JPH11207773A - Resin sealing device and resin sealing method for sealed object - Google Patents

Abstract

(57) [Problem] To provide a multi-plunger type resin sealing device and a resin sealing method for an object to be sealed, which can realize constant pressure and constant speed operation between a plurality of plungers. SOLUTION: An auxiliary drive device 18 having a plunger drive unit 16a, 16b coupled to each of plungers 11a, 11b and a housing 17 on which the plunger drive units 16a, 16b are mounted, and an auxiliary drive device coupled to the housing 17 are provided. Apparatus 1
When controlling the main driving device 23 that drives the plungers 11a and 11b collectively via the main unit 8 so that the sealing resin injection pressure by the plungers 11a and 11b becomes substantially equal based on the injection pressure measurement value of each plunger, Drive 23
With this, the injection pressure in the plunger having the lowest sealing resin injection pressure is corrected, and as a result, the injection pressure in the plunger that has become over-output is corrected by the auxiliary driving device 18.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resin sealing device for resin-sealing an object to be sealed such as a semiconductor chip and a resin sealing method using the resin sealing device.

[0002]

2. Description of the Related Art FIG. 3 is a sectional view showing a main part of a multi-plunger injection device as a conventional resin sealing device. In the figure, reference numeral 1 denotes a semiconductor chip as an object to be sealed, 2 denotes a sealing mold in which a cavity 2a and a pot 2b are formed, 3
Is a tablet-shaped sealing resin made of a thermosetting resin for transfer molding such as an epoxy resin.
The semiconductor chip 1 is set in the cavity 2a, the sealing resin 3 is inserted into the pot 2b, and the sealing resin 3 is heated by heating the sealing mold 2 by a heater (not shown). Is melted in the pot 2b to be in a fluid state.

Reference numeral 4 denotes a plunger for injecting the molten sealing resin 3 in the pot 2b into the cavity 2a, 5 a compression coil spring for correcting an injection imbalance between the plurality of plungers 4, 6 a plunger 4 and a compression coil spring. A housing housing a plurality of plunger units, such as 5, is a drive shaft for driving the housing 6 in the vertical direction, and a drive source of the drive shaft 7 is not shown.

Next, the operation will be described. The semiconductor chip 1 is set in a plurality of cavities 2 a in the sealing mold 2, while the sealing resin 3 is inserted into the pot 2 b in the sealing mold 2 and melted, and injected into the cavity 2 a by the plunger 4. Then, the semiconductor chip 1 is sealed with a resin. The driving force of the plunger 4 is determined by a driving source (not shown).
From the drive shaft 7.

At this time, even if the amount of resin in each sealing resin 3 varies, the plurality of plungers 4
Retreat against the spring pressure of the corresponding spring (in the figure,
(Moving downward), the injection pressure is equalized. However, with the compression coil spring 5, high-precision equalization is difficult, and satisfactory equal-pressure injection cannot be realized.

[0006] For this reason, a type using a hydraulic mechanism (not shown) instead of the compression coil spring 5 has also been put into practical use. That is, a plurality of hydraulic pistons corresponding to each of the plurality of plungers are provided, and by supplying hydraulic pressure to the plurality of pistons in parallel with a single hydraulic pump, equal pressure injection between the plurality of plungers is realized. is there. By using this hydraulic mechanism, equal pressure injection between a plurality of plungers could be realized, but as a problem peculiar to the hydraulic mechanism, compared with the pot life of the sealing resin, the sealing of a plurality of plungers into a plurality of cavities was compared. The time required for the resin injection pressure to reach an equal pressure was relatively long, and satisfactory resin sealing quality could not be obtained.

[0007]

Since the conventional multi-plunger injection device as a resin sealing device is configured as described above, a plurality of compression coil springs 5 are caused by variations in the amount of the sealing resin 3. However, there is a problem that the difference in the injection pressure between the plungers 4 cannot be absorbed, and the equal pressure injection cannot be realized. In the case of using a hydraulic mechanism (not shown) in place of the compression coil spring 5, since the time until the injection pressure by a plurality of plungers reaches an equal pressure is relatively long, stable quality for a molded product can be obtained. There were problems such as not being able to do.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and there is little variation in injection pressure between a plurality of plungers due to variation in the amount of sealing resin. It is an object of the present invention to provide a resin sealing device and a method for sealing a resin to be sealed with a resin that is relatively short until the injection pressure becomes substantially uniform.

