JPH11110714A - Magnetic head and magnetic recording / reproducing apparatus using the same - Google Patents

Magnetic head and magnetic recording / reproducing apparatus using the same

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Publication number
JPH11110714A
JPH11110714A JP9268469A JP26846997A JPH11110714A JP H11110714 A JPH11110714 A JP H11110714A JP 9268469 A JP9268469 A JP 9268469A JP 26846997 A JP26846997 A JP 26846997A JP H11110714 A JPH11110714 A JP H11110714A
Authority
JP
Japan
Prior art keywords
magnetic
film
metal
films
recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9268469A
Other languages
Japanese (ja)
Inventor
Masaya Sakaguchi
昌也 坂口
Shunsaku Muraoka
俊作 村岡
Hiroyuki Hasegawa
博幸 長谷川
Akinaga Natsui
昭長 夏井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9268469A priority Critical patent/JPH11110714A/en
Publication of JPH11110714A publication Critical patent/JPH11110714A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】 【課題】 デジタルVTRやデータストレージ等の大容
量データの記録再生に適した高効率な磁気ヘッドおよび
磁気記録再生装置を提供することを目的とする。 【解決手段】 非磁性膜6を介して隣り合い、且つ磁化
容易方向が異なる金属磁性膜5a、5bの間の非磁性膜
の膜厚を5nm以下にすることにより、非磁性膜を通っ
て隣接金属磁性膜に磁束が渡る時の、非磁性膜の磁気抵
抗の影響を軽減し、記録再生効率の改善ができる。
(57) [Problem] To provide a highly efficient magnetic head and a magnetic recording / reproducing apparatus suitable for recording / reproducing large-capacity data such as a digital VTR and data storage. SOLUTION: By making the thickness of a non-magnetic film between metal magnetic films 5a and 5b which are adjacent to each other via a non-magnetic film 6 and have different easy magnetization directions to 5 nm or less, the metal magnetic films 5a and 5b are adjacent to each other through the non-magnetic film. The effect of the magnetic resistance of the non-magnetic film when the magnetic flux passes through the metal magnetic film can be reduced, and the recording / reproducing efficiency can be improved.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、磁気記録媒体に対
して情報信号の記録や再生を行う磁気ヘッド及びそれら
を用いた磁気記録再生装置に関するものであり、特に、
多量の信号を効率よく記録再生するデジタルVTRやコ
ンピュータ用磁気記録再生装置等に用いられる磁気ヘッ
ド及びそれらを用いた磁気記録再生装置とに関するもの
である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head for recording and reproducing information signals on and from a magnetic recording medium and a magnetic recording / reproducing apparatus using them.
The present invention relates to a magnetic head used for a digital VTR, a magnetic recording / reproducing device for a computer, etc., which efficiently records and reproduces a large amount of signals, and a magnetic recording / reproducing device using them.

【0002】[0002]

【従来の技術】近年、ディジタルVTRやコンピュータ
用磁気記録再生装置のように大容量の情報信号を高速に
記録再生するシステムの開発が盛んになってきており、
磁気記録媒体もこのような多量の情報を記録再生するた
めに、従来の酸化鉄系から合金粉末媒体や金属蒸着媒体
等の高抗磁力媒体へと変わってきた。そこで、磁気ヘッ
ドとしてもこれらの高抗磁力媒体に対応できるような高
飽和磁束密度を有し、記録、再生効率が優れた磁気ヘッ
ドの開発が望まれてきた。
2. Description of the Related Art In recent years, systems for recording and reproducing large-capacity information signals at high speed, such as digital VTRs and magnetic recording / reproducing apparatuses for computers, have been actively developed.
Magnetic recording media have also changed from conventional iron oxide-based media to high coercive force media such as alloy powder media and metal vapor deposition media in order to record and reproduce such a large amount of information. Therefore, it has been desired to develop a magnetic head having a high saturation magnetic flux density capable of coping with these high coercive force media and having excellent recording and reproducing efficiency.

【0003】従来、このような磁気ヘッドは、主に飽和
磁束密度の高いセンダストやアモルファス磁性合金等の
金属磁性膜と絶縁膜との積層膜の両側を基板で挟持する
積層型構造を有するものとされ、高周波数帯域での渦電
流損失を低減して高周波特性を向上させていた。
Conventionally, such a magnetic head has a laminated structure in which both sides of a laminated film of a metal magnetic film such as sendust or amorphous magnetic alloy having a high saturation magnetic flux density and an insulating film are sandwiched between substrates. As a result, the eddy current loss in the high frequency band is reduced to improve the high frequency characteristics.

