JPH109831A - Flying height measuring device for magnetic recording devices - Google Patents

Flying height measuring device for magnetic recording devices

Info

Publication number
JPH109831A
JPH109831A JP16269696A JP16269696A JPH109831A JP H109831 A JPH109831 A JP H109831A JP 16269696 A JP16269696 A JP 16269696A JP 16269696 A JP16269696 A JP 16269696A JP H109831 A JPH109831 A JP H109831A
Authority
JP
Japan
Prior art keywords
light
flying height
slider
magnetic recording
magnetic head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16269696A
Other languages
Japanese (ja)
Inventor
Hiroyuki Sugawara
弘之 菅原
Sadao Mori
貞雄 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP16269696A priority Critical patent/JPH109831A/en
Publication of JPH109831A publication Critical patent/JPH109831A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】 【課題】磁気記録装置における磁気ヘッド・スライダの
浮上量計測に、FTRを利用した場合にスライダをはじ
めとする磁気ヘッド支持系に特別な加工を施す必要がな
い浮上量測定装置を提供する。 【解決手段】磁気ヘッド2とスライダ1をシールドして
いる絶縁膜3を浮上量センサの光路として利用する。
Abstract: PROBLEM TO BE SOLVED: To measure flying height of a magnetic head slider in a magnetic recording apparatus without using special processing on a slider or other magnetic head support system when using an FTR to measure the flying height of the slider. Provide equipment. An insulating film that shields a magnetic head and a slider is used as an optical path of a flying height sensor.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は磁気記録装置の浮上
量測定装置に関する。
The present invention relates to a flying height measuring device for a magnetic recording device.

【0002】[0002]

【従来の技術】従来の技術は特開平3−212868 号公報の
ように発光部,光路,受光部の全てを光集積化したセン
サを磁気ヘッド・スライダに搭載している装置が紹介さ
れている。また、別の方法として特開平3−054405 号公
報に記載のように、磁気ヘッド・スライダには光路のみ
を搭載して発光部および受光部を装置外部に設置して、
光路と発光部及び受光部を光ファイバで接続する装置が
紹介されている。
2. Description of the Related Art As a prior art, Japanese Patent Application Laid-Open No. 3-212868 discloses an apparatus in which a sensor in which all of a light emitting section, an optical path and a light receiving section are optically integrated is mounted on a magnetic head slider. . As another method, as described in JP-A-3-054055, only a light path is mounted on a magnetic head slider, and a light emitting unit and a light receiving unit are installed outside the apparatus.
A device for connecting an optical path to a light emitting unit and a light receiving unit by an optical fiber is introduced.

【0003】[0003]

【発明が解決しようとする課題】FTRを利用した浮上
量測定装置はスライダにセンサを構成することが可能で
あることから、浮上量の絶対値測定ができる点や磁気ヘ
ッドの位置決め動作時(シーク動作時)の挙動計測が可
能であり、しかも実ディスクと実スライダの組合せで測
定ができる点で従来から使用されている光干渉式の浮上
テスタに比べて有利である。しかし、逆にスライダにセ
ンサを搭載する必要があるため、スライダに特別の加工
を施す必要がある。
Since the flying height measuring apparatus using the FTR can constitute a sensor on the slider, the flying height measuring apparatus can measure the absolute value of the flying height, and can be used during the magnetic head positioning operation (seek operation). This is advantageous over the optical interference type floating tester conventionally used in that the behavior can be measured during operation) and the measurement can be performed using a combination of an actual disk and an actual slider. However, conversely, since it is necessary to mount the sensor on the slider, it is necessary to perform special processing on the slider.

【0004】本発明の目的は、FTRを利用したセンサ
をスライダに特別の加工することなく実スライダに構成
することができる浮上量測定装置を提供することにあ
る。
SUMMARY OF THE INVENTION An object of the present invention is to provide a flying height measuring apparatus capable of forming a sensor using an FTR into an actual slider without specially processing the slider.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するため
本発明は浮上量センサを新たに構成するのではなく、図
5に示すようにスライダ1と磁気ヘッド2の間をシール
ドする絶縁膜3を浮上量センサの光路として利用する。
In order to achieve the above-mentioned object, the present invention does not newly construct a flying height sensor, but instead forms an insulating film 3 for shielding between a slider 1 and a magnetic head 2 as shown in FIG. Is used as the optical path of the flying height sensor.

