JPH108253A - Manufacturing method of surface coated cemented carbide cutting tool with excellent chipping resistance - Google Patents

Manufacturing method of surface coated cemented carbide cutting tool with excellent chipping resistance

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Publication number
JPH108253A
JPH108253A JP16449496A JP16449496A JPH108253A JP H108253 A JPH108253 A JP H108253A JP 16449496 A JP16449496 A JP 16449496A JP 16449496 A JP16449496 A JP 16449496A JP H108253 A JPH108253 A JP H108253A
Authority
JP
Japan
Prior art keywords
layer
cemented carbide
cutting tool
coated cemented
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16449496A
Other languages
Japanese (ja)
Other versions
JP3304767B2 (en
Inventor
Takatoshi Ooshika
高歳 大鹿
Keiji Nakamura
惠滋 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
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Filing date
Publication date
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Priority to JP16449496A priority Critical patent/JP3304767B2/en
Publication of JPH108253A publication Critical patent/JPH108253A/en
Application granted granted Critical
Publication of JP3304767B2 publication Critical patent/JP3304767B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Chemical Vapour Deposition (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a method for producing a cutting tool made of surface coated cemented carbide excellent in chipping resistance and showing excellent cuttability over a long period. SOLUTION: At the time of producing a cutting tool made of surface coated cemented carbide by forming a hard coating layer with 3 to 20μm average layer thickness contg. an Al2 O3 layer on the surface of a WC base cemented carbide substrate using a chemical vapor deposition method and/or a physical vapor deposition method, in the formation of the above Al2 O3 layer, as the reactive gas, an inert reactive gas having a compsn. composed of, by volume, 0.5 to 10% AlCl3 , 1 to 30% sulfur oxide (where y/x>2 in the case of being expressed by the compositional formula of Sx Oy , and the balance inert gas is used.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、硬質被覆層を構
成する酸化アルミニウム(以下、Al23 で示す)層
を相対的に速い成膜速度で、かつ厚膜に形成することが
でき、しかもこれを厚膜化してもその層厚が均一化し、
かつ他の構成層に対してすぐれた層間密着性を示すこと
から、例えば鋼や鋳鉄などの連続切削は勿論のこと、特
に断続切削に用いた場合にも、切刃にチッピング(微小
欠け)などの発生なく、すぐれた切削性能を長期に亘っ
て発揮する表面被覆超硬合金製切削工具(以下、被覆超
硬工具という)の製造法に関するものである。
BACKGROUND OF THE INVENTION The present invention, aluminum oxide which constitutes the hard coating layer (hereinafter, indicated by Al 2 O 3) layer relatively fast deposition rate, and can be formed into a thick film, Moreover, even if this is made thicker, the layer thickness becomes uniform,
In addition, since it shows excellent interlayer adhesion to other constituent layers, it can be used not only for continuous cutting of steel or cast iron, for example, but also for intermittent cutting, especially when used for chipping (minute chipping) on the cutting edge. The present invention relates to a method for producing a surface-coated cemented carbide cutting tool (hereinafter referred to as a coated cemented carbide tool) that exhibits excellent cutting performance for a long period of time without occurrence of cracks.

【0002】[0002]

【従来の技術】従来、炭化タングステン基超硬合金基体
(以下、超硬基体という)の表面に、化学蒸着法および
/または物理蒸着法を用いて、Al2 3 層を含む硬質
被覆層、例えばTiの炭化物(以下、TiCで示す)
層、窒化物(以下、同じくTiNで示す)層、炭窒化物
(以下、TiCNで示す)層、酸化物(以下、TiO2
で示す)層、炭酸化物(以下、TiCOで示す)層、窒
酸化物(以下、TiNOで示す)層、および炭窒酸化物
(以下、TiCNOで示す)層のうちの1種または2種
以上と、Al23 層とからなる硬質被覆層を3〜20
μmの平均層厚で形成してなる被覆超硬工具が知られて
いる。また、特に上記被覆超硬工具の硬質被覆層を構成
するAl23 層の形成が、反応ガスとして、容量%
(以下、%の表示は容量%を示す)で、三塩化アルミニ
ウム(以下、AlCl3 で示す):1〜20%、二酸化
炭素(以下、CO2 で示す):0.5〜30%、[必要
に応じて一酸化炭素(CO)または塩化水素(HC
l):1〜30%]、水素:残り、からなる組成を有す
る水素系反応ガスを用い、反応温度:950〜1100
℃、雰囲気圧力:20〜200torr、の条件で行わ
れていることも知られている。
2. Description of the Related Art Conventionally, a hard coating layer including an Al 2 O 3 layer is formed on a surface of a tungsten carbide-based cemented carbide substrate (hereinafter referred to as a cemented carbide substrate) by using a chemical vapor deposition method and / or a physical vapor deposition method. For example, a carbide of Ti (hereinafter, referred to as TiC)
Layer, nitride (hereinafter also indicated as TiN) layer, carbonitride (hereinafter indicated as TiCN) layer, oxide (hereinafter referred to as TiO 2)
) Layer, a carbonate (hereinafter, shown as TiCO) layer, a nitrogen oxide (hereinafter, shown as TiNO) layer, and one or more of a carbon oxynitride (hereinafter, shown as TiCNO) layer When the hard coating layer consisting of the Al 2 O 3 layer 3-20
A coated carbide tool formed with an average layer thickness of μm is known. Further, in particular, the formation of the Al 2 O 3 layer constituting the hard coating layer of the coated cemented carbide tool is considered as a reaction gas,
(Hereinafter,% indicates volume%), aluminum trichloride (hereinafter, shown as AlCl 3 ): 1 to 20%, carbon dioxide (hereinafter, shown as CO 2 ): 0.5 to 30%, [ If necessary, carbon monoxide (CO) or hydrogen chloride (HC
l): 1 to 30%], hydrogen: a hydrogen-based reaction gas having a composition consisting of the remainder, and a reaction temperature of 950 to 1100.
It is also known that the process is performed under the conditions of ° C and an atmospheric pressure of 20 to 200 torr.

