JPH11100273A5 - - Google Patents
Info
- Publication number
- JPH11100273A5 JPH11100273A5 JP1997261560A JP26156097A JPH11100273A5 JP H11100273 A5 JPH11100273 A5 JP H11100273A5 JP 1997261560 A JP1997261560 A JP 1997261560A JP 26156097 A JP26156097 A JP 26156097A JP H11100273 A5 JPH11100273 A5 JP H11100273A5
- Authority
- JP
- Japan
- Prior art keywords
- valves
- reliability
- heat dissipation
- silicon nitride
- thermal conductivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9261560A JPH11100273A (ja) | 1997-09-26 | 1997-09-26 | 窒化珪素質焼結体、その製造方法及びそれを用いた回路基板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9261560A JPH11100273A (ja) | 1997-09-26 | 1997-09-26 | 窒化珪素質焼結体、その製造方法及びそれを用いた回路基板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11100273A JPH11100273A (ja) | 1999-04-13 |
| JPH11100273A5 true JPH11100273A5 (de) | 2004-11-11 |
Family
ID=17363606
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9261560A Pending JPH11100273A (ja) | 1997-09-26 | 1997-09-26 | 窒化珪素質焼結体、その製造方法及びそれを用いた回路基板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11100273A (de) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4831581B2 (ja) * | 2007-07-02 | 2011-12-07 | 独立行政法人産業技術総合研究所 | 高周波用低損失誘電体材料、その製造方法及び部材 |
| EP3248956B1 (de) * | 2015-01-23 | 2020-11-04 | Kabushiki Kaisha Toshiba | Siliciumnitridsinterkörpersubstrat und siliciumnitridschaltungssubstrat mit verwendung davon sowie halbleiterbauelement |
| CN113614910A (zh) * | 2019-03-29 | 2021-11-05 | 电化株式会社 | 氮化硅烧结体及其制造方法、以及层叠体及电力模组 |
| JPWO2024095834A1 (de) * | 2022-11-02 | 2024-05-10 |
-
1997
- 1997-09-26 JP JP9261560A patent/JPH11100273A/ja active Pending
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