipment for measuring flatness of thin plate - Google Patents
Method and equipment for measuring flatness of thin plateInfo
- Publication number
- JPH1068620A JPH1068620A JP22695896A JP22695896A JPH1068620A JP H1068620 A JPH1068620 A JP H1068620A JP 22695896 A JP22695896 A JP 22695896A JP 22695896 A JP22695896 A JP 22695896A JP H1068620 A JPH1068620 A JP H1068620A
- Authority
- JP
- Japan
- Prior art keywords
- thin plate
- flatness
- measuring
- air
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 26
- 238000001514 detection method Methods 0.000 claims description 8
- 238000002347 injection Methods 0.000 claims description 8
- 239000007924 injection Substances 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 5
- 229910000831 Steel Inorganic materials 0.000 abstract description 9
- 230000005484 gravity Effects 0.000 abstract description 9
- 239000010959 steel Substances 0.000 abstract description 9
- 238000012360 testing method Methods 0.000 abstract description 7
- 239000000725 suspension Substances 0.000 abstract description 5
- 238000007796 conventional method Methods 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 description 45
- 238000005339 levitation Methods 0.000 description 10
- 238000012545 processing Methods 0.000 description 10
- 238000005096 rolling process Methods 0.000 description 5
- 230000001174 ascending effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000007667 floating Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000013208 measuring procedure Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、例えば鋼板やアル
ミニウム板、銅合金板等の薄板の平坦度測定方法および
装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for measuring flatness of a thin plate such as a steel plate, an aluminum plate and a copper alloy plate.
【０００２】[0002]
【従来の技術】近年、上記したような金属薄板について
は、打抜きやプレス加工装置の自動化の進展に伴い、平
坦度に対する要求がますます高度化しつつある。すなわ
ち、平坦度の悪い薄板は、自動加工装置のハンドリング
過程でガイドや工具に突っかかり、不良品を発生させた
り、甚だしい場合にはラインを停止せしめて生産性を著
しく阻害する。2. Description of the Related Art In recent years, with respect to the above-mentioned metal sheet, the demand for flatness has been more and more advanced with the progress of automation of punching and press working equipment. That is, a thin plate having poor flatness hits a guide or a tool in the handling process of the automatic processing apparatus, causing a defective product or, in extreme cases, stopping the line, thereby significantly impairing productivity.
【０００３】一方、間仕切り（パーティッション）、配
電盤、冷蔵庫外板、洗濯機外板等に使用される薄板は、
外観の美観が極めて重要な品質であるので、さらに厳格
な平坦度が要求される。これらの要求に応えるために、
連続焼鈍ライン、めっきライン、リコイラーライン等の
薄板の製造ラインや、レベラーシャーライン等のコイル
加工ラインで、厳格な平坦度出荷検査が実施されてい
る。On the other hand, thin plates used for partitions, switchboards, refrigerator skins, washing machine skins, etc.
Since aesthetic appearance is a very important quality, more stringent flatness is required. To meet these demands,
Strict flatness shipping inspections are performed on thin plate production lines such as continuous annealing lines, plating lines, recoiler lines, and coil processing lines such as leveler shear lines.
【０００４】従来の平坦度検査は、図６に示すように、
切板状の薄板31、またはコイル状に巻き取られる製造ラ
イン上のストリップを、表面が平坦に加工された測定ベ
ッド（定盤）32上に静置し、「隙間ゲージ」と呼ばれる
特殊な測定具33を用いて、薄板31の波高さＨを人手によ
り測定するという極めて能率の悪い方法により行われて
いる。すなわち、この方法でライン上の薄板を測定する
場合には、この間、当然ラインを停止せざるを得ず、生
産性を著しく阻害するのみならず、ラインの自動化・省
力化の大きな妨げとなっている。The conventional flatness inspection is as shown in FIG.
A thin plate 31 in the form of a cut plate or a strip on a production line that is wound into a coil is placed on a measurement bed (surface plate) 32 with a flat surface, and a special measurement called a "gauge" is performed. This is performed by a very inefficient method of manually measuring the wave height H of the thin plate 31 using the tool 33. In other words, when measuring a thin plate on a line by this method, the line must be stopped during this time, not only significantly impairing the productivity but also greatly hindering the automation and labor saving of the line. I have.
【０００５】この問題を解決する測定法として、人手に
よる測定に代わり、レーザー変位計等による板表面の空
間座標測定装置を用いて、短時間で自動的に測定する方
法が知られている（日本鉄鋼協会編，圧延理論部会第10
0 回記念シンポジウム「圧延技術・圧延理論の発展と将
来の潮流」平成６年６月発行，P.186-187 参照）。この
方法によれば、図７に示すように、ラインに組込まれた
測定ベッド（図示せず）上を移動する鋼板41の上方に、
レーザー変位計から成る複数の距離センサー42…が並設
され、これら距離センサー42…によって、鋼板表面まで
の距離が鋼板41の移動に伴って順次検出される。この検
出信号が演算装置43に入力され、この演算装置43によっ
て、測定ベッドからの鋼板表面41の高さ寸法の変化と、
測定間隔に関するデータとから、伸び率・急峻度などが
算出される。As a measuring method for solving this problem, there has been known a method of automatically measuring in a short time using a spatial coordinate measuring device of a plate surface using a laser displacement meter instead of manual measurement (Japanese). Iron and Steel Association, Rolling Theory Working Group No. 10
0th Commemorative Symposium “Development of Rolling Technology and Rolling Theory and Future Trends”, published in June 1994, pp.186-187). According to this method, as shown in FIG. 7, above a steel plate 41 moving on a measurement bed (not shown) incorporated in the line,
A plurality of distance sensors 42 composed of laser displacement meters are arranged in parallel, and the distance sensors 42 sequentially detect the distance to the surface of the steel sheet as the steel sheet 41 moves. This detection signal is input to the arithmetic unit 43, which changes the height of the steel sheet surface 41 from the measurement bed,
From the data on the measurement interval, the elongation rate, steepness, and the like are calculated.
【０００６】ところで、上記のように測定ベッドに鋼板
を載置した状態で平坦度を測定する従来法では、板の自
重によって潜在化している平坦度不良を認識できない。
特に板の反りは、上記の方法では殆ど測定することがで
きず、このため、通常「吊り下げテスト」と呼ばれる測
定がさらに実施されている。すなわち、図８(a) に示す
切板状の吊り下げテスト用サンプル51に対し、同図(b)
に示すように、板幅方向Ｃを上下方向にして上方縁の中
央箇所ＰA で吊り下げ、このときの水平方向の反り量
を、圧延方向Ｌに沿うＬ反り量として測定する。また、
同図(c) に示すように、圧延方向Ｌを上下方向にして上
方縁の中央箇所ＰB で吊り下げ、このときの水平方向の
反り量を、板幅方向Ｃに沿うＣ反り量として測定するの
である。In the conventional method of measuring flatness with a steel plate placed on a measuring bed as described above, it is not possible to recognize a flatness defect that is latent due to the weight of the plate.