【0003】[0003]

【発明が解決しようとする課題】一方、近年の切削加工
のFA化はめざましく、かつ省力化に対する要求も強
く、これに伴い、被覆超硬工具には使用寿命のさらなる
延命化が求められ、これに対応する手段として、これを
構成する硬質被覆層のうち、特に耐酸化性と熱的安定性
にすぐれ、さらに高硬度を有するAl23 層の厚膜化
が広く検討されているが、前記Al23 層は、これを
厚くすると、上記の従来Al23 層形成手段では層厚
が局部的に不均一になり、切刃の逃げ面、すくい面、お
よび前記逃げ面とすくい面の交わるエッジ部の間には層
厚に著しいバラツキが発生するようになるばかりでな
く、他の構成層との密着性(層間密着性)も低下し、こ
れらが原因で、例えば鋼や鋳鉄などの断続切削に用いた
場合に切刃にチッピングが発生し易く、比較的短時間で
使用寿命に至るのが現状である。
On the other hand, in recent years, the use of FA in cutting has been remarkable, and there has been a strong demand for labor saving. Accordingly, coated carbide tools have been required to have a longer service life. As means corresponding to the above, among the hard coating layers constituting the same, particularly, the oxidation resistance and thermal stability are excellent, and further thickening of an Al 2 O 3 layer having high hardness has been widely studied. When the thickness of the Al 2 O 3 layer is increased, the thickness of the Al 2 O 3 layer becomes locally non-uniform in the conventional Al 2 O 3 layer forming means, and the flank of the cutting edge, the rake face, and the rake face Not only does the layer thickness significantly vary between the edges where the surfaces intersect, but also the adhesion to other constituent layers (interlayer adhesion) is reduced, which results in, for example, steel or cast iron. Chipping on cutting edge when used for interrupted cutting such as Easily it occurs, at present, leading to a relatively short time service life.

【0004】[0004]

【課題を解決するための手段】そこで、本発明者等は、
上述のような観点から、被覆超硬工具の製造に際して、
特に硬質被覆層を構成するAl23 層の形成に着目
し、層厚を厚くした場合の層厚の局部的バラツキの減少
と、層間密着性の向上を図るべく研究を行った結果、以
下の(a)および(b)に示す研究結果を得たのであ
る。 (a) 従来の水素系反応ガスを用いて形成されるAl
23 層においては、反応雰囲気中で、反応ガスの構成
成分であるCO2 と水素(H2 )が、 CO2 +H2 →CO+H2 O (1) 上記反応式(1)にしたがって反応し、この結果生成し
たH2 Oと、AlCl3が、 AlCl3 +H2 O→Al23 +HCl (2) 上記反応式(2)にしたがって反応し、AlCl3 が加
水分解されてAl23を生成し、この場合上記(1)
式の反応に比して上記(2)式の反応がきわめて速く、
したがって上記(1)式で生成したH2 Oは、すばやく
反応雰囲気中に存在するAlCl3 と反応することか
ら、ほとんどのAl23 は反応雰囲気中での生成とな
り、これが基体表面(基体表面に形成された硬質被覆層
表面を含む、以下同じ)に堆積することによりAl2
3 層が形成される反応機構をとるものであるため、反応
ガスの流れや基体表面の形状にも影響されることと相ま
って、例えば切削工具であるスローアウエイチップを反
応ガス流中にどのような状態で配置しても、切刃の逃げ
面、すくい面、および前記逃げ面とすくい面の交わるエ
ッジ部の相互間に均一な層厚のAl2 3 層を形成する
ことは困難で、大きな層厚のバラツキの発生は避けられ
ないこと。
Means for Solving the Problems Accordingly, the present inventors have
From the above viewpoint, when manufacturing coated carbide tools,
In particular, focusing on the formation of the Al 2 O 3 layer constituting the hard coating layer, a study was conducted to reduce the local variation of the layer thickness when the layer thickness was increased and to improve the interlayer adhesion. (A) and (b) were obtained. (A) Al formed using a conventional hydrogen-based reaction gas
In the 2 O 3 layer, CO 2 and hydrogen (H 2 ), which are constituents of a reaction gas, react in a reaction atmosphere according to the above reaction formula (1), CO 2 + H 2 → CO + H 2 O. The resulting H 2 O and AlCl 3 react with AlCl 3 + H 2 O → Al 2 O 3 + HCl (2) according to the above reaction formula (2), whereby AlCl 3 is hydrolyzed to form Al 2 O 3 And in this case, the above (1)
The reaction of the above formula (2) is much faster than the reaction of the formula,
Therefore, H 2 O generated by the above formula (1) quickly reacts with AlCl 3 present in the reaction atmosphere, and most of the Al 2 O 3 is generated in the reaction atmosphere. including the formed hard coat layer surface, Al 2 O by depositing the same hereinafter)
Because it takes a reaction mechanism in which three layers are formed, it is affected by the flow of the reaction gas and the shape of the surface of the substrate. Even if it is arranged in a state, it is difficult to form an Al 2 O 3 layer having a uniform thickness between the flank of the cutting edge, the rake face, and the edge portion where the flank and the rake face intersect, and it is difficult Variations in layer thickness are inevitable.

