JPH11121318A5 - - Google Patents
Info
- Publication number
- JPH11121318A5 JPH11121318A5 JP1997286328A JP28632897A JPH11121318A5 JP H11121318 A5 JPH11121318 A5 JP H11121318A5 JP 1997286328 A JP1997286328 A JP 1997286328A JP 28632897 A JP28632897 A JP 28632897A JP H11121318 A5 JPH11121318 A5 JP H11121318A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor manufacturing
- manufacturing apparatus
- host computer
- consumption amount
- manufacturing system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28632897A JP4176855B2 (ja) | 1997-10-20 | 1997-10-20 | 半導体製造システム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28632897A JP4176855B2 (ja) | 1997-10-20 | 1997-10-20 | 半導体製造システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH11121318A JPH11121318A (ja) | 1999-04-30 |
| JPH11121318A5 true JPH11121318A5 (2) | 2005-06-16 |
| JP4176855B2 JP4176855B2 (ja) | 2008-11-05 |
Family
ID=17702974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28632897A Expired - Fee Related JP4176855B2 (ja) | 1997-10-20 | 1997-10-20 | 半導体製造システム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4176855B2 (2) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6456894B1 (en) * | 1999-06-01 | 2002-09-24 | Applied Materials, Inc. | Semiconductor processing techniques |
| JP4899478B2 (ja) * | 2003-09-02 | 2012-03-21 | 株式会社ニコン | 保守管理装置、保守管理方法、保守管理プログラム、及び情報記録媒体 |
| JP5259042B2 (ja) * | 2004-09-24 | 2013-08-07 | 株式会社日立国際電気 | 半導体製造システム、半導体製造装置のロギング方法、管理装置及び管理装置のプログラム |
-
1997
- 1997-10-20 JP JP28632897A patent/JP4176855B2/ja not_active Expired - Fee Related
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