JPH11218709A - Optical scanning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical scanning device having the reflection mirror, in which the effect on the reduction of the amplitudes and the number of vibrations is made small while maintaining a large reflection surface, by providing the compensating means, that compensates for the deflection of the mirror, to the mirror. SOLUTION: The direction of the magnetic field generated in left and right electromagnet coils 3a and 3b is switched in the vicinity of the resonant vibration number of an elestically deforming member 2. By conducting the control described above, rotary vibration in the vicinity of the resonant vibration number is given to the member 2. Thus, a reflection mirror 1, which is fixed to one end of the member 2, is rotatively vibrated about the longitudinal direction center axis of the member 2 as a rotation center axis. Then, compensation means 12a to 12d, which compensate for the deflection of the mirror 1, are provided to the mirror. The deflection of the mirror 1 is simply compensated for by the means 12a to 12d and the optical scanning device having the reflection mirror, in which no deflection is generated even though a rotative vibration is conducted, is constituted.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical scanning device used for scanning light in a laser beam printer, a laser projector, a laser scanning type image display device and the like.

[0002]

2. Description of the Related Art As a conventional optical scanning device, there is one disclosed in, for example, Japanese Patent Application Laid-Open No. 8-152575.
In this device, the displacement of the piezoelectric element is enlarged by utilizing this principle, and the light is scanned by directly rotating and vibrating the reflecting mirror using the displacement as a tangential movement amount.

As another example of a conventional optical scanning device,
There is one disclosed in JP-A-5-100175. In this apparatus, a reflection mirror is provided at one end of an elastic deformation member, linear vibration of a piezoelectric element is input to a vibration input section at the other end, and the mirror is deflected by bending vibration or torsional vibration in a resonance state of the elastic deformation member. Is scanned.

In addition, there are provided an optical scanning device which applies a driving force to the elastically deformable member by electromagnetic force and vibrates the reflection mirror by the resonance vibration of the elastically deformable member to scan light, and a galvano mirror which forcibly vibrates by electromagnetic induction. There are also optical scanning devices.

In order to use the above-described optical scanning device in a laser beam printer, a laser projector, a laser scanning HMD, or the like, it is desirable that the optical scanning device be provided with a reflecting mirror capable of obtaining a large amplitude and a large frequency. Therefore, it is necessary to use a light and hard material for the reflection mirror. As a specific material, beryllium is generally used.

[0006]

When a reflecting mirror having a certain thickness and surface area is provided at the tip of a drive shaft and is vibrated, the reflecting mirror is bent by reciprocating motion caused by the vibration. Hereinafter, the principle of deflection generation will be specifically described with reference to the drawings. FIG. 13 shows a sectional view of the reflection mirror 1. Reference numeral 16 denotes a rotation center axis. FIG. 13 illustrates an optical scanning device in which the rotation center axis 16 coincides with the center axis of the reflection mirror 1. The optical scanning device is not limited to the one in which the center axis of rotation and the central axis of the reflection mirror coincide with each other. However, since the principle of the deflection is the same, the description will be made using the present optical scanning device.

As shown in FIG. 13A, it is assumed that the reflection mirror 1 moves by a certain angle from the horizontal position 50. Reference numeral 50 denotes a horizontal position when the reflection mirror 1 is in a horizontal state. When the reflection mirror 1 moves at an angle from the horizontal position 50, the reflection mirror 1
In each of the positions (1) and (2), an inertial force for stopping the movement acts in the vertical direction 52 of the reflecting mirror 1 surface. The force increases as the distance from the horizontal position increases. In other words, different inertial forces act on the rotating shaft 16 at each position in the vertical direction 51. The inertia force increases as the distance from the rotation shaft 16 increases (because the distance from the horizontal position 50 increases).

Accordingly, the reflecting mirror 1 is bent. As the vibration of the reflection mirror 1, when returning from the state shown in FIG. 13A to the horizontal position 50, the vibration in which each point of the central axis is always on the vertical axis 51 without bending is the ideal vibration. . However, in practice, as shown in FIG.
Deflection occurs. This is because, as described above, different inertial forces are generated at each point in the vertical direction 51 of the reflection mirror 1. In addition, at the symmetric point about the rotation axis 16 in the vertical direction 51, the inertia force acts in the opposite direction, so that the generated bending is also in the opposite direction. According to the vibration having the bending as shown in FIG. 13B, the effective reflection area becomes small.