【0005】(b) 上記(a)の検討結果から、でき
るだけ基体表面でのAl23 生成による層形成を行え
ば、層厚の均一化が可能になるという結論に達し、これ
を可能ならしめる反応ガスの開発に努めたところ、反応
ガスとして、AlCl3 :0.5〜10%、酸化イオウ
(但し、組成式:Sx y で表した場合、y/x>
2):1〜30%、不活性ガス:残り、からなる組成を
有する不活性ガス系反応ガスを用いると、反応ガス中の
上記酸化イオウ(以下、SO3 を例にとり説明する)
が、 SO3 →SO2 +O (ア) 上記(ア)式にしたがって分解し、Oを生成する。一
方、同時に生成したSO2 は基体表面においてAlCl
3 の分解を促進する触媒として作用することから、Al
Cl3 は、基体表面で、 AlCl3 → Al+Cl2 (イ) 上記(イ)式にしたがって分解し、AlとCl2 を生成
する。そこで、上記(ア)式と(イ)式で生成したAl
とOは、基体表面で、 Al+O→Al2 3 (ウ) 上記(ウ)式にしたがって反応してAl2 3 が生成す
る。ここで上記(ア)式、(イ)式、および(ウ)式の
反応はいずれもその反応速度が速いために、Al2 3
層の成膜速度は相対的にきわめて速いものとなるばかり
でなく、上記(ウ)式の反応が基体表面で行われること
から、Al2 3 層の形成に際しては、生成Al2 3
の基体表面への移動距離がほとんどなく、かつ反応ガス
の流れや基体表面形状に影響されることなく行われるこ
とになるので、この結果形成された蒸着Al2 3
は、その層厚が厚くなっても局部的バラツキがきわめて
少なく、その上基体表面に対する密着性も一段と向上し
たものになること。
(B) From the results of the above-mentioned study (a), it has been concluded that the layer thickness can be made uniform by forming Al 2 O 3 on the surface of the substrate as much as possible. When efforts were made to develop a reaction gas for the reaction, AlCl 3 : 0.5 to 10%, sulfur oxide (provided that the composition formula: S x O y , y / x>
2): When an inert gas-based reaction gas having a composition of 1 to 30% and an inert gas: remaining is used, the above-mentioned sulfur oxide in the reaction gas (hereinafter, SO 3 will be described as an example)
However, SO 3 → SO 2 + O (A) is decomposed according to the above equation (A) to generate O. On the other hand, SO 2 generated at the same time
Since it acts as a catalyst to accelerate the decomposition of 3 , Al
Cl 3 is a substrate surface, decompose according AlCl 3 → Al + Cl 2 (b) (a) above equation, to produce Al and Cl 2. Therefore, the Al formed by the above equations (A) and (A)
And O is the substrate surface, and reacted according to Al + O → Al 2 O 3 ( c) above (c) formula Al 2 O 3 to produce. Here, the reactions of the above formulas (A), (A) and (C) all have a high reaction rate, so that Al 2 O 3
Not only the film formation rate of the layer becomes relatively high, but also the reaction of the above formula (c) is carried out on the substrate surface. Therefore, when forming the Al 2 O 3 layer, the formed Al 2 O 3
Of the reaction gas flow and the shape of the substrate surface, so that the resulting deposited Al 2 O 3 layer has a layer thickness of Even when the thickness is increased, local variations are extremely small, and the adhesion to the substrate surface is further improved.

