JPH11170366A - Film sticking apparatus and film sticking method using the same - Google Patents

Abstract

(57) [Problem] To provide a film sticking apparatus and a film sticking method capable of uniformly sticking a film to an object to be stuck without generating wrinkles or bubbles. SOLUTION: The film sticking device of the present invention has a concave portion, and a frame supporting the film so as to cover the concave portion;
Gas introduction means for introducing gas into a closed space surrounded by the frame and the film when supporting the film on the frame, and supporting the object to be attached so as to face the film supported by the frame. And a moving means for moving the film supported by the frame and the object on the object support in the direction of approaching and separating.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film sticking apparatus for sticking a film to an object to be stuck, and more particularly to a film sticking apparatus capable of sticking a film uniformly without generating wrinkles or bubbles.

[0002]

2. Description of the Related Art In various industrial fields, it is sometimes necessary to attach a thin film to an arbitrary member. For example, when forming a color filter on a substrate of a liquid crystal display device, a case where a film for forming a color filter having an adhesive property on one side is attached to the substrate is exemplified. Then, the operation of irradiating the film for forming a color filter with a laser beam to perform laser baking to color the substrate is performed in any order on the three color films of red, green, and blue to produce a color filter.

[0003]

When the film for forming a color filter is pasted on a substrate, the film is easily wrinkled, bubbles are easily left between the film and the substrate, and the color filter is not formed reliably. Had a problem. Until now, there has been a method of sticking the film on the substrate with a roller to prevent bubbles from remaining between the film and the substrate. Was enough. Alternatively, in order to improve the efficiency of the film sticking operation, it was necessary to examine a method of supplying the film.
In view of the above, the present invention can uniformly apply a film to an object to be attached without generating wrinkles or bubbles in a film attaching operation such as an operation of attaching a color filter forming film of a liquid crystal display device. It is an object to provide a film sticking apparatus and a film sticking method.

[0004]

Means for Solving the Problems In order to achieve the above object, the present inventors have proposed a method for uniformly applying a film to an object without wrinkles or air bubbles. Attaching to an object with almost uniform tension applied in all directions in the plane (hereinafter referred to as isotropic uniform tension), and applying a film to remove air at the interface between the film and the object Affixing the film sequentially from the center of the surface to the periphery to the periphery,
It was found that the two conditions should be met. That is, the film sticking device according to the present invention has a concave portion, a frame supporting the film so as to cover the concave portion, and a concave portion sealed by the frame and the film when the frame supports the film. Gas introducing means for introducing a gas into the inside, an object-to-be-attached support portion for supporting an object to be attached so as to face the film supported by the frame, and a film-and-object-to-be-adhered supported by the frame. Moving means for moving the object to be pasted on the part in a direction of approaching and separating.

When such a film sticking device is used, since the peripheral portion of the film is supported by the frame, the gas is introduced into the recess sealed by the frame and the film, so that the film isotropically attached to the surface of the film. A uniform tension can be applied, and the film surface protrudes in a convex shape. When the film and the object to be adhered are brought close to each other in this state, the film is adhered from the central portion of the surface to which the object is adhered to the peripheral portion. Can be made to escape. In addition, since the tension is applied almost uniformly to the film in all directions, there is no possibility of the film shrinking in one direction that may occur when the film is attached with the tension applied unevenly. No wrinkles are formed on the film surface after application.

[0006] The film sticking apparatus may be provided with a film cutting means for cutting the periphery of the film stuck on the object to be stuck. If such a cutting means is provided, it is possible to easily cut off an unnecessary portion of the film attached to the object to be attached without using manual operation, or to cut out a portion attached to the object to be attached from the film. And work efficiency can be improved. Further, the film sticking device may be provided with a film supply mechanism for continuously supplying a film to the frame. If such a supply mechanism is provided, it is not necessary to set a new film for each object to be pasted, and the film can be continuously supplied, so that the working efficiency can be improved.

In the film sticking method according to the present invention, a film is supported by a frame of the film sticking apparatus, and a gas is introduced from a gas introducing means into a concave portion of the frame sealed by the film to increase the internal pressure. After causing the film supported by the frame to bulge in a convex shape, the moving means is operated to bring the film supported by the frame closer to the object to be bonded, and the film is attached to the surface of the object to be bonded. Characterized in that it is attached from the center to the outer periphery.