[0009]

According to a first aspect of the present invention, there is provided a resin sealing device comprising: a plurality of plungers for injecting a sealing resin into a plurality of cavities in which a body to be sealed is arranged; A plurality of auxiliary driving means coupled to each other and driving the corresponding plunger independently of the other plungers;
A housing on which the plurality of auxiliary driving units are mounted, a main driving unit coupled to the housing, and collectively driving the plurality of plungers via the housing and the plurality of auxiliary driving units; A plurality of sensors corresponding to each of the plungers, measuring the injection pressure of the corresponding plunger, and outputting the measured values, and the auxiliary so that the injection pressures of the plurality of plungers are substantially equal based on the measured values. And a control means for controlling the driving means and the main driving means.

The resin sealing device according to a second aspect of the present invention is the resin sealing device according to the first aspect of the present invention, wherein the control means sets a predetermined one of a plurality of plungers based on measurement values output by a plurality of sensors. The main driving means is controlled so as to correct the negative deviation in the plunger having the largest negative deviation from the reference value of the injected injection pressure, and the positive driving in the remaining plungers caused by the driving by the main driving means. A plurality of auxiliary driving means corresponding to each of the plungers are controlled in a direction in which the deviation in the direction is reduced.

A resin sealing device according to a third aspect of the present invention is the resin sealing device according to the first or second aspect, further comprising an electric motor in which a main drive unit and a plurality of auxiliary drive units are respectively controlled by a control unit. A plurality of plungers are reciprocally driven collectively by the electric motor of the main driving means via the housing and the plurality of auxiliary driving means, and the plurality of plungers are driven by the electric motor of the plurality of auxiliary driving means. It reciprocates the corresponding plunger.

According to a fourth aspect of the present invention, there is provided a resin sealing method for an object to be sealed, wherein the resin sealing apparatus according to any one of the first to third aspects is used, and the object is sealed into a plurality of cavities. And place
A plurality of plungers are collectively driven by the main drive unit via the housing and the plurality of auxiliary drive units based on a command from the control unit, and the injection pressure of the corresponding plunger is measured by the plurality of sensors to measure the injection pressure. The main drive unit is configured to correct the negative-direction deviation in the plunger having the maximum negative-direction deviation from a preset injection pressure reference value of the plurality of plungers by the control unit based on the value. Controlling and controlling the plurality of auxiliary driving means in a direction to reduce the positive deviation in the remaining plunger due to the driving of the main driving means, and controlling the plurality of auxiliary driving means corresponding to each of the plurality of auxiliary driving means. This is a method of injecting a molten resin into the plurality of cavities with a substantially equal injection pressure by using a plunger, and sealing the object to be sealed with the resin.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 First Embodiment A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a block diagram showing a multi-plunger injection device as a resin sealing device, and FIG. 2 is an explanatory diagram of an operation state of each plunger in the multi-plunger injection device shown in FIG. In the figure, those denoted by the same reference numerals as those of the conventional example indicate the same or equivalent parts as those of the conventional example.

In FIG. 1, reference numerals 11a and 11b denote plungers for applying a fluid force to the sealing resin 3, that is, plungers for injecting the sealing resin 3 melted in the pot 2b into the cavity 2a. 12a and 12b are servo motors, 1
Reference numerals 3a and 13b denote rotary reciprocating motion converters which are directly connected to the output shafts of the servo motors 12a and 12b, reduce the forward and reverse rotation speeds, convert the reciprocating motion into reciprocating motions according to the forward and reverse rotations, and output the reciprocating motion. Is converted to a reciprocating motion.

14a and 14b are plungers 11a and 11
The plunger drive shafts 15a and 15b which are inserted between b and the rotary reciprocating motion converters 13a and 13b and connect them are encoders directly connected to the rotary shafts of the servo motors 12a and 12b. Reference numerals 16a and 16b denote auxiliary driving devices as auxiliary driving means for reciprocatingly driving the corresponding plungers 11a and 11b, respectively, and servo motors 12a, 12b,
Rotary reciprocating motion converters 13a, 13b, plunger drive shaft 1
4a, 14b and encoders 15a, 15b. Reference numeral 17 denotes a housing for mounting and storing the auxiliary driving devices 16a and 16b.

Reference numerals 18a and 18b denote rotary reciprocating converters 13.
a and 13b respectively attached to the plungers 11
These are load cells as sensors for measuring the injection pressures a and 11b, and the measured values are output to a control device 25 described later.