For example, in an optical scanning device provided in an image display device, it is necessary to scan a beam as large as possible in order to give light having a large beam diameter to an observer's eyes. However, if the reflection mirror is large, the deflection becomes large as described above, and the actual reflection area becomes smaller than the size of the reflection mirror. In addition, the inertia increases, and it becomes impossible to secure a large frequency and amplitude.

The present invention has been made in view of the above problems, and has as its object to provide an optical scanning device including a reflection mirror which has a large reflection surface and has a small influence on a decrease in amplitude and frequency. .

[0011]

According to an aspect of the present invention, there is provided an optical scanning device having a reflection mirror that scans light by rotating and vibrating.
The reflection mirror is provided with a correction means for correcting the deflection of the reflection mirror.

In the above configuration, since the correction means for correcting the deflection of the reflection mirror is provided, the deflection of the reflection mirror is corrected by the correction means in a simple manner. That is, it is possible to configure an optical scanning device including a reflection mirror that does not generate deflection even when it is rotated. If the correcting means is not provided in the reflection mirror, the control of the driving means for correcting deflection (giving rotational vibration) becomes complicated.

The deflection is, for example, a deflection generated in a rotation direction with respect to a rotation axis. The deflection of the reflecting mirror that rotates and oscillates may be in various directions, but the largest amount of deflection occurs in the direction perpendicular to the rotation axis. The deflection in other directions is not so large as to affect the reflection area of the reflection mirror. Therefore, by providing a correction unit that corrects the deflection generated in the rotation direction with respect to the rotation axis, it is possible to prevent the reflection mirror from reducing the reflection area due to the deflection.

According to a second aspect of the present invention, in the optical scanning device according to the first aspect, the correction means has a deflection detecting function for detecting the deflection of the reflection mirror, and the detection result of the deflection detecting function is used. The deflection is corrected based on the deflection.

In the above configuration, since the correcting means has the deflection detecting function, it is not necessary to arbitrarily configure a means for detecting the deflection, so that the configuration can be simplified.

According to a third aspect of the present invention, in the optical scanning device according to the first aspect, the deflection detecting means having a deflection detecting function for detecting deflection of the reflection mirror is provided separately from the correction means. Wherein the correction means corrects the deflection of the reflection mirror based on the detection result of the deflection detection means.

In the above configuration, since the deflection detecting means is provided on the reflection mirror separately from the deflection correcting means, real-time deflection correction can be performed. That is,
The deflection correcting means can be controlled so that the deflection amount detected by the deflection detecting means becomes zero. According to such a method, the deflection correction is performed more reliably.

The invention described in claim 4 is the first to third aspects of the present invention.
In any one of the optical scanning devices, the correction unit may include a piezoelectric unit integrally provided on a back surface of the reflection unit of the reflection mirror.

In the above configuration, since the reflecting means and the correcting means are integrally formed, the reflecting mirror can be formed compact. Further, since the correcting means is composed of the piezoelectric means, the deflection can be corrected easily by applying an electric signal lightly.

According to a fifth aspect of the present invention, in the optical scanning device, the reflecting means on a flat plate, two pairs of piezoelectric means opposed to each other across a base material arranged on the back side of the reflecting means, and Means for providing a deflection correction signal to the means.

In the above configuration, the deflection caused by the force applied to the opposite ends of the reflecting mirror in opposite directions can be corrected separately at both ends by two pairs of piezoelectric means, so that the deflection can be reliably corrected. be able to.

[0022]

DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment FIG. 1 is a top perspective view showing the overall configuration of an optical scanning device according to the present embodiment. Reference numeral 1 denotes a reflection mirror that scans light, and reference numeral 2 denotes an elastic deformation member (here, a torsion spring) that rotationally vibrates the reflection mirror 1. Reference numerals 3a and 3b denote left and right electromagnet coils, 4 denotes a magnetic plate, and the electromagnet coils 3a and 3b and the magnetic plate 4 are collectively referred to as driving means. The driving means gives the elastic deformation member 2 rotational vibration near the resonance frequency. The elastically deformable member 2 resonates torsionally with the rotational vibration given by the driving means. 5 is a base, 6 is a connector, 7 is a cable, and 8 is control means.