【0004】このような積層型構造の磁気ヘッドは、磁
性膜だけで磁路が構成されており、磁路全体にわたって
高い透磁率が求められ、磁化困難方向だけで磁路を構成
することが望まれるが、磁路は磁性膜面内の全ての方向
をとるため、磁化困難方向だけで磁路を構成することは
困難である。そこで、金属磁性膜の異方性を小さくして
等方性に近い膜を用いる方法や、絶縁膜を介して隣接す
る金属磁性膜の磁化容易方向をほぼ直交させる方法(特
開昭63−217511号公報)等が提案されている。
In such a magnetic head having a laminated structure, a magnetic path is constituted only by a magnetic film, a high magnetic permeability is required over the entire magnetic path, and it is desirable to constitute a magnetic path only in a direction in which magnetization is difficult. However, since the magnetic path takes all directions in the plane of the magnetic film, it is difficult to form the magnetic path only in the direction in which magnetization is difficult. Therefore, a method of using a film close to isotropic by reducing the anisotropy of the metal magnetic film, or a method of making the magnetization easy directions of adjacent metal magnetic films through an insulating film substantially orthogonal to each other (Japanese Patent Laid-Open No. 63-217511) And the like have been proposed.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、等方性
に近い金属磁性膜を用いる方法では、高周波数帯域にお
ける初透磁率が自然共鳴のために低下するので、磁気ヘ
ッドの高周波数特性が劣化するという問題がある。ま
た、絶縁膜を介して隣接する金属磁性膜の磁化容易方向
をほぼ直交させる方法では、積層した金属磁性膜の膜特
性に比べて、磁気ヘッド化した時のヘッド特性が良くな
いという問題がある。
However, in the method using a metal magnetic film that is close to isotropic, the initial magnetic permeability in a high frequency band is reduced due to natural resonance, so that the high frequency characteristics of the magnetic head are deteriorated. There is a problem. Further, in the method in which the easy magnetization directions of the adjacent metal magnetic films via the insulating film are substantially orthogonal to each other, there is a problem that the head characteristics when a magnetic head is formed are not good as compared with the film characteristics of the stacked metal magnetic films. .

【0006】本発明は、上記の問題点に鑑み、積層型磁
気ヘッドの形状、磁路等を考慮し、高い記録再生効率を
得ることができる磁気ヘッドおよびそれを用いた磁気記
録再生装置を提供することを目的とする。
In view of the above problems, the present invention provides a magnetic head capable of obtaining high recording / reproducing efficiency in consideration of the shape, magnetic path and the like of a laminated magnetic head, and a magnetic recording / reproducing apparatus using the same. The purpose is to do.

【0007】[0007]

【課題を解決するための手段】上記課題を解決するため
に本発明の第1番目の磁気ヘッドは、金属磁性膜と非磁
性膜とを交互に積層した一対の多層膜磁気コアをその端
面同士が対向するように配置して磁気ギャップを形成し
た磁気ヘッドにおいて、非磁性膜を介して隣り合う金属
磁性膜の磁化容易方向が異なる層を少なくとも一つ有
し、且つ前記非磁性膜を介して隣り合う金属磁性膜の磁
化容易方向が異なる層の間の非磁性膜の膜厚が5nm以
下であることを特徴とする。
In order to solve the above-mentioned problems, a first magnetic head of the present invention comprises a pair of multi-layered magnetic cores in which metal magnetic films and non-magnetic films are alternately laminated, the end faces of which are arranged. Are arranged so as to face each other to form a magnetic gap, the magnetic head having at least one layer in which the easy magnetization directions of the metal magnetic films adjacent to each other via the nonmagnetic film are different from each other, and via the nonmagnetic film. The thickness of the non-magnetic film between adjacent layers of the magnetic metal films having different directions of easy magnetization is 5 nm or less.

【0008】このような磁気ヘッドによれば、非磁性膜
を介して隣接し、磁化容易方向が異なる金属磁性膜間を
磁束が渡ることによる磁気抵抗の影響が小さくなるた
め、記録再生効率を向上させることができる。
According to such a magnetic head, the influence of the magnetic resistance caused by the magnetic flux passing between the metal magnetic films adjacent to each other via the non-magnetic film and having different directions of easy magnetization is reduced, so that the recording / reproducing efficiency is improved. Can be done.

【0009】次に本発明の第2番目の磁気ヘッドは、積
層磁性膜と絶縁膜とを交互に積層した一対の多層膜磁気
コアをその端面同士が対向するように配置して磁気ギャ
ップを形成した磁気ヘッドにおいて、前記積層磁性膜
は、金属磁性膜と非磁性膜とが交互に積層してなり、非
磁性膜を介して隣り合う金属磁性膜の磁化容易方向が異
なる層を少なくとも一つ有し、且つ前記非磁性膜を介し
て隣り合う金属磁性膜の磁化容易方向が異なる層の間の
非磁性膜の膜厚が5nm以下であることを特徴とする。
A second magnetic head according to the present invention forms a magnetic gap by arranging a pair of multilayer magnetic cores in which laminated magnetic films and insulating films are alternately laminated so that their end faces face each other. In the magnetic head described above, the laminated magnetic film has at least one layer in which a magnetic magnetic film and a non-magnetic film are alternately laminated, and the direction of easy magnetization of the adjacent metal magnetic films via the non-magnetic film is different. The thickness of the nonmagnetic film between the layers having different easy magnetization directions of the metal magnetic films adjacent to each other via the nonmagnetic film is 5 nm or less.