【0006】[0006]

【発明の実施の形態】本発明の第1の実施例を図1から
図3を用いて説明する。図1は全体構成を示した側面図
であり、図2は図1における測定主要部を示した図であ
る。図3は図1の正面図である。次の、図1から図3の
構成要素を述べる。1は磁気ヘッド2を搭載したスライ
ダ、5は磁気ディスク4を固定し回転させるスピンドル
モータ、7および8は光束6のビーム径を磁気ディスク
4の半径の値にコリメートするコリメータレンズ、9は
光束6の一部を入射光11として絶縁膜3に入射させる
プリズムカプラ、10は入射光11を絶縁膜3から測定
光13として出射させるプリズムカプラ、12はプリズ
ムカプラ9とスライダの境界で反射する参照光、14は
偏光子、15および16は光検出器、17は光検出器1
5,16から浮上量を求める回路、18はスライダ1を
支持するロードアームである。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a side view showing the overall configuration, and FIG. 2 is a diagram showing a main measurement part in FIG. FIG. 3 is a front view of FIG. Next, components of FIGS. 1 to 3 will be described. 1 is a slider on which the magnetic head 2 is mounted, 5 is a spindle motor for fixing and rotating the magnetic disk 4, 7 and 8 are collimator lenses for collimating the beam diameter of the light beam 6 to the value of the radius of the magnetic disk 4, and 9 is a light beam 6 Is a prism coupler that makes a part of the incident light 11 incident on the insulating film 3, 10 is a prism coupler that emits the incident light 11 from the insulating film 3 as the measuring light 13, and 12 is a reference light that is reflected at the boundary between the prism coupler 9 and the slider. , 14 are polarizers, 15 and 16 are photodetectors, 17 is photodetector 1
Reference numeral 18 denotes a load arm for supporting the slider 1.

【0007】このように構成された本発明の第1の実施
例について、その動作を説明する。図1で、スライダ1
はスピンドルモータ5に取り付けられて回転している磁
気ディスク4の上を浮上している。スライダ1にはプリ
ズムカプラ9および10が搭載されている。光束6はコ
リメータレンズ7および8によって磁気ディスク4の半
径の範囲に平行光になるようにコリメートされている。
光束6のうちプリズムカプラ9の反射面9aに入射した
光は、図2に示すように磁気ヘッド2とスライダ1をシ
ールドしている絶縁膜3に入射する光とプリズムカプラ
9とスライダ1の境界で反射する光に分かれる。このう
ち、プリズムカプラ9とスライダ1の境界で反射した光
は参照光12としてある偏光面のみ偏光子14で選択さ
れて光検出器15に導かれ電気信号E1 に変換される。
また、絶縁膜3に入射した光は測定部3aで全反射する
ような入射角θで入射される。測定部3aで反射した光
はプリズムカプラ10により出射され、測定光13とし
て偏光子14で参照光12と同じ偏光面のみ選択して光
検出器16に入射して電気信号E2 に変換される。この
とき、測定部3aと空気の境界にはエバネッセント波が
光の波長程度の領域まで空気側にしみ出している。測定
部3aと磁気ディスク4の浮上量が十分大きな場合には
光は全反射するが、浮上量が光の波長程度以下となりエ
バネッセント波がしみ出た領域に達すると光が磁気ディ
スク4に吸収されて光量が図4のように浮上量に対して
変化する。この光学現象をFTRという。逆に反射光量
を測定することで浮上量を測定することができる。しか
し、測定光13の光量変化を測定しただけでは、光束6
の光量そのものが変化した場合はそれがそのまま測定誤
差となる。また、スライダがシーク動作するときの挙動
を測定するために、光束6のビーム径を磁気ディスク1
の半径にコリメートしているが、光は通常面内でガウス
分布しているのでシーク動作するとプリズムカプラ9に
入射する光量が変化するため、これも測定誤差となる。
そこで、上述したようにプリズムカプラ9の形状をひし
型にしてスライダ1との境界で反射した光を参照光12
として利用して測定光13と比E2/E1を浮上量演算回
路17で求めることで測定誤差を除去できる。
The operation of the first embodiment of the present invention configured as described above will be described. In FIG. 1, slider 1
Is floating above the rotating magnetic disk 4 attached to the spindle motor 5. The slider 1 has prism couplers 9 and 10 mounted thereon. The light flux 6 is collimated by collimator lenses 7 and 8 so that the light flux becomes parallel light within the radius of the magnetic disk 4.
As shown in FIG. 2, the light of the light flux 6 incident on the reflection surface 9a of the prism coupler 9 is incident on the insulating film 3 shielding the magnetic head 2 and the slider 1 and the boundary between the prism coupler 9 and the slider 1. Splits into light reflected by Of the light, the light reflected at the boundary between the prism coupler 9 and the slider 1 is selected by the polarizer 14 only for a certain polarization plane as the reference light 12, guided to the photodetector 15, and converted into an electric signal E 1 .
The light incident on the insulating film 3 is incident at an incident angle θ such that the light is totally reflected by the measuring unit 3a. The light reflected by the measuring portion 3a is emitted by the prism coupler 10, is converted into an electric signal E 2 to select only the same polarization plane as the reference light 12 by the polarizer 14 and incident on the light detector 16 as measurement light 13 . At this time, the evanescent wave is seeping out to the air side at the boundary between the measurement unit 3a and the air to the region of the wavelength of light. When the flying height of the measuring unit 3a and the magnetic disk 4 is sufficiently large, the light is totally reflected. However, when the flying height becomes less than the wavelength of the light and reaches the area where the evanescent wave has permeated, the light is absorbed by the magnetic disk 4. As shown in FIG. 4, the light amount changes with respect to the flying height. This optical phenomenon is called FTR. Conversely, the flying height can be measured by measuring the amount of reflected light. However, only by measuring the change in the amount of light of the measuring light 13, the light flux 6
If the light amount itself changes, it directly becomes a measurement error. Further, in order to measure the behavior when the slider performs a seek operation, the beam diameter of the light beam 6 is changed to the magnetic disk 1.
However, since the light normally has a Gaussian distribution in the plane, the amount of light incident on the prism coupler 9 changes when a seek operation is performed, which also causes a measurement error.
Therefore, as described above, the prism coupler 9 is shaped like a diamond and the light reflected at the boundary with the slider 1 is used as the reference light 12.
The measurement error can be eliminated by determining the ratio E 2 / E 1 to the measurement light 13 by the flying height calculation circuit 17 using the above.

