JPH11160877A5 - - Google Patents
Info
- Publication number
- JPH11160877A5 JPH11160877A5 JP1998268267A JP26826798A JPH11160877A5 JP H11160877 A5 JPH11160877 A5 JP H11160877A5 JP 1998268267 A JP1998268267 A JP 1998268267A JP 26826798 A JP26826798 A JP 26826798A JP H11160877 A5 JPH11160877 A5 JP H11160877A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- independently represent
- resist composition
- positive resist
- composition according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26826798A JP3841378B2 (ja) | 1997-09-25 | 1998-09-22 | ポジ型レジスト組成物 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26039997 | 1997-09-25 | ||
| JP9-260399 | 1997-09-25 | ||
| JP26826798A JP3841378B2 (ja) | 1997-09-25 | 1998-09-22 | ポジ型レジスト組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH11160877A JPH11160877A (ja) | 1999-06-18 |
| JPH11160877A5 true JPH11160877A5 (2) | 2005-02-24 |
| JP3841378B2 JP3841378B2 (ja) | 2006-11-01 |
Family
ID=26544594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26826798A Expired - Fee Related JP3841378B2 (ja) | 1997-09-25 | 1998-09-22 | ポジ型レジスト組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3841378B2 (2) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100634973B1 (ko) | 1999-04-09 | 2006-10-16 | 센쥬긴소쿠고교가부시키가이샤 | 솔더볼 및 솔더볼의 피복방법 |
| JP4529245B2 (ja) * | 1999-12-03 | 2010-08-25 | 住友化学株式会社 | 化学増幅型ポジ型レジスト組成物 |
| JP6065749B2 (ja) * | 2013-05-29 | 2017-01-25 | 住友ベークライト株式会社 | 感光性樹脂組成物および電子装置 |
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1998
- 1998-09-22 JP JP26826798A patent/JP3841378B2/ja not_active Expired - Fee Related