JPH1114407A - Quick-response measurement controller and its measuring system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a quick-response measurement controller which can quickly respond to large variation and accurately respond to small variation by using such a position detector that can detect position signals at shortened time intervals against the large variation and with improved accuracy against the small variation and the measuring system of the controller. SOLUTION: A rotating slit 20a coupled with a motor 14 and a fixed slit 22 are provided between a light emitting element 18 and a light receiving element 16a in a state where the slits 20a and 22 are faced oppositely to each other and a rotating slit 20b coupled with a detecting shaft 12 and the slit 20a are provided between the light emitting element 18 and another light receiving element 16b in a state where the slits 20b and 20a are faced oppositely to each other. In addition, a signal processing circuit 24 which calculates the periods of an absolute position signal related to the light passed through the slits 22 and 20a and a relative position signal related to the light passed through the slits 20b and 20a based on the position signals and, at the same time, finds the rotating speed of the detecting shaft 12 is provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-speed response measurement control device and a measurement system therefor, and more particularly to a detection method for detecting a position or a speed by measuring a phase difference, a frequency difference, or a period difference. TECHNICAL FIELD The present invention relates to a high-speed response measurement control device and a measurement system for improving the response of a position and speed signal detected by the device and improving the accuracy based on the position and speed signals.

[0002]

2. Description of the Related Art Conventionally, this kind of high-speed response measurement control device and its measurement system are used for an anti-skid system (anti-brake system) used for safe driving of an automobile, traveling control of an electric vehicle, or positioning of a linear motor. It is used in various fields such as control and control of industrial robots and machine tools.

There are various types of position detectors used in the measurement control device or the measurement system, including an analog position detector, a digital position detector, and a position detector combining an analog system and a digital system. Are known. Each of these features
For example, an analog position detector has a feature that its control speed is very high, and a digital position detector has a feature that a signal to be handled is a discrete value.

As other position detectors, inductosin and magnetosin are known. Inductosin and magnetosin are obtained by simply averaging the phase difference signals of a rotating electric field and a rotating magnetic field to obtain accuracy. This Inductosin was developed by Farrand Control of the United States, and "Inductosin" is its trade name. The operating principle of the inductosyn is the same as that of a so-called synchro or resolver, and is classified into a rotary inductosin and a linear inductosin according to the shape of a glass plate on which windings are printed. Generally, it is used for angle transmission, electric gearing, or position detection in numerical control of a machine tool.

[0005]

However, the conventional analog position detector has a problem that accuracy is poor. In addition, the digital position detector has a disadvantage that when the moving speed of the position detection target decreases, the time interval between the detected position and speed signals increases. For example, according to an electromagnetic rotation detector that is a type of digital position detector used for detecting the rotation of a tire in an anti-skid system, slip is detected by a difference in the number of rotations of the tire. There is a problem that control in a low-speed region cannot be effectively performed due to poor response of detecting the rotation speed of the tire. This made control impossible when starting at low speed.

Further, when an analog position detector and a digital position detector are combined to improve accuracy and responsiveness while covering the disadvantages of both, a plurality of systems are required, resulting in a complicated and expensive system. was there. On the other hand, in measurement systems that apply inductsin or magnetosin, if the accuracy is improved by simply averaging the phase difference signals of the rotating electric field and rotating magnetic field as described above, the response will be poor. was there.

In a conventional measuring device such as a resolver for detecting a phase difference, it is necessary to measure the phase difference. Therefore, there is a limit to increasing the measurement frequency from the viewpoint of calculation speed, which is lower than the control speed. Inconvenience has been pointed out.
Furthermore, when this resolver is applied, since it is necessary to accurately measure the phase difference, if the circuit configuration is such that the applied signal is an accurate sine wave and the detection signal has an accurate waveform, the circuit becomes complicated. There was a problem that it became expensive. Further, according to such a measuring instrument, it is not possible to avoid an excessively long operation time in an operation involving division or the like, and an influence on the measurement accuracy due to the occurrence of waveform distortion between the applied signal and the detection signal.

When positioning control is performed by a linear motor, a linear detector having a very high resolution is used in order to improve the response in a low speed range. There was a problem that it became weak. Further, when a linear detector having a very high resolution is used, there is a problem that the production cost is increased.

The problem to be solved by the present invention is to realize a high-speed response in a low-speed region by a position signal detected at a short time interval similar to that in a high-speed region even in a low-speed region. By detecting position signals at the same interval, it is possible to use an element having a low high-speed response as a used element. The second problem to be solved by the present invention is that the time interval of the detected position signal is shortened for a large change in a short time, and the accuracy of the detected position signal is small for a small change. Provide a high-speed response measurement control device and a measurement system that can respond quickly to large fluctuations and accurately respond to small fluctuations by performing measurement control using a position detector with improved sensitivity Is to do. Thus, control with high accuracy and excellent responsiveness is realized.

[0010]

In order to solve this problem, a high-speed response measurement control device according to claim 1 of the present invention comprises:
A frequency calculating means for adding a known moving waveform frequency and a set moving waveform frequency to a set frequency, and a frequency signal obtained by adding a known moving frequency waveform and a frequency waveform attached to a control target to the frequency as a feedback signal And a control means for controlling the set frequency obtained by the calculation means.

According to the measurement control device of the first aspect having the above-mentioned configuration, the set frequency is obtained by adding the known moving waveform frequency and the set moving waveform frequency by the frequency calculating means. The obtained set frequency is controlled using the added frequency waveform of the waveform and the frequency waveform attached to the control target as a feedback signal.