In particular, the warpage of the plate can hardly be measured by the above method, and therefore, a measurement usually called a “suspension test” is further performed. That is, the cut-plate-shaped hanging test sample 51 shown in FIG.
As shown in (1), the sheet is suspended at the center P A of the upper edge with the sheet width direction C as the vertical direction, and the amount of warpage in the horizontal direction at this time is measured as the amount of L warpage along the rolling direction L. Also,
As shown in FIG. (C), measuring the rolling direction L in the vertical direction hung at a central portion P B of the upper edge, a horizontal direction of the warp amount at this time, as the C amount of warpage along the plate width direction C You do it.
【０００７】[0007]
【発明が解決しようとする課題】しかしながら、前記し
た測定ベッド上での測定に加え、さらに上述の吊り下げ
テストを行う場合には、このテストでは板を立て、なお
かつ板を吊り上げる作業が必要となるため、さらに余分
な時間を要するばかりでなく、作業者の肉体的負荷も大
きく、効率的な測定を行えないという問題を有してい
る。However, in addition to the above-described measurement on the measuring bed, when performing the above-mentioned suspension test, this test requires an operation of erecting a plate and lifting the plate. Therefore, there is a problem that not only extra time is required but also the physical load on the operator is large, and efficient measurement cannot be performed.
【０００８】本発明は、上記した問題点に鑑みなされた
ものであって、板の反りを含む平坦度を短時間で精度良
く測定でき、また、全体の構成をより簡素なものとなし
得る薄板の平坦度測定方法および装置を提供することを
目的としている。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and is intended to measure a flatness including a warpage of a plate accurately in a short time and to make the whole structure simpler. It is an object of the present invention to provide a flatness measuring method and apparatus.
【０００９】[0009]
【課題を解決するための手段】上記の目的を達成するた
めに、本発明の請求項１の薄板の平坦度測定方法は、薄
板を測定ベッドの上方空間に移動させた後に移動力を解
除して薄板に自由落下を生じさせる薄板移動手段を設
け、この薄板移動手段による移動力解除後に薄板が空中
に位置する時点での薄板各部の空間座標を検出して、こ
の薄板の平坦度を求めることを特徴とするものである。In order to achieve the above-mentioned object, a flatness measuring method for a thin plate according to the present invention comprises releasing a moving force after moving the thin plate to a space above the measuring bed. Providing a thin plate moving means for causing the thin plate to freely fall, detecting the spatial coordinates of each part of the thin plate at the time when the thin plate is in the air after releasing the moving force by the thin plate moving means, and obtaining the flatness of the thin plate. It is characterized by the following.
【００１０】すなわち、上記方法のように、薄板を測定
ベッドの上方空間に移動した後に移動力を解除し、これ
に作用する外力が重力を除いてほぼゼロの非拘束状態と
することで、この状態での薄板は、その内部応力のみに
よる変形、すなわち、自重に左右されない反りや板波が
素直に出現する。したがって、このときの薄板の表面形
状から精度の良い平坦度の測定が可能となる。That is, as in the above-described method, the moving force is released after the thin plate is moved to the space above the measuring bed, and the external force acting on the thin plate is set to a non-constrained state of almost zero except for gravity. In the thin plate in this state, deformation due to only its internal stress, that is, warpage or plate wave that does not depend on its own weight appears straightforwardly. Therefore, it is possible to accurately measure the flatness from the surface shape of the thin plate at this time.
【００１１】しかも上記では、非拘束状態で空中に位置
する薄板に対し、その各部の空間座標が検出され、これ
ら空間座標から、薄板の急峻度の他、全体的なＬ反り量
やＣ反り量も同時に求めることができる。したがって、
より短時間で精度の良い平坦度の測定を効率的に行うこ
とが可能となる。請求項２の薄板の平坦度測定方法は、
略水平状態の薄板を上記薄板移動手段によって上方へと
移動させる途中で移動力を解除することにより、移動力
解除後の薄板に慣性による上昇移動を生じさせ、この上
昇移動とその後の自由落下移動との間で速度がほぼゼロ
となった時点での薄板各部の空間座標から、この薄板の
平坦度を求めることを特徴とするものである。Moreover, in the above, the spatial coordinates of each part of the thin plate which is positioned in the air in an unconstrained state are detected, and from these spatial coordinates, the steepness of the thin plate, the overall amount of L warp and the amount of C warp are detected. Can also be obtained at the same time. Therefore,
It is possible to efficiently measure the flatness with high accuracy in a shorter time. The method for measuring flatness of a thin plate according to claim 2 is as follows.
By releasing the moving force in the middle of moving the thin plate in the substantially horizontal state upward by the thin plate moving means, the thin plate after the moving force is released causes an upward movement by inertia, and this rising movement and the subsequent free fall movement The flatness of the thin plate is obtained from the spatial coordinates of each part of the thin plate at the time when the speed becomes substantially zero.
【００１２】すなわち、薄板が略水平状態で空中を上下
方向に移動する場合には、その移動速度に応じた空気抵
抗が外力として作用する。そこで、上記では、薄板を上
方へと移動させる途中で移動力を解除することにより、
移動力解除後の薄板に慣性による上昇移動を生じさせ
る。この上昇移動の速度は重力の作用で次第に減速して
速度がゼロになった後、自由落下状態に移行することと
なる。この間の速度がゼロとなった時点では、上記した
空気抵抗もほぼゼロとなることから、このときの薄板各
部の空間座標を検出することで、重力および空気抵抗に
も左右されない精度の良い平坦度を求めることができ
る。That is, when the thin plate moves in the vertical direction in the air in a substantially horizontal state, the air resistance corresponding to the moving speed acts as an external force. Therefore, in the above, by releasing the moving force in the middle of moving the thin plate upward,
After the moving force is released, the thin plate is moved upward by inertia. The speed of this ascending movement is gradually reduced by the action of gravity, becomes zero, and then shifts to a free fall state. At the time when the speed becomes zero during this time, the above-mentioned air resistance also becomes almost zero, so by detecting the spatial coordinates of each part of the thin plate at this time, the flatness with high accuracy which is not affected by gravity and air resistance Can be requested.