【0006】この発明は、上記の研究結果に基づいてな
されたものであって、超硬基体の表面に、化学蒸着法お
よび/または物理蒸着法を用いて、Al2 3 層を含む
硬質被覆層、例えばTiC層、TiN層、TiCN層、
TiO2 層、TiCO層、TiNO層、およびTiCN
O層のうちの1種または2種以上と、前記Al23
層とからなる硬質被覆層を3〜20μmの平均層厚で形
成することにより被覆超硬工具を製造する方法にして、
前記硬質被覆層を構成するAl23 層の形成を、反応
ガスとして、AlCl3 :0.5〜10%、酸化イオウ
(但し、組成式:Sx y で表した場合、y/x>
2):1〜30%、ArやHeなどの不活性ガス:残
り、からなる組成を有する不活性ガス系反応ガスを用い
て行うことにより、速い成膜速度での形成を可能とし、
かつ厚膜化層の層厚均一化および層間密着性の向上をは
かり、この結果としてすぐれた耐チッピング性を示すよ
うになる被覆超硬工具を製造する方法に特徴を有するも
のである。
The present invention has been made on the basis of the above-mentioned research results, and a hard coating including an Al 2 O 3 layer on a surface of a superhard substrate by using a chemical vapor deposition method and / or a physical vapor deposition method. Layers such as TiC layer, TiN layer, TiCN layer,
TiO 2 layer, TiCO layer, TiNO layer, and TiCN
A method for producing a coated cemented carbide tool by forming a hard coating layer comprising one or more of the O layers and the Al 2 O 3 -based layer with an average layer thickness of 3 to 20 μm,
The formation of the Al 2 O 3 layer constituting the hard coating layer is performed by using, as a reaction gas, AlCl 3 : 0.5 to 10%, sulfur oxide (however, when represented by a composition formula: S x O y , y / x >
2): 1 to 30%, inert gas such as Ar or He: remaining, by using an inert gas-based reaction gas having a composition consisting of:
Further, the present invention is characterized by a method for producing a coated cemented carbide tool which achieves uniform layer thickness of the thickened layer and improved interlayer adhesion and, as a result, exhibits excellent chipping resistance.

【0007】つぎに、この発明の方法において、反応ガ
スの組成を上記の通りに限定した理由を説明する。 (a)AlCl3 その割合が0.5%未満では、Al23 のAl源が不
足してAl23 層の形成が遅くなり、実用的でなく、
一方その割合が10%を越えるとAl源が供給過剰とな
り、Al23 層の結晶性が低下するようになることか
ら、その割合を0.5〜10%、望ましくは2〜7%と
定めた。
Next, the reason why the composition of the reaction gas is limited as described above in the method of the present invention will be described. (A) When the proportion of AlCl 3 is less than 0.5%, the source of Al 2 O 3 is insufficient and the formation of the Al 2 O 3 layer becomes slow, which is not practical.
On the other hand, if the ratio exceeds 10%, the supply of the Al source becomes excessive, and the crystallinity of the Al 2 O 3 layer decreases, so that the ratio is 0.5 to 10%, preferably 2 to 7%. I decided.

【0008】(b)酸化イオウ(以下、Sx y で示
す) その割合が1%未満では、Al23 のO源に対してA
l源が供給過剰となって結晶性が低下し、一方その割合
が30%を越えると逆にAl源に対して分解Oが過剰に
存在し、Al23 層の形成速度が遅くなることから、
その割合を1〜30%、望ましくは5〜20%と定め
た。また、Sx y のSとOの原子割合、すなわちy/
xが2以下では、SO2 が化学的に安定したものなの
で、上記(ア)式、すなわちSO3 →SO2 +Oにした
がって生成するOが皆無となり、実質的にAl23
の形成が不可能となることから、y/x>2と定めた。
(B) Sulfur oxide (hereinafter referred to as S x O y ) When the proportion is less than 1%, A is less than the O source of Al 2 O 3.
If the l-source is excessively supplied and the crystallinity is reduced, on the other hand, if the ratio exceeds 30%, the decomposition O is excessively present relative to the Al source, and the formation rate of the Al 2 O 3 layer is reduced. From
The ratio was set to 1 to 30%, preferably 5 to 20%. Further, the atomic ratio of S and O in S x O y , that is, y /
When x is 2 or less, since SO 2 is chemically stable, there is no O generated according to the above formula (A), that is, SO 3 → SO 2 + O, and the formation of the Al 2 O 3 layer is substantially eliminated. Since it becomes impossible, y / x> 2 was determined.