The reflection mirror 1 is fixed to one end of the elastic deformation member 2. The other end of the elastic deformation member 2 is fixed to the base 5. In the driving means, the left and right electromagnet coils 3
Reference numerals a and 3b are fixed on the base 5 so as to sandwich the portion of the elastic deformation member 2 near the base 5 side. The magnetic plate 4 is
When the central axis in the longitudinal direction is translated downward in the vertical direction, it is fixed to a position on the upper surface of the elastically deformable member 2 that connects the upper portions of the left and right electromagnet coils 3a and 3b.

When the magnetic plate 4 is a permanent magnet having different magnetic poles at both ends in the longitudinal direction, the left and right electromagnet coils 3
A current is supplied to a and 3b so that a magnetic field in the same direction is generated. In this way, an attractive force is generated between one end of the magnetic plate 4 and the electromagnet coil 3a or 3b located thereunder, and the other end of the magnetic plate 4 and the electromagnet coil 3b or 3a located therebelow. There will be a repulsion between them. That is, the magnetic plate 4 is inclined from the horizontal position, and a force is applied to the elastically deformable member 2 to which it is fixed in the rotational direction.

The directions of the magnetic fields generated in the left and right electromagnet coils 3 a and 3 b are switched near the resonance frequency of the elastic deformation member 2. By controlling in this way,
Rotational vibration near the resonance frequency is applied to the elastic deformation member 2. The elastically deformable member 2 resonates with the rotational vibration. Therefore, the reflection mirror 1 fixed to one end of the elastic deformation member 2 rotates and vibrates around the longitudinal center axis of the elastic deformation member 2 as the rotation center axis.

When the magnetic plate 4 is not a permanent magnet, a current flows through only one of the left and right electromagnet coils 3a and 3b to generate a magnetic field. The electromagnet coil 3a or 3b in which the magnetic field is generated, and the magnetic plate 4 located above the electromagnet coil 3a or 3b
An attractive force acts between one ends of the. Therefore, the magnetic plate 4 is inclined from the horizontal position. The electromagnet coils 3a and 3b for generating a magnetic field are switched near the resonance frequency of the elastic deformation member 2. By doing so, the magnetic plate 4 performs rotational vibration near the resonance frequency. This rotational vibration is applied to the elastic deformation member 2.

Accordingly, the elastically deformable member 2 resonates with the rotational vibration given by the magnetic flat plate 4. Therefore, the reflection mirror 1 fixed to one end of the elastic deformation member 2 rotates and vibrates. Next, each component will be described in detail. FIG. 2 is a detailed view including a part of the reflection mirror 1 and a part of the elastic deformation member 2, and FIG.

The reflection mirror 1 has a rotation center axis 1 on each of an upper surface and a lower surface of a mirror base material 13 made of a light and hard material.
A total of four piezoelectric films (upper surface piezoelectric films 12a, 12b, lower surface piezoelectric films 12c, 12d) are bonded to each other, two on the left and right around the center 6.
Reflecting means 14 is provided on the upper surfaces of a and 12b in a film shape by mirror coating. The mirror substrate 13 includes left and right piezoelectric films 12a, 12b and 12
The center axis of rotation has a biconvex shape 13a so that c and 12d do not come into contact with each other.

The four piezoelectric films 12a, 12b, 12c, 1
The electrodes 11a, 11a ',
11b, 11b ', 11c, 11c', 11d, 11
d '. The electrodes are omitted in FIG. Upper surface electrode 11 of upper piezoelectric films 12a and 12b
A and 11b may be configured such that the reflection means 14 part becomes an electrode. In this case, an insulating member is provided between the two electrodes 11a and 11b so that the electrodes 11a and 11b do not contact each other. Further, the reflecting means 14 may use a reflecting member or the like instead of the reflecting film formed by the mirror coating as in the present embodiment.