【００１３】なお、上記の方法を好適に実施するための
平坦度測定装置は、請求項３記載のように、薄板がほぼ
水平状態で載置される測定ベッドと、この測定ベッドの
上方空間に位置するときの薄板各部の空間座標を検出す
る空間座標検出手段と、薄板を測定ベッドの上方空間に
移動させた後に移動力を解除して薄板に自由落下を生じ
させる薄板移動手段と、空間座標検出手段からの検出信
号に基づき薄板が空中に位置するときの空間座標からこ
の薄板の平坦度を演算する演算手段とを設けて構成され
る。A flatness measuring device for suitably implementing the above method is, as described in claim 3, a measuring bed on which a thin plate is placed in a substantially horizontal state, and a flat space above the measuring bed. Spatial coordinate detecting means for detecting the spatial coordinates of each part of the thin plate when it is positioned; thin sheet moving means for releasing the moving force after moving the thin sheet to the space above the measurement bed to cause free fall on the thin sheet; spatial coordinates And calculating means for calculating the flatness of the thin plate from spatial coordinates when the thin plate is positioned in the air based on a detection signal from the detecting means.
【００１４】さらに、上記装置における薄板移動手段
は、例えば請求項４記載のように、測定ベッドの表面か
ら加圧ガスを上方に噴射して薄板を測定ベッド上に浮上
させる加圧ガス噴射装置で構成することができる。すな
わち、測定ベッドをいわゆるエアー浮上テーブル構造と
し、加圧ガスとして例えば圧縮空気を測定ベッド表面か
ら噴射させて、薄板を測定ベッド上に浮上させる。Further, the thin plate moving means in the above apparatus is a pressurized gas injection device for injecting pressurized gas upward from the surface of the measurement bed to float the thin plate on the measurement bed, as described in claim 4. Can be configured. That is, the measurement bed has a so-called air floating table structure, and, for example, compressed air is injected from the surface of the measurement bed as a pressurized gas to float the thin plate on the measurement bed.
【００１５】このような構成によれば、測定ベッド上の
薄板の全体にわたってほぼ均一に浮上力を作用させるこ
とも、測定ベッド表面に例えば加圧ガス噴射ノズルを適
宜の間隔で配置することで容易に行うことができる。し
たがって、測定ベッドから上方への移動時に、さらに自
重による変形が加わることを抑え、略水平状態を維持し
た状態で浮上させることができるので、浮上力を停止し
た後には薄板本来の形状が速やかに出現し、空中での薄
板本来の形状に基づく空間座標を確実に検出することが
できる。According to such a configuration, it is easy to apply a floating force almost uniformly over the entire thin plate on the measurement bed by arranging, for example, pressurized gas injection nozzles at appropriate intervals on the surface of the measurement bed. Can be done. Therefore, when moving upward from the measurement bed, deformation due to its own weight is further suppressed, and it is possible to levitate while maintaining a substantially horizontal state. The spatial coordinates that appear and are based on the original shape of the thin plate in the air can be reliably detected.
【００１６】しかも、上記のように浮上力を加えた後に
この浮上力を瞬間的に解除する制御も、例えば加圧ガス
の供給配管に介設した開閉弁の開閉操作で簡単に行うこ
とができるので、薄板を空中に移動させる薄板移動手段
を、その制御構成も含め、より簡素な構成とすることが
できる。Further, the control for instantaneously releasing the levitation force after the levitation force is applied as described above can be easily performed by, for example, opening and closing an on-off valve provided in a supply pipe for pressurized gas. Therefore, the thin plate moving means for moving the thin plate into the air can have a simpler configuration including its control configuration.
【００１７】[0017]
〔実施形態１〕次に、本発明の一実施形態について図面
を参照して説明する。図１に示す平坦度測定装置は、鋼
板やアルミニウム板、銅合金板などの被測定板材として
の薄板１が載置される測定ベッド２を備え、表面が平坦
に加工されたこの測定ベッド２に、薄板移動手段として
の加圧ガス噴射装置３が付設されている。この装置３
は、測定ベッド２の表面に埋め込まれた多数のエアー噴
出ノズル４…と、コンプレッサポンプ５と、このコンプ
レッサポンプ５に各エアー噴出ノズル４…を接続するエ
アー供給管６と、このエアー供給管６に介設された電磁
弁より成る開閉弁７と、この開閉弁７およびコンプレッ
サポンプ５の作動を制御するエアー供給制御装置８とか
ら構成されている。[Embodiment 1] Next, an embodiment of the present invention will be described with reference to the drawings. The flatness measuring device shown in FIG. 1 includes a measuring bed 2 on which a thin plate 1 as a plate material to be measured such as a steel plate, an aluminum plate, or a copper alloy plate is placed. A pressurized gas injection device 3 as a thin plate moving means is additionally provided. This device 3
, A number of air ejection nozzles 4 embedded in the surface of the measurement bed 2, a compressor pump 5, an air supply pipe 6 for connecting each air ejection nozzle 4 to the compressor pump 5, and an air supply pipe 6 And an air supply control device 8 for controlling the operation of the on-off valve 7 and the compressor pump 5.
【００１８】エアー供給制御装置８によりコンプレッサ
ポンプ５が起動され、その後、開閉弁７が開弁される
と、所定圧力に加圧された圧縮空気（以下、エアーと略
記する）が、エアー供給管６を通して各エアー噴出ノズ
ル４…に供給され、これにより、これらノズル４…から
ほぼ均一な圧力のエアーがそれぞれ上方に向けて噴出す
る。When the compressor pump 5 is started by the air supply control device 8 and then the on-off valve 7 is opened, compressed air (hereinafter abbreviated as air) pressurized to a predetermined pressure is supplied to the air supply pipe. 6, air is supplied to each of the air ejection nozzles 4..., Whereby air having a substantially uniform pressure is ejected upward from each of the nozzles 4.
【００１９】一方、測定ベッド２の上方には、薄板１の
平坦度を演算する演算処理装置（演算手段）９に接続さ
れた多数のレーザー式距離センサー10…が空間座標検出
手段として設けられている。これら距離センサー10…
は、測定ベッド２と平行な面（センサー取付け面）11
に、所定の配列で二次元的に設置されている。後述する
ように、平坦度の測定に当たって薄板１を測定ベッド２
の上方空間に上昇させて自由落下させる際、各距離セン
サー10…で薄板１表面までの距離を、所定のサンプリン
グ時間毎に検出し得るように構成されている。On the other hand, above the measuring bed 2, a number of laser type distance sensors 10 connected to an arithmetic processing unit (arithmetic means) 9 for calculating the flatness of the thin plate 1 are provided as spatial coordinate detecting means. I have. These distance sensors 10…
Is a plane parallel to the measuring bed 2 (sensor mounting surface).
Are arranged two-dimensionally in a predetermined arrangement. As described later, when measuring the flatness, the thin plate 1 is placed on the measuring bed 2.
Is configured to be able to detect the distance to the surface of the thin plate 1 with each of the distance sensors 10 at every predetermined sampling time when the ascent is made to fall into the space above and fall freely.