[0008] That is, the film is supported by the frame of the film sticking device, and thereby the frame recessed portion serving as a closed space is
By increasing the internal pressure by introducing gas from the gas introduction means,
An isotropic uniform tension can be applied to the surface of the film supported by the frame, and the film can bulge in a convex shape.
In this state, the film is moved closer to the object to be stuck, and the film is stuck from the center to the outer periphery of the surface of the object to be stuck, so that the film is stuck to the object without causing wrinkles or bubbles. can do. Further, the tension applied to the film can be adjusted by changing the pressure of the gas inside the frame supporting the film, and the sticking conditions can be easily optimized.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the drawings, but the present invention is not limited to only these embodiments. FIG. 1 and FIG. 2 are schematic configuration diagrams showing an example of the film sticking apparatus of the present embodiment,
FIG. 1 is a partial sectional view showing a main part of the present apparatus, and FIG. 2 is a plan view. This is an example of a film sticking device for forming a color filter of a liquid crystal display device. As shown in FIGS. 1 and 2, the film sticking apparatus 1 of the present embodiment includes a top plate 4a,
It is roughly composed of an outer frame 4b, a piston 5 (moving means), a base 8 (an adherend support portion), a support 9, a spring 10, and a film fixing rubber 11.

As shown in FIG. 1, a central portion of a top plate 4a is fixed to a lower end of a piston 5 of an air cylinder, and an outer frame 4b is fixed to a peripheral portion of a lower surface of the top plate 4a without a gap. The frame 4 is composed of the top plate 4a and the outer frame 4b. The film 14 to be attached to the lower surface of the frame 4 is supported. On the other hand, in the center of the base 8, a substrate 13 to which a film is to be attached (object to be attached)
Is to be supported. Therefore, when the piston 5 moves up and down by the operation of the air cylinder, the frame 4
The film 14 and the substrate 13 which are supported by the substrate are moved closer to and away from each other.

As shown in FIG. 2, the frame 4 has a shape in which circular plate portions are provided at four corners of a rectangular plate portion, and each circular plate portion is provided with a hole. As shown in FIGS. 1 and 2, columns 9, 9... Are fixed to the four corners of the base 8, and the holes of the frame 4 are inserted. It works. Each strut 9, 9
Are provided on the outer peripheral portion of the outer frame 4b, respectively, so that the film fixing rubber 11 can be in close contact with the lower end of the outer frame 4b. The film fixing rubber 11 has the same planar shape as that of the frame body 4, and holes are formed at four corners of the film fixing rubber 11 so that the columns 9 can be inserted therethrough. The lower surface of the outer frame 4b and the film fixing rubber 11 are brought into close contact with each other to form the film 1
4 can be held. And film 1
When the frame 4 is supported on the lower surface of the frame 4, a closed space 15 is formed by the frame 4 and the film 14. The state can be maintained.

As shown in FIG. 2, a hole is formed in one side of the frame 4 and this hole is connected to an air supply source (not shown) through a pipe to introduce air into the closed space 15. It is an air introduction path 16 for performing the above. Air is supplied to the closed space 15 formed by the top plate 4a, the outer frame 4b, and the film 14 from the air introduction path 16. Further, the amount of air supplied into the closed space 15 can be appropriately controlled, and the air pressure in the closed space 15 can be controlled.

As shown in FIG. 1, an inner frame 6 is fixed to the lower surface of the top plate 4a.
A notch is provided at a position in contact with a corner of the upper surface, and a film holder 7 made of an elastic material such as rubber is provided on an inner surface of the notch. The film retainer 7 serves to buffer the contact between the inner frame 6 and the substrate 13 when the frame 4 descends, and at the same time, serves to reliably press the film 14 at the edge of the substrate 13. . A stage 8 a is provided at the center of the upper surface of the base 8, and a substrate 13 on which a film 14 is adhered is fixed thereon. A cutter 12 is provided around the stage 8a so as to surround the stage 8a. As shown in FIG. 3, the height of the cutting edge of the cutter 12 is slightly higher than the height of the film 14 at the position of the cutter 12 when the piston 5 reaches the lowest point. This allows the cutting edge of the cutter 12 to contact the film 14 just before the piston 5 reaches the lowest point, and cut the film.

As shown in FIG. 2, the substrate 13 is continuously supplied to the film sticking apparatus 1 from the left side in FIG. 2 by a transport mechanism (not shown). It is conveyed to the right inside. At this time, an apparatus for performing laser printing may be installed on the right side of the film sticking apparatus 1 in FIG. Also, film 1
4 is continuously supplied to the film sticking apparatus 1 from the lower side in FIG. 2 by a film supply mechanism (not shown), and the remaining film 14 used is conveyed to the upper side in FIG. It has become.

