JPH11197583A5 - - Google Patents

Info

Publication number
JPH11197583A5
JPH11197583A5 JP1998017880A JP1788098A JPH11197583A5 JP H11197583 A5 JPH11197583 A5 JP H11197583A5 JP 1998017880 A JP1998017880 A JP 1998017880A JP 1788098 A JP1788098 A JP 1788098A JP H11197583 A5 JPH11197583 A5 JP H11197583A5
Authority
JP
Japan
Prior art keywords
treatment
treated
tank
container
drive shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998017880A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11197583A (ja
JP4001993B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP01788098A priority Critical patent/JP4001993B2/ja
Priority claimed from JP01788098A external-priority patent/JP4001993B2/ja
Publication of JPH11197583A publication Critical patent/JPH11197583A/ja
Publication of JPH11197583A5 publication Critical patent/JPH11197583A5/ja
Application granted granted Critical
Publication of JP4001993B2 publication Critical patent/JP4001993B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP01788098A 1998-01-14 1998-01-14 溶剤処理密閉装置 Expired - Lifetime JP4001993B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP01788098A JP4001993B2 (ja) 1998-01-14 1998-01-14 溶剤処理密閉装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP01788098A JP4001993B2 (ja) 1998-01-14 1998-01-14 溶剤処理密閉装置

Publications (3)

Publication Number Publication Date
JPH11197583A JPH11197583A (ja) 1999-07-27
JPH11197583A5 true JPH11197583A5 (2) 2005-08-18
JP4001993B2 JP4001993B2 (ja) 2007-10-31

Family

ID=11956020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP01788098A Expired - Lifetime JP4001993B2 (ja) 1998-01-14 1998-01-14 溶剤処理密閉装置

Country Status (1)

Country Link
JP (1) JP4001993B2 (2)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006297199A (ja) * 2005-04-15 2006-11-02 Keiji Nakaya 密閉処理装置
FR2932108B1 (fr) 2008-06-10 2019-07-05 Soitec Polissage de couches de germanium

Similar Documents

Publication Publication Date Title
US5738128A (en) Centrifugal wafer carrier cleaning apparatus
US4983223A (en) Apparatus and method for reducing solvent vapor losses
AU673663B2 (en) Vacuum air lock for a closed perimeter solvent conservation system
KR102282674B1 (ko) 자동 샘플링 장치 및 방법
JP5129042B2 (ja) 基板の処理装置
US6432214B2 (en) Cleaning apparatus
HK1002262B (en) Centrifugal wafer carrier cleaning apparatus
JP7027284B2 (ja) 基板処理装置及び基板処理方法
JP3307429B2 (ja) 真空洗浄・乾燥方法および装置
JPH11197583A5 (2)
US3871394A (en) Device for treating articles arranged in containers with organic solvents
JP4001993B2 (ja) 溶剤処理密閉装置
JP2013103186A (ja) Ｐｃｂ汚染電気機器の処理システム及び装置
EP0392758B1 (en) Solvent recovering system for a cleaning machine
KR101350830B1 (ko) Uv도료분진의 집진장치
US5799677A (en) Hermetic enclosure for treating a workpiece with a solvent
CN213067032U (zh) 用于大工件加工的真空干燥机
US6241597B1 (en) Cleaning apparatus for maintaining semiconductor equipment
CN210481516U (zh) 翻转滑动式腔门结构、等离子真空腔体及等离子处理设备
US5311891A (en) Solvent recovering system for a cleaning machine
JP2006297199A (ja) 密閉処理装置
KR100941846B1 (ko) 수직소둔로 밀폐박스의 분위기 가스 이물질 제거장치
KR101723557B1 (ko) 클린룸 콘크리트바닥의 천공장치
JP2024071987A (ja) 被洗浄物の無人洗浄装置
JPH0234704A (ja) 可搬式搬出入装置