JPH11204362A - Manufacture of chip inductor and device for manufacturing the chip inductor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and device in which the time for manufacturing a chip inductor is reduced. SOLUTION: In this method, a chip inductor is formed by carrying out laser trimming for simultaneously radiating a plurality of spot-like or slit-like laser beams which is arrayed along a columnar or prismatic work which has a conductor pattern such as a thin film formed as inductance provided on an insulating board made of ceramics of the like. A device therefor is constituted by a columnar or prismatic work 10 which has a conductor pattern, such as a thin film formed as inductance provided on an insulating board made of ceramics or the like, a rotary moving section 20 for moving the work 10 in the longitudinal direction while rotating the work 10, and a laser trimming section 22 for simultaneously radiating a plurality of spot-like laser beams 21 along the longitudinal direction from a predetermined direction of the work 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a chip inductor and an apparatus for manufacturing a chip inductor, and more particularly to a method for manufacturing a chip inductor by performing laser trimming with a plurality of spot or slit laser beams. The present invention relates to a method for manufacturing a chip inductor and a device for manufacturing a chip inductor in which time is significantly reduced.

[0002]

2. Description of the Related Art As shown in FIGS. 7 and 8, a conventional chip inductor is manufactured in the form of a column or a prism having an insulating substrate 11 made of ceramics and a conductor pattern 12 made of a thin film formed as an inductance. Work 1
0, a single laser beam 1 radiating from a certain direction
It is well known that the coil 3 is formed by rotating the workpiece 3 while moving it in the longitudinal direction of the workpiece 10 and helically laser-trimming the workpiece.

A chip inductor manufactured in this manner can obtain a desired chip inductance by changing the number of rotations (number of turns).

[0004]

However, in the above-described method of producing a chip inductor in the prior art described above, since the inductance is obtained by the number of turns under the same material condition, a work of only the number of turns is required. There is a problem that rotation is required and a processing time for one chip is required.

[0005] Accordingly, there is a problem that the chip inductor has to be solved to shorten the processing time for obtaining a desired inductance.

[0006]

In order to solve the above-mentioned problems, a method of manufacturing a chip inductor according to the present invention is directed to a method of manufacturing a chip inductor having a columnar shape having a conductor pattern such as a thin film formed as an inductance on an insulating substrate such as a ceramic. A prism-shaped work, and a laser trimming means for irradiating a plurality of spot-shaped or slit-shaped laser beams arranged along the length direction of the work, wherein the plurality of spot-shaped or slit-shaped That is, a chip inductor is produced by simultaneously irradiating a laser beam.

The laser trimming means for irradiating the plurality of spot-shaped laser beams simultaneously starts the laser trimming by irradiating the laser beams simultaneously, and simultaneously moves the work in the length direction while rotating the work. The laser trimming means for irradiating the plurality of slit-shaped laser beams with the laser trimming with the adjacent laser beam when the work makes one rotation; A method of manufacturing a chip inductor, comprising: a slit-shaped laser beam in a direction intersecting obliquely with a vertical direction, and simultaneously irradiating the laser beam so that continuous laser trimming is performed at a joint portion with the surface of the work. It is.

[0008] Further, the chip inductor manufacturing apparatus comprises: a columnar or prismatic work in which a conductor pattern such as a thin film formed as an inductance is provided on an insulating substrate such as a ceramic; And a laser trimming means for simultaneously irradiating the work with a plurality of spot-shaped laser beams along a length direction from a predetermined direction of the work.

Further, a chip inductor manufacturing apparatus includes a prismatic work in which a conductor pattern such as a thin film formed as an inductance is provided on an insulating substrate such as a ceramic; Laser trimming means for simultaneously irradiating a plurality of slit-shaped laser beams intersecting with each other.

With the chip inductor manufacturing method and the chip inductor manufacturing apparatus having such a configuration, a columnar or prismatic work can be simultaneously laser-trimmed with a plurality of laser beams, and a desired inductance is created. Laser trimming time can be greatly reduced.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, various embodiments of a chip inductor manufacturing apparatus embodying a method for manufacturing a chip inductor according to the present invention will be described with reference to the drawings.

As shown in FIGS. 1 and 2, a chip inductor manufacturing apparatus includes a columnar work 10 in which a conductor pattern such as a thin film formed as an inductance is provided on an insulating substrate such as a ceramic; A rotary moving section 20 for moving the workpiece 10 in the longitudinal direction while rotating the laser 10; and a laser trimming section 22 as a laser trimming means for simultaneously irradiating a plurality of spot-shaped laser beams 21 from a predetermined direction of the workpiece 10 along the length direction. It is composed of

The laser trimming section 22 has a size in the length direction of the work 10, and has a mask section 23 for receiving a laser beam 25, and the mask section 23 is linearly fixed so as to correspond to the length direction of the work 10. And a laser transmission hole 24 having an interval of.

