JPH11119042A - Planar waveguide device with segmented waveguide - Google Patents

Planar waveguide device with segmented waveguide

Info

Publication number
JPH11119042A
JPH11119042A JP10207665A JP20766598A JPH11119042A JP H11119042 A JPH11119042 A JP H11119042A JP 10207665 A JP10207665 A JP 10207665A JP 20766598 A JP20766598 A JP 20766598A JP H11119042 A JPH11119042 A JP H11119042A
Authority
JP
Japan
Prior art keywords
waveguide
segment
waveguides
optical
segmented
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10207665A
Other languages
Japanese (ja)
Inventor
Tae-Hyung Rhee
泰 衡 李
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of JPH11119042A publication Critical patent/JPH11119042A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/125Bends, branchings or intersections
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Communication System (AREA)

Abstract

PROBLEM TO BE SOLVED: To adjust attenuation of a light signal by addition of a simple structure body by providing a segment waveguide having at least one break of a waveguide causing the intensity attenuation of a small light signal in the waveguide. SOLUTION: This element consists of a plane substrate 100, a branch waveguide 110 with a branch path, and segment waveguides 120. The segment waveguides 120 correct the unequal branching ratio of waveguide light signals or an output difference between the waveguides to obtain the equal branching ratio of the waveguides or the equal output between the waveguides. The segment waveguides 120 are formed of gaps as breaks of optical waveguides for generating smaller intensity attenuation than the light signal intensity in the waveguides, i.e., a discontinuous array of segmented optical waveguides. The segment waveguides 120 need to have at least one break, and two adjacent breaks form a segment to prescribe the input/output end surface along the optical axis.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は分岐導波路を有する
平面導波路素子に係り、導波路の均等な分岐比または導
波路間の均等な出力を持たせる平面導波路素子に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a planar waveguide device having a branch waveguide, and more particularly to a planar waveguide device having a uniform branch ratio of a waveguide or a uniform output between waveguides.

【0002】[0002]

【従来の技術】光信号の分岐、変調、スイッチング、信
号多重化、等化などの光信号処理を目的として、平面導
波路技術を用いて平面基板上に光導波路を製作する光素
子の集積化技術に対して多くの研究が行われてきた。光
通信システムを目的とする光導波路素子を製作するため
に必要な技術は、導波路設計、製作、パッケージとに大
別される。
2. Description of the Related Art Integration of an optical device for manufacturing an optical waveguide on a flat substrate using a planar waveguide technology for the purpose of optical signal processing such as branching, modulation, switching, signal multiplexing, and equalization of an optical signal. Much research has been done on technology. Techniques required for manufacturing an optical waveguide device for an optical communication system are broadly classified into waveguide design, manufacturing, and packaging.

【0003】光導波路素子はその目的によって光信号を
分岐する際に導波路の形状が非対称になるようにした
り、その進行行程の差が出るようにすべき場合がある。
このような導波路を製作したりパッケージ工程を行うこ
とにおいては信号強度減衰やその他信号減衰が必然的に
発生する。このような場合、特にY-分岐点を使用する素
子の場合、分岐比を正確に分岐させる特性が非常に大切
である。また、Y-分岐点を使用した非対称構造の素子の
場合、このような分岐比を人為的に調節する必要があ
る。従来は大量生産において、このような問題が解決で
きる特別な技術が無く、個別の手作業による調節で分岐
比の調整が可能であった。図4は非対称型光導波路素子
の一例を示すものである。参照番号100は平面基板、130
は非対称導波路を示す。
Depending on the purpose of the optical waveguide device, it may be necessary to make the shape of the waveguide asymmetric when branching an optical signal, or to make the traveling path differ.
In manufacturing such a waveguide or performing a packaging process, signal intensity attenuation and other signal attenuation are inevitably generated. In such a case, particularly in the case of an element using a Y-branch point, the characteristic of accurately branching the branch ratio is very important. In the case of an element having an asymmetric structure using a Y-branch point, it is necessary to adjust such a branching ratio artificially. Conventionally, in mass production, there is no special technique capable of solving such a problem, and the branch ratio can be adjusted by individual manual adjustment. FIG. 4 shows an example of an asymmetric optical waveguide device. Reference number 100 is a flat substrate, 130
Denotes an asymmetric waveguide.