A high-speed response measurement control device according to a second aspect of the present invention performs measurement control using a position detector that detects a temporal change amount of a measurement target, and the speed is higher than a maximum moving speed of the measurement target. A moving body, a first transmitting means coupled to the moving body and transmitting a first waveform signal generated by the movement of the moving body according to dynamic characteristics of the moving body; and An absolute position detecting means for detecting a signal indicating the absolute position of the moving body based on the waveform signal and outputting the signal as an absolute position signal; and a second means coupled to the measurement target and generated by the movement of the measurement target. A second transmission unit that transmits the waveform signal according to the dynamic characteristic of the measurement target, and a relative position between the first transmission unit and the second transmission unit based on the first and second waveform signals. Signal indicating the relative position And a relative position detecting unit that outputs the relative position signal and the frequency of the absolute position signal, and detects a temporal change amount of the measurement target based on the frequency. Things.

According to the high-speed response measurement control device according to the second aspect of the present invention, when the moving object moves at a speed higher than the maximum moving speed of the object to be measured, the first transmitting means coupled to the moving object moves. A first waveform signal generated according to the dynamic characteristic of the moving body is transmitted, and a signal indicating an absolute position of the moving body is detected by the absolute position detecting means based on the first waveform signal. The signal is output as an absolute position signal. When the measurement object moves, the second waveform signal generated according to the dynamic characteristic of the measurement object is transmitted by the second transmission means coupled to the measurement object, and the first waveform signal is transmitted by the relative position detection means. And a signal indicating a relative position between the first transmitting means and the second transmitting means is detected based on the second waveform signal and the signal is output as a relative position signal. Then, the temporal change amount of the measurement target is detected based on the frequencies of the relative position signal and the absolute position signal obtained by the frequency calculation means.

[0014] With this, the calculation is performed with emphasis on the temporal proximity for large fluctuations, so that the time interval between the detected position signals is shortened, and the small fluctuations are averaged over time. Therefore, the accuracy of the detected position signal is improved. The known moving waveform frequency and the set moving waveform frequency are added by the frequency calculating means to obtain a set frequency, and the added frequency waveform of the known moving frequency waveform and the frequency waveform attached to the control target is used as a feedback signal. The control of the determined set frequency is performed.

In this case, if the first transmitting means is constituted by a fixed slit and a rotating slit, the second transmitting means is constituted by a set of rotating slits, and the first transmitting means is constituted by a pair of rotating slits. In the case where the second transmission means is constituted by a fixed slit and a vibration slit, it is desirable that the second transmission means be constituted by a rotation slit and a vibration slit. Thus, measurement control is performed using the light emitting element or the magnetic field generating element.

In this case, the high-speed response measurement control device calculates the dynamic average value of the moving frequency of the measurement target from the frequency waveforms observed at a plurality of points at different positions. A first calculating means for obtaining a frequency waveform according to the following equation: “Dynamic average value of measurement target = (N−1) / N × (current calculation result) + 1 / N × (moving frequency of measurement target at time before Δt) Dynamic average value) ".

According to the high-speed response measurement control device having the above-described configuration, a frequency is calculated by measuring an addition waveform of a known moving frequency waveform and a waveform attached to a measurement object by averaging. By subtracting the known moving frequency from the calculated frequency, the accuracy and the response in obtaining the frequency to be measured are compatible.

Alternatively, in accordance with a fifth aspect of the present invention, a first method for calculating a frequency waveform attached to a controlled object from frequency waveforms observed at a plurality of points at different positions, instead of the arithmetic means, is provided. The control unit may include a calculation unit and a control unit that controls measurement of a position and a speed of the control target based on a frequency waveform of the control target obtained by the first calculation unit.

According to the high-speed response measurement control device according to the fifth aspect of the present invention, since the position and speed of the control target are measured and controlled, the position and speed can be measured more accurately and quickly. become. In this case, the frequency waveform obtained by the first arithmetic unit is obtained by applying a known modification to the waveform signal from the control target to obtain a waveform signal that can be observed at a plurality of points, and then inverse the known modification. If it is obtained by achieving an accuracy greater than the interval between the observation points by performing the conversion, it uses a super-resolution technique that offsets the essential error that occurs in measurement control. Thus, further improvement in accuracy will be achieved. In this case, the known deformation is one in which three or more observation points are placed at known intervals during the period of the frequency waveform, and is represented by a trigonometric function corresponding to each position, and takes a normal distribution. If so, the desired measurement is performed based on the trigonometric function corresponding to each position.

In the above-described high-speed response measurement control device, by adding a three-phase magnetic field signal of the rotor of the motor to the added waveform and the origin signal waveform, line saving can be realized and the configuration of the device can be simplified. Will be.

According to a second aspect of the present invention, there is provided a high-speed response measurement system comprising: a known moving frequency waveform of a moving body moving at a speed higher than a maximum moving speed of a measuring object; and a waveform attached to the measuring object. The first gist comprises a first arithmetic means for measuring the period of the added waveform and calculating a frequency, and a second arithmetic means for obtaining a frequency to be measured by subtracting a known moving frequency from the calculated frequency. It is assumed that.

According to the high-speed response measurement system having the above-mentioned configuration, the known moving frequency waveform of the moving object moving at a speed higher than the maximum moving speed of the measuring object and the waveform attached to the measuring object can be obtained. The frequency of the measurement target is obtained by measuring the period of the addition waveform of the above, calculating the frequency, and subtracting the known moving frequency from the calculated frequency. Measurement is performed with high accuracy and responsiveness over a wide range.