【0010】このような磁気ヘッドによれば、高周波数
帯域での渦電流の影響や、非磁性膜を介して隣接し、磁
化容易方向の異なる金属磁性膜間を磁束が渡ることによ
る磁気抵抗の影響が小さくなるため、高周波数帯域まで
記録再生効率を向上させることができる。
According to such a magnetic head, the effect of eddy current in a high frequency band and the magnetic resistance of the magnetic head caused by the magnetic flux passing between metal magnetic films adjacent to each other via a non-magnetic film and having different directions of easy magnetization are reduced. Since the influence is reduced, the recording / reproducing efficiency can be improved up to a high frequency band.

【0011】次に本発明の磁気記録再生装置は、前記第
1番目あるいは第2番目のいずれかに記載の磁気ヘッド
を用いるものである。
Next, a magnetic recording / reproducing apparatus according to the present invention uses the magnetic head according to any one of the first and second aspects.

【0012】このような磁気記録再生装置によれば、記
録再生効率を向上させることができるため、大容量のデ
ータを高速に記録再生することができる。
According to such a magnetic recording / reproducing apparatus, since the recording / reproducing efficiency can be improved, large-capacity data can be recorded / reproduced at high speed.

【0013】[0013]

【発明の実施の形態】以下、本発明の実施の形態につい
て、図面を参照にしながら説明する。
Embodiments of the present invention will be described below with reference to the drawings.

【0014】図1は、本発明の第1の実施の形態に係る
磁気ヘッドを模式的に示す斜視図である。図2は、図1
に示した磁気ヘッドにおける、磁気媒体が対向する側の
面(以下、「媒体スライド面」という。)の磁気ギャッ
プ近傍の構成を模式的に示す図である。
FIG. 1 is a perspective view schematically showing a magnetic head according to a first embodiment of the present invention. FIG. 2 shows FIG.
FIG. 3 is a diagram schematically showing a configuration near a magnetic gap on a surface (hereinafter, referred to as a “media slide surface”) of a magnetic head shown in FIG.

【0015】図1に示した磁気ヘッドにおいては、一対
の非磁性基板1により多層膜磁気コア2が挟み込まれて
おり、一対の多層膜磁気コア2が多層膜端面が対向する
ように配置されて、磁気ギャップ3を形成している。磁
気ヘッドにはコイルを捲回するための巻線窓4がヘッド
厚さ方向に貫通して設けられている。
In the magnetic head shown in FIG. 1, a multi-layer magnetic core 2 is sandwiched between a pair of non-magnetic substrates 1, and a pair of multi-layer magnetic cores 2 are arranged so that end faces of the multi-layer film face each other. , A magnetic gap 3 is formed. The magnetic head is provided with a winding window 4 for winding a coil therethrough in the thickness direction of the head.

【0016】図2に示したように、多層膜磁気コア2
は、金属磁性膜5と非磁性膜6とが交互に積層されるこ
とにより構成されている。金属磁性膜5のうち、非磁性
膜6を挟んで隣接する金属磁性膜の磁化容易方向が膜面
内において、それぞれ磁気ギャップ面と平行5a、磁気
ギャップ面と垂直5bであり、かつこの一対の金属磁性
膜5a、5bの間の非磁性膜厚が5nm以下である。
As shown in FIG. 2, the multilayer magnetic core 2
Is formed by alternately laminating a metal magnetic film 5 and a non-magnetic film 6. Of the metal magnetic films 5, the directions of easy magnetization of the metal magnetic films adjacent to each other with the non-magnetic film 6 interposed therebetween are 5a parallel to the magnetic gap plane and 5b perpendicular to the magnetic gap plane in the film plane, respectively. The nonmagnetic film thickness between the metal magnetic films 5a and 5b is 5 nm or less.

【0017】金属磁性膜5および非磁性膜6を構成する
材料としては、従来、磁気ヘッド、特に積層型の磁気ヘ
ッドに用いられてきたものであれば、特に制限されるこ
となく使用することができる。
As a material constituting the metal magnetic film 5 and the non-magnetic film 6, any material can be used without particular limitation as long as it has been conventionally used for a magnetic head, especially a laminated magnetic head. it can.

【0018】例えば、金属磁性膜5の材料としては、F
eTaN、CoNbZrTa、FeAlSiなどを、非
磁性膜6の材料としては、SiO2、Al23などを用
いることができる。
For example, the material of the metal magnetic film 5 is F
eTaN, CoNbZrTa, FeAlSi, and the like, and the material of the nonmagnetic film 6 can be SiO 2 , Al 2 O 3, and the like.