【0004】一般的に非対称型光導波路素子の製作にお
いて、光信号が進行する行路差または信号減衰の発生程
度の差によって分岐した各導波路ごとに出力光信号の差
が必然的に発生し、他の要因によっても光導波路素子の
不均等な分岐比または出力差が発生する。従って非対称
形態の導波路を含む構造を有する光導波路素子で分岐比
や出力光信号の強度を一致させる必要がある場合、既存
の光信号減衰器やフィルターの追加の素子を使用して人
為的な調節が必要であった。このため追加した素子の使
用に伴うコストアップ、追加素子と導波路素子の整列に
従う時間的な経費の増大、設備の追加及び様々な素子を
モジュール化するためのコストの発生などが伴うという
欠点があった。
Generally, in the manufacture of an asymmetric optical waveguide device, a difference in output optical signal is inevitably generated for each branched waveguide due to a difference in a path where an optical signal travels or a difference in the degree of signal attenuation. Other factors also cause unequal branch ratios or output differences of the optical waveguide device. Therefore, when it is necessary to match the branching ratio and the intensity of the output optical signal in an optical waveguide element having a structure including an asymmetrical waveguide, an artificial element using an existing optical signal attenuator or an additional element of a filter is used. Adjustment was required. For this reason, there are disadvantages that the cost is increased due to the use of the added element, the time cost is increased due to the alignment of the additional element and the waveguide element, the equipment is added, and the cost for modularizing various elements is generated. there were.

【0005】[0005]

【発明が解決しようとする課題】本発明の目的は、上記
欠点を解決し、光導波路素子の不均等な分岐比または出
力差を補正して均等な分岐比または均等出力を作るため
に、既存の光導波路素子を製作する工程に追加の工程や
追加の工程精度が不要であって、これを具現することに
おいて追加のコストの発生要因を排除することを特徴と
するセグメント導波路を備えた平面導波路素子を提供す
ることにある。
SUMMARY OF THE INVENTION It is an object of the present invention to solve the above-mentioned drawbacks and to provide a uniform branching ratio or an equal output by correcting an uneven branching ratio or an output difference of an optical waveguide element. A plane having a segmented waveguide, which does not require an additional step or an additional step accuracy in the step of manufacturing the optical waveguide element, and eliminates an additional cost factor in realizing this. It is to provide a waveguide element.

【0006】[0006]

【課題を解決するための手段】上記の技術的課題を解決
するための本発明による、セグメント導波路を具備した
平面導波路素子は、分岐導波路を有する平面導波路素子
において、前記導波路素子は、各導波路の出力信号の強
度減衰を調節し前記各導波路間の光信号の出力強度を均
一化するためにセグメント導波路を具備し、前記セグメ
ント導波路は前記導波路中に小さな光信号の強度減衰を
発生させる光導波路の途切れを少なくとも1つ有してな
ることを特徴とする。
According to a first aspect of the present invention, there is provided a planar waveguide device having a segmented waveguide, comprising: a branch waveguide; Comprises a segmented waveguide for adjusting the intensity attenuation of the output signal of each waveguide and making the output intensity of the optical signal between the waveguides uniform, wherein the segmented waveguide has a small light intensity in the waveguide. The optical waveguide is characterized by having at least one break in the optical waveguide that causes signal intensity attenuation.

【0007】また、本発明によるセグメント導波路の光
信号信号強度減衰は各導波路に含まれたセグメントの個
数、一つの導波路内でセグメント間の距離、セグメント
間のオフセットの程度によって調節される。
In addition, the optical signal intensity attenuation of the segmented waveguide according to the present invention is adjusted by the number of segments included in each waveguide, the distance between segments in one waveguide, and the degree of offset between segments. .