According to another aspect of the present invention, there is provided a high-speed response measurement system, comprising: a moving body moving at a speed higher than a maximum moving speed of a measuring object; First transmitting means for transmitting according to the following, an absolute position detecting means for detecting a signal indicating an absolute position of the moving body based on the first waveform signal, and outputting the signal as an absolute position signal; A second transmitting unit coupled to the target and transmitting a second waveform signal generated by the measurement target according to the dynamic characteristic of the measurement target; and the first transmission unit based on the first and second waveform signals. And a relative position detecting means for detecting a signal indicating the relative position of the transmitting means and the second transmitting means and outputting the signal as a relative position signal, and calculating the frequencies of the relative position signal and the absolute position signal. , Based on the frequency It is an Abstract by comprising a position detector to detect a temporal change amount of the measurement target Te.

According to the high-speed response measurement system having the above configuration, when the moving body moves at a speed higher than the maximum moving speed of the object to be measured, the first transmitting means coupled to the moving body can A first waveform signal generated according to the dynamic characteristic of the moving body is transmitted, and a signal indicating an absolute position of the moving body is detected by the absolute position detecting means based on the first waveform signal. Is output as an absolute position signal. When the measurement object moves, the second waveform signal generated according to the dynamic characteristic of the measurement object is transmitted by the second transmission means coupled to the measurement object, and the first waveform signal is transmitted by the relative position detection means. And a signal indicating a relative position between the first transmitting means and the second transmitting means is detected based on the second waveform signal and the signal is output as a relative position signal. Then, the temporal change amount of the measurement target is detected based on the frequencies of the relative position signal and the absolute position signal obtained by the frequency calculation means.

As a result, the calculation is performed with emphasis on the temporal proximity for large fluctuations, so that the time interval between the detected position signals is shortened, and the small fluctuations are averaged over time. Therefore, the accuracy of the detected position signal is improved. The known moving waveform frequency and the set moving waveform frequency are added by the frequency calculating means to obtain a set frequency, and the added frequency waveform of the known moving frequency waveform and the frequency waveform attached to the control target is used as a feedback signal. The control of the determined set frequency is performed.

In this case, as described in claim 12, the high-speed response measurement system calculates the dynamic average value of the moving frequency of the measurement object from the frequency waveforms observed at a plurality of points at different positions. And a dynamic average value of the measurement target = (N−1) / N × (current calculation result) + 1 / N × (dynamic of the moving frequency of the measurement target at the time before Δt). (Average value). "

[0027] According to the high-speed response measurement system having the above-described structure, an averaged waveform of the known moving frequency waveform and the waveform attached to the object to be measured is measured by averaging, and the frequency is calculated. By subtracting the known moving frequency from the calculated frequency, the accuracy and the response in obtaining the frequency to be measured are compatible.

Alternatively, instead of these calculating means, a first means for calculating a frequency waveform attached to the control object from frequency waveforms observed at a plurality of points at different positions may be used. The control unit may include a calculation unit and a control unit that controls measurement of a position and a speed of the control target based on a frequency waveform of the control target obtained by the first calculation unit.

According to the high-speed response measurement system according to the thirteenth aspect, since the position and speed of the controlled object are measured and controlled, the position and speed can be measured more accurately and quickly. Become. In this case, the frequency waveform obtained by the first arithmetic unit is obtained by applying a known modification to the waveform signal from the control target to obtain a waveform signal that can be observed at a plurality of points, and then inverse the known modification. If it is obtained by achieving an accuracy greater than the interval between the observation points by performing the conversion, it uses a super-resolution technique that offsets the essential error that occurs in measurement control. Thus, further improvement in accuracy will be achieved. In this case, the known deformation is to place three or more observation points at known intervals between periods of the frequency waveform,
If it is represented by a trigonometric function corresponding to each position and has a normal distribution, desired measurement will be performed based on the trigonometric function corresponding to each position.

In the above-described high-speed response measurement system, if a three-phase magnetic field signal of the rotor of the motor is added to the added waveform and the origin signal waveform, line saving can be realized and the configuration of the device can be simplified. become.

[0031]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 is a diagram showing an external configuration of an optical differential position detector 100 according to one embodiment of the present invention. In the figure, a detection shaft 12 is connected to a position detection or measurement object such as a tire (not shown), and the movement of the measurement object is transmitted through the detection shaft 12 to each unit of the optical differential position detector 100. It is transmitted to. The motor 14 is maintained at a constant rotation by a central control circuit (CPU) (not shown) based on a triangular wave signal output from a light receiving element 16a described later.

Reference numeral 18 denotes a light emitting element. The light emitting element 18 is connected to a CPU or a processing board (not shown) and is configured to emit light at a constant brightness. The light emitted by the light emitting element 18 is configured to be received by the light receiving elements 16a and 16b, and a plurality of optical slits are interposed between the light emitting element 18 and the light receiving elements 16a and 16b. I have.

That is, the light emitting element 18 and the light receiving element 16a
Between them, there is provided a rotating slit 20a and a fixed slit 22 which are coupled to the motor 14 and rotate,
The detection axis 12 is provided between the light emitting element 18 and the light receiving element 16b.
The rotating slit 20b and the rotating slit 20a which are connected to and rotate are provided to face each other.

The light receiving element 16a is the light emitting element 1
8, the fixed slit 22 and the rotating slit 20
a as a signal relating to the detection of the absolute position of the rotary slit 20a, and receives a triangular wave signal proportional to the rotation of the rotary slit 20a as an absolute position signal as a signal processing circuit 24 (DS).
P). The triangular wave signal is a signal proportional to the rotation of the motor 14 because the rotary slit 20a is connected to the motor 14.