【0019】金属磁性膜5の好ましい厚さを例示すれ
ば、0.05〜5.0μmである。本実施の形態の磁気
ヘッドでは、非磁性膜6を介して隣接する金属磁性膜5
a、5bの磁化容易方向が異なる。そのため、磁気ヘッ
ドに磁束が流れる時は、図3に示すように、非磁性膜6
通って隣接金属磁性膜に磁束が渡ってしまう。また、図
4に示すように、一般的な膜特性測定時には、金属磁性
膜に対して一方向に磁界を印加するため、磁束は非磁性
膜を通って隣接金属磁性膜には渡らない。つまり、積層
した金属磁性膜の膜特性に比べて、磁気ヘッド化した時
のヘッド特性が良くない原因の一つが、この非磁性膜を
通って隣接金属磁性膜に磁束が渡ることによる非磁性膜
の磁気抵抗である。なお、図3、4中の実線矢印は磁束
の流れを示し、破線矢印は磁化容易方向を示す。
The preferred thickness of the metal magnetic film 5 is, for example, 0.05 to 5.0 μm. In the magnetic head of the present embodiment, the metal magnetic film 5 adjacent via the non-magnetic film 6
The easy magnetization directions of a and 5b are different. Therefore, when a magnetic flux flows through the magnetic head, as shown in FIG.
The magnetic flux passes through the adjacent metal magnetic film. Further, as shown in FIG. 4, when measuring general film characteristics, a magnetic field is applied to the metal magnetic film in one direction, so that the magnetic flux does not pass through the non-magnetic film to the adjacent metal magnetic film. In other words, one of the reasons why the head characteristics when a magnetic head is formed is not as good as the film characteristics of the laminated metal magnetic film is that the magnetic flux passes through the non-magnetic film to the adjacent metal magnetic film. Is the magnetoresistance. 3 and 4, solid arrows indicate the flow of the magnetic flux, and broken arrows indicate the directions of easy magnetization.

【0020】非磁性膜厚を変化させたシミュレーション
結果を図5に示す。金属磁性膜5の磁化困難方向の透磁
率は5000、磁化容易方向の透磁率は500、非磁性
膜6の透磁率は1で一定として、非磁性膜厚を変化させ
た。それぞれの場合の磁気コアの磁気抵抗を求め、非磁
性膜厚が零の時との相対比較を示す。非磁性膜厚が零の
時(0dB)が最も磁気コアの磁気抵抗が小さく、非磁
性膜厚が増加するにつれて磁気コアの磁気抵抗が増加し
ている。また、非磁性膜厚が5nm以下では、磁気抵抗
の増加は僅かであるので、非磁性膜の磁気抵抗による磁
気ヘッドの効率低下も僅かであることがわかる。
FIG. 5 shows the results of a simulation in which the thickness of the nonmagnetic film was changed. The magnetic permeability of the metal magnetic film 5 in the hard magnetization direction was 5000, the magnetic permeability in the easy magnetization direction was 500, and the magnetic permeability of the nonmagnetic film 6 was 1 and the nonmagnetic film thickness was changed. The magnetic resistance of the magnetic core in each case is obtained, and a relative comparison with the case where the non-magnetic film thickness is zero is shown. When the nonmagnetic film thickness is zero (0 dB), the magnetic resistance of the magnetic core is the smallest, and as the nonmagnetic film thickness increases, the magnetic resistance of the magnetic core increases. Further, when the non-magnetic film thickness is 5 nm or less, the increase in the magnetic resistance is small, and it can be seen that the decrease in the efficiency of the magnetic head due to the magnetic resistance of the non-magnetic film is also small.

【0021】図2に示した膜構造を有する積層型磁気ヘ
ッドを作製した。金属磁性膜5はFeTaNで膜厚は
0.4μm、非磁性膜6はSiO2で膜厚は4nmと5
0nmの2種類を作製した。また、金属磁性膜及び非磁
性膜はスパッタリング法で成膜し、金属磁性膜の磁化容
易方向はスパッタ中にマグネットの位置を変化させて制
御した。
A laminated magnetic head having the film structure shown in FIG. 2 was manufactured. The metal magnetic film 5 is made of FeTaN and has a thickness of 0.4 μm, and the nonmagnetic film 6 is SiO 2 and has a thickness of 4 nm.
Two types of 0 nm were produced. The metal magnetic film and the non-magnetic film were formed by a sputtering method, and the direction of easy magnetization of the metal magnetic film was controlled by changing the position of the magnet during sputtering.

【0022】作製した磁気ヘッドの相対出力の周波数依
存を図6に示す。図中(a)は非磁性膜厚が50nm、
(b)は非磁性膜厚が4nmのヘッドである。本発明の
磁気ヘッドを用いることにより、全周波数帯域で高出力
化が実現していることがわかる。
FIG. 6 shows the frequency dependence of the relative output of the manufactured magnetic head. In the figure, (a) shows a non-magnetic film thickness of 50 nm,
(B) is a head having a nonmagnetic film thickness of 4 nm. It can be seen that the use of the magnetic head of the present invention achieves high output in all frequency bands.