【0008】次に図6を用いて第2の実施例を説明す
る。図6は第2の実施例を説明する浮上量測定装置の側
面図である。19は偏光ビームスプリッタ、20から2
3は光検出器、24,25は浮上量演算回路、26は判
断部である。なお、偏光ビームスプリッタ以前の構成要
素は前述した第1の実施例と同様でありここでは省略す
る。
Next, a second embodiment will be described with reference to FIG. FIG. 6 is a side view of the flying height measuring device for explaining the second embodiment. 19 is a polarizing beam splitter, 20 to 2
3 is a photodetector, 24 and 25 are flying height calculation circuits, and 26 is a judgment unit. The components before the polarization beam splitter are the same as those in the first embodiment described above, and a description thereof will be omitted.

【0009】以上のように構成された本発明の第2の実
施例についてその動作を説明する。本実施例における参
照光12と測定光13を取り出すまでは、第1の実施例
と同様なのでその説明は省略する。参照光12は偏光ビ
ームスプリッタ19でS偏光とP偏光に分離されて、そ
れぞれ光検出器20と22に導かれ電気信号EP1とES1
に変換される。測定光13も参照光13と同様に偏光ビ
ームスプリッタ19でS偏光とP偏光に分離されて、そ
れぞれ光検出器21と23に導かれ電気信号EP2とES2
に変換される。浮上量演算回路24ではP偏光に対する
反射率EP2/EP1を求め、浮上量演算回路25ではS偏
光に対する反射率ES2/ES1を求める。このようにP偏
光とS偏光の両方を利用すると、図4に示すように浮上
量に対して測定感度が高いP偏光が浮上量がゼロになる
前に最小浮上となり、一つの反射率で二つの浮上量が存
在する領域を判断部26でS偏光を利用して判断するこ
とが可能となる。
The operation of the second embodiment of the present invention configured as described above will be described. Until the reference light 12 and the measurement light 13 are taken out in this embodiment, it is the same as in the first embodiment, and a description thereof will be omitted. The reference light 12 is separated into S-polarized light and P-polarized light by a polarization beam splitter 19, and guided to photodetectors 20 and 22, respectively, to receive electric signals E P1 and E S1.
Is converted to The measurement light 13 is also separated into S-polarized light and P-polarized light by the polarization beam splitter 19 in the same manner as the reference light 13 and guided to the photodetectors 21 and 23, respectively, and the electric signals E P2 and E S2 are obtained.
Is converted to The flying height calculation circuit 24 calculates the reflectance E P2 / E P1 for P-polarized light, and the flying height calculation circuit 25 calculates the reflectance E S2 / E S1 for S-polarized light. When both the P-polarized light and the S-polarized light are used in this manner, as shown in FIG. 4, the P-polarized light having a high measurement sensitivity with respect to the flying height becomes the minimum flying height before the flying height becomes zero, and two reflectances are obtained with one reflectance. The area where two flying heights exist can be determined by the determination unit 26 using S-polarized light.