The piezoelectric films 12a, 12b, 12c, and 12d are made of a material called an electromechanical transducer, and when a voltage is applied, the material itself mechanically and physically changes (rotates, expands, contracts, and the like). As the piezoelectric film, for example, a piezoelectric ceramic or an organic piezoelectric film can be used. The piezoelectric ceramic is generally made of PZT.

In this embodiment, a piezoelectric film that expands and contracts in the AA ′ direction (see FIG. 1) is used. That is, it expands and contracts in the vertical direction of the rotation center axis 16 of the reflection mirror 1. The piezoelectric films 12 a, 12 b, 12 c, and 12 d include upper and lower piezoelectric films 12 a, 12 c, 12
When b and 12d are considered as a pair, the structure is a so-called bimorph displacement element.

By applying an appropriate voltage to each of the piezoelectric films, each of the piezoelectric films expands and contracts, and the mirror substrate 13 also moves in accordance with the movement. That is, the displacement of the entire reflecting mirror 1 is corrected. Specifically, the deflection that occurs in the direction perpendicular to the rotation axis 16 of the reflection mirror 1 is corrected. In this embodiment, the piezoelectric film may have a unimorph displacement element structure in which one of the left and right upper and lower piezoelectric films is disposed. in this case,
The correction force is smaller than when a bimorph displacement element is configured. However, since the weight of the entire piezoelectric film is reduced,
The influence on the vibration of the reflection mirror 1 is reduced.

A voltage is applied to the electrodes provided on the reflection mirror 1 from the control means 8. This electrode and the control circuit 8 are connected by a wiring 21. FIG. 4 shows a detailed view of a joint portion between the elastically deformable member 2, the connector 6, and the cable 7 so that the arrangement of the wiring 21 can be easily understood.

The wiring 21 connected to the electrode of the reflection mirror 1 is formed on the surface of the elastically deformable member 2 and the surface of the base 5 with aluminum or the like by using a fine processing process.
And it is connected to the cable 7 via the connector 6. The cable 7 is connected to the control means 8. Since the joint between the elastically deformable member 2 and the base 5 or the reflection mirror 1 has a small amount of twist, the wire 21 does not break due to the twist.

FIG. 5 shows a block diagram of the control means 8 of this embodiment. In FIG. 5, only the circuit portion in the control means 8 for the piezoelectric films 12b and 12d on the right side of the reflection mirror 1 is shown, but the circuit for the piezoelectric films 12a and 12c on the left side is also the same. Hereinafter, the detection of deflection when the piezoelectric film is made of a piezoelectric ceramic will be described.

The inside of the piezoelectric ceramic crystal is polarized in the direction opposite to the surface, and charges of opposite polarity are attracted to the surface of the metal electrode and charged. That is, as shown in FIG.
The deflection detecting means 82 for detecting the difference between the potential of the electrodes 1b and 11d and the potential of the electrodes 11b 'and 11d' has a potential difference v _1.
Is detected. It will be the potential difference v ₁ that the normal potential difference.

When deflection occurs in the reflection mirror 1, one surface of each of the piezoelectric films 12b and 12d is pulled and the other surface is compressed. Therefore, the charge density in the piezoelectric film changes,
The bound charge on the surface will also change. Therefore, a difference occurs in the potential difference detected by the deflection detecting means 82. For example, when the bending as shown in FIG. 6B occurs, the upper surface is pulled and the lower surface is compressed. At this time, a different potential v ₂ is detected from the detection means 82 Normal potential difference v ₁ in flexure.

When a voltage is applied such that the potential difference changes from v ₂ to the normal potential difference v ₁ , the piezoelectric ceramic expands and contracts in a direction for correcting the deflection, and the deflection is corrected. As a specific control method, first, the deflection amount is calculated by measuring the potential difference v ₂ by the deflection detecting means 82. Reflection mirror 1
Is in a steady state, and the periodic change in the amount of deflection with respect to the drive signal that gives the rotational vibration is measured, the drive signal generation unit 83 corrects the periodic drive signal ( A deflection correction signal) is created and stored.