【0023】図7は、本発明の第2の実施の形態に係る
磁気ヘッドにおける、媒体スライド面の磁気ギャップ近
傍の構成を模式的に示す図である。
FIG. 7 is a diagram schematically showing a configuration near a magnetic gap on a medium sliding surface in a magnetic head according to a second embodiment of the present invention.

【0024】同図に示されるように、本実施の形態の磁
気ヘッドは、積層磁性膜7と絶縁膜8とを交互に積層し
た一対の多層膜磁気コア9をその端面同士が対向するよ
うに配置して磁気ギャップ3を形成した磁気ヘッドであ
る。積層磁性膜7は、金属磁性膜5と非磁性膜6とが交
互に積層されることにより構成されている。金属磁性膜
5のうち、非磁性膜6を挟んで隣接する金属磁性膜の磁
化容易方向が膜面内において、それぞれ磁気ギャップ面
と平行5a、磁気ギャップ面と垂直5bであり、かつこ
の一対の金属磁性膜5a、5bの間の非磁性膜厚が5n
m以下である。
As shown in FIG. 1, in the magnetic head of the present embodiment, a pair of multilayer magnetic cores 9 in which laminated magnetic films 7 and insulating films 8 are alternately laminated are arranged such that their end faces face each other. This is a magnetic head in which a magnetic gap 3 is formed by being arranged. The laminated magnetic film 7 is configured by alternately laminating the metal magnetic film 5 and the non-magnetic film 6. Of the metal magnetic films 5, the directions of easy magnetization of the metal magnetic films adjacent to each other with the non-magnetic film 6 interposed therebetween are 5a parallel to the magnetic gap plane and 5b perpendicular to the magnetic gap plane in the film plane, respectively. Non-magnetic film thickness between metal magnetic films 5a and 5b is 5n
m or less.

【0025】金属磁性膜5、非磁性膜6及び絶縁膜8を
構成する材料としては、従来、磁気ヘッド、特に積層型
の磁気ヘッドに用いられてきたものであれば、特に制限
されることなく使用することができる。
The material constituting the metal magnetic film 5, the non-magnetic film 6, and the insulating film 8 is not particularly limited as long as it has been conventionally used for a magnetic head, particularly a laminated magnetic head. Can be used.

【0026】例えば、金属磁性膜5の材料としては、F
eTaN、CoNbZrTa、FeAlSiなどを、非
磁性膜6の材料としては、SiO2、Al23などを、
絶縁膜8の材料としては、SiO2、Al23などを用
いることができる。
For example, the material of the metal magnetic film 5 is F
eTaN, CoNbZrTa, FeAlSi, etc., and the material of the non-magnetic film 6 include SiO 2 , Al 2 O 3, etc.
As a material of the insulating film 8, SiO 2 , Al 2 O 3 or the like can be used.

【0027】金属磁性膜5の好ましい厚さを例示すれ
ば、0.1〜5.0μmで、絶縁膜8は0.1〜1μm
である。
The preferred thickness of the metal magnetic film 5 is 0.1 to 5.0 μm, and the thickness of the insulating film 8 is 0.1 to 1 μm.
It is.

【0028】本実施の形態の磁気ヘッドは、非磁性膜6
を介して隣接する金属磁性膜5a、5bの磁化容易方向
が異なるため、非磁性膜を通って隣接金属磁性膜に磁束
が渡ってしまうが、非磁性膜6の厚さを5nm以下にす
ることにより、非磁性膜の磁気抵抗の影響を軽減し、磁
気ヘッドの効率を改善することが可能である。
The magnetic head of the present embodiment has a non-magnetic film 6
Since the directions of easy magnetization of the adjacent metal magnetic films 5a and 5b are different from each other, the magnetic flux passes through the non-magnetic film to the adjacent metal magnetic film, but the thickness of the non-magnetic film 6 should be 5 nm or less. Thereby, the effect of the magnetic resistance of the non-magnetic film can be reduced, and the efficiency of the magnetic head can be improved.

【0029】また、積層磁性膜7と絶縁膜8とを交互に
積層することにより、高周波数帯域での渦電流を抑える
ことが可能となり、高周波数帯域での磁気ヘッドの効率
改善を実現することができる。
Also, by alternately laminating the laminated magnetic films 7 and the insulating films 8, it becomes possible to suppress eddy currents in a high frequency band, and to improve the efficiency of the magnetic head in a high frequency band. Can be.