Next, the film sticking apparatus 1 of the present embodiment
The procedure for attaching the film 14 on the substrate 13 by using will be described with reference to FIGS. First, in the initial state, the piston 5 is lifted upward in FIG.
A gap is formed between b and the film fixing rubber 11. When the film 14 is inserted into the gap and the piston 5 descends, the film 14 is sandwiched between the outer frame 4b and the film fixing rubber 11. At this time, the top plate 4a, the outer frame 4b, and the film 14 form a closed space 15. A substrate 13 to which a film 14 is to be attached is fixed on the stage 8a at the center of the upper surface of the base 8.

When air is introduced from the air introduction path 16 into the closed space 15 with the top plate 4a, the outer frame 4b and the film 14 forming the closed space 15, the pressure in the closed space 15 increases. As a result, the film 14 protrudes downward in the figure as shown in FIG. When the piston 5 descends while maintaining this state, the springs 10, 10,.
The lowermost part of the film 14 that has shrunk and swells in a convex shape contacts the central part of the upper surface of the substrate 13. Substrate 1 of film 14
The surface on the third side has adhesiveness, and the film 14
3 is attached to the upper surface of the substrate 13 in order from the portion in contact with the substrate 3.

When the piston 5 further descends, the contact portion between the film 14 and the substrate 13 spreads from the central portion of the upper surface of the substrate 13 to the peripheral portion, and finally reaches the entire upper surface of the substrate 13 as shown in FIG. The film 14 is stuck. Finally, the film retainer 7 completely presses the film 14 on the upper surface of the substrate 13 by pressing the peripheral portion of the substrate 13 on which the film 14 is adhered, and the cutter 12 contacts the film 14 and adheres to the substrate 13. The periphery of the attached portion of the film 14 is cut.

When the operation of attaching one substrate 13 is completed,
The piston 5 rises, the outer frame 4b and the film fixing rubber 1
In a state where a gap is formed between the film 1 and the film supply mechanism, the cut portion of the film 14 is conveyed to the upper side in FIG. 2, and the surface of the new film 14 is transferred to the film sticking apparatus 1 from the lower side in the figure. Supplied. Further, the substrate 13 on which the attaching operation has been completed is transported (discharged) to the right side in FIG. 2 by the transport mechanism, and the substrate 13 on which the attaching operation is next performed is supplied to the film attaching apparatus 1 from the left side in the figure.

As described above, in the film sticking apparatus 1 of the present embodiment, the pressure of the closed space 15 formed by the top plate 4a, the outer frame 4b and the film 14 is increased so that the surface of the film 14 is isotropic. By applying a uniform tension to bulge convexly, and by sticking the film 14 from the center of the upper surface of the substrate 13 toward the peripheral edge, wrinkles or
The film 14 can be stuck on the upper surface of the substrate 13 without generating bubbles on the stuck surface. Further, the amount of air supplied into the closed space 15 can be appropriately controlled, and the air pressure in the closed space 15 can be controlled.
The pressure can be adjusted by changing the air pressure in the closed space 15 constituted by 4 and the sticking conditions can be easily optimized.

Further, since the film sticking apparatus 1 is provided with a cutter 12 for cutting the periphery of the film 14 stuck to the substrate 13, the portion of the film 14 stuck to the substrate 13 is subjected to the sticking operation. Can be cut out at the same time, and work efficiency can be improved by saving labor. At this time, it is sufficient to move the piston 5 up and down, and it is not necessary to move the cutter 12.
It is not necessary to further include a drive mechanism or the like.

The film sticking apparatus 1 includes a film 1
Since the film supply mechanism for continuously supplying the film 4 is provided, the supply of the film 14 can be continuously performed, and the work efficiency can be improved without labor.
In addition, since the film sticking apparatus 1 is provided with a transport mechanism for transporting the substrate 13, the substrate 13 can be continuously supplied to the film sticking apparatus 1, thereby saving labor and improving work efficiency. be able to.