Reference numeral 19 denotes a servo motor. Reference numeral 20 denotes a rotary reciprocating motion converter which is directly connected to the output shaft of the servo motor 19, reduces the forward / reverse rotation speed, converts it into reciprocating motion corresponding to the forward / reverse rotation, and outputs the reciprocating motion. And is constituted by a reduction gear for reducing the rotation speed, a ball screw for converting the rotation into reciprocating motion, and the like. Reference numeral 21 denotes a drive shaft which is inserted between the housing 17 and the rotary reciprocating converter 20 and connects these components.
Is an encoder directly connected to the rotary shaft of the. 23 is the housing 1
7 and a main drive unit as a main drive unit that reciprocally drives the plungers 11a and 11b via the auxiliary drive devices 16a and 16b, and includes a servo motor 19, a rotary reciprocating converter 20, a drive shaft 21, and an encoder 22. It consists of.

Reference numeral 24 denotes a load cell mounted on the rotary reciprocating converter 20. The output of the load cell 24 measures the axial pressure during the forward and backward movements of the drive shaft 21, and outputs the measured value to a control unit 25 described later. Output to Reference numeral 25 denotes a control device as control means, which includes encoders 15a, 15b and load cells 18a, 18 constituting auxiliary driving devices 16a, 16b.
b and the output signals of the encoder 22 and the load cell 24 constituting the main driving device 23 are input to control the main driving device 23 and the auxiliary driving devices 16a and 16b.

Next, the operation will be described. Sealing mold 2
The semiconductor chip 1 as an object to be sealed is arranged in the plurality of cavities 2a in the above, while the tablet-like sealing resin 3 is inserted into the pot 2b of the sealing mold 2 and melted. Next, based on a command from the control device 25, the main drive device 23 causes the housing 17 and the auxiliary drive devices 16a,
The plungers 11a and 11b are collectively driven via 6b.

That is, the control device 25 includes the plunger 11a,
The servomotor 19 constituting the main driving device 23 is driven so that the injection pressure of 11b becomes the preset reference value Ps, and the output thereof is reciprocated by the rotary reciprocating converter 20, that is, the up-down motion in FIG. And transmitted to the plungers 11a and 11b via the drive shaft 21, the housing 17, and the auxiliary drive devices 16a and 16b. In this case, the moving distance of the vertical movement of the plungers 11a and 11b is proportional to the rotation angle of the servomotor 19, and the direction is determined by the rotation direction. The driving force for moving the housing 17 up and down is measured by the load cell 24, and the measured value is returned to the control device 25.

Then, the injection pressure of the corresponding plungers 11a, 11b is measured by the load cells 18a, 18b, and the measured value is returned to the control device 25. In the control device 25, the plungers 11a, 1
The main driving device 23 is controlled so as to correct the negative deviation in the plunger 11b having a large negative deviation from the preset reference value of 1b. Then, a positive deviation occurs in the remaining plungers 11a due to the driving of the main driving device 23, so that the auxiliary driving devices 16a, 16a, 1
6b.

That is, the control device 25 is connected to the auxiliary drive device 16
The servomotors 12a and 12b constituting the motors a and 16b are driven, and the output thereof is converted into reciprocating motions by the rotary reciprocating motion converters 13a and 13b, that is, up and down motion in FIG. 1, and is transmitted via plunger driving shafts 14a and 14b. Plunger 11
a and 11b. In this case, the moving distance of the vertical movement of the plungers 11a and 11b is
9 is proportional to the rotation angle, and the direction is determined by the rotation direction.

As a result, the auxiliary driving devices 16a, 1
The molten sealing resin 3 is injected into the plurality of cavities 2a with substantially equal injection pressure by the plungers 11a and 11b corresponding to the respective ones of the semiconductor chips 6b.

As described above, the first embodiment shown in FIG.
Multi-plunger injection device as the main driving device 23
, The plungers 11a and 11b are reciprocally driven collectively, and the corresponding plungers are individually reciprocated by the auxiliary driving devices 16a and 16b.
The details of this operation will be described with reference to FIG.

FIG. 2A is a graph showing the change of the injection pressure P of the plungers 11a and 11b with respect to the elapsed time t. The horizontal axis represents time t, and the vertical axis represents the injection pressure P. FIG.
In (A), Ps is a preset reference value, P1, P2
2 indicates the injection pressure of the plungers 11a and 11b, respectively.