【0008】[0008]

【発明の実施の形態】以下、添付した図面を参照して本
発明の望ましい実施例を説明する。本発明は導波路の製
作時に光信号を減衰する簡単な構造を導波路内部に含
む。そして本発明は導波路製作時、従来と同一の工程及
び同一精度を維持しながら全ての出力導波路の全般的な
出力信号強度減衰を均一にする。図1は本発明の望まし
い一実施例による均等分岐比を有する導波路の構造を含
む非対称光導波路素子の構造であって、参照番号100は
平面基板、110は分岐路を有する導波路、120は複数のセ
グメント導波路を示す。
Preferred embodiments of the present invention will be described below with reference to the accompanying drawings. The present invention includes a simple structure inside the waveguide that attenuates the optical signal during fabrication of the waveguide. In addition, the present invention makes the overall output signal strength attenuation of all output waveguides uniform while maintaining the same process and the same accuracy when manufacturing the waveguide. FIG. 1 shows a structure of an asymmetric optical waveguide device including a structure of a waveguide having an equal branching ratio according to a preferred embodiment of the present invention, wherein reference numeral 100 is a planar substrate, 110 is a waveguide having a branch, and 120 is a waveguide. 3 shows a plurality of segmented waveguides.

【0009】セグメント導波路120は導波路光信号の不
均等な分岐比または導波路間の出力差を補正して導波路
の均等な分岐比または導波路間の均等な出力を得ること
を可能にする。セグメント導波路120は導波路内部に光
信号強度に比べて小さな強度減衰を発生させるための光
導波路の途切れによる間隙の形成、すなわちセグメント
化された光導波路の不連続な配列よりなる。セグメント
導波路は途切れを少なくとも1つ有すればよいが、隣接
する2つの途切れはセグメントを形成しその光軸方向に
入出力端面を規定する。
The segmented waveguide 120 compensates for an unequal branch ratio of the waveguide optical signal or an output difference between the waveguides, thereby obtaining a uniform branch ratio of the waveguides or a uniform output between the waveguides. I do. The segmented waveguide 120 is formed by forming a gap due to interruption of the optical waveguide to generate an intensity attenuation smaller than the optical signal intensity inside the waveguide, that is, a discontinuous arrangement of segmented optical waveguides. The segment waveguide may have at least one break, but two adjacent breaks form a segment and define an input / output end face in the optical axis direction.

【0010】これは単一平面上に製作された導波路素子
の出力端導波路で各導波路間の出力信号強度減衰を調節
し各導波路間の光信号の強度を均一化するためである。
This is to adjust the output signal intensity attenuation between the waveguides at the output end waveguide of the waveguide element manufactured on a single plane, and to make the intensity of the optical signal between the waveguides uniform. .

【0011】非対称型導波路設計時、全ての導波路の出
力を一定の範囲内で調節するために、最低出力を有する
分岐導波路の出力信号強度減衰を基準として他の導波路
の全部または一部をセグメント導波路として製作する。
図2はセグメント導波路120の多様な構造を示すもので
あって、導波路出力の減衰程度の調節は各分岐導波路に
含まれるセグメント導波路を構成するセグメントの個
数、セグメント相互間の間隙の距離、セグメント間のひ
ずみ程度によって調節する。
In designing an asymmetric waveguide, in order to adjust the output of all waveguides within a certain range, all or one of the other waveguides is determined based on the output signal strength attenuation of the branch waveguide having the lowest output. The part is manufactured as a segment waveguide.
FIG. 2 shows various structures of the segment waveguide 120. The attenuation of the waveguide output is controlled by adjusting the number of segments constituting the segment waveguide included in each branch waveguide and the gap between the segments. Adjust according to the distance and the degree of distortion between segments.

【0012】このためにセグメント導波路120は導波路
とこれに隣接するセグメント間または相互に隣接するセ
グメントの間で信号減衰が発生する構造を有する。また
セグメント導波路120は導波路と隣接したセグメントま
たは隣接したセグメント同志の間に光軸の傾斜すなわち
チルトあるいは光軸のオフセットがある構造を有する。
For this purpose, the segmented waveguide 120 has a structure in which signal attenuation occurs between the waveguide and adjacent segments or between mutually adjacent segments. Further, the segment waveguide 120 has a structure in which the optical axis is inclined or tilted or the optical axis is offset between segments adjacent to the waveguide or between adjacent segments.

【0013】各セグメントの間または導波路とセグメン
トとの間の間隙部分にはクラッドのような物質を使用す
るかまたはセグメントの屈折率より小さな屈折率を有す
る物質を使用する。
A material such as a cladding or a material having a refractive index smaller than the refractive index of the segment is used in the gap between each segment or between the waveguide and the segment.

