JPH11218182A - Vibration isolating table - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration isolating table made a part of a floor of a building and usable for the installation of vibration affected equipment such as precision mechanical equipment. SOLUTION: This vibration isolating table is installed in an opening 14 of a floor 12 having the opening 14 at least at a part and having space 16 below. This vibration isolating table is provided with a frame 30 arranged in the space being hung from the floor part of the opening peripheral edge by a plurality of hanging members 22 movable like a pendulum, a surface table 32 positioned in the opening 14 being fitted to the frame 30 through support means 34 for damping vertical vibration, and a damper 38 provided independently of the support means 34 so as to damp horizontal vibration applied to the surface table 32.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an anti-vibration table for forming a part of a floor of a building, and more particularly, to installing a precision device which dislikes vibration, such as a manufacturing facility or an inspection device of a semiconductor manufacturing plant, so-called anti-vibration device. The present invention relates to a vibration isolation table suitable for performing.

[0002]

2. Description of the Related Art A base frame, a suspension plate on which equipment to be subjected to vibration isolation is mounted, a rod for suspending the suspension plate in the base frame, and upper and lower parts of the rod, the base frame and the suspension plate. There has been proposed an anti-vibration table including a magnet arranged to repel each other in at least one of the connecting portions (JP-A-63-135629).

[0003]

It is necessary for the anti-vibration device to block external vibration as sufficiently as possible. For this purpose, the anti-vibration device is installed on a vibration isolation table to reduce the external vertical load. Horizontal loads must be damped separately. However, in the vibration isolating table according to the above proposal, these loads are received by the common magnet, and the vibration isolation is insufficient, so that it is possible to win.

Next, since the anti-vibration table on which the anti-vibration device is installed forms a part of the floor of the building, at least the portion of the anti-vibration table on which the anti-vibration device is installed is substantially the same as the floor of the building. In the anti-vibration table according to the proposal, the upper plate or the lower plate of the suspension plate and the base frame are at different levels, and cannot be applied to the floor of a building as it is. .

[0005] The present invention provides an anti-vibration table that can be a part of the floor of a building and on which anti-vibration equipment can be installed.

[0006]

SUMMARY OF THE INVENTION The present invention is a vibration isolation table which is installed in a floor having a space below and at least a part of which has an opening. The anti-vibration table is suspended by a plurality of hanging members capable of pendulum movement from a floor portion of the opening periphery, and is mounted on the pedestal via the pedestal disposed in the space and the support means for attenuating vertical vibration. A surface plate attached to the opening, and a damper provided independently of the support means for attenuating horizontal vibration applied to the surface plate;

[0007] It is preferable that the damper is of an active type and is composed of a linear motor.

[0008]

[Operation and effect] The vibration applied to the building is transmitted to the base through the gantry. However, since the base is attached to the gantry through the support means for damping the vertical vibration,
Vertical vibrations are damped by the support means. further,
Horizontal vibrations that are transmitted to the surface plate are damped by the dampers.

Since the support means and the damper are provided separately and independently from each other, it is possible to determine a capacity and a spring constant so that damping suitable for vertical vibration and horizontal vibration can be obtained. Therefore, the vertical vibration and the horizontal vibration can be sufficiently attenuated, and the vibration transmitted to the anti-vibration device can be removed.

[0010] Since the surface plate is located at the opening of the floor, the surface plate and the floor of the building can be set at substantially the same level.

Since the gantry is connected to and suspended from the suspending member capable of pendulum movement, the natural period of the vibration isolator can be easily changed by changing the length of the suspending member. The most reliable way to increase the vibration isolation capacity of the vibration isolation table is to extend the natural period, which is achieved by increasing the length of the suspension member, by increasing the length of the suspension member. According to the present invention, the natural period can be extended in a stable state, and the anti-vibration ability can be enhanced, since there is no possibility that an unstable phenomenon such as buckling occurs.

According to a preferred embodiment, the damper for attenuating horizontal vibration is an active type, that is, a type for actively controlling vibration, and is made of a linear motor, so that even a minute vibration can be effectively attenuated. .

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIG. 1 showing a front view of a vibration isolation table 10, an opening 14 and a space 1 below the opening 14 are shown.
6 is installed at the opening 14 in a building 18 having a floor 12 having a vibration damper 6 for vibration isolation of an anti-vibration device 20. When the anti-vibration device 20 is, for example, a semiconductor manufacturing facility, a space for returning equipment-related equipment and circulating air is provided below the manufacturing facility. The present invention utilizes such a space 16. Install a vibration isolation table. For this purpose, first, an opening 14 is provided in the floor 12. The size of the opening 14 can be determined according to the anti-vibration device 20.

A suspension member 22 capable of pendulum movement is suspended from a floor portion around the opening 14. FIG. 1 shows a suspension member 22 on the right side of the drawing for convenience of explanation.
Although a damper to be described later is shown on the left side, a plurality of, for example, four or six hanging members 22 are arranged on the periphery of the opening 14. The floor 12 is provided with a small beam 24 made of two channel steels 26 and arranged with a gap back to back. The upper end of the suspension member 22 penetrates through the clearance and is connected to the fixing plate 28, and the fixing plate 28 rests on the flanges of the two channel steels 26. The suspension member 22 can be formed by a steel bar or a wire of a piano wire, and can be pendulum-moved by its elastic deformation. The upper end of the suspension member 22 and the fixing plate 28 can be connected via a wedge.

