JPH11197583A5 - - Google Patents

Info

Publication number
JPH11197583A5
JPH11197583A5 JP1998017880A JP1788098A JPH11197583A5 JP H11197583 A5 JPH11197583 A5 JP H11197583A5 JP 1998017880 A JP1998017880 A JP 1998017880A JP 1788098 A JP1788098 A JP 1788098A JP H11197583 A5 JPH11197583 A5 JP H11197583A5
Authority
JP
Japan
Prior art keywords
treatment
treated
tank
container
drive shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998017880A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11197583A (ja
JP4001993B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP01788098A priority Critical patent/JP4001993B2/ja
Priority claimed from JP01788098A external-priority patent/JP4001993B2/ja
Publication of JPH11197583A publication Critical patent/JPH11197583A/ja
Publication of JPH11197583A5 publication Critical patent/JPH11197583A5/ja
Application granted granted Critical
Publication of JP4001993B2 publication Critical patent/JP4001993B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP01788098A 1998-01-14 1998-01-14 溶剤処理密閉装置 Expired - Lifetime JP4001993B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP01788098A JP4001993B2 (ja) 1998-01-14 1998-01-14 溶剤処理密閉装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP01788098A JP4001993B2 (ja) 1998-01-14 1998-01-14 溶剤処理密閉装置

Publications (3)

Publication Number Publication Date
JPH11197583A JPH11197583A (ja) 1999-07-27
JPH11197583A5 true JPH11197583A5 (2) 2005-08-18
JP4001993B2 JP4001993B2 (ja) 2007-10-31

Family

ID=11956020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP01788098A Expired - Lifetime JP4001993B2 (ja) 1998-01-14 1998-01-14 溶剤処理密閉装置

Country Status (1)

Country Link
JP (1) JP4001993B2 (2)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006297199A (ja) * 2005-04-15 2006-11-02 Keiji Nakaya 密閉処理装置
FR2932108B1 (fr) 2008-06-10 2019-07-05 Soitec Polissage de couches de germanium

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