【0009】なお、その他の製造条件である反応温度お
よび雰囲気圧力は、反応温度:800〜1100℃、望
ましくは900〜1050℃、雰囲気圧力:20〜20
0torr、望ましくは40〜100torrとするの
がよい。これは、反応温度が800℃未満ではAl2
3 層の結晶性が低下し、一方1100℃を越えるとAl
23 層が粗粒化し、耐チッピング性が低下するように
なるという理由によるものであり、また雰囲気圧力が2
0torr未満では反応が遅くなり、所定の速さでの層
形成が行われず、一方200torrを越えると層の表
面に凹凸が生じるようになって、層厚不均一化の原因と
なるという理由によるものである。また、硬質被覆層の
平均層厚を3〜20μmとしたのは、その層厚が3μm
未満では所望のすぐれた耐摩耗性を確保することができ
ず、一方その層厚が20μmを越えると、切刃に欠けや
チッピングが発生し易くなるという理由によるものであ
る。
The reaction temperature and atmospheric pressure, which are other production conditions, are as follows: reaction temperature: 800 to 1100 ° C., preferably 900 to 1050 ° C., and atmospheric pressure: 20 to 20.
0 torr, preferably 40 to 100 torr. This is because when the reaction temperature is lower than 800 ° C., Al 2 O
The crystallinity of the three layers decreases, while if it exceeds 1100 ° C, Al
This is because the 2 O 3 layer becomes coarse and the chipping resistance is reduced.
If the pressure is less than 0 torr, the reaction is slow, and the layer is not formed at a predetermined speed. On the other hand, if the pressure exceeds 200 torr, the surface of the layer becomes uneven, which causes a non-uniform layer thickness. It is. Further, the reason why the average layer thickness of the hard coating layer is 3 to 20 μm is that the layer thickness is 3 μm.
If the thickness is less than 20 μm, the desired excellent wear resistance cannot be ensured. On the other hand, if the thickness exceeds 20 μm, chipping or chipping is likely to occur on the cutting edge.

【0010】[0010]

【発明の実施の形態】つぎに、この発明の方法を実施例
により具体的に説明する。原料粉末として、平均粒径:
2.8μmを有する中粒WC粉末、同4.9μmの粗粒
WC粉末、同1.5μmの(Ti,W)C(重量比で、
以下同じ、TiC/WC=30/70)粉末、同1.2
μmの(Ti,W)CN(TiC/TiN/WC=24
/20/56)粉末、同1.2μmの(Ta,Nb)C
(TaC/NbC=90/10)粉末、および同1.1
μmのCo粉末を用意し、これら原料粉末を表1に示さ
れる配合組成に配合し、ボールミルで72時間湿式混合
し、乾燥した後、ISO・CNMG120408(超硬
基体A〜D用)および同SEEN42AFTN1(超硬
基体E用)に定める形状の圧粉体にプレス成形し、この
圧粉体を同じく表1に示される条件で真空焼結すること
により超硬基体A〜Eをそれぞれ製造した。さらに、上
記超硬基体Bに対して、100torrのCH4 ガス雰
囲気中、温度:1400℃に1時間保持後、徐冷の浸炭
を施し、処理後、超硬基体表面に付着するカーボンとC
oを酸およびバレル研磨で除去することにより、表面か
ら11μmの位置で最大Co含有量:15.9重量%、
深さ:42μmのCo富化帯域を基体表面部に形成し
た。また、上記超硬基体AおよびDには、焼結したまま
で、表面部に表面から17μmの位置で最大Co含有
量:9.1重量%、深さ:23μmのCo富化帯域が形
成されており、残りの超硬基体CおよびEには、前記C
o富化帯域の形成がなく、全体的に均質な組織をもつも
のであった。なお、表1には、上記超硬基体A〜Eの内
部硬さ(ロックウエル硬さAスケール)をそれぞれ示し
た。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the method of the present invention will be specifically described with reference to embodiments. As raw material powder, average particle size:
Medium WC powder having 2.8 μm, coarse WC powder having 4.9 μm, and (Ti, W) C having 1.5 μm (weight ratio:
Hereinafter the same, TiC / WC = 30/70) powder, same as 1.2
μm (Ti, W) CN (TiC / TiN / WC = 24
/ 20/56) Powder, (Ta, Nb) C of 1.2 μm
(TaC / NbC = 90/10) powder, and 1.1
μm Co powder was prepared, and these raw material powders were blended in the blending composition shown in Table 1, wet-mixed for 72 hours with a ball mill, dried, and then subjected to ISO • CNMG120408 (for carbide substrates A to D) and SEEN42AFTN1. Press-formed into a green compact having a shape defined for (for super-hard substrate E), and the green compact was vacuum-sintered under the conditions shown in Table 1 to produce super-hard substrates A to E, respectively. Further, the cemented carbide substrate B is kept in a 100 Torr CH 4 gas atmosphere at a temperature of 1400 ° C. for 1 hour, and then gradually carburized. After the treatment, carbon and carbon adhering to the cemented carbide substrate surface are treated.
By removing o by acid and barrel polishing, the maximum Co content at a position 11 μm from the surface: 15.9% by weight,
A Co-enriched zone having a depth of 42 μm was formed on the surface of the substrate. On the surface of the cemented carbide substrates A and D, a Co-enriched zone having a maximum Co content of 9.1 wt% and a depth of 23 μm was formed at a position of 17 μm from the surface of the sintered body. And the remaining cemented carbide substrates C and E have the C
o There was no formation of an enriched zone and the tissue had an overall homogeneous structure. Table 1 shows the internal hardness (Rockwell hardness A scale) of each of the carbide substrates A to E.