The distance L between the laser transmission holes 24 is determined by the work 10
This is set in advance so that when the work 10 completes one rotation while moving linearly, the position of the laser 10 is exactly trimmed by the adjacent laser transmission hole 24.

That is, as shown in FIG. 2A, a plurality of spot-shaped laser beams 21 provided linearly are
The workpiece 10 is rotated and linearly moved while simultaneously irradiating the predetermined positions S1, S2, and S3. Then, the irradiation locus of the spot-shaped laser beam 21 is as shown in FIG.
As shown in FIG. 7, a spiral trajectory 25 that has been laser-trimmed at the time of a half rotation is obtained. The length of the trajectory 25 is L / 2, which is a half of the distance L between the laser transmission holes 24 in the positions M1, M2, and M3 that have been rotated half way and in the linear direction.

Further, when the rotation and the linear movement progress while irradiating the work 10 with the laser beam 21, as shown in FIG. 2 (c), the movement distance at the time of further 1/2 rotation becomes L / 2, At the position of the trajectory where laser trimming started (S
1,) S2, S3 and the positions E1, E2 (, E3) of the laser-trimmed trajectory of the adjacent spot-shaped laser beam 21 that has been finally laser-trimmed can be combined to form a spiral-shaped conductor pattern.

As described above, when the work 10 is linearly moved while rotating, the work 10 is rotated once and the work 10 is rotated.
With a plurality of spot-shaped laser beams 21 linearly arranged in the length direction, a chip inductor formed of a desired spiral coil can be formed.

Next, an embodiment of a chip inductor manufacturing apparatus embodying a method of manufacturing a chip inductor according to a second embodiment of the present invention will be described with reference to FIGS.

The chip inductor manufacturing apparatus is a prismatic work 40 in which a conductor pattern such as a thin film formed as an inductance is provided on an insulating substrate such as a ceramic.
And a shot laser trimming unit 27 that is a laser trimming unit that simultaneously irradiates a plurality of slit-shaped laser beams 26 to the opposing surface of the work 40.

A shot laser trimming unit 27 includes a laser light source 30 and a mask unit 28 for irradiating a laser beam from the laser light source 30 with a slit-shaped laser beam 26 formed through a slit 31 at a predetermined interval to the surface of the work 40. It is composed of The slit 31 of the mask section 28
It is inclined by a predetermined angle with respect to the surface of the work 40, and the irradiation trajectory of the slit-like laser beam 26 to the top, side, bottom, and back of the work 40 is made continuous at the corners where the surfaces are joined. And it is formed so that it may become spiral.

That is, the shot laser trimming section 27
As shown in FIG. 4, the top irradiation trajectory 32 and the bottom irradiation trajectory 34 of the slit-shaped laser beam 26 formed by irradiating the surface of the work 40 are different from each other even in the side irradiation trajectory 33 and the back irradiation trajectory 35. Joined corners (points A, B,
The positions of the slits 31 facing each other are arranged so as to be inclined at the surface of the work 40 so as to be continuous at the points C and D).

The laser trimming of the workpiece 40 in the shot laser trimming section 27 having such a configuration is performed by the laser shot trimming section 27 which is disposed opposite to the workpiece.
The work 40 is mounted so that the surface of the work 40 is vertical.

Then, the relationship between the upper surface and the lower surface of the work 40 and the slit 31 of the mask part 28
The locus is continuous on the side surface and the back surface of the zero.

In this state, the shot laser trimming unit 2
By irradiating the work 40 with a slit-like laser beam 26 from 7, inclined linear laser trimming can be performed.

After the laser trimming on the top and bottom surfaces of the work 40 is completed, when the work 40 is rotated 90 degrees and placed between the shot laser trimming units 27, the upper part is the side and the lower part is the back. At this time, the slit 31 of the mask section 28 is set in a positional relationship that is continuous with the irradiation trajectory of the upper surface and the bottom surface of the work 40.

By irradiating the slit-shaped laser beam 26 on the side and back surfaces of the work in this way and performing laser trimming, as shown in FIG.
A continuous track is formed at the corners of the respective surfaces, and a chip inductor formed of a spiral coil is completed.

In the embodiment described above, the shot laser trimming unit 2 is located at a position facing the work 40.
7, but without being limited to this, for example,
A single operation is possible if a configuration is adopted in which all surfaces of the prismatic workpiece 40 are irradiated with a laser beam, for example, a configuration in which a shot laser trimming unit 27 is disposed on each of the top, side, side, and back surfaces. This completes the chip inductor.

Next, an embodiment of a chip inductor manufacturing apparatus embodying a method of manufacturing a chip inductor according to a third embodiment of the present invention will be described with reference to FIG.