【0014】上記のように構成された導波路素子におい
て出力信号強度減衰が最大の分岐導波路を基準とし、よ
り減衰が大きい順にセグメントの構造及び配列を構成し
て信号減衰を基準値に揃えるように増加させて全ての導
波路の減衰特性が同一となるように調節する。
In the waveguide element constructed as described above, the structure and arrangement of the segments are arranged in descending order of the attenuation with reference to the branch waveguide having the largest output signal intensity attenuation, and the signal attenuation is adjusted to the reference value. So that the attenuation characteristics of all the waveguides are the same.

【0015】また、セグメント導波路の存在によって発
生する反射損失を減らすために、必要であればセグメン
トの入出力面である光軸方向の端面の傾斜角度を調節し
て制作すればよい。図3は導波路内に任意の角度処理を
施して反射損失を減らす例を示す。参照番号140は入出
力面が光軸に垂直な方向に対して所定の角度θだけ傾斜
したセグメントを有するセグメント導波路を示す。傾斜
角度θは0°≦θ≦20゜の範囲にあることが好まし
い。
Further, in order to reduce the reflection loss caused by the existence of the segment waveguide, if necessary, it may be manufactured by adjusting the inclination angle of the end face in the optical axis direction which is the input / output surface of the segment. FIG. 3 shows an example in which the waveguide is subjected to an arbitrary angle processing to reduce the reflection loss. Reference numeral 140 denotes a segment waveguide having a segment whose input / output surface is inclined by a predetermined angle θ with respect to a direction perpendicular to the optical axis. The inclination angle θ is preferably in the range of 0 ° ≦ θ ≦ 20 °.

【0016】なお導波路とセグメント導波路は同じ工程
を使用して同時に製作される。
Note that the waveguide and the segment waveguide are manufactured simultaneously using the same process.

【0017】[0017]

【発明の効果】本発明によれば、光導波路素子の出力導
波路端で発生する出力の差を無くすべく調節することに
関し、導波路の製作時に同時に簡単な構造体の付加によ
り光信号の減衰の調整が可能となるため、追加の工程や
追加の調整が不要となる。またパッケージグ及び実装に
おいて追加の工程や人為的な努力が不要であり、同等な
機能をする素子の製作時においてコスト削減ができると
いう効果を更に有する。
According to the present invention, an optical signal is attenuated by the addition of a simple structure at the same time as the manufacture of a waveguide. Can be adjusted, so that an additional step or additional adjustment is not required. Further, there is no need for an additional step or artificial effort in packaging and mounting, and there is another effect that the cost can be reduced when manufacturing an element having the same function.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の望ましい一実施例による均等分岐比を
有する導波路の構造を含む非対称光導波路素子の構造を
示す。
FIG. 1 illustrates a structure of an asymmetric optical waveguide device including a structure of a waveguide having an equal branching ratio according to a preferred embodiment of the present invention.

【図2】本発明の望ましい一実施例によるセグメント導
波路の構造を示す。
FIG. 2 illustrates a structure of a segmented waveguide according to a preferred embodiment of the present invention.

【図3】反射損失を減らすための任意の角度を有するセ
グメント導波路を有する導波路の構造を示す。
FIG. 3 shows a structure of a waveguide having segmented waveguides having arbitrary angles to reduce reflection loss.

【図4】非対称型光導波路素子の一例を示す。FIG. 4 shows an example of an asymmetric optical waveguide device.

【符号の説明】[Explanation of symbols]

100 平面基板 110 分岐導波路 120 セグメント導波路 130 非対称分岐導波路 140 任意の傾斜角度(θ)を有するセグメント導波路 100 Planar substrate 110 Branch waveguide 120 Segment waveguide 130 Asymmetric branch waveguide 140 Segment waveguide with arbitrary inclination angle (θ)