【0011】ついで、これらの超硬基体A〜Eの表面
に、ホーニングを施した状態で、通常の化学蒸着装置を
用い、表2(表中のl−TiCNは特開平6−8010
号公報に記載される縦長成長結晶組織をもつものであ
り、また同p−TiCNは通常の粒状結晶組織をもつも
のである)および表3に示される条件にて、表4、5に
示される組成および目標層厚(切刃の逃げ面)の硬質被
覆層を形成することにより本発明法1〜10および従来
法1〜10をそれぞれ実施し、被覆超硬工具(以下、そ
れぞれの方法に対応する被覆超硬工具を本発明被覆超硬
工具1〜10および従来被覆超硬工具1〜10という)
を製造した。この結果得られた各種の被覆超硬工具の硬
質被覆層を構成するAl23 層について、切刃の逃げ
面とすくい面の交わるエッジ部の最大層厚を測定し、さ
らに前記エッジ部からそれぞれ1mm内側の箇所の逃げ面
とすくい面における層厚を測定した。この測定結果を表
6,7に示した。なお、硬質被覆層を構成するAl2
3 層以外のその他の層の層厚には、いずれも局部的バラ
ツキがほとんどなく、目標層厚とほぼ同じ値を示すもの
であった。
Then, the surfaces of these superhard substrates A to E were honed, and a conventional chemical vapor deposition apparatus was used. Table 1 (1-TiCN in the table corresponds to JP-A-6-8010
Under the conditions shown in Table 3 and Table 3 under the conditions shown in Table 3 and under the condition shown in Table 3. By forming the hard coating layer having the composition and the target layer thickness (the flank of the cutting edge), the methods 1 to 10 of the present invention and the conventional methods 1 to 10 are carried out, respectively, and the coated carbide tool (hereinafter, corresponding to each method) Coated carbide tools to be used are referred to as coated carbide tools 1 to 10 of the present invention and conventional coated carbide tools 1 to 10).
Was manufactured. For the resulting Al 2 O 3 layer constituting the hard coating layer of the various coated carbide tools obtained as a result, the maximum layer thickness at the edge where the flank and rake face of the cutting edge intersect was measured, and further from the edge. The layer thickness was measured on the flank and rake face of each 1 mm inside. The measurement results are shown in Tables 6 and 7. In addition, Al 2 O constituting the hard coating layer
The thicknesses of the other layers other than the three layers showed almost no local variation, and were almost the same as the target layer thickness.

【0012】さらに、いずれも耐チッピング性を評価す
る目的で、上記本発明被覆超硬工具1、2および従来被
覆超硬工具1、2については、被削材:JIS・FCD
45の角材、切削速度:150m/min.、切込み:
2mm、送り:0.3mm/rev.、切削時間:10
分、の条件でダクタイル鋳鉄の乾式断続切削試験を行
い、切刃の逃げ面摩耗幅を測定した。
Further, for the purpose of evaluating chipping resistance, the coated carbide tools 1 and 2 of the present invention and the conventional coated carbide tools 1 and 2 were subjected to a work material: JIS FCD.
45, a cutting speed: 150 m / min. , Infeed:
2 mm, feed: 0.3 mm / rev. , Cutting time: 10
A dry intermittent cutting test of ductile cast iron was performed under the following conditions, and the flank wear width of the cutting edge was measured.

【0013】また上記本発明被覆超硬工具3、4および
従来被覆超硬工具3、4については、被削材:JIS・
SCM440の角材、切削速度:150m/min.、
切込み:2mm.、送り:0.3mm/rev.、切削
時間:10分、の条件で合金鋼の乾式断続切削試験を行
い、同じく切刃の逃げ面摩耗幅を測定した。
[0013] The coated carbide tools 3 and 4 of the present invention and the conventional coated carbide tools 3 and 4 have a work material of JIS.
Square material of SCM440, cutting speed: 150 m / min. ,
Cut: 2 mm. , Feed: 0.3 mm / rev. A dry intermittent cutting test was performed on the alloy steel under the conditions of cutting time: 10 minutes, and the flank wear width of the cutting edge was measured in the same manner.