The technical scope of the present invention is not limited to the above embodiment, and various changes can be made without departing from the spirit of the present invention. For example, the frame 4 is composed of the top plate 4a and the outer frame 4b, but the frame 4 may be composed of one component. Further, in the above embodiment, the film 14 is moved and attached to the substrate 13, but the film 14 may be moved alone or the substrate 13 may be moved. Alternatively, in the above embodiment, the cutter 12 is used as the cutting means. However, the cutting means is not limited to a cutting tool, and may be cut by heat using a nichrome wire or the like depending on the material of the film 14. Absent.
The above embodiment is directed to a device for attaching a film for forming a color filter of a liquid crystal display device, but the present invention is also applicable to a variety of industrial fields in which a thin film film can be formed into an arbitrary member. It is possible to apply to the work of pasting.

[0023]

As described above, the film sticking apparatus of the present invention has a concave portion, a frame supporting the film so as to cover the concave portion, and a frame when the film is supported by the frame. Gas introduction means for introducing a gas into the concave portion sealed by the film, an object-to-be-attached object supporting portion for supporting the object to be attached to face the film supported by the frame, and supported by the frame. A moving means for moving the film and the object to be pasted on the object to be adhered support portion in the approaching and separating directions, wherein the film is supported so as to cover the concave portion of the frame. In addition, by introducing gas into the concave portion sealed by the frame and the film, tension can be applied uniformly. Since the convexly swelled film is adhered from the central portion of the surface to be adhered to the peripheral portion, wrinkles and bubbles generated at the time of attaching the film are allowed to escape from the central portion of the adhered surface to the peripheral portion. it can. Since tension is uniformly applied to the film, it does not shrink in one direction after application and does not form wrinkles on the film surface.

[0024] Since the film sticking device is provided with a cutting means for cutting the periphery of the film stuck to the object, unnecessary portions of the film stuck to the object can be cut off immediately. In addition, labor can be saved and work efficiency can be improved. Further, in the film sticking device,
Since the supply mechanism for continuously supplying the film is provided, it is not necessary to set a new film for each object to be pasted, and the work efficiency can be improved.

[0025] In the film sticking method of the present invention, the film is supported by the frame of the film sticking apparatus, and gas is introduced from the gas introducing means into the recess of the frame sealed by the film to increase the internal pressure. After the film supported by the body is bulged in a convex shape, the moving means is operated to bring the film supported by the frame closer to the object to be adhered, and the film is placed at the center of the surface to be adhered of the object to be adhered. From the outer peripheral portion, it is possible to impart an isotropic uniform tension to the film surface supported by the frame body, since the film is stuck in this state, the film on the object to be stuck The film can be stuck without causing wrinkles or bubbles. At this time, the tension applied to the film can be adjusted by changing the pressure of the gas inside the frame supporting the film, and the sticking conditions can be easily optimized.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram (partial cross-sectional view) illustrating an example of a film sticking apparatus according to the present embodiment.

FIG. 2 is a schematic configuration diagram (plan view) illustrating an example of a film sticking apparatus according to the present embodiment.

FIG. 3 is a schematic configuration diagram (partial cross-sectional view) illustrating an operation of the film sticking apparatus of the present embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Film sticking apparatus 4 Frame 4a Top plate 4b Outer frame 5 Piston 6 Inner frame 7 Film holder 8 Base 9 Support 10 Spring 11 Film fixing rubber 12 Cutter 13 Substrate 14 Film 15 Closed space 16 Air introduction path

Claims (4)

[Claims] 1. A film sticking apparatus for sticking a film to an object to be stuck, comprising: a frame having a concave portion and supporting the film so as to cover the concave portion; and supporting the film by the frame. Gas introducing means for introducing a gas into the concave portion sealed by the frame and the film when it is made to adhere, and an adherend supporting the adherend so as to face the film supported by the frame. A film sticking device, comprising: a support portion; and a moving means for moving the film supported by the frame and the object to be stuck on the object to be stuck in a direction in which they approach and separate from each other. . 2. The film sticking apparatus according to claim 1, further comprising a film cutting means for cutting the periphery of the film stuck on the object to be stuck. 3. The film sticking apparatus according to claim 1, further comprising a film supply mechanism for continuously supplying a film to the frame. 4. A film is supported on a frame of the film sticking apparatus according to claim 1, and gas is introduced from a gas introducing means into a concave portion of the frame sealed by the film. After the film supported by the frame body is convexly bulged by introducing and increasing the internal pressure, the film supported by the frame body is moved closer to the object to be adhered by operating the moving means. A film sticking method from a central portion to a peripheral portion of a sticking surface of an object to be stuck.