【００２０】これら各距離センサー10…で検出される距
離信号が演算処理装置９に入力される。この演算処理装
置９は、距離信号をｚ座標、センサー取付け面11での各
距離センサー10…の二次元配列位置をｘ座標・ｙ座標と
する空間座標値を、薄板１表面における各検出点に対応
付け、そして、これら空間座標から、薄板１の急峻度や
全体的な反り量を求める演算を行うように構成されてい
る。A distance signal detected by each of the distance sensors 10 is input to the arithmetic processing unit 9. The arithmetic processing unit 9 assigns spatial coordinate values, where the distance signal is the z coordinate and the two-dimensional array position of each of the distance sensors 10 on the sensor mounting surface 11 is the x coordinate and the y coordinate, to each detection point on the surface of the thin plate 1. It is configured to perform the calculation for obtaining the steepness of the thin plate 1 and the overall amount of warpage from these spatial coordinates.
【００２１】図２には、前記エアー噴出ノズル４…およ
び距離センサー10…の配置の一例を示している。図中○
印が測定ベッド２表面でのエアー噴出ノズル４…の埋め
込み位置を示しており、これらは、測定ベッド２のほぼ
全面にわたって千鳥状に配置されている。また、距離セ
ンサー10…は、同図中□印で示すように、測定ベッド２
の幅方向Ｃにおける中心線上と、長手方向Ｌにおける中
心線および各端部側の直線上に、それぞれ所定の間隔で
配置されている。FIG. 2 shows an example of the arrangement of the air ejection nozzles 4 and the distance sensors 10. ○ in the figure
The marks indicate the embedding positions of the air ejection nozzles 4 on the surface of the measurement bed 2, and these are arranged in a staggered manner over substantially the entire surface of the measurement bed 2. The distance sensors 10,...
Are arranged at predetermined intervals on the center line in the width direction C, and on the center line in the longitudinal direction L and straight lines on each end side.
【００２２】次に、上記構成の平坦度測定装置における
測定手順について説明する。前記エアー供給制御装置８
により、開閉弁７を閉にしてコンプレッサポンプ５が起
動され、この状態で薄板１が測定ベッド２上に載置され
ると、まず、開閉弁７が開弁される。これにより、前記
したように、各エアー噴出ノズル４…からほぼ均一圧力
のエアーが上方に向けて噴出する。この結果、測定ベッ
ド２上の薄板１が、下側からのエアーの押上げ力によ
り、測定ベッド２の表面から離間して、略水平状態を維
持し上方に浮上する。そして、薄板１の上昇移動の途
中、すなわち、エアーによる浮上力と薄板１の自重とが
バランスして薄板１の上昇移動が停止する前に、開閉弁
７が閉弁され、これにより、エアーの噴出が停止する。Next, a measuring procedure in the flatness measuring apparatus having the above configuration will be described. The air supply control device 8
Thereby, the on-off valve 7 is closed and the compressor pump 5 is started. When the thin plate 1 is placed on the measurement bed 2 in this state, the on-off valve 7 is first opened. As a result, as described above, air having a substantially uniform pressure is ejected upward from each of the air ejection nozzles 4. As a result, the thin plate 1 on the measurement bed 2 is separated from the surface of the measurement bed 2 by the pushing-up force of the air from below, maintains a substantially horizontal state, and floats upward. The on-off valve 7 is closed during the upward movement of the thin plate 1, that is, before the upward movement of the thin plate 1 is stopped due to the balance between the levitation force of the air and the own weight of the thin plate 1. The eruption stops.
【００２３】上記の操作によって浮上する薄板１の浮上
高さの時間推移は、概ね図３に示すように表される。同
図において、点がエアー噴出停止点であり、この時点
までは薄板１はエアー浮上力によって上昇する。そし
て、この上昇移動の途中でエアーの噴出を停止させる
と、薄板１は点以降も慣性によって幾分上昇を継続す
る。この慣性による上昇移動は、その速度が重力によっ
て次第に減速されて速度ゼロ（同図中の点）となり、
次いで、重力に応じた自由落下状態となって測定ベッド
２上に降下する。The change over time of the flying height of the thin plate 1 that floats by the above operation is generally represented as shown in FIG. In the figure, the point is the air ejection stop point, and up to this point, the thin plate 1 rises due to the air buoyancy. Then, when the ejection of the air is stopped during the ascending movement, the thin plate 1 continues to ascend somewhat after the point due to the inertia. In this upward movement due to inertia, the speed is gradually reduced by gravity to zero speed (point in the figure),
Next, it falls into the free fall state according to gravity and falls on the measurement bed 2.
【００２４】このように薄板１に上昇・落下移動を生じ
させる過程においては、薄板１にはその移動速度に応じ
た空気抵抗が外力として作用するが、の時点から慣性
で上昇を続けた後に速度がゼロになるの時点では、上
記の空気抵抗もゼロとなる。この瞬間、薄板１に作用す
る外力は重力を除いてほぼゼロとなり、このとき、薄板
１はその内部応力によってのみ変形する。すなわち、自
重に左右されない反りや板波が素直に出現することにな
り、このときの薄板１の表面形状を検出することで、精
度の良好な平坦度の算出が可能となる。In the process of causing the thin plate 1 to move up and down as described above, the air resistance corresponding to the moving speed acts on the thin plate 1 as an external force. Is zero, the above-described air resistance also becomes zero. At this moment, the external force acting on the thin plate 1 becomes almost zero except for gravity, and at this time, the thin plate 1 is deformed only by its internal stress. That is, a warp or a plate wave that does not depend on its own weight appears in a straightforward manner. By detecting the surface shape of the thin plate 1 at this time, it is possible to calculate the flatness with good accuracy.
【００２５】そこで、上記の平坦度測定装置では、上記
の時点における各距離センサー10…での検出距離信号
に基づいて、平坦度の算出が行われる。すなわち、エア
ー噴出停止点の時点から、距離センサー10…による薄
板１表面までの距離の検出が開始され、以降、所定のサ
ンプリング時間毎に検出される距離信号が演算処理装置
９に逐次入力される。Therefore, in the above flatness measuring device, the flatness is calculated based on the distance signals detected by the respective distance sensors 10 at the above-mentioned time points. That is, the detection of the distance to the surface of the thin plate 1 by the distance sensors 10 is started from the time of the air ejection stop point, and thereafter, distance signals detected at predetermined sampling times are sequentially input to the arithmetic processing unit 9. .