【0014】また、同じく本発明被覆超硬工具5、6お
よび従来被覆超硬工具5、6については、被削材:JI
S・S45Cの角材、切削速度:150m/min.、
切込み:2mm.、送り:0.3mm/rev.、切削
時間:10分、の条件で炭素鋼の乾式断続切削試験を行
い、切刃の逃げ面摩耗幅を測定した。
Similarly, for the coated carbide tools 5 and 6 of the present invention and the conventionally coated carbide tools 5 and 6, a work material: JI
S.S45C square bar, cutting speed: 150 m / min. ,
Cut: 2 mm. , Feed: 0.3 mm / rev. A dry intermittent cutting test of carbon steel was performed under the conditions of cutting time: 10 minutes, and the flank wear width of the cutting edge was measured.

【0015】同じく本発明被覆超硬工具7、8および従
来被覆超硬工具7、8については、被削材:JIS・F
C200の角材、切削速度:150m/min.、切込
み:2mm.、送り:0.3mm/rev.、切削時
間:10分、の条件で鋳鉄の乾式断続切削試験を行い、
切刃の逃げ面摩耗幅を測定した。
Similarly, for the coated carbide tools 7 and 8 of the present invention and the conventional coated carbide tools 7 and 8, a work material: JIS F
C200 square bar, cutting speed: 150 m / min. , Cut: 2 mm. , Feed: 0.3 mm / rev. , Cutting time: 10 minutes, dry intermittent cutting test of cast iron,
The flank wear width of the cutting blade was measured.

【0016】さらに同じく本発明被覆超硬工具9、10
および従来被覆超硬工具9、10については、被削材:
幅100mm×長さ500mmの寸法をもったJIS・
SCM440の角材、使用条件:直径125mmのカッ
ターに単刃取り付け、回転数:510r.p.m.、切
削速度:200m/min.、切込み:2mm.、送
り:0.2mm/刃、切削時間:3パス(1パスの切削
時間:5.3分)、の条件で合金鋼の乾式フライス切削
(断続切削)試験を行い、切刃の逃げ面摩耗幅を測定し
た。これらの測定結果を表6、7に示した。
Further, the same applies to the coated carbide tools 9 and 10 of the present invention.
And for the conventional coated carbide tools 9, 10, the work material:
JIS with dimensions of width 100mm x length 500mm
Square material of SCM440, use conditions: single blade attached to a cutter with a diameter of 125 mm, rotation speed: 510 r. p. m. , Cutting speed: 200 m / min. , Cut: 2 mm. , Feed: 0.2mm / tooth, cutting time: 3 passes (cutting time of 1 pass: 5.3 minutes), dry milling (intermittent cutting) test of alloy steel, flank wear of cutting edge The width was measured. Tables 6 and 7 show the results of these measurements.

【0017】[0017]

【表1】 [Table 1]

【0018】[0018]

【表2】 [Table 2]

【0019】[0019]

【表3】 [Table 3]

【0020】[0020]

【表4】 [Table 4]

【0021】[0021]

【表5】 [Table 5]

【0022】[0022]

【表6】 [Table 6]

【0023】[0023]

【表7】 [Table 7]

【0024】[0024]