【0010】[0010]

【発明の効果】本発明によれば、センサ測定部の光路と
してスライダと磁気ヘッドをシールドする絶縁膜を利用
しているため、スライダにプリズムカプラを搭載する以
外はスライダをはじめとする磁気ヘッド支持系にまった
く加工を施す必要がなく高精度な浮上量測定が可能とな
る。また、磁気ヘッドと浮上量センサが一体となってい
るため、R/W信号と浮上量の関係が一度に測定でき
る。
According to the present invention, since the slider and the insulating film for shielding the magnetic head are used as the optical path of the sensor measuring section, except for mounting the prism coupler on the slider, the magnetic head support including the slider is supported. It is possible to measure the flying height with high accuracy without having to perform any processing on the system. Further, since the magnetic head and the flying height sensor are integrated, the relationship between the R / W signal and the flying height can be measured at once.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1の実施例を説明する側面図。FIG. 1 is a side view illustrating a first embodiment of the present invention.

【図2】図1における測定主要部を示した側面図。FIG. 2 is a side view showing a main measurement part in FIG.

【図3】図1の正面図本発明の斜視図。FIG. 3 is a front view of FIG. 1 and a perspective view of the present invention.

【図4】浮上量と反射率の関係を示した図。FIG. 4 is a diagram showing a relationship between a flying height and a reflectance.

【図5】課題を解決するための手段を示した側面図。FIG. 5 is a side view showing a means for solving the problem.

【図6】本発明の第1の実施例を説明する側面図。FIG. 6 is a side view illustrating the first embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1…スライダ、4…磁気ディスク、5…スピンドルモー
タ、6…光束、7,8…コリメータレンズ、11…入射
光、12…参照光、13…測定光、14…偏光子、1
5,16…光検出器、17…浮上量演算回路。
REFERENCE SIGNS LIST 1 slider, 4 magnetic disk, 5 spindle motor, 6 luminous flux, 7 8 collimator lens, 11 incident light, 12 reference light, 13 measurement light, 14 polarizer, 1
5, 16: photodetector, 17: flying height calculation circuit.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】磁気記録装置の磁気ヘッド・スライダの浮
上特性を計測する手段として、光が全反射する際に生じ
るエバネッセント波を利用した測定装置において、薄膜
磁気ヘッドを構成するスライダと素子を絶縁する絶縁膜
を光路として利用して浮上量センサとすることを特徴と
する磁気記録装置の浮上量測定装置。
In a measuring apparatus utilizing an evanescent wave generated when light is totally reflected, a slider and an element constituting a thin film magnetic head are insulated as means for measuring the flying characteristics of a magnetic head slider of a magnetic recording apparatus. A flying height measuring device for a magnetic recording device, wherein a flying height sensor is used by using an insulating film to be used as an optical path.
【請求項2】プリズムカプラに入射した光を参照光と測
定光に分離することで、光量変動および光量分布による
測定誤差を除去する手段を備えた請求項1に記載の磁気
記録装置の浮上量測定装置。
2. A flying height of a magnetic recording apparatus according to claim 1, further comprising means for separating light incident on the prism coupler into reference light and measurement light to remove a measurement error due to a light amount fluctuation and a light amount distribution. measuring device.
JP16269696A 1996-06-24 1996-06-24 Flying height measuring device for magnetic recording devices Pending JPH109831A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16269696A JPH109831A (en) 1996-06-24 1996-06-24 Flying height measuring device for magnetic recording devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16269696A JPH109831A (en) 1996-06-24 1996-06-24 Flying height measuring device for magnetic recording devices

Publications (1)

Publication Number Publication Date
JPH109831A true JPH109831A (en) 1998-01-16

Family

ID=15759568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16269696A Pending JPH109831A (en) 1996-06-24 1996-06-24 Flying height measuring device for magnetic recording devices

Country Status (1)

Country Link
JP (1) JPH109831A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006337373A (en) * 2005-06-03 2006-12-14 Asml Netherlands Bv Method for correcting disturbance in level sensor optical path

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006337373A (en) * 2005-06-03 2006-12-14 Asml Netherlands Bv Method for correcting disturbance in level sensor optical path
US7751059B2 (en) 2005-06-03 2010-07-06 Asml Netherlands B.V. Method for correcting disturbances in a level sensor light path

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