The light receiving element 16b is used for detecting the relative position between the rotating slit 20b and the rotating slit 20a by projecting the light emitted by the light emitting element 18 and passing through a pair of slits constituted by the rotating slit 20b and the rotating slit 20a. While receiving as a signal, the rotating slit 20b
And outputs a triangular wave signal corresponding to the difference between the rotation of the detection shaft 12 connected to the rotation slit 20b and the rotation of the motor 14 connected to the rotation slit 20a as a relative position signal. Is configured.

The signal processing circuit 24 detects the respective periods of the absolute position signal output from the light receiving element 16a and the relative position signal output from the light receiving element 16b, and, based on those periods, calculates a frequency calculation signal to be described later. By using the pulse circuit (see FIG. 2B), the number of rotations of the detection axis = 1 / (cycle of the triangular wave of the light receiving element 16b)
A calculation represented by a mathematical expression of −1 / (cycle of the triangular wave of the light receiving element 16a) is performed to detect the rotation speed of the detection shaft 12. Thus, the absolute position of the detection shaft 12 is obtained. Further, the signal processing circuit 24
Is configured to output a control signal for controlling the movement of the measurement control target connected via the detection axis 12 of the optical differential position detector 100 to the measurement control target.

At this time, the dynamic average value of the detection axis 12 is as follows: the dynamic average value of the object to be measured = (N−1) / N × (current calculation result) + 1 / N × (measurement of time before Δt) (The dynamic average value of the target moving frequency). Further, the position and speed of the detection shaft 12 can be obtained by, for example, finely integrating the frequency waveform calculated by the above-described calculation of the frequency at a plurality of points at different positions.

Furthermore, the accuracy of the frequency waveform related to the number of rotations of the detection axis is determined by applying a known deformation to the waveform signal from the detection axis 12 to obtain a waveform signal that is observed at a plurality of points. By performing the inverse transformation of the deformation, it is configured such that the accuracy equal to or more than the interval between the observation points is achieved. In this case, the known deformation is to place three or more observation points at known intervals during the period of the frequency waveform, and to express the points by trigonometric functions corresponding to the respective positions. It has a normal distribution.

The measurement control function of the signal processing circuit 24 will be described with reference to the schematic block diagram of the optical differential position detector 100 shown in FIG. 2A. As shown in the figure, the signal processing circuit 24 according to the measurement control device includes a pulse circuit (not shown in FIG. 2A) for frequency calculation shown in FIG. 2B, in addition to the PID control circuit 26 and the PID circuit 28. ing. In FIG. 2A, the rotation detector 30a
Is converted by a high-precision reference wave into a high-precision time value (frequency information), which is output from the light receiving element 16a and converted into a timing signal, and converted into a high-precision time value (frequency information). Is output to

The rotation detector 30b detects the axis 1 detected by the light receiving element 16b and converted into a timing signal.
2 is used to convert the increment of the relative position signal of the rotation of the object to be measured, which is transmitted through the control signal 2, into a high-precision time value (frequency information) using a high-precision reference wave, and to output it to the PID control circuit 26. The PID control circuit 26 includes a signal relating to a target absolute position such as a target position or a target rotation number input to the position setting device 32 using a personal computer or the like (not shown) and an absolute position at the time of measurement of the measurement target. , A signal corresponding to the difference between the absolute position and the difference in speed is calculated and output to the PID circuit (proportional circuit) 28.

The PID circuit 28 calculates the relative position signal increment time based on the absolute position signal increment time to determine the absolute position and velocity of the object to be measured. As described above, the rotation speed of the detection shaft is calculated based on the period of these signals, whereby the absolute position and speed of the measurement target can be obtained. In this case, the control elements calculated by the integration circuit 34, the PID circuit 36, and the like are configured to be reflected, and the high-speed response of the frequency of the relative position signal and the high resolution of the position signal corresponding to the resolution of time measurement are provided. Is obtained. As a result, a control result with good responsiveness and high accuracy over time can be obtained.

FIG. 2B is a block diagram of a frequency calculation pulse circuit provided inside the signal processing circuit 24. In FIG. 1, T1 to T3 are pulse output circuits that output pulse signals having different phases set in advance. The synchronization circuit 38a synchronizes pulse signals output from the pulse output circuit T1 and the setting pulse circuit and outputs these synchronization signals to the OR circuit 40. The synchronization circuit 38b is output by the light receiving element 16a. The absolute position signal and the signal output from the pulse output circuit T2 are synchronized, and these synchronization signals are output to the OR circuit 40. The synchronization circuit 38c outputs a signal output from the pulse output circuit T3 and a relative position signal output from the light receiving element 16b to the reversible counter 42.

The OR circuit 40 calculates the logical sum of the signals output from the synchronization circuits 38a and 38b and outputs the result to the reversible counter 42.
Performs an increment process on a signal related to an absolute position signal and performs a decrement process on a signal related to a relative position signal. Thus, the above-described process of calculating the rotation speed of the detection shaft 12 is performed. By performing the calculation in this manner, the position signal is obtained as a digital value + duty ratio.

Next, another embodiment will be described with reference to FIGS. 1 and 2 in this case.
The same components as those shown in B are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 3 is a diagram showing an external configuration of a linear scale 200 as an example of an optical differential position detector according to another embodiment of the present invention. This linear scale 200
Are the sensor motor 14, the signal processing circuit 24, the light receiving elements 16a, 16b, the fixed slit 22,
0, light emitting elements 18a and 18b, a linear slit 46, and the like.