The chip inductor manufacturing apparatus includes a prismatic work 40 in which a conductor pattern such as a thin film formed as an inductance is provided on an insulating substrate such as a ceramic.
, A laser light source 30, and a laser beam 4 from the laser light source
Prism 4 for refracting 1a, 41b, 41c, 41d
2a, 42b, 42c, 42d and prisms 42a, 4
Laser beams 41a refracted by 2b, 42c, 42d,
41b, 41c, a mask portion 43a that passes through 41d,
43b, 43c and 43d. The mask portions 43a, 43b, 43c, and 43d have a structure provided with slits 44a, 44b, 44c, and 44d inclined with respect to the work 40 in the same manner as described in the second embodiment. . In these configurations, the laser trimming means includes the laser light source 30 and the prism 42a,
42b, 42c, 42d and mask portions 43a, 43b, 4
3c and 43d.

The prisms 42a, 42b, 42c, 42d
The number of mask portions 43a, 43b, 43c, and 43d is equal to the number of surfaces of the prismatic work 40 (in the case of the embodiment, four surfaces), and they are arranged as a set and arranged at a position orthogonal to each surface. It has a structure. Also, as described above, each slit 44
Similarly to the second embodiment, a, 44b, 44c, and 44d have a structure that is inclined so that a continuous irradiation locus is formed at the corner of the joint of each surface (see FIG. 4).

In the chip inductor manufacturing apparatus having such a configuration, the work 4 is controlled by one laser light source 30.
0 on each surface at the same time.
Laser trimming can be performed by irradiating b, 41c, and 41d, and a desired chip inductor can be created by one operation.

[0032]

As described above, the method and the apparatus for manufacturing the chip inductor according to the present invention perform the laser trimming by using a plurality of spot-shaped or slit-shaped laser beams which are simultaneously irradiated, thereby obtaining a circular shape. There is an effect that the process time for forming a chip inductor by processing a columnar or prismatic workpiece can be greatly reduced.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view of a chip inductor manufacturing apparatus according to a first embodiment of the present invention.

FIG. 2 is an explanatory diagram showing a principle of performing laser trimming using the plurality of spot-shaped laser beams.

FIG. 3 is a schematic perspective view of a chip inductor manufacturing apparatus according to a second embodiment of the present invention.

FIG. 4 is an explanatory diagram showing a state of laser trimming performed on each surface by the plurality of slit-shaped laser beams.

FIG. 5 is a schematic perspective view showing a state where laser trimming has been performed on each surface of the work having the same prismatic shape.

FIG. 6 is a schematic perspective view of a chip inductor manufacturing apparatus according to a third embodiment of the present invention.

FIG. 7 is a schematic perspective view showing a technique for forming a chip inductance by performing trimming with a single laser beam in the related art.

FIG. 8 is a schematic plan view showing the structure of the same prismatic work.

[Explanation of symbols]

Reference Signs List 10: work, 20: rotation drive unit, 21: spot laser beam, 22: laser trimming unit (laser trimming means), 23: mask unit, 24: laser transmission hole, 2
5; laser beam; 25; spiral trajectory; 26; slit laser beam; 27; shot laser trimming section (laser trimming means); 28; mask section; 30; laser light source; 31; slit; Locus, 3
3; side irradiation trajectory, 34; bottom irradiation trajectory, 35; back irradiation trajectory, 40; work, 41a to 41d; laser beam,
42a to 42d; prism, 43a to 43d; mask portion, 44a to 44d; slit

Claims (5)

[Claims] 1. A cylindrical or prismatic work having a conductor pattern such as a thin film formed as an inductance on an insulating substrate such as ceramics, and a plurality of spots or a plurality of spots arranged along the length direction of the work. A chip trimming means for irradiating a slit-shaped laser beam, and simultaneously irradiating the work with the plurality of spot-shaped or slit-shaped laser beams to form a chip inductor. Manufacturing method. 2. The laser trimming means for irradiating the plurality of spot-shaped laser beams simultaneously starts the laser trimming by irradiating the laser beams simultaneously, and simultaneously moves the work in the length direction while rotating the work. 2. The method for manufacturing a chip inductor according to claim 1, wherein laser trimming with an adjacent laser beam is continued when the work makes one rotation. 3. The laser trimming means for irradiating the plurality of slit-shaped laser beams includes a slit-shaped laser beam in a direction obliquely intersecting with a length direction of one surface of the prismatic work. 2. The method of manufacturing a chip inductor according to claim 1, wherein said laser beam is simultaneously irradiated so that continuous laser trimming is performed at a junction with said surface. 4. A cylindrical or prismatic work in which a conductor pattern such as a thin film formed as an inductance is provided on an insulating substrate such as ceramics, and a rotation moving means for moving the work in the longitudinal direction while rotating the work. And a laser trimming means for simultaneously irradiating the work with a plurality of spot-shaped laser beams along a length direction from a predetermined direction of the work. 5. A prismatic work in which a conductor pattern such as a thin film formed as an inductance is provided on an insulating substrate made of ceramics or the like, and a plurality of slits which intersect obliquely with the length direction of one surface of the work. And a laser trimming means for simultaneously irradiating a laser beam in a shape.