【発明の効果】表6,7に示される結果から、いずれも
硬質被覆層を構成するAl2 3 層の形成に不活性ガス
系反応ガスを用いる本発明法1〜10で製造された本発
明被覆超硬工具1〜10は、いずれもこれを構成する硬
質被覆層のうちのAl23 層の層厚に、これを厚膜化
しても局部的バラツキがきわめて少なく、切刃の逃げ
面、すくい面、および逃げ面とすくい面の交わるエッジ
部の相互間の層厚が均一化しているのに対して、Al2
3 層の形成に水素系反応ガスを用いる従来法1〜10
で製造された従来被覆超硬工具1〜10においては、逃
げ面、すくい面、およびエッジ部における層厚の相互間
のバラツキが著しく、この結果として本発明被覆超硬工
具1〜10は、鋼および鋳鉄の断続切削で、前記Al2
3 層がすぐれた層間密着性を有することと相まって、
従来被覆超硬工具1〜10に比してすぐれた耐チッピン
グ性を示すようになることが明らかである。上述のよう
に、この発明の方法によれば、硬質被覆層を構成するA
2 3 層の層厚を厚膜化しても、その層厚に局部的バ
ラツキがきわめて少なく、かつ層間密着性の良好な被覆
超硬工具を製造することができ、したがって、この結果
得られた被覆超硬工具は、例えば鋼や鋳鉄などの連続切
削は勿論のこと、断続切削においてもすぐれた耐チッピ
ング性を示し、長期に亘ってすぐれた切削性能を示すの
で、切削加工のFA化および省力化に寄与するなど工業
上有用な効果をもたらすものである。
As can be seen from the results shown in Tables 6 and 7, all of the books produced by the present invention methods 1 to 10 using an inert gas-based reactive gas for forming the Al 2 O 3 layer constituting the hard coating layer. In each of the invention coated carbide tools 1 to 10, even if the thickness of the Al 2 O 3 layer of the hard coating layer constituting the hard coating layer is increased, the local variation is extremely small, and the cutting edge escapes. The surface thickness, the rake face, and the layer thickness between the flank and the rake face intersecting edges are made uniform, while Al 2
Conventional methods 1 to 10 using a hydrogen-based reaction gas for forming the O 3 layer
In the conventional coated cemented carbide tools 1 to 10 manufactured by the above, the variation in the layer thickness between the flank, the rake face, and the edge portion is remarkable, and as a result, the coated cemented carbide tools 1 to 10 of the present invention and in intermittent cutting of cast iron, the Al 2
Coupled with the excellent interlayer adhesion of the O 3 layer,
It is clear that the chipping resistance is superior to that of the conventional coated carbide tools 1 to 10. As described above, according to the method of the present invention, A
Even if the layer thickness of the l 2 O 3 layer is increased, a coated carbide tool having very little local variation in the layer thickness and good interlayer adhesion can be manufactured. Coated carbide tools, for example, show excellent chipping resistance even in intermittent cutting as well as continuous cutting of steel and cast iron, etc., and show excellent cutting performance over a long period of time. It has industrially useful effects such as contributing to labor saving.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 炭化タングステン基超硬合金基体の表面
に、化学蒸着法および/または物理蒸着法を用いて、酸
化アルミニウム層を含む硬質被覆層を3〜20μmの平
均層厚で形成することにより表面被覆超硬合金製切削工
具を製造する方法にして、前記酸化アルミニウム層の形
成に、反応ガスとして、容量%で、 三塩化アルミニウム:0.5〜10%、 酸化イオウ(但し、組成式:Sx y で表した場合、y
/x>2):1〜30%、 不活性ガス:残り、からなる組成を有する不活性ガス系
反応ガスを用いることを特徴とする耐チッピング性のす
ぐれた表面被覆超硬合金製切削工具の製造法。
1. A hard coating layer including an aluminum oxide layer having an average thickness of 3 to 20 μm is formed on a surface of a tungsten carbide-based cemented carbide substrate using a chemical vapor deposition method and / or a physical vapor deposition method. In a method for producing a surface-coated cemented carbide cutting tool, aluminum trichloride: 0.5 to 10% by volume, as a reactive gas, sulfur oxide (the composition formula: When represented by S x O y , y
/ X> 2): 1 to 30%, inert gas: the use of an inert gas-based reactive gas having a composition consisting of the remainder, a cutting tool made of a surface-coated cemented carbide having excellent chipping resistance. Manufacturing method.
【請求項2】 炭化タングステン基超硬合金基体の表面
に、化学蒸着法および/または物理蒸着法を用いて、T
iの炭化物層、窒化物層、炭窒化物層、酸化物層、炭酸
化物層、窒酸化物層、および炭窒酸化物層のうちの1種
または2種以上と、酸化アルミニウム層とからなる硬質
被覆層を3〜20μmの平均層厚で形成することにより
表面被覆超硬合金製切削工具を製造する方法にして、前
記酸化アルミニウム層の形成に、反応ガスとして、容量
%で、 三塩化アルミニウム:0.5〜10%、 酸化イオウ(但し、組成式:Sx y で表した場合、y
/x>2):1〜30%、 不活性ガス:残り、からなる組成を有する不活性ガス系
反応ガスを用いることを特徴とする耐チッピング性のす
ぐれた表面被覆超硬合金製切削工具の製造法。
2. The surface of a tungsten carbide-based cemented carbide substrate is subjected to chemical vapor deposition and / or physical vapor deposition to form a T
i or one or more of a carbide layer, a nitride layer, a carbonitride layer, an oxide layer, a carbonate layer, a nitride oxide layer, and a carbonitride layer, and an aluminum oxide layer A method of manufacturing a surface-coated cemented carbide cutting tool by forming a hard coating layer with an average layer thickness of 3 to 20 μm. : 0.5 to 10%, sulfur oxide (however, when represented by a composition formula: S x O y , y
/ X> 2): 1 to 30%, inert gas: the use of an inert gas-based reactive gas having a composition consisting of the remainder, a cutting tool made of a surface-coated cemented carbide having excellent chipping resistance. Manufacturing method.
JP16449496A 1996-06-25 1996-06-25 Manufacturing method of surface coated cemented carbide cutting tool with excellent chipping resistance Expired - Fee Related JP3304767B2 (en)

Priority Applications (1)

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JP16449496A JP3304767B2 (en) 1996-06-25 1996-06-25 Manufacturing method of surface coated cemented carbide cutting tool with excellent chipping resistance

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Application Number Priority Date Filing Date Title
JP16449496A JP3304767B2 (en) 1996-06-25 1996-06-25 Manufacturing method of surface coated cemented carbide cutting tool with excellent chipping resistance

Publications (2)

Publication Number Publication Date
JPH108253A true JPH108253A (en) 1998-01-13
JP3304767B2 JP3304767B2 (en) 2002-07-22

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ID=15794235

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