The light emitting element 18 emits light with a constant brightness, and the light projected by the light emitting element 18
The light receiving element 16b is configured to receive light. Between the light emitting element 18a and the light receiving element 16a, a rotary slit 2 coupled to the sensor motor 14 and rotating.
The fixed slit 22 is interposed between the light emitting element 18 and the light receiving element 16b.
And a linear slit 46 fixedly provided.

The light receiving element 16a is the light emitting element 1
8a, the fixed slit 22 and the rotating slit 2
The light transmitted through the pair of slits constituted by 0 is received and a triangular wave signal proportional to the rotation of the rotary slit 20 is output to the signal processing circuit 24 as an absolute position signal.

The light receiving element 16b transmits light emitted by the light emitting element 18 and transmitted through a pair of slits formed by the rotary slit 20 and the linear slit 46 to the moving unit, that is, the sensor motor 14 relative to the linear slit 46. While receiving the position signal, the difference between the linear movement of the moving unit and the rotational movement with the sensor motor 14, that is, the linear movement of the moving unit and the rotational slit 2
It is configured to output a triangular wave signal corresponding to the difference in rotation of the sensor motor 14 connected to 0 as a relative position signal.

The signal processing circuit 24 detects the respective periods of the absolute position signal output from the light receiving element 16a and the relative position signal output from the light receiving element 16b, and based on these periods, the detection axis moving frequency = An operation represented by an equation of 1 / (cycle of the triangular wave of the light receiving element 16b) -1 / (cycle of the triangular wave of the light receiving element 16a) is performed. As a result, the movement of the detection axis (not shown) is detected, and its absolute position is obtained. The schematic block configuration of the linear scale 200 is the same as that shown in FIG. 2A described above. Since the measurement control is performed in the same manner as in the optical differential position detector described above, a detailed description thereof will be made. Is omitted.

FIG. 4A is a diagram showing an external configuration of an optical sampling position detector 300 according to another embodiment of the present invention. This optical sampling position detector 300
Are a detection shaft 12 coupled to a measurement target, a vibrator 48 connected to a vibrator (not shown), a light-emitting element 18, and a light-receiving element 16.
a, 16b, a rotating slit 20, a fixed slit 22, a vibration slit 50, a signal processing circuit 24, and the like. First, between the light emitting element 18 and the light receiving element 16a, there is provided a vibration slit 50 which is coupled to the vibrator 48 and vibrates.
And the fixed slit 22 are provided to face each other, and the light emitting element 1
Between the light receiving element 8 and the light receiving element 16b, a rotating slit 20 coupled to the detection shaft 12 and rotating and a vibration slit 50 are provided to face each other.

The light receiving element 16a is the light emitting element 1
8, the fixed slit 22 and the vibrating slit 50
Is received as an absolute position signal of the vibration slit 50, and a triangular wave signal according to the vibration of the vibration slit 50 is output to the signal processing circuit 24 as an absolute position signal. ing. This triangular wave signal is a signal proportional to the vibration of the vibrator since the vibration slit is connected to the vibrator.

The light receiving element 16b receives light emitted by the light emitting element 18 and transmitted through a pair of slits constituted by the rotary slit 20 and the vibration slit 50 as a relative position signal between the rotary slit 20 and the vibration slit 50. , The rotation difference between the rotation slit 20 and the vibration slit 50, that is, the rotation of the detection shaft 12 connected to the rotation slit 20 and the vibrator 48 connected to the vibration slit 50.
Is output as a relative position signal.

The signal processing circuit 24 detects the time when the absolute position signal output from the light receiving element 16a and the relative position signal output from the light receiving element 16b change, and
The vibration slit 50 relating to the absolute position signal is obtained from the vibration equation of FIG.
The relationship between the time and the distance from the fixed position is calculated, and based on this relationship, the position of the portion where the signal of the light receiving element 16b changes is calculated for each cycle of the signal output from the light receiving element 16b.

For example, FIG. 4B shows values of various signals with respect to time, that is, detection angles of the rotating slit 20 detected by the optical sampling position detector 300, and pulse values detected by the light receiving elements 16a and 16b. However, the relationship between the time and the distance from the fixed position of the vibration slit 50 is obtained based on the pulse signal output from the light receiving element 16a, and the relationship between the relationship and the pulse signal output from the light receiving element 16b is obtained. Based on this, the rotation speed of the detection shaft 12 coupled to the rotation slit 20 is detected, and its absolute position is obtained. The schematic block configuration of the optical sampling position detector 300 is the same as that shown in FIG. 2A described above, and measurement control is performed in the same manner as in the optical differential position detector described above. Therefore, the detailed description is omitted.

Next, a magnetic differential position detector according to another embodiment of the present invention will be described with reference to FIGS. FIG. 5A is a diagram illustrating an external configuration of the mechanical magnetic differential position detector 400. Reference numerals 52a and 52b denote permanent magnets that form a magnetic field, and the magnetic field formed by these magnets is detected by magnetic detectors 54a and 54b, respectively. And these permanent magnets 52
A plurality of rotating magnetic gears are interposed between the a and 52b and the magnetic detectors 54a and 54b.

That is, the permanent magnet 52a and the magnetic detector 5
4a, there is provided a magnetic slit and a rotating magnetic gear 56 which is coupled to the motor 14 and rotates.
a between the permanent magnet 52b and the magnetic detector 54b, there is also provided a magnetic slit, and the rotating magnetic gear 56b which is coupled to the detection shaft 12 and rotates.
And the rotating magnetic gear 56a are provided to face each other.
The plane form and the side form of these rotating magnetic gears 56a and 56b are, for example, as shown in FIG. 5B.