【００２６】演算処理装置９では、これら入力信号中、
例えば測定ベッド２の中心上に位置する距離センサー10
での検出距離信号の変化から、エアー噴出停止後に、薄
板１が最上位の高さ（点）に達してほぼ静止状態とな
った時点を判別する。すなわち、上記の検出距離信号
は、エアー噴出停止点以降の慣性による上昇過程で次
第に小さくなり、点で最小となった後、その後の自由
落下状態で次第に大きくなる。そこで、前回サンプリン
グ時からの減少度合いがほぼゼロとなった時点を点と
判別して、この時点での各距離センサー10…からの検出
距離信号に基づき、前記したように、この薄板１の急峻
度や反り量などの平坦度が算出される。In the arithmetic processing unit 9, among these input signals,
For example, a distance sensor 10 located on the center of the measuring bed 2
From the change of the detection distance signal in step (1), the point at which the thin plate 1 reaches the uppermost height (point) and becomes almost stationary after the air ejection is stopped is determined. That is, the above-mentioned detection distance signal gradually decreases in the ascending process due to inertia after the air ejection stop point, becomes minimum at the point, and gradually increases in the subsequent free fall state. Therefore, the point in time when the degree of decrease from the previous sampling becomes substantially zero is determined as a point, and based on the detected distance signals from the respective distance sensors 10 at this point, the steepness of the thin plate 1 is determined as described above. Flatness such as degree and warpage is calculated.
【００２７】図４には、本実施形態での薄板１の平坦度
測定に要する測定時間の一例を示している。本実施形態
の平坦度測定装置によれば、同図に本発明法として示す
ように、約10秒前後で、薄板１の急峻度と共に、Ｌ反り
量やＣ反り量も同時に測定される。これに対し、前述し
た吊り下げテストによるＬ反り量・Ｃ反り量の測定で
は、同図中に従来法として示すように、少なくとも90秒
を超える測定時間が必要である。したがって、本実施形
態での測定によれば、従来法に比べ、著しく測定時間が
短縮される。FIG. 4 shows an example of the measurement time required for measuring the flatness of the thin plate 1 in the present embodiment. According to the flatness measuring apparatus of the present embodiment, as shown in the figure, the steepness of the thin plate 1 and the amount of L warp and the amount of C warp are simultaneously measured in about 10 seconds. On the other hand, in the measurement of the amount of L warpage and the amount of C warpage by the above-described hanging test, as shown in FIG. Therefore, according to the measurement in the present embodiment, the measurement time is significantly reduced as compared with the conventional method.
【００２８】〔実施形態２〕前記の実施形態１では、薄
板移動手段として、薄板１をエアー浮上させるための加
圧ガス噴射装置３を測定ベッド２に付設して構成した
が、本実施形態においては、図５に示すような真空吸着
式の吊り上げ装置20により、薄板移動手段が構成されて
いる。この装置20は、例えば、板厚が厚くエアーでは浮
上させ難い重量のある板に対して採用される。[Second Embodiment] In the first embodiment, the pressurized gas injection device 3 for floating the thin plate 1 by air is attached to the measurement bed 2 as the thin plate moving means. The thin plate moving means is constituted by a vacuum suction type lifting device 20 as shown in FIG. This apparatus 20 is used, for example, for a heavy plate having a large plate thickness and hard to float by air.
【００２９】測定ベッド２の上方に設けられたこの吊り
上げ装置20は、二次元的に配置された多数の吸盤21…を
備え、これら吸盤21…を支持する格子状の枠体22は、図
示しない吊り上げ駆動ユニットに吊設されている。吸盤
21…には、電磁弁より成る開閉弁23が介設された真空配
管24によってバキュームポンプ25に接続され、このバキ
ュームポンプ25を吸着制御装置26により起動し、開閉弁
23を開弁することによって、各吸盤21…に真空吸引力が
発生する。The lifting device 20 provided above the measuring bed 2 has a large number of suction cups 21 arranged two-dimensionally, and a grid-like frame 22 supporting these suction cups 21 is not shown. It is suspended from the lifting drive unit. Sucker
21 are connected to a vacuum pump 25 by a vacuum pipe 24 provided with an on-off valve 23 composed of an electromagnetic valve, and the vacuum pump 25 is started by an adsorption control device 26,
By opening the valve 23, a vacuum suction force is generated in each of the suction cups 21.
【００３０】この吊り上げ装置20を用いて薄板１の平坦
度を測定する場合には、測定ベッド２上の薄板１に吸盤
21…を密着させて上記した真空吸引力によりこの薄板１
を保持し、この状態で、枠体22を上昇させる。そして、
上昇の途中で開閉弁23を閉弁すると共に各吸盤21…を大
気に連通させることによって保持力を解除し、これによ
って、この薄板１に、前記と同様に、保持力解除後に慣
性による上昇移動を幾分継続させた後、自由落下させ
る。この間、吊り上げ装置20の上方に設けられている前
記同様のレーザー式距離センサー10…により、格子状の
枠体22を通して各センサー10…と薄板１表面までの距離
が検出され、この検出信号が前記演算処理装置９に入力
されて、薄板１の平坦度が前記同様に算出される。When the flatness of the thin plate 1 is measured by using the lifting device 20, a suction cup is attached to the thin plate 1 on the measuring bed 2.
21 ... are brought into close contact with each other and
Is held, and in this state, the frame 22 is raised. And
During the ascent, the holding force is released by closing the on-off valve 23 and opening the suction cups 21 to the atmosphere, whereby the thin plate 1 is moved upward by inertia after the holding force is released in the same manner as described above. Is allowed to fall for some time and then allowed to fall freely. During this time, the distance between each sensor 10 and the surface of the thin plate 1 is detected through the lattice-shaped frame 22 by the same laser type distance sensors 10 provided above the lifting device 20. The flatness of the thin plate 1 is input to the arithmetic processing unit 9 and calculated in the same manner as described above.
【００３１】なお、上記各実施形態における平坦度測定
装置は、切板状の薄板１を被測定対象物とする他、さら
に、コイル状に巻き取られる薄板製造ラインに組込ん
で、ライン上を移動するストリップを被測定対象物とし
て構成することも可能である。すなわち、平坦度測定時
には、測定ベッド上で張力をリリースしてストリップを
弛ませた状態とし、また、浮上高さを小さくすること
で、浮上する被測定領域のストリップに、拘束力が作用
しない状態で空中を上下に移動させることができ、この
空中に位置するときに検出される空間座標から、前記と
同様に、急峻度の他、同時にＬ反り量やＣ反り量を求め
ることができる。The flatness measuring device in each of the above embodiments uses the cut-plate-shaped thin plate 1 as an object to be measured, and further incorporates the thin plate 1 into a thin-plate manufacturing line that is wound in a coil shape, and It is also possible to configure the moving strip as an object to be measured. That is, at the time of flatness measurement, the tension is released on the measurement bed so that the strip is slackened, and the flying height is reduced, so that the restraining force does not act on the strip in the measurement area that floats. Can be moved up and down in the air, and from the spatial coordinates detected when it is located in the air, the steepness, as well as the amount of L warp and the amount of C warp can be determined at the same time as described above.