A gantry 30 is connected to the plurality of suspension members 22 and is disposed in the space 16. The gantry 30 is formed by connecting an H-shaped steel or a grooved steel in a rectangular shape, and attaching a top plate and a brace appropriately thereto, and has rigidity and strength to support an anti-vibration device. The connection between the gantry 30 and the suspension member 22 can be fixed by the above-described wedge.

A platen 32 is attached to the gantry 30 via support means 34 for attenuating vertical vibration, and is located at the opening 14. The anti-vibration device is mounted on the surface plate 32. The platen 32 is
H-shaped steel or channel steel is stretched and connected in a rectangular shape, and a top plate, a bottom plate, and a brace are appropriately attached to the H-shaped steel or channel steel, and has rigidity and strength to support the anti-vibration device.

In the illustrated embodiment, the support means 34 is an active-type pneumatic actuator which also serves as an air spring. The pressure of the air spring is maintained at a predetermined level by a controller (not shown) including a CPU, which keeps the surface plate 32 at a predetermined level and attenuates vertical vibrations. When vibration is applied from the outside, the vibration is detected by the vertical acceleration sensor 36, and the controller adjusts the pressure of the air spring to suppress the vibration based on the signal from the acceleration sensor 36, and actively controls the vibration. Control. The support means 34
In addition to the active type described above, a normal damper such as an air spring having a damping mechanism by an orifice and automatically adjusting the level, a viscous damper using a viscous liquid, or rubber can be used. It is preferable to have not only the function of damping the vibration but also the function of adjusting the level as described above.

A damper 38 is provided independently of the support means 34 to attenuate horizontal vibration applied to the surface plate 32. In the illustrated embodiment, the damper 38 comprises an active type linear motor. That is, the movable iron core 40 on the gantry 30 side, the fixed iron core 42 on the floor 12 side, and a coil (not shown) are used, and the vibration is actively controlled by the fixed iron core 42 so as to suppress the movement of the movable iron core 40. .
In the case of a linear motor, minute adjustment can be made by changing the current or voltage flowing through the coil. As the damper 38, besides the above-mentioned active type, a normal damper such as a viscous damper using a viscous liquid or rubber can be used.

Next, the arrangement of the support means 34 and the damper 38 will be described. Although the support means and the damper are described using reference numerals 34 and 38, respectively, these need not be the air actuator and the linear motor described above. Can be selected from those mentioned above.

In the arrangement shown in FIGS. 2 and 3, a beam 44 is attached to a floor portion around the periphery of the square opening 14, a T beam 46 is attached to the beam 44, and the gantry 30 is hung at four corners of the T beam 46. It is suspended by a suspending member 22. Four support means 34 are attached to the gantry 30 so as to be located at the four corners of the square base 32, and support the base 32. In addition, four dampers 38
It is attached so that it is located corresponding to the center of two sides. Each damper 38 is attached to a support member 48 hanging down from the T-beam 46 and a support member 50 projecting upward from the gantry 30. In FIG. 2, two dampers 38 located at the top and bottom attenuate vibrations in the X direction, and two dampers 38 located at the left and right attenuate vibrations in the Y direction.

In the arrangement shown in FIGS. 4 and 5, a beam 44 is attached to the floor around the periphery of the square opening 14, and an auxiliary beam 45 extends downward from the beam 44. Further, a T-beam 46 is attached to the beam 44,
Are suspended at the four corners of the T beam 46 by hanging members 22. The four support means 34 are attached to the gantry 30 so as to be located at the four corners of the square platen 32,
2 is supported. Further, eight dampers 38 are provided on the platen 3
Two dampers 38 are attached to each of the four corners so as to correspond to the four corners. Each damper 38
It is attached to the auxiliary beam 45 and the gantry 30. In FIG. 4, four dampers 38 located at the top and bottom attenuate vibrations in the Y direction, and four dampers 38 located at the left and right attenuate vibrations in the X direction.

[Brief description of the drawings]

FIG. 1 is a front view partially in section showing an embodiment of a surface plate of a building according to the present invention.

FIG. 2 is a plan view showing another embodiment of the surface plate of the building according to the present invention.

FIG. 3 is a front view showing a cross section of a part viewed in the direction of line 3-3 in FIG. 2;

FIG. 4 is a plan view showing still another embodiment of the surface plate of the building according to the present invention.

FIG. 5 is a front view showing a part of the surface plate shown in FIG. 4 in section.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Vibration isolation table 12 Floor 14 Opening 16 Space 18 Building 20 Anti-vibration equipment 22 Hanging member 30 Stand 32 Surface plate 34 Support means 38 Damper

Claims (2)

[Claims] 1. A vibration isolation table installed in a floor having a space below and having an opening in at least a part thereof, the plurality of hanging members being capable of pendulum movement from a floor portion around the opening. And a pedestal disposed in the space, attached to the pedestal via support means for attenuating vertical vibration, and a surface plate positioned at the opening, and damping horizontal vibration applied to the surface plate And a damper provided independently of the support means. 2. The damper is of an active type.
The anti-vibration table according to claim 1, comprising a linear motor.