The magnetic detector 54a detects the magnetic field generated by the permanent magnet 52a, detects the absolute position of the rotating magnetic gear 56a, and outputs a signal including a frequency signal proportional to the rotation of the rotating magnetic gear 56a. It is output to a signal processing circuit (not shown) as an absolute position signal. This signal processing circuit has the same configuration as that of the signal processing circuit 24 shown in FIG. 1, and the detection target is replaced with a magnetic signal.

The magnetic detector 54b includes a permanent magnet 52b
To detect the relative position between the rotating magnetic gear 56b and the rotating magnetic gear 56a, and the difference in rotation between the rotating magnetic gear 56b and the rotating magnetic gear 56a, that is, the rotation of the detection shaft 12 and the motor. A triangular wave signal corresponding to the rotation difference of No. 14 is output as a relative position signal.

The signal processing circuit (not shown) includes a magnetic detector 5
4a and the relative position signal output from the magnetic detector 54b are detected.
Based on these periods, an arithmetic operation represented by a mathematical formula of detection shaft rotation speed = 1 / (cycle of the triangular wave of the magnetic detector 54b) -1 / (cycle of the triangular wave of the magnetic detector 54a) is performed.

Thus, the rotation speed of the detection shaft 12 is detected, and the absolute position of the detection shaft 12 is obtained. In this case, the schematic block configuration of the mechanical magnetic differential position detector 400 is the same as that shown in FIG.
Since the measurement control is performed in the same manner as in the optical differential position detector described above, a detailed description thereof will be omitted.

FIG. 6 shows an electromagnetic differential position detector 500.
FIG. 2 is a diagram showing an external configuration of the apparatus. The rotating magnetic gear 56 is coupled to the detection shaft 12 attached to a measurement object (not shown) and has a magnetic slit. An exciting coil 58 connected to a vibration waveform generator (not shown) is provided on the detection shaft 12 side of the rotating magnetic gear 56 so as to form a rotating magnetic field according to the rotation of the rotating magnetic gear 56. It is configured.

The magnetic circuit constituted by the rotating magnetic gear 56 and the exciting coil 58 is provided with a magnetic detector 54 fixedly mounted. The waveform of the vibration waveform generator (not shown) is output as an absolute position signal to a signal processing circuit (not shown).

The signal processing circuit (not shown) has the same configuration as the signal processing circuit 24 shown in FIG. 1, and uses a magnetic object instead of light to be detected. The relative signals of the rotating magnetic field generated by the exciting coil 58 and the magnetic field generated by the rotating magnetic gear 56 coupled to the detection shaft 12 are detected by the magnetic detector 5.
4 and outputs it as a relative position signal, and by performing an arithmetic process on the relative position signal and the above-described absolute position signal, the rotational speed of the detection shaft 12, that is, the absolute position of the detection shaft 12 is obtained. is there. Also in this case, the schematic block configuration of the electromagnetic differential position detector 500 is the same as that shown in FIG. 2A described above, and measurement is performed in the same manner as in the optical differential position detector described above. Since the control is performed, a detailed description thereof will be omitted.

FIG. 7 is a diagram showing an external configuration of a permanent magnet type differential position detector. This permanent magnet type differential position detector 6
Reference numeral 00 denotes a cylinder provided with a magnetic slit provided as a permanent magnet and provided opposite to the cylinder and having the same width as the width of the magnetic slit. A pair of gears are provided that are shifted only by one. Further, a signal processing circuit (not shown) is provided, and the absolute position of the measurement target is detected by a pair of gear groups.
The current value is measured in a state where a sine wave having a phase difference of 0 ° is applied, and the detection is performed based on the detection of a change in the magnetoresistance. The signal processing circuit detects a change in the current value based on the change in the magnetic resistance, and calculates a position of the slit of the permanent magnet, that is, a position corresponding to an absolute position of the measurement target, based on the change in the current value.

Another example of the magnetic position detector is a magnetic sampling position detector. In this case, a diaphragm provided with a magnetic detector is provided instead of the rotating magnetic gear.

Further, although not shown, other examples of the position detector include an electrostatic type and an ultrasonic type. First, examples of the electrostatic position detector include an electrostatic phase difference detector and an electrostatic sampling position detector. The electrostatic phase difference detector is configured by replacing the magnetic circuit of the magnetic position detector shown in FIG. 5A or 6 with an electric circuit and replacing the magnetic detector with an electrostatic detector. The electrostatic sampling position detector
It is constructed by replacing the magnetism in the magnetic sampling position detector with static electricity.

The ultrasonic position detector is composed of a magnet having a slit magnetically provided and coupled to the object to be measured, and a coil, a magnetic material, an elastic material and the like provided outside. This ultrasonic position detector is configured so that an elastic traveling wave is generated in a magnetic body by ultrasonic waves, and a signal based on the elastic traveling wave is detected by its coil to obtain an absolute position of a measurement target. It is.

FIG. 8A shows an optical sweep type phase difference detector 70.
FIG. 2 is a diagram illustrating an external configuration of the 0 ’. The optical sweep type phase difference detector 700 includes a light emitting element 18, a light receiving element 16, a rotating slit 20, and the like. The light-emitting element 18 of the optical sweep type phase difference detector 700 has the structure shown in FIG.
As shown in (1), light is emitted by a sweep type circuit at different phases. Based on the phase shift, the absolute position of the detection shaft 12 and the relative position of the rotary slit 20 are detected, and the detection shaft is detected by a signal processing circuit (not shown). Twelve absolute positions are detected.