【0030】図7に示した膜構造を有する積層型磁気ヘ
ッドを作製した。金属磁性膜5はFeTaNで膜厚は
0.4μm、非磁性膜6はSiO2で膜厚は4nm、絶
縁膜8はSiO2で膜厚は0.15nmで作製した。ま
た、金属磁性膜、非磁性膜及び絶縁膜はスパッタリング
法で成膜し、金属磁性膜の磁化容易方向はスパッタ中に
マグネットの位置を変化させて制御した。
A laminated magnetic head having the film structure shown in FIG. 7 was manufactured. The metal magnetic film 5 was made of FeTaN with a thickness of 0.4 μm, the nonmagnetic film 6 was made of SiO 2 with a thickness of 4 nm, and the insulating film 8 was made of SiO 2 with a thickness of 0.15 nm. Further, the metal magnetic film, the non-magnetic film and the insulating film were formed by sputtering, and the direction of easy magnetization of the metal magnetic film was controlled by changing the position of the magnet during sputtering.

【0031】図6(c)に作製した磁気ヘッドの相対出
力の周波数依存を示す。図中(b)の第一の実施の形態
の磁気ヘッドに比べて、高周波数領域で高出力化が実現
していることがわかる。
FIG. 6C shows the frequency dependence of the relative output of the manufactured magnetic head. It can be seen that high output is realized in a high frequency region as compared with the magnetic head of the first embodiment in FIG.

【0032】なお、上記した第1及び第2の実施の形態
の磁気ヘッドでは、金属磁性膜の磁化容易方向が2方向
存在し、それらを、非磁性膜を介して交互に積層した場
合について述べたが、非磁性膜を介して隣接する一対の
金属磁性膜の、それぞれの磁化容易方向が異なる層が少
なくとも一つ存在すれば、本発明の効果は期待できる。
In the magnetic heads of the first and second embodiments described above, a case is described in which the metal magnetic films have two easy magnetization directions and these are alternately stacked via a non-magnetic film. However, the effect of the present invention can be expected if at least one layer having a different easy magnetization direction exists between a pair of metal magnetic films adjacent to each other via the nonmagnetic film.

【0033】また、上記した第1及び第2の実施の形態
の磁気ヘッドでは、金属磁性膜の磁化容易方向が、膜面
内において、磁気ギャップ面と平行な方向と磁気ギャッ
プ面と垂直方向の2種類である場合について述べたが、
磁化容易方向や磁化容易方向の数については、これに限
らない。つまり、非磁性膜を介して隣接する一対の金属
磁性膜の、それぞれの磁化容易方向が異なり、非磁性膜
を通って隣接金属磁性膜に磁束が渡る膜構造であれば、
本発明の効果は期待できる。
In the magnetic heads of the first and second embodiments described above, the direction of easy magnetization of the metal magnetic film is in a direction parallel to the magnetic gap plane and a direction perpendicular to the magnetic gap plane in the film plane. Although the case of two types was described,
The easy magnetization direction and the number of easy magnetization directions are not limited to this. In other words, if the pair of metal magnetic films adjacent to each other via the non-magnetic film has a different magnetization easy direction, and if the film structure allows the magnetic flux to pass to the adjacent metal magnetic film through the non-magnetic film,
The effects of the present invention can be expected.

【0034】また、上記した第1及び第2の実施の形態
の磁気ヘッドでは、スパッタリング法を用いて成膜した
例について示したが、真空蒸着法、イオンプレーティン
グ法やクラスターイオンビーム法等の真空薄膜形成法を
用いることも可能である。磁化容易方向の制御方法につ
いても、材料や成膜方法に合わせて種々の方法を用いる
ことが可能である。
In the magnetic heads of the first and second embodiments described above, an example in which a film is formed by a sputtering method has been described. However, a vacuum evaporation method, an ion plating method, a cluster ion beam method, or the like may be used. It is also possible to use a vacuum thin film forming method. Various methods can be used for controlling the direction of easy magnetization in accordance with the material and the film formation method.

【0035】以下、本発明に係る磁気記録再生装置の実
施の形態について図8を参照しながら説明する。
Hereinafter, an embodiment of a magnetic recording / reproducing apparatus according to the present invention will be described with reference to FIG.

【0036】図8は、本発明に係る磁気ヘッドを搭載し
た磁気記録再生装置の一例を示す図である。ヘリカル走
査する回転ドラム10に取り付けられた本発明の磁気ヘ
ッド11が、走行しつつある磁気テープ12と接触し、
磁気テープ12上に信号が記録される。同様にして、本
発明の磁気ヘッドと磁気テープ12が接触して磁気テー
プ12上の信号が再生される。
FIG. 8 is a diagram showing an example of a magnetic recording / reproducing apparatus equipped with the magnetic head according to the present invention. The magnetic head 11 of the present invention attached to the rotating drum 10 for helical scanning comes into contact with the running magnetic tape 12,
A signal is recorded on the magnetic tape 12. Similarly, the magnetic head of the present invention comes into contact with the magnetic tape 12, and the signal on the magnetic tape 12 is reproduced.

