JPH11163364A5 - - Google Patents
Info
- Publication number
- JPH11163364A5 JPH11163364A5 JP1997344350A JP34435097A JPH11163364A5 JP H11163364 A5 JPH11163364 A5 JP H11163364A5 JP 1997344350 A JP1997344350 A JP 1997344350A JP 34435097 A JP34435097 A JP 34435097A JP H11163364 A5 JPH11163364 A5 JP H11163364A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- interlayer insulating
- insulating film
- organic resin
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34435097A JP4202454B2 (ja) | 1997-11-27 | 1997-11-27 | 半導体装置およびその作製方法 |
| US09/197,767 US7202497B2 (en) | 1997-11-27 | 1998-11-23 | Semiconductor device |
| US09/550,598 US7192865B1 (en) | 1997-11-27 | 2000-04-17 | Semiconductor device and process for producing the same |
| US11/713,619 US8440509B2 (en) | 1997-11-27 | 2007-03-05 | Method for producing a semiconductor device by etch back process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34435097A JP4202454B2 (ja) | 1997-11-27 | 1997-11-27 | 半導体装置およびその作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH11163364A JPH11163364A (ja) | 1999-06-18 |
| JPH11163364A5 true JPH11163364A5 (2) | 2005-07-14 |
| JP4202454B2 JP4202454B2 (ja) | 2008-12-24 |
Family
ID=18368566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34435097A Expired - Fee Related JP4202454B2 (ja) | 1997-11-27 | 1997-11-27 | 半導体装置およびその作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4202454B2 (2) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4619050B2 (ja) * | 2003-06-30 | 2011-01-26 | 株式会社半導体エネルギー研究所 | 表示装置の作製方法 |
| KR101137873B1 (ko) | 2005-04-11 | 2012-04-20 | 엘지디스플레이 주식회사 | 패드전극 형성방법, 그를 이용한 액정표시소자의 제조방법,및 그 방법에 의해 제조된 액정표시소자 |
| JP5258277B2 (ja) | 2006-12-26 | 2013-08-07 | 株式会社半導体エネルギー研究所 | 液晶表示装置 |
| CN111886699B (zh) * | 2018-03-28 | 2024-06-14 | 堺显示器制品株式会社 | 有机el显示装置及其制造方法 |
-
1997
- 1997-11-27 JP JP34435097A patent/JP4202454B2/ja not_active Expired - Fee Related
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