According to the present embodiment described above, the increment of the absolute position signal of the reference rotation or vibration, which has been converted into the timing signal, is converted into a high-precision time value by the high-precision reference wave. The increment of the relative position signal of the rotation or vibration of the measurement object, which has been converted into the signal, is converted into a high-precision time value by the high-precision reference wave. Since the absolute position and speed of the measurement target are obtained by calculating based on the increment time of the position signal, the high-speed response of the frequency of the relative position signal and the high position corresponding to the resolution of the time measurement are high. Resolution is obtained.

Further, according to the above-described embodiment, the difference between the absolute position and speed of the object to be measured and the difference between the absolute position and speed of the target is calculated, and control elements such as the position and speed, or a single PID are used. Since the calculation is performed, a control result with good responsiveness and high accuracy over time is obtained.

The present invention is not limited to the above-described embodiment at all, and various modifications can be made without departing from the gist of the present invention. In many of the embodiments described above, a rotary slit is used. However, the present invention is not limited to this, and a linear slit may be used. Further, although the gear-type slit is used as the above-described magnetic slit, a magnetic slit and a non-magnetic member may be alternatively used. Further, if a three-phase magnetic field signal of the rotor of the motor is added to the added waveform and the origin signal waveform, the line can be saved.

[0072]

According to the high-speed response measurement control device according to the first aspect, the physical frequency is determined by the addition frequency waveform of the known moving frequency waveform and the frequency waveform attached to the control target, that is, the known moving frequency waveform. The control of the set frequency is performed using the waveform that has been frequency-modulated as a feedback signal, so that the moving frequency is the center frequency, and the frequency band with a limited width above and below the frequency attached to the control target is limited. Therefore, measurement with high accuracy and good responsiveness is performed.

According to the high-speed response measurement control device according to the second aspect, since the calculation is performed with emphasis on the temporal proximity for a large change, the time interval between the detected position signals is reduced, and Since the accuracy of the detected position signal is improved by averaging in time with respect to the fluctuation, a high-speed response can be made to a large fluctuation, and a precise response can be made to a small fluctuation.

Therefore, a combination of any of a fixed slit, a rotating slit, a vibration slit and the like can be used as the measuring element. At this time, as a signal generation source to be transmitted and received, a light emitting body, a magnetic body, and the like are preferable. In other words, elements exhibiting extremely excellent high-speed responsiveness as a whole, but having low high-speed responsiveness can be used as elements constituting each part. Furthermore, since a frequency waveform is obtained by obtaining a dynamic average value or using a super-resolution technique, measurement with higher accuracy becomes possible.

According to the high-speed response measurement system according to the second aspect of the present invention, the known moving frequency is calculated from the frequency of the added waveform of the known moving frequency waveform and the waveform attached to the object to be measured. Since the frequency of the measurement target is obtained by subtraction, a calculation in a high frequency region is performed for a large change, and the time interval of the detected position signal is shortened, and the change is reduced to a small change. On the other hand, the accuracy of the detected position signal is improved. In addition, a high-speed response can be made to a large change, and a precise response can be made to a small change.
As a result, measurement can be performed with high accuracy and responsiveness over a wide range from the stopped state of the measurement target to the high-speed movement state.

[Brief description of the drawings]

FIG. 1 is an external configuration diagram of an optical differential position detector according to an embodiment of the present invention.

FIG. 2A is a schematic block configuration diagram of a measurement control device used for a position detector according to one embodiment of the present invention.

FIG. 2B is a block diagram of a pulse circuit for frequency calculation.

FIG. 3 is an external configuration diagram of a linear scale as an example of an optical differential position detector according to another embodiment of the present invention.

FIG. 4A is an external configuration diagram of an optical sampling position detector according to another embodiment of the present invention.

FIG. 4B is a diagram showing an example of a timing chart of the optical sampling position detector shown in FIG. 4A.

FIG. 5A is an external configuration diagram of a mechanical magnetic differential position detector according to another embodiment of the present invention.

FIG. 5B is a plan view and a side view of the rotary magnetic gear shown in FIG. 5A.

FIG. 6 is an external configuration diagram of an electromagnetic differential position detector according to another embodiment of the present invention.

FIG. 7 is an external configuration diagram of a permanent magnet type differential position detector according to another embodiment of the present invention.

FIG. 8A is an external configuration diagram of an optical sweep type phase difference detector according to another embodiment of the present invention.

FIG. 8B is a diagram showing an example of a timing chart of the optical sweep type phase difference detector shown in FIG. 8A.

[Explanation of symbols]

 REFERENCE SIGNS LIST 100 Optical differential position detector 200 Linear scale 300 Optical sampling position detector 400 Mechanical magnetic differential position detector 500 Electromagnetic differential position detector 600 Permanent magnet differential position detector 700 Optical sweep type Phase difference detector 12 Detection axis 14 Motor 16a, 16b Light receiving element 18 Light emitting element 20a, 20b Rotating slit 22 Fixed slit 24 Signal processing circuit 26 PID control circuit 28, 36 PID circuit 30a, 30b Rotation detector 32 Position setting unit 34 Integration Circuit 38a, 38b, 38c Synchronous circuit 40 OR circuit 42 Reversible counter 46 Linear slit 48 Vibrator 50 Vibration slit 52a, 52b Permanent magnet 54a, 54b Magnetic detector 56a, 56b Rotating magnetic gear 58 Excitation coil

Claims (17)