【0037】本発明の磁気記録再生装置では、記録再生
効率を向上させた磁気ヘッドを用いているため、大容量
のデータを効率よく記録再生することが可能である。
In the magnetic recording / reproducing apparatus of the present invention, since a magnetic head with improved recording / reproducing efficiency is used, it is possible to efficiently record / reproduce a large amount of data.

【0038】なお、記録、再生ともに本発明の磁気ヘッ
ドを用いる磁気記録再生装置について述べたが、記録あ
るいは再生ヘッドのどちらか一方のみに本発明の磁気ヘ
ッドを用いる磁気記録再生装置でも、本発明の効果は期
待できる。
Although the magnetic recording / reproducing apparatus using the magnetic head of the present invention for both recording and reproduction has been described, the present invention can be applied to a magnetic recording / reproducing apparatus using the magnetic head of the present invention for only one of the recording and reproducing heads. The effect can be expected.

【0039】また、磁気媒体として磁気テープを用いる
磁気記録再生装置について示したが、磁気ディスクなど
の磁気媒体を用いた磁気記録再生装置でも、本発明の効
果は期待できる。
Although the magnetic recording / reproducing apparatus using a magnetic tape as the magnetic medium has been described, the effects of the present invention can also be expected in a magnetic recording / reproducing apparatus using a magnetic medium such as a magnetic disk.

【0040】また、本発明は上述した実施の形態に限定
されるものではなく、本発明の趣旨を逸脱しない範囲で
種々の変更を加えることができる。
The present invention is not limited to the above-described embodiment, and various changes can be made without departing from the spirit of the present invention.

【0041】[0041]

【発明の効果】以上に説明したように、本発明に係る磁
気ヘッドは、非磁性膜を介して隣り合い、且つ磁化容易
方向が異なる金属磁性膜の間の非磁性膜の膜厚を5nm
以下にすることにより、非磁性膜を通って隣接金属磁性
膜に磁束が渡ってしまう時の、非磁性膜の磁気抵抗の影
響を軽減し、磁気ヘッドの記録再生効率の改善ができる
という効果を奏する。また、この磁気ヘッドを用いるこ
とにより、大容量のデータを効率よく記録再生するのに
適した磁気記録再生装置を提供することができる。
As described above, in the magnetic head according to the present invention, the thickness of the non-magnetic film between the metal magnetic films adjacent to each other via the non-magnetic film and having different easy magnetization directions is 5 nm.
By reducing the following, the effect of reducing the magnetic resistance of the non-magnetic film when the magnetic flux passes through the non-magnetic film to the adjacent metal magnetic film can be reduced, and the recording and reproducing efficiency of the magnetic head can be improved. Play. Further, by using this magnetic head, it is possible to provide a magnetic recording / reproducing apparatus suitable for efficiently recording / reproducing a large amount of data.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1の実施の形態に係る磁気ヘッドの
斜視図
FIG. 1 is a perspective view of a magnetic head according to a first embodiment of the present invention.

【図2】本発明の第1の実施の形態に係る磁気ヘッドに
おける、磁気媒体スライド面の磁気ギャップ近傍の構成
を模式的に示す図
FIG. 2 is a view schematically showing a configuration near a magnetic gap on a slide surface of a magnetic medium in the magnetic head according to the first embodiment of the present invention;

【図3】磁気ヘッドにおいて、非磁性膜を介して隣り合
い、且つ磁化容易方向が異なる金属磁性膜部分の磁束の
流れを模式的に示す図
FIG. 3 is a diagram schematically showing a flow of magnetic flux in a metal magnetic film portion adjacent to the magnetic head via a non-magnetic film and having a different easy magnetization direction.

【図4】膜特性測定時において、非磁性膜を介して隣り
合い、且つ磁化容易方向が異なる金属磁性膜部分の磁束
の流れを模式的に示す図
FIG. 4 is a diagram schematically showing the flow of magnetic flux in a metal magnetic film portion adjacent to a non-magnetic film and having a different easy magnetization direction when measuring film characteristics.

【図5】非磁性膜を介して隣り合い、且つ磁化容易方向
が異なる金属磁性膜からなる磁気コアの磁気抵抗と非磁
性膜厚との関係を示すシミュレーション結果の図
FIG. 5 is a diagram of a simulation result showing a relationship between a magnetic resistance and a non-magnetic film thickness of a magnetic core formed of a metal magnetic film adjacent to each other via a non-magnetic film and having different easy magnetization directions.

【図6】第1の実施の形態の磁気ヘッド、第2の実施の
形態の磁気ヘッド及び従来の磁気ヘッドの相対出力の周
波数特性を示す図
FIG. 6 is a diagram illustrating frequency characteristics of relative outputs of the magnetic head according to the first embodiment, the magnetic head according to the second embodiment, and a conventional magnetic head;

【図7】本発明の第2の実施の形態に係る磁気ヘッドに
おける、磁気媒体スライド面の磁気ギャップ近傍の構成
を模式的に示す図
FIG. 7 is a diagram schematically showing a configuration near a magnetic gap on a magnetic medium slide surface in a magnetic head according to a second embodiment of the present invention.