【００３２】そしてこの場合には、反り量も同時に求め
られるので、従来の吊り下げテスト用の切板状サンプル
を別途採取する必要が無く、これにより、歩留りが向上
し、また、不必要な小コイルの発生が防止される。以上
の説明のように、上記各実施形態では、薄板１を空中に
移動させ、そして、移動力を解除した後に薄板１に作用
する外力が重力を除いてほぼゼロとなった時点で、薄板
各部の空間座標を検出して薄板の平坦度が求められる。In this case, since the amount of warpage is also determined at the same time, there is no need to separately collect a conventional cutting plate-shaped sample for a hanging test, thereby improving the yield and reducing unnecessary small size. The generation of coils is prevented. As described above, in each of the above-described embodiments, the thin plate 1 is moved into the air, and when the external force acting on the thin plate 1 becomes substantially zero except for gravity after the moving force is released, each part of the thin plate 1 Is detected, and the flatness of the thin plate is obtained.
【００３３】すなわち、重力を除く外力をゼロとした非
拘束状態では、薄板１は、その内部応力のみによる変形
が自由に出現し、この状態での薄板各部の空間座標を検
出することにより、これら空間座標から、自重に左右さ
れない薄板１の急峻度が求められ、同時に、全体的なＬ
反り量やＣ反り量が求められる。したがって、より短時
間で精度の良い平坦度の測定を効率的に行うことができ
る。また、平坦度測定に係る作業負担も大幅に低減され
ることから、要員の省力が可能となり、さらに、処理ラ
インの作業統合が可能となる。That is, in the unconstrained state where the external force excluding gravity is zero, the thin plate 1 freely deforms only due to its internal stress, and by detecting the spatial coordinates of each part of the thin plate in this state, From the spatial coordinates, the steepness of the thin plate 1 independent of its own weight is determined, and at the same time, the overall L
The amount of warpage and the amount of C warpage are determined. Therefore, accurate flatness measurement can be efficiently performed in a shorter time. Further, since the work load related to the flatness measurement is greatly reduced, it is possible to save the labor of the personnel and to integrate the work of the processing line.
【００３４】なお、上記の各実施形態は本発明を限定す
るものではなく、本発明の範囲内で種々の変更が可能で
ある。例えば上記各実施形態では、空間座標検出手段と
してレーザー式距離センサー10を用いた例を示したが、
例えば超音波式や渦電流式など、同様な機能を発揮する
その他のセンサーを用いて構成することができる。ま
た、薄板移動手段としては、実施形態１でのエアー浮上
方式に基づく加圧ガス噴射装置３や、実施形態２での真
空吸着式吊り上げ装置20の他、例えば電磁石式の吊り上
げ装置、或いは機械押上げ式などのその他の構成とする
ことが可能である。この場合、測定ベッド２上にほぼ水
平に載置されている薄板１を上方空間へと移動させる際
には、薄板１のほぼ全面にわたる一様な支持状態を維持
して上昇させることが必要である。すなわち、薄板を局
部的に支持して上昇させる構成では、上昇の過程で自重
に起因する湾曲変形がさらに加わり、この場合は、上昇
移動力を解除して空中で非拘束状態としても、上記の湾
曲変形状態からの復帰動作に例えば振動を生じてすぐに
は解消されず、薄板本来の形状を空中で検出できなくな
る。The embodiments described above do not limit the present invention, and various changes can be made within the scope of the present invention. For example, in each of the above embodiments, an example was shown in which the laser distance sensor 10 was used as the spatial coordinate detection means,
For example, it can be configured using other sensors that exhibit similar functions, such as an ultrasonic type and an eddy current type. As the thin plate moving means, in addition to the pressurized gas injection device 3 based on the air levitation method in the first embodiment, the vacuum suction type lifting device 20 in the second embodiment, an electromagnet type lifting device, or a mechanical pushing device, for example. Other configurations, such as a raised type, are possible. In this case, when the thin plate 1 placed substantially horizontally on the measurement bed 2 is moved to the upper space, it is necessary to raise the thin plate 1 while maintaining a uniform support state over substantially the entire surface of the thin plate 1. is there. In other words, in the configuration in which the thin plate is locally supported and raised, a bending deformation due to its own weight is further added in the process of lifting, and in this case, even if the lifting movement force is released and the non-constrained state is set in the air, the above-mentioned condition is obtained. For example, vibration is generated in the return operation from the curved deformation state and the vibration is not canceled immediately, and the original shape of the thin plate cannot be detected in the air.
【００３５】そこで、実施形態１のように、測定ベッド
２の表面全体にわたって多数のエアー噴出ノズル４…を
設け、或いはエアー噴出孔を形成して、これらからエア
ーがほぼ均一な圧力で噴出されるように構成すれば、上
記のような略水平状態を維持して薄板１を浮上させるこ
とができ、しかも、浮上力を付与し薄板１を上方に移動
させた後に瞬間的に浮上力を解除する制御も、エアー供
給配管の開閉弁７の開閉操作で簡単に行うことができ
る。したがって、このようなエアー浮上方式を採用する
ことで、制御構成も含めて全体の構成をより簡素なもの
とすることができる。Therefore, as in Embodiment 1, a large number of air ejection nozzles 4 are provided over the entire surface of the measurement bed 2 or air ejection holes are formed, and air is ejected from these at substantially uniform pressure. With such a configuration, the thin plate 1 can be levitated while maintaining the substantially horizontal state as described above, and the levitation force is instantaneously released after the levitation force is applied to move the thin plate 1 upward. Control can also be easily performed by opening and closing the on-off valve 7 of the air supply pipe. Therefore, by employing such an air levitation method, the overall configuration including the control configuration can be simplified.
【００３６】一方、上記各実施形態では、略水平状態の
薄板１を上下に移動させる際の空気抵抗を考慮し、薄板
１の慣性による上昇移動後の最上位に位置する時点での
薄板各部の空間座標を検出するように構成した例を示し
たが、本発明の請求項１、３、４の範囲においては、薄
板１が非拘束状態で空中を移動するときの任意の時点で
の空間座標を検出し、この検出値から平坦度を求めるよ
うに構成することも可能であり、例えば慣性による上昇
移動を生じさせることなく、移動力の解除後にすぐに自
由落下状態となる構成においても、空気抵抗を無視する
ことができるような微小な速度域での空間座標を検出す
ることで、精度の良好な平坦度を求めることができる。On the other hand, in each of the above-described embodiments, taking into account the air resistance when the thin plate 1 in a substantially horizontal state is moved up and down, each part of the thin plate at the time of being located at the highest position after the thin plate 1 is moved upward by inertia. Although an example has been shown in which the spatial coordinates are detected, in the scope of claims 1, 3 and 4 of the present invention, the spatial coordinates at any time when the thin plate 1 moves in the air in an unconstrained state. It is also possible to determine the flatness from this detected value.For example, even in a configuration in which the free fall state is immediately obtained after the moving force is released without causing the ascending movement due to inertia, By detecting the spatial coordinates in a minute speed range where the resistance can be neglected, it is possible to obtain a highly accurate flatness.