FIG. 2B is a graph showing the change of the input current I of the servomotors 12a and 12b with respect to the elapsed time t. The horizontal axis represents time t, and the vertical axis represents the input current I. FIG.
In (B), Is is a preset reference value of a current command, I0 is an input current of the servomotor 19, and I1 and I2 are input currents of the servomotors 12a and 12b, respectively. The servo motor 19 and the servo motors 12a and 12a
The absolute value of the reference value differs from b.

FIG. 2C shows a reference value P of the injection pressures P1, P2 in the plungers 11a, 11b with respect to the elapsed time t.
The magnitude of the input current I0 of the servo motor 19 with respect to the reference value Is is indicated by (+) and (-), and the input currents I1 and I2 of the servomotors 12a and 12b are reduced in the injection pressure direction. The current input, that is, the reverse input is indicated by (-), and the absence of input is indicated by (0), and is shown in a table format corresponding to FIGS. 2 (A) and 2 (B). As described above, the meanings of (+), (0), and (-) are different between I0 and I1, I2. This is because the input current I0 of the servomotor 19 is always the injection pressure increasing current, that is, the positive current. Direction rotation state, and its reference value Is
The size comparison with
The input currents I1 and I2 of 2a and 12b have no input (0),
This is because whether the injection pressure decreasing current is input (-) is noticed.

2 (A) to 2 (C), first, only the servo motor 19 in the main drive unit 23 is
The injection pressure increasing current I0 having a magnitude exceeding the preset reference value Is is input, and the plungers 11a and 11b are driven collectively only the main drive unit 23. Since the injection pressures P1 and P2 of the plungers 11a and 11b are lower than the reference value Ps between the times t0 and t1 at the start of the driving, that is, the injection pressures P1 and P2 are (-) with respect to the reference value Ps.
a and 12b continue the stopped state. That is, I0 is in the (+) state larger than the reference value Is in the injection pressure increasing direction input, and I1 and I2 are in the state of no input (0).

Next, during the period from time t1 to time t2, the injection pressure P1 of the plungers 11a and 11b exceeds the reference value Ps, and P2 remains lower than the reference value Ps. Is (+) and P2 is (-), the servo motor 12a rotates in the reverse direction and the servo motor 12b stops in a state where the servo motor 19 continues to input the injection pressure increasing direction. That is, I0 is an injection pressure increasing direction input (+) state larger than the reference value Is, I1 is an injection pressure decreasing direction input (-), and I2 is a state of no input (0).

Next, from time t2 to time t3, the injection pressures P1 and P2 of the plungers 11a and 11b are both set to the reference value P.
s, that is, both P1 and P2 are (+) with respect to the reference value Ps. The injection pressure decreasing current is input to 12a and 12b. That is, although I0 is an injection pressure increasing direction input, it is a (-) state smaller than the reference value Is, and both I1 and I2 are injection pressure decreasing direction inputs (-).

Next, during the period from time t3 to time t4, the injection pressure P1 of the plungers 11a and 11b remains above the reference value Ps, but P2 has converged to the reference value Ps, that is, the injection pressure P1 has reached the reference value Ps. On the other hand, since P1 is (+) and P2 is (0), the servomotor 19 is continuously operated so as to maintain the deviation between P2 and Ps at zero, and the servomotor 12b
Is stopped, and only the servo motor 12a is rotated in the reverse direction. That is, although I0 is the injection pressure increasing direction input, the reference value Is
(0), I2 is no input (0), and I1 is the injection pressure decreasing direction input (-).

Next, after the time t4, the injection pressure P1 of the plungers 11a and 11b also converges to the reference value Ps, that is, both P1 and P2 are (0) with respect to the reference value Ps. Is continuously operated so as to continuously output a force for reducing the difference between P1 and P2 from the reference value Ps to zero, and the servomotors 12a and 12b are stopped. That is, I
0 is an injection pressure increasing direction input but is equal to the reference value Is (0), and neither I1 nor I2 is input (0).

As described above, when the control device 25 controls the plungers 11a and 11b to drive the plungers 11a and 11b so that the injection pressures thereof become substantially uniform, the load cells 18a and 18b are controlled.
b, the plungers 11a, 11b
Plunger with the smallest injection pressure at the injection pressure of
That is, the main driving device 23 is controlled so that the injection pressure P2 of the plunger 11b approaches the reference value Ps, and each of the plungers 11a, 11 generated by the main driving device 23 is controlled.
The auxiliary driving devices 16 corresponding to the injection pressures P1 and P2 that have exceeded the reference value Ps in b are only reduced.
a and 16b are controlled.