[Claims] 1. A frequency calculating means for adding a known moving waveform frequency and a set moving waveform frequency to a set frequency, and adding an added frequency waveform of the known moving frequency waveform and a frequency waveform attached to a control target. A high-speed response measurement control device, comprising: control means for controlling a set frequency obtained by the frequency calculation means as a feedback signal. 2. A measurement control device for performing measurement control using a position detector for detecting a temporal change amount of a measurement object, comprising: a moving body moving at a speed higher than a maximum moving speed of the measurement object; First transmitting means for transmitting a first waveform signal generated by the movement of the moving body according to the dynamic characteristics of the moving body; and determining an absolute position of the moving body based on the first waveform signal. An absolute position detecting means for detecting a signal shown and outputting the signal as an absolute position signal; and a second waveform signal generated by movement of the measurement target coupled to the measurement target according to a dynamic characteristic of the measurement target. A second transmitting means for transmitting, detecting a signal indicating a relative position between the first transmitting means and the second transmitting means based on the first and second waveform signals, and using the signal as a relative position signal Output relative position detection means The provided, calculates the frequency of the relative position signal and the absolute position signal, high-speed response measurement control device being characterized in that to detect the temporal change amount of the measurement target based on the frequency. 3. When the first transmitting means is constituted by a fixed slit and a rotating slit, the second transmitting means is constituted by a pair of rotating slits, and the first transmitting means is constituted by a fixed slit. 3. The high-speed response measurement control device according to claim 2, wherein, when configured by a vibration slit, the second transmission unit is configured by a rotation slit and a vibration slit. 4. 4. A first calculating means for calculating a frequency waveform from a frequency waveform obtained by observing a dynamic average value of a moving frequency of a measurement target at a plurality of points at different positions; (N−1) / N × (current calculation result) + 1 / N × (dynamic average value of moving frequency of measurement object at time before Δt) ” The high-speed response measurement control device according to any one of claims 1 to 3, further comprising: 5. A first calculating means for calculating a frequency waveform attached to a control target from frequency waveforms observed at a plurality of points at different positions, and a first control means for calculating a frequency waveform obtained by the first calculating means. The high-speed response measurement control device according to any one of claims 1 to 3, further comprising: a control unit configured to control measurement of a position and a speed of the control target based on the frequency waveform. 6. A frequency waveform obtained by the first arithmetic means is obtained by subjecting a waveform signal from a control object to a known deformation to obtain a waveform signal which can be dispersed and observed at a plurality of points.
6. The high-speed response measurement control apparatus according to claim 5, wherein the apparatus is obtained by achieving an accuracy equal to or longer than the interval between observation points by performing inverse transformation of a known deformation. 7. The known modification is characterized in that three or more observation points are placed at known intervals between periods of a frequency waveform and are represented by trigonometric functions corresponding to the respective positions. The high-speed response measurement control device according to claim 6. 8. The high-speed response measurement control device according to claim 7, wherein the known deformation has a normal distribution. 9. The method according to claim 1, wherein a line saving is realized by adding a three-phase magnetic field signal of a motor rotor to the addition waveform and the origin signal waveform. High-speed response measurement control device. 10. A first operation for measuring a cycle of an addition waveform of a known moving frequency waveform of a moving body moving at a speed higher than a maximum moving speed of a measurement target and a waveform attached to the measurement target and calculating a frequency. A high-speed response measurement system comprising: means for calculating a frequency to be measured by subtracting a known moving frequency from the calculated frequency. 11. A moving body moving at a speed higher than a maximum moving speed of a measurement object, and a first transmitting means for transmitting a first waveform signal generated by the moving body according to dynamic characteristics of the moving body. An absolute position detecting means for detecting a signal indicating an absolute position of the moving object based on the first waveform signal and outputting the signal as an absolute position signal; and an absolute position detecting means coupled to the measurement target and generated by the measurement target. A second transmission unit that transmits a second waveform signal according to the dynamic characteristic of the measurement target; and a first transmission unit and a second transmission unit based on the first and second waveform signals. Relative position detecting means for detecting a signal indicating the relative position and outputting the signal as a relative position signal, calculating the frequency of the relative position signal and the absolute position signal, and calculating the time of the measurement object based on the frequency. To detect dynamic changes A high-speed response measurement system comprising a position detector according to claim 1. 12. A first calculating means for calculating a frequency waveform by calculating a dynamic average value of a moving frequency of a measurement target from a plurality of frequency waveforms observed at a plurality of points at different positions; (N−1) / N × (current calculation result) + 1 / N × (dynamic average value of moving frequency of measurement object at time before Δt) ” The high-speed response measurement system according to claim 10 or 11, further comprising: 13. A first calculating means for calculating a frequency waveform attached to a control target from frequency waveforms observed at a plurality of points at different positions, and a first control means for calculating a frequency waveform attached to the control target. The high-speed response measurement system according to any one of claims 10 to 12, further comprising: a control unit configured to control measurement of a position and a speed of the control target based on the frequency waveform. 14. A frequency waveform obtained by said first calculating means is obtained by subjecting a waveform signal from a control object to a known deformation by applying a known deformation to a waveform signal which can be distributed and observed at a plurality of points. 14. The high-speed response measurement system according to claim 13, wherein the high-speed response measurement system is obtained by achieving accuracy equal to or longer than the interval between observation points by performing an inverse transformation. 15. The known modification is characterized in that three or more observation points are placed at known intervals between periods of a frequency waveform and are represented by trigonometric functions corresponding to the respective positions. The high-speed response measurement system according to claim 14, wherein: 16. The high-speed response measurement system according to claim 15, wherein the known deformation has a normal distribution. 17. The high-speed response measurement system according to claim 10, wherein a line saving is realized by adding a three-phase magnetic field signal of a rotor of the motor to the addition waveform and the origin signal waveform.