JPH11176786A5 - - Google Patents
Info
- Publication number
- JPH11176786A5 JPH11176786A5 JP1997342425A JP34242597A JPH11176786A5 JP H11176786 A5 JPH11176786 A5 JP H11176786A5 JP 1997342425 A JP1997342425 A JP 1997342425A JP 34242597 A JP34242597 A JP 34242597A JP H11176786 A5 JPH11176786 A5 JP H11176786A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- cleaning
- cleaning liquid
- liquid outlet
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34242597A JPH11176786A (ja) | 1997-12-12 | 1997-12-12 | 半導体基板洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34242597A JPH11176786A (ja) | 1997-12-12 | 1997-12-12 | 半導体基板洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11176786A JPH11176786A (ja) | 1999-07-02 |
| JPH11176786A5 true JPH11176786A5 (2) | 2004-12-24 |
Family
ID=18353644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34242597A Pending JPH11176786A (ja) | 1997-12-12 | 1997-12-12 | 半導体基板洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11176786A (2) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007222755A (ja) * | 2006-02-22 | 2007-09-06 | Hoya Corp | スピン洗浄装置及びスピン洗浄方法 |
| JP2008147364A (ja) * | 2006-12-08 | 2008-06-26 | Toyota Motor Corp | 半導体ウエハを洗浄する装置と方法 |
| JP2014067864A (ja) * | 2012-09-26 | 2014-04-17 | Tokyo Electron Ltd | 基板洗浄装置及び基板洗浄方法 |
| KR102616585B1 (ko) * | 2022-04-01 | 2023-12-21 | 세메스 주식회사 | 기판처리장치 및 기판처리방법 |
-
1997
- 1997-12-12 JP JP34242597A patent/JPH11176786A/ja active Pending
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