In the first embodiment, only the control based on the detection of the injection pressure has been described. However, in practice, the encoder 15 directly connected to the servomotors 12a and 12b is used.
a, 15b and the output Y0 of the encoder 22 directly connected to the servomotor 19,
By detecting the position and velocity of the plungers 11a and 11b, not only the injection pressure of the plungers 11a and 11b,
The flow rate of the molten resin 3a is also included in the control items to perform more advanced control.

As described above, the multi-plunger injection device according to the first embodiment includes all plungers 11a, 1
1b is driven collectively by the main driving device 23, and the control is shared so that the variation of the injection pressure between the plurality of plungers 11a and 11b is corrected by the auxiliary driving devices 16a and 16b. 16b and the main drive unit 23, without using the hydraulic system,
2a, 12b, 19 and rotary reciprocating motion converters 13a, 13
b, 20 and the negative pressure control of the injection pressure of the plungers 11a, 11b measured by the load cells 18a, 18b is performed. Therefore, the responsiveness is extremely good and is shorter than the pot life of the sealing resin 3. It is possible to converge to a predetermined injection pressure at a time, and it is possible to realize high-precision equal-pressure and constant-speed control between the plurality of plungers 11a and 11b.

As described above, all the plungers 11
When the a and 11b are collectively driven by the main driving device 23,
The main driving device 23 is controlled so that the injection pressure of the plunger 11b having the smallest injection pressure approaches the reference value Ps, and the control is performed so that the excessive injection pressure in the individual plungers 11a and 11b is corrected by the auxiliary driving devices 16a and 16b. Since the auxiliary driving devices 16a and 16b are configured to generate only the output in the negative direction, the auxiliary driving devices 16a and 16b can be reduced in size and weight.
The servomotors 12a and 12b may have relatively small capacities, and the rotary reciprocating motion converters 13a and 13b may also be small and light, and can achieve high-precision equal pressure and constant speed control between a plurality of plungers 11a and 11b. Can be obtained at low cost.

In the first embodiment, the main drive unit 23 is constituted by the servomotor 19, the rotary reciprocating converter 20, and the like, and the auxiliary drive units 16a and 16b are formed by the servomotors 12a and 12b and the rotary reciprocating converter. 13a, 13b, etc., the servo motors 12a,
The motor need not be limited to 12b and 19, but may be any motor having a relatively large starting torque. In particular, the auxiliary drive device 16
Since a and 16b are only loads in the negative direction, the output may be relatively small. For example, a linear motor or the like may be used instead of the servo motors 12a and 12b. In this case, the plunger drive shafts 14a and 14b Can be directly driven, and the rotary reciprocating motion converters 13a and 13b become unnecessary.

In the first embodiment, an example in which the number of the plungers 11a and 11b is two has been described. However, the present invention is not limited to the number of the plungers and can be applied to a case where the number of the plungers is three or more.

[0039]

According to the first invention, a plurality of auxiliary driving means for driving a plurality of plungers and a main driving means for collectively driving the plurality of plungers via the plurality of auxiliary driving means are connected in series. The main drive unit and the plurality of auxiliary drive units are controlled based on the measurement values of a plurality of sensors that measure the injection pressure of each plunger. Due to the effect, the injection pressure between the plurality of plungers becomes substantially uniform in a relatively short time, and there is an effect that a resin sealing device capable of manufacturing a sealed object with high quality can be obtained.

According to the second aspect of the invention, the deviation in the negative direction of the plunger having the largest deviation in the negative direction with respect to the preset reference value of the injection pressure among the plurality of plungers is corrected. The driving means is controlled, and as a result, the plurality of auxiliary driving means are controlled in a direction to reduce the positive deviation generated in the other plungers, so that the injection pressure between the plurality of plungers is relatively short. The drive system of the plurality of auxiliary driving means may be relatively small and light, and a relatively small and inexpensive resin sealing device capable of manufacturing a sealed object with high quality may be obtained. is there.