【図8】本発明に係る磁気ヘッドを搭載した磁気記録再
生装置の一例を示す図
FIG. 8 is a diagram showing an example of a magnetic recording / reproducing apparatus equipped with a magnetic head according to the present invention.

【符号の説明】[Explanation of symbols]

1 非磁性基板 2,9 多層膜磁気コア 3 磁気ギャップ 4 巻線窓 5 金属磁性膜 5a 磁化容易方向が膜面内において、磁気ギャップ面
とほぼ平行な金属磁性膜 5b 磁化容易方向が膜面内において、磁気ギャップ面
とほぼ垂直な金属磁性膜 6 非磁性膜 7 積層磁性膜 8 絶縁膜 10 回転ドラム 11 磁気ヘッド 12 磁気テープ 13,14 傾斜ポスト 15 固定ドラム
DESCRIPTION OF SYMBOLS 1 Nonmagnetic substrate 2, 9 Multilayer magnetic core 3 Magnetic gap 4 Winding window 5 Metal magnetic film 5a Metal magnetic film whose magnetization easy direction is in the film plane, and metal magnetic film almost parallel to the magnetic gap surface 5b The magnetization easy direction is in the film plane , A metal magnetic film substantially perpendicular to the magnetic gap surface, a non-magnetic film, a laminated magnetic film, an insulating film, a rotating drum, a magnetic head, a magnetic tape, a tilted post, and a fixed drum.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 夏井 昭長 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Akinaga Natsui 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 金属磁性膜と非磁性膜とを交互に積層し
た一対の多層膜磁気コアをその端面同士が対向するよう
に配置して磁気ギャップを形成した磁気ヘッドにおい
て、非磁性膜を介して隣り合う金属磁性膜の磁化容易方
向が異なる層を少なくとも一つ有し、且つ前記非磁性膜
を介して隣り合う金属磁性膜の磁化容易方向が異なる層
の間の非磁性膜の膜厚が5nm以下であることを特徴と
する磁気ヘッド。
1. A magnetic head in which a magnetic gap is formed by arranging a pair of multilayer magnetic cores in which metal magnetic films and non-magnetic films are alternately stacked so that their end faces are opposed to each other. At least one layer in which the directions of easy magnetization of the metal magnetic films adjacent to each other are different, and the thickness of the nonmagnetic film between the layers in which the directions of easy magnetization of the adjacent metal magnetic films are different via the nonmagnetic film is A magnetic head having a thickness of 5 nm or less.
【請求項2】 積層磁性膜と絶縁膜とを交互に積層した
一対の多層膜磁気コアをその端面同士が対向するように
配置して磁気ギャップを形成した磁気ヘッドにおいて、
前記積層磁性膜は、金属磁性膜と非磁性膜とが交互に積
層してなり、非磁性膜を介して隣り合う金属磁性膜の磁
化容易方向が異なる層を少なくとも一つ有し、且つ前記
非磁性膜を介して隣り合う金属磁性膜の磁化容易方向が
異なる層の間の非磁性膜の膜厚が5nm以下であること
を特徴とする磁気ヘッド。
2. A magnetic head having a magnetic gap formed by arranging a pair of multilayer magnetic cores in which laminated magnetic films and insulating films are alternately laminated such that their end faces face each other.
The laminated magnetic film has a structure in which a metal magnetic film and a non-magnetic film are alternately laminated, and has at least one layer in which the metal magnetic films adjacent to each other via the non-magnetic film have different magnetization directions. A magnetic head, characterized in that the thickness of the nonmagnetic film between layers having different directions of easy magnetization of the metal magnetic films adjacent via the magnetic film is 5 nm or less.
【請求項3】 請求項1または請求項2のいずれか一項
に記載の磁気ヘッドを用いることを特徴とする磁気記録
再生装置。
3. A magnetic recording / reproducing apparatus using the magnetic head according to claim 1.
JP9268469A 1997-10-01 1997-10-01 Magnetic head and magnetic recording / reproducing apparatus using the same Pending JPH11110714A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9268469A JPH11110714A (en) 1997-10-01 1997-10-01 Magnetic head and magnetic recording / reproducing apparatus using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9268469A JPH11110714A (en) 1997-10-01 1997-10-01 Magnetic head and magnetic recording / reproducing apparatus using the same

Publications (1)

Publication Number Publication Date
JPH11110714A true JPH11110714A (en) 1999-04-23

Family

ID=17458943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9268469A Pending JPH11110714A (en) 1997-10-01 1997-10-01 Magnetic head and magnetic recording / reproducing apparatus using the same

Country Status (1)

Country Link
JP (1) JPH11110714A (en)

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