JPH1089284A - ターボ分子ポンプ - Google Patents

ターボ分子ポンプ

Info

Publication number
JPH1089284A
JPH1089284A JP26352396A JP26352396A JPH1089284A JP H1089284 A JPH1089284 A JP H1089284A JP 26352396 A JP26352396 A JP 26352396A JP 26352396 A JP26352396 A JP 26352396A JP H1089284 A JPH1089284 A JP H1089284A
Authority
JP
Japan
Prior art keywords
blade
rotor
blades
turbo
molecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26352396A
Other languages
English (en)
Japanese (ja)
Inventor
Yasushi Maejima
靖 前島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Seiki KK
Original Assignee
Seiko Seiki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Seiki KK filed Critical Seiko Seiki KK
Priority to JP26352396A priority Critical patent/JPH1089284A/ja
Priority to EP97306652A priority patent/EP0829645A3/de
Publication of JPH1089284A publication Critical patent/JPH1089284A/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP26352396A 1996-09-12 1996-09-12 ターボ分子ポンプ Pending JPH1089284A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP26352396A JPH1089284A (ja) 1996-09-12 1996-09-12 ターボ分子ポンプ
EP97306652A EP0829645A3 (de) 1996-09-12 1997-08-29 Turbomolekularpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26352396A JPH1089284A (ja) 1996-09-12 1996-09-12 ターボ分子ポンプ

Publications (1)

Publication Number Publication Date
JPH1089284A true JPH1089284A (ja) 1998-04-07

Family

ID=17390728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26352396A Pending JPH1089284A (ja) 1996-09-12 1996-09-12 ターボ分子ポンプ

Country Status (2)

Country Link
EP (1) EP0829645A3 (de)
JP (1) JPH1089284A (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008136084A1 (ja) * 2007-04-23 2008-11-13 Shimadzu Corporation ターボ分子ポンプ
WO2009101699A1 (ja) * 2008-02-15 2009-08-20 Shimadzu Corporation ターボ分子ポンプ
KR20150119549A (ko) * 2014-04-15 2015-10-26 한밭대학교 산학협력단 터보분자식 수증기 압축장치
JP2016211535A (ja) * 2015-05-04 2016-12-15 プファイファー・ヴァキューム・ゲーエムベーハー ローターディスク
JP2020122429A (ja) * 2019-01-30 2020-08-13 株式会社島津製作所 ターボ分子ポンプ

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3092063B2 (ja) 1998-06-17 2000-09-25 セイコー精機株式会社 ターボ分子ポンプ
JP3047292B1 (ja) 1998-11-24 2000-05-29 セイコー精機株式会社 ターボ分子ポンプ及び真空装置
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ
DE10103230A1 (de) * 2001-01-25 2002-08-01 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotor-und Statorschaufeln
JP7668612B2 (ja) * 2018-08-08 2025-04-25 エドワーズ株式会社 真空ポンプ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB580806A (en) * 1941-05-21 1946-09-20 Alan Arnold Griffith Improvements in compressor, turbine and like blades
FR1306013A (fr) * 1961-08-04 1962-10-13 Snecma Perfectionnements aux pompes à vide turbomoléculaires
DE2229724B2 (de) * 1972-06-19 1980-06-04 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
DE7237362U (de) * 1972-10-12 1973-01-11 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
SU1252552A1 (ru) * 1984-06-01 1986-08-23 Научно-исследовательский институт прикладной математики и кибернетики при Горьковском государственном университете им.Н.И.Лобачевского Ротор радиального турбомолекул рного вакуумного насоса
DE3507274A1 (de) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen
WO1994007033A1 (en) * 1992-09-23 1994-03-31 United States Of America As Represented By The Secretary Of The Air Force Turbo-molecular blower

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008136084A1 (ja) * 2007-04-23 2008-11-13 Shimadzu Corporation ターボ分子ポンプ
WO2009101699A1 (ja) * 2008-02-15 2009-08-20 Shimadzu Corporation ターボ分子ポンプ
CN102007298A (zh) * 2008-02-15 2011-04-06 株式会社岛津制作所 涡轮分子泵
US8668436B2 (en) 2008-02-15 2014-03-11 Shimadzu Corporation Turbomolecular pump
JP5445143B2 (ja) * 2008-02-15 2014-03-19 株式会社島津製作所 ターボ分子ポンプ
KR20150119549A (ko) * 2014-04-15 2015-10-26 한밭대학교 산학협력단 터보분자식 수증기 압축장치
JP2016211535A (ja) * 2015-05-04 2016-12-15 プファイファー・ヴァキューム・ゲーエムベーハー ローターディスク
JP2020122429A (ja) * 2019-01-30 2020-08-13 株式会社島津製作所 ターボ分子ポンプ

Also Published As

Publication number Publication date
EP0829645A2 (de) 1998-03-18
EP0829645A3 (de) 1998-11-11

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