According to the third aspect of the present invention, a motor is provided in each of the plurality of auxiliary drive means and the main drive means, and the plurality of plungers are driven by the motors. The injection pressure between the plungers becomes substantially uniform in a very short time, and there is an effect that a resin sealing device capable of manufacturing a sealed object with high quality and high efficiency can be obtained.

Further, according to the fourth invention, based on the measured values of the injection pressure of the corresponding plunger by the plurality of sensors,
The main drive means is drive-controlled so as to correct the negative-direction deviation in the plunger in which the deviation in the negative direction with respect to the reference value is the largest, and the deviation in the positive direction in the remaining plungers due to the driving of the main drive means is corrected. The plurality of auxiliary driving units are drive-controlled so as to correct in the decreasing direction, and the plurality of plungers corresponding to each of the plurality of auxiliary driving units substantially control each of the plurality of cavities in which the object to be sealed is arranged. Since the molten resin is injected at a uniform injection pressure and the object to be sealed is resin-sealed, it is possible to absorb a disturbance caused by a variation in the amount of the sealing resin, and the injection pressure between the plurality of plungers is relatively low. There is an effect that a resin sealing method of the object to be sealed can be obtained in which the object to be sealed can be manufactured with high quality and high efficiency in a substantially uniform manner in a short time.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a multi-plunger injection device as Embodiment 1 of the present invention.

FIG. 2 is an explanatory diagram of an operation state of each plunger in the multi-plunger injection device shown in FIG.

FIG. 3 is a block diagram showing a conventional multi-plunger injection device.

[Explanation of symbols]

1 semiconductor chip, 2 sealing mold, 2a cavity,
2b pot, 3 sealing resin, 11a, 11b plunger, 12a, 12b servo motor, 13a, 13b
Rotary reciprocating motion converter, 14a, 14b plunger drive shaft, 15a, 15b encoder, 16a, 16b auxiliary drive device, 17 housing, 18a, 18b load cell,
19 servo motor, 20 rotation reciprocating converter, 21
Drive shaft, 22 Encoder, 23 Main drive, 24
Load cell, 25 controller

Claims (4)

[Claims] 1. A plurality of plungers for injecting a sealing resin into a plurality of cavities in which an object to be sealed is arranged, and coupled to each of the plurality of plungers, a corresponding plunger is independent of another plunger. A plurality of auxiliary driving means for driving, a housing on which the plurality of auxiliary driving means are mounted, and a plurality of plungers which are coupled to the housing and collectively drive the plurality of plungers via the housing and the plurality of auxiliary driving means A plurality of sensors that correspond to each of the plurality of plungers, measure the injection pressure of the corresponding plungers, and output the measured values, and the injection pressures of the plurality of plungers based on the measured values. And a control means for controlling the auxiliary driving means and the main driving means so that the values are substantially equal. 2. The resin sealing device according to claim 1, wherein
The control means, based on the measurement values output by the plurality of sensors,
Among the plurality of plungers, the main driving unit is controlled so as to correct the negative deviation in the plunger in which the negative deviation with respect to the preset injection pressure reference value is the largest, and the driving by the main driving unit is performed. A resin sealing device characterized by controlling a plurality of auxiliary driving means corresponding to each of the plungers in a direction to reduce a positive deviation in the remaining plungers caused by the plungers. 3. The resin sealing device according to claim 1, wherein the main drive unit and the plurality of auxiliary drive units each include a motor controlled by a control unit, and the main drive unit includes a motor. A plurality of plungers are reciprocally driven collectively via the body and the plurality of auxiliary driving means, and a corresponding one of the plurality of plungers is reciprocated by the electric motor of the plurality of auxiliary driving means. Resin sealing device. 4. A resin sealing device according to claim 1, wherein an object to be sealed is arranged in a plurality of cavities, and a housing is driven by a main drive unit based on a command from a control unit. Collectively driving a plurality of plungers through the body and the plurality of auxiliary driving means, measuring the injection pressure of the corresponding plunger by a plurality of sensors, based on the measured value of the injection pressure,
Controlling the main drive means to correct the negative-direction deviation in the plunger having a maximum negative-direction deviation from a preset injection pressure reference value of the plurality of plungers by the control means; The plurality of auxiliary driving units are controlled in a direction to reduce a positive deviation in the remaining plungers due to the driving of the main driving unit, and the plurality of plungers corresponding to each of the plurality of auxiliary driving units are controlled by the plurality of plungers. Wherein the molten resin is injected into the cavity at a substantially uniform injection pressure, and the object is sealed with the resin.