【００３７】[0037]
【発明の効果】以上の説明のように、本発明の請求項１
の薄板の平坦度測定方法においては、薄板を測定ベッド
の上方空間に移動させ、移動力解除後に薄板が空中に位
置する時点、すなわち、自重に左右されない反りや板波
が素直に出現した時点での薄板各部の空間座標を検出す
るので、この空間座標から、薄板の急峻度の他、全体的
なＬ反り量やＣ反り量も同時に求めることができ、これ
によって、より短時間で精度の良い平坦度の測定を効率
的に行うことができる。As described above, according to the first aspect of the present invention,
In the method for measuring the flatness of a thin plate, the thin plate is moved to a space above the measurement bed, and when the thin plate is positioned in the air after the movement force is released, that is, at the time when a warp or a plate wave that does not depend on its own weight appears straightforwardly. Since the spatial coordinates of each part of the thin plate are detected, not only the steepness of the thin plate but also the overall L warp amount and the C warp amount can be obtained at the same time from the spatial coordinates. The flatness can be measured efficiently.
【００３８】また、請求項２の平坦度測定方法において
は、略水平状態の薄板を上方へと移動させる途中で移動
力を解除し、移動力解除後の薄板に慣性による上昇移動
を生じさせて、この上昇移動とその後の自由落下移動と
の間で速度がほぼゼロとなった時点での薄板各部の空間
座標から平坦度を求めるので、さらに空中移動時の空気
抵抗にも左右されない精度の良い平坦度を求めることが
できる。Further, in the flatness measuring method according to the second aspect, the moving force is released during the upward movement of the substantially horizontal thin plate, and the thin plate after the moving force is released is caused to move upward by inertia. Since the flatness is obtained from the spatial coordinates of each part of the thin plate at the time when the speed becomes substantially zero between the upward movement and the subsequent free fall movement, the accuracy is not affected by the air resistance at the time of moving in the air. Flatness can be determined.
【００３９】一方、上記の方法を好適に実施するための
請求項３記載の平坦度測定装置の中で、薄板を測定ベッ
ドの上方空間に移動させた後に移動力を解除する薄板移
動手段を、請求項４のように、測定ベッドの表面から加
圧ガスを上方に噴射して薄板を測定ベッド上に浮上させ
る加圧ガス噴射装置で構成すれば、測定ベッドから上方
への移動時に、さらに自重による変形が加わることを抑
えて略水平状態を維持した状態で浮上させることがで
き、浮上力停止後に、薄板本来の形状を速やかに出現さ
せて、その空間座標を確実に検出することができる。し
かも、浮上力を加えた後にこの浮上力を瞬間的に解除す
る制御も、例えば加圧ガスの供給配管に介設した開閉弁
の開閉操作で簡単に行うことができるので、その制御構
成も含め、全体的な構成をより簡素なものとすることが
できる。On the other hand, in the flatness measuring apparatus according to claim 3 for suitably implementing the above method, a thin plate moving means for releasing the moving force after moving the thin plate to the space above the measuring bed is provided. According to a fourth aspect of the present invention, a pressurized gas injection device configured to inject a pressurized gas upward from the surface of the measurement bed to cause the thin plate to float on the measurement bed can further reduce its own weight when moving upward from the measurement bed. It is possible to levitate while maintaining a substantially horizontal state while suppressing the deformation due to the above, and to quickly emerge the original shape of the thin plate after the suspension of the levitation force, and to reliably detect its spatial coordinates. Moreover, the control for instantaneously releasing the levitation force after the application of the levitation force can be easily performed by, for example, opening and closing an on-off valve provided in the supply pipe of the pressurized gas. Thus, the overall configuration can be simplified.
【図１】本発明の一実施形態における薄板の平坦度測定
装置の概略構成図である。FIG. 1 is a schematic configuration diagram of a thin plate flatness measuring apparatus according to an embodiment of the present invention.
【図２】上記平坦度測定装置における測定ベッドに設け
られたエアー噴出ノズルと上方の距離センサーとの各配
置を示す平面図である。FIG. 2 is a plan view showing an arrangement of an air ejection nozzle provided on a measurement bed and an upper distance sensor in the flatness measuring device.
【図３】上記平坦度測定装置での平坦度測定時における
薄板の浮上高さの時間的推移を示すグラフである。FIG. 3 is a graph showing a temporal transition of a flying height of a thin plate when the flatness is measured by the flatness measuring device.
【図４】上記平坦度測定装置での平坦度測定に要する時
間を従来法と比較して示すグラフである。FIG. 4 is a graph showing a time required for flatness measurement by the flatness measuring device in comparison with a conventional method.
【図５】本発明の他の実施形態での平坦度測定装置にお
ける薄板移動手段を示す概略構成図である。FIG. 5 is a schematic configuration diagram showing a thin plate moving unit in a flatness measuring device according to another embodiment of the present invention.
【図６】従来の平坦度測定法を示すものであって、要部
拡大断面図Ｅを付記した斜視図である。FIG. 6 is a perspective view showing a conventional flatness measuring method, to which an enlarged sectional view E of a main part is added.
【図７】従来の他の平坦度測定装置を示す概略構成図で
ある。FIG. 7 is a schematic configuration diagram showing another conventional flatness measuring device.
【図８】従来の吊り下げテスト法を示すものであって、
同図(a) は切板状の測定サンプルの斜視図、同図(b) は
Ｌ反り量を測定するときの吊り下げ状態を示す斜視図、
同図(c) はＣ反り量を測定するときの吊り下げ状態を示
す斜視図である。FIG. 8 shows a conventional suspension test method,
FIG. 2A is a perspective view of a cut-plate-shaped measurement sample, and FIG. 1B is a perspective view showing a suspended state when measuring the amount of L warpage.
FIG. 3C is a perspective view showing a suspended state when measuring the amount of C warpage.
