JPH11121879A5 - - Google Patents
Info
- Publication number
- JPH11121879A5 JPH11121879A5 JP1997283440A JP28344097A JPH11121879A5 JP H11121879 A5 JPH11121879 A5 JP H11121879A5 JP 1997283440 A JP1997283440 A JP 1997283440A JP 28344097 A JP28344097 A JP 28344097A JP H11121879 A5 JPH11121879 A5 JP H11121879A5
- Authority
- JP
- Japan
- Prior art keywords
- light source
- wavelength
- light
- nonlinear optical
- optical crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28344097A JP3956447B2 (ja) | 1997-10-16 | 1997-10-16 | インジェクション・シーディングを用いた露光用レーザ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28344097A JP3956447B2 (ja) | 1997-10-16 | 1997-10-16 | インジェクション・シーディングを用いた露光用レーザ装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH11121879A JPH11121879A (ja) | 1999-04-30 |
| JPH11121879A5 true JPH11121879A5 (de) | 2005-06-23 |
| JP3956447B2 JP3956447B2 (ja) | 2007-08-08 |
Family
ID=17665579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28344097A Expired - Fee Related JP3956447B2 (ja) | 1997-10-16 | 1997-10-16 | インジェクション・シーディングを用いた露光用レーザ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3956447B2 (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11298083A (ja) * | 1998-04-15 | 1999-10-29 | Komatsu Ltd | 注入同期型狭帯域レーザ |
| JP2002329911A (ja) * | 2001-04-27 | 2002-11-15 | Komatsu Ltd | レーザ装置、増幅器、及び紫外線レーザ装置 |
| JP4657103B2 (ja) * | 2003-04-22 | 2011-03-23 | 株式会社小松製作所 | 露光用２ステージレーザ装置 |
| US7599413B2 (en) | 2006-05-19 | 2009-10-06 | Pavilion Integration Corp. | Self-contained module for injecting signal into slave laser without any modifications or adaptations to it |
| US9608399B2 (en) * | 2013-03-18 | 2017-03-28 | Kla-Tencor Corporation | 193 nm laser and an inspection system using a 193 nm laser |
-
1997
- 1997-10-16 JP JP28344097A patent/JP3956447B2/ja not_active Expired - Fee Related
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