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 分岐導波路を有する平面導波路素子にお
いて、 前記導波路素子は、各導波路の出力信号の強度減衰を調
節し前記各導波路間の光信号の出力強度を均一化するた
めにセグメント導波路を具備し、 前記セグメント導波路は前記導波路中に小さな光信号の
強度減衰を発生させる光導波路の途切れを少なくとも1
つ有してなることを特徴とする平面導波路素子。
1. A planar waveguide device having a branch waveguide, wherein said waveguide device adjusts the intensity attenuation of an output signal of each waveguide and equalizes the output intensity of an optical signal between said waveguides. A segmented waveguide, wherein the segmented waveguide has at least one break in the optical waveguide that causes a small optical signal intensity attenuation in the waveguide.
A planar waveguide device, comprising:
【請求項2】 前記セグメント導波路は、 導波路とこれに隣接したセグメントとの間で信号減衰が
発生する構造であることを特徴とする請求項1に記載の
平面導波路素子。
2. The planar waveguide device according to claim 1, wherein the segment waveguide has a structure in which signal attenuation occurs between the waveguide and a segment adjacent thereto.
【請求項3】 前記セグメント導波路は、 相互に隣接したセグメント間で信号減衰が発生する構造
であることを特徴とする請求項1に記載の平面導波路素
子。
3. The planar waveguide device according to claim 1, wherein the segment waveguide has a structure in which signal attenuation occurs between mutually adjacent segments.
【請求項4】 前記セグメント導波路は、 前記導波路とこれに隣接したセグメントまたは相互に隣
接したセグメントの間に光軸のチルトまたはオフセット
のある構造であることを特徴とする請求項1に記載の平
面導波路素子。
4. The segment waveguide according to claim 1, wherein the segment waveguide has a structure in which the optical axis is tilted or offset between the waveguide and a segment adjacent thereto or a segment adjacent to each other. Planar waveguide device.
【請求項5】 前記導波路とセグメント導波路は同じ工
程を使用して同時に製作されることを特徴とする請求項
1に記載の平面導波路素子。
5. The planar waveguide device according to claim 1, wherein the waveguide and the segment waveguide are manufactured simultaneously using the same process.
【請求項6】 前記導波路の終端または前記セグメント
導波路の一つ以上のセグメントの両端が光軸に垂直な方
向に対して所定の角度θ傾斜し、前記角度θは0°≦θ
≦20゜の範囲であることを特徴とする請求項1に記載
の平面導波路素子。
6. An end of the waveguide or both ends of one or more segments of the segmented waveguide are inclined at a predetermined angle θ with respect to a direction perpendicular to an optical axis, and the angle θ is 0 ° ≦ θ.
2. The planar waveguide device according to claim 1, wherein the angle is in a range of ≤20 °.
【請求項7】 前記セグメント導波路は、セグメントの
個数が調節されることにより光信号の信号強度減衰が調
節されることを特徴とする請求項1に記載の平面導波路
素子。
7. The planar waveguide device according to claim 1, wherein the signal intensity of the segment waveguide is adjusted by adjusting the number of segments.
JP10207665A 1997-07-28 1998-07-23 Planar waveguide device with segmented waveguide Pending JPH11119042A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1997-35590 1997-07-28
KR1019970035590A KR19990012249A (en) 1997-07-28 1997-07-28 Planar Waveguide Devices with Segmented Waveguides

Publications (1)

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US7995872B2 (en) 2007-02-14 2011-08-09 Ngk Insulators, Ltd. Optical modulator component and optical modulator
JP2019095683A (en) * 2017-11-27 2019-06-20 住友ベークライト株式会社 Optical waveguide film including optical attenuation portion, and optical component

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US6823103B2 (en) 2000-12-15 2004-11-23 Lightwave Microsystems Corporation Optical devices for controlling insertion loss
FR2830627B1 (en) * 2001-10-10 2004-01-30 Centre Nat Rech Scient OPTICAL CHIP WITH SEGMENTED FASHION ADAPTATION GUIDE
CN110568556A (en) * 2019-10-12 2019-12-13 上海鸿辉光通科技股份有限公司 Planar optical waveguide optical splitter and waveguide optical device with customizable return loss

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7995872B2 (en) 2007-02-14 2011-08-09 Ngk Insulators, Ltd. Optical modulator component and optical modulator
JP5421595B2 (en) * 2007-02-14 2014-02-19 日本碍子株式会社 Traveling wave type optical modulator
JP2019095683A (en) * 2017-11-27 2019-06-20 住友ベークライト株式会社 Optical waveguide film including optical attenuation portion, and optical component

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GB2327773B (en) 1999-06-23
GB9815628D0 (en) 1998-09-16
GB2327773A (en) 1999-02-03
KR19990012249A (en) 1999-02-25

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