１ 薄板 ２ 測定ベッド ３ 加圧ガス噴射装置（薄板移動手段） ９ 演算処理装置（演算手段） 10 距離センサー（空間座標検出手段） DESCRIPTION OF SYMBOLS 1 Thin plate 2 Measurement bed 3 Pressurized gas injection device (thin plate moving means) 9 Arithmetic processing unit (arithmetic means) 10 Distance sensor (space coordinate detecting means)
Claims (4)
た後に移動力を解除して薄板に自由落下を生じさせる薄
板移動手段を設け、この薄板移動手段による移動力解除
後に薄板が空中に位置する時点での薄板各部の空間座標
を検出して、この薄板の平坦度を求めることを特徴とす
る薄板の平坦度測定方法。1. A thin plate moving means for releasing a moving force after a thin plate is moved to a space above a measuring bed to cause free fall on the thin plate, and the thin plate is positioned in the air after the moving force is released by the thin plate moving device. A flatness measuring method for a thin plate, comprising detecting spatial coordinates of each part of the thin plate at the time of performing the process, and obtaining flatness of the thin plate.
よって上方へと移動させる途中で移動力を解除すること
により、移動力解除後の薄板に慣性による上昇移動を生
じさせ、この上昇移動とその後の自由落下移動との間で
速度がほぼゼロとなった時点での薄板各部の空間座標か
ら、この薄板の平坦度を求めることを特徴とする請求項
１記載の薄板の平坦度測定方法。2. The moving force is released during the upward movement of the thin plate in a substantially horizontal state by the thin plate moving means, thereby causing the thin plate after the moving force is released to move upward due to inertia. 2. The method for measuring flatness of a thin plate according to claim 1, wherein the flatness of the thin plate is obtained from the spatial coordinates of each part of the thin plate when the speed becomes substantially zero between the subsequent free fall movement.
ッドと、この測定ベッドの上方空間に位置するときの薄
板各部の空間座標を検出する空間座標検出手段と、薄板
を測定ベッドの上方空間に移動させた後に移動力を解除
して薄板に自由落下を生じさせる薄板移動手段と、空間
座標検出手段からの検出信号に基づき薄板が空中に位置
するときの空間座標からこの薄板の平坦度を演算する演
算手段とを備えていることを特徴とする薄板の平坦度測
定装置。3. A measuring bed on which a thin plate is placed in a substantially horizontal state, space coordinate detecting means for detecting spatial coordinates of each part of the thin plate when the thin plate is located in a space above the measuring bed, and a thin plate placed above the measuring bed. The flatness of this thin plate is determined from the thin plate moving means that releases the moving force after moving to the space and causes the thin plate to freely fall, and the spatial coordinates when the thin plate is positioned in the air based on the detection signal from the space coordinate detecting means. Calculating means for calculating the flatness of the thin plate.
から加圧ガスを上方に噴射して薄板を測定ベッド上に浮
上させる加圧ガス噴射装置であることを特徴とする請求
項３記載の薄板の平坦度測定装置。4. The apparatus according to claim 3, wherein said thin plate moving means is a pressurized gas injection device for injecting a pressurized gas upward from the surface of the measuring bed to float the thin plate on the measuring bed. Thin plate flatness measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22695896A JPH1068620A (en) | 1996-08-28 | 1996-08-28 | Method and equipment for measuring flatness of thin plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22695896A JPH1068620A (en) | 1996-08-28 | 1996-08-28 | Method and equipment for measuring flatness of thin plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1068620A true JPH1068620A (en) | 1998-03-10 |
Family
ID=16853294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22695896A Pending JPH1068620A (en) | 1996-08-28 | 1996-08-28 | Method and equipment for measuring flatness of thin plate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1068620A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100495125B1 (en) * | 2000-12-22 | 2005-06-14 | 주식회사 포스코 | Apparatus and method for measuring flatness of cold strip |
| GB2415259A (en) * | 2004-06-16 | 2005-12-21 | Christopher St John Cordingley | Measuring warp in planar materials |
| KR101030857B1 (en) | 2008-09-29 | 2011-04-22 | 현대제철 주식회사 | How to measure flatness of strip |
| JP2011237243A (en) * | 2010-05-10 | 2011-11-24 | Ihi Corp | Warpage measuring apparatus, flotation transport conveyor having the same and warpage measurement method |
| CN103302111A (en) * | 2013-07-01 | 2013-09-18 | 莱芜钢铁集团有限公司 | Steel section bending online measurement device and steel section bending online measurement method |
| JP2016070866A (en) * | 2014-10-01 | 2016-05-09 | 日本電気硝子株式会社 | Shape measuring device |
| CN113324512A (en) * | 2021-04-20 | 2021-08-31 | 广东新合铝业新兴有限公司 | Online continuous monitoring system and method for aluminum profile production |
| CN115077465A (en) * | 2022-07-20 | 2022-09-20 | 新沂市盛翔节能保温工程有限公司 | Device and method for detecting flatness of external wall insulation board |
| CN115752342A (en) * | 2022-12-14 | 2023-03-07 | 中信渤海铝业控股有限公司 | Section curvature measuring device and section curvature measuring method |
-
1996
- 1996-08-28 JP JP22695896A patent/JPH1068620A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100495125B1 (en) * | 2000-12-22 | 2005-06-14 | 주식회사 포스코 | Apparatus and method for measuring flatness of cold strip |
| GB2415259A (en) * | 2004-06-16 | 2005-12-21 | Christopher St John Cordingley | Measuring warp in planar materials |
| GB2415259B (en) * | 2004-06-16 | 2009-03-25 | Christopher St John Cordingley | Measuring warp in planar materials |
| KR101030857B1 (en) | 2008-09-29 | 2011-04-22 | 현대제철 주식회사 | How to measure flatness of strip |
| JP2011237243A (en) * | 2010-05-10 | 2011-11-24 | Ihi Corp | Warpage measuring apparatus, flotation transport conveyor having the same and warpage measurement method |
| CN103302111A (en) * | 2013-07-01 | 2013-09-18 | 莱芜钢铁集团有限公司 | Steel section bending online measurement device and steel section bending online measurement method |
| CN103302111B (en) * | 2013-07-01 | 2015-05-27 | 莱芜钢铁集团有限公司 | Steel section bending online measurement device and steel section bending online measurement method |
| JP2016070866A (en) * | 2014-10-01 | 2016-05-09 | 日本電気硝子株式会社 | Shape measuring device |
| CN113324512A (en) * | 2021-04-20 | 2021-08-31 | 广东新合铝业新兴有限公司 | Online continuous monitoring system and method for aluminum profile production |
| CN113324512B (en) * | 2021-04-20 | 2021-12-07 | 广东新合铝业新兴有限公司 | Online continuous monitoring system and method for aluminum profile production |
| CN115077465A (en) * | 2022-07-20 | 2022-09-20 | 新沂市盛翔节能保温工程有限公司 | Device and method for detecting flatness of external wall insulation board |
| CN115752342A (en) * | 2022-12-14 | 2023-03-07 | 中信渤海铝业控股有限公司 | Section curvature measuring device and section curvature measuring method |
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