Then, the switch 81 is switched from the measurement mode to the drive mode (specifically, the switch 81 is switched so as to connect the electrode and the voltage applying means 84). The voltage application unit (drive circuit) 84 applies a voltage to the electrodes based on the drive signal generated by the drive signal generation unit 83 in the measurement mode. That is, by applying a voltage amplitude change corresponding to a periodic change in the amount of deflection to the intensity modulation of the voltage waveform and applying it to the piezoelectric ceramic electrode in synchronization with the resonance vibration, resonance vibration without deflection can be achieved. .

Incidentally, the rotational vibration of the reflection mirror 1 is
Deflection detecting means 8 having symmetry about
The potential difference detected in 2 is equivalent to four piezoelectric films 12a, 12b, 1
One of 2c and 12d may be used. However, detecting the potential difference between the four piezoelectric films 12a, 12b, 12c, and 12d has higher detection sensitivity.

<Second Embodiment> In the optical scanning device of this embodiment, a piezoelectric element for detecting distortion and a piezoelectric element for correcting deflection are separately provided on the reflection mirror 1.
The circuit configuration of the control means 8 is also adapted to such a configuration. FIG. 7 shows an overall configuration diagram of the reflection mirror 1, FIG. 8 shows a component configuration diagram of the reflection mirror 1, and FIG. 9 shows a block diagram of the control means 8. Since the overall configuration and other components are almost the same as those of the first embodiment, the drawings and the description are omitted.

As shown in FIGS. 7 and 8, the difference between the reflection mirror 1 and the first embodiment is that the depths of the left and right piezoelectric films 12a and 12b on the upper surface of the mirror substrate 13 (the elastic deformation member 2) are different. The piezoelectric films 15a, 15
b is adhered. In addition, these piezoelectric films 1
Other piezoelectric films 12a, 12b, 5a, 15b
The electrodes 17a, 17a ', and 17 are the same as 12c and 12d.
b, 17b '.

The piezoelectric films 15a and 15b are piezoelectric films for detecting deflection. Other piezoelectric films 12a, 12b, 12c,
Reference numeral 12d denotes a deflection correction piezoelectric film. Next, the circuit block diagram of FIG. 9 will be described. In FIG. 9, FIG.
Similarly, only the circuit portion in the control means 8 for the right piezoelectric films 15b, 12b, 12d is shown, but the left piezoelectric film 1
The same applies to the circuits for 5a, 12a and 12c.

The deflection detecting means 82 includes two electrodes 17
b, to detect the 'potential difference v ₂ of' 17b. Next, the potential difference v in a state where there is no deflection, which is detected and stored in advance, is stored.
Calculate the amount of deflection based on ₁ . Then, an applied voltage for correcting the deflection is calculated, and a control signal including the information is sent to the voltage applying means 84.

The voltage applying means 84 applies a voltage to each electrode of the piezoelectric elements 12b and 12d based on the control signal. By performing such control, the deflection is corrected. still,
Performing the above control at predetermined time intervals enables real-time correction.

In the optical scanning devices of the above two embodiments, the driving means for generating the electromagnetic force is used as the driving means for the elastic deformation member 2, but the invention is not limited to this driving means. Any drive means may be used as long as it provides rotational vibration to the elastic deformation member 2. For example, a configuration may be employed in which linear vibration of the piezoelectric element is applied to the elastic deformation member 2 to cause the elastic deformation member 2 to resonate.

<Third Embodiment> FIG. 10 is a top perspective view of an optical scanning device according to this embodiment. The reflection mirror 1 of the optical scanning device according to the present embodiment oscillates vertically (in the direction of arrow 34). The reflection mirror 30 is an elastic deformation member 31
At one end. The other end of the elastic deformation member 31 is fixed to the base 33.

The elastic deformation member 31 is sandwiched between two piezoelectric films 32. The piezoelectric film 32 serves as driving means for the elastic deformation member 31. The two piezoelectric films 32 are controlled such that one expands while the other contracts. The direction of expansion and contraction is the direction of the shaft 35 (coinciding with the longitudinal central axis of the elastic deformation member 31). The piezoelectric film 32 expands and contracts at a frequency near the bending frequency of the elastic deformation member 31. The elastically deformable member 31 bends and vibrates in resonance with the expansion and contraction movement. Therefore, the elastic deformation member 31
The reflection mirror 30 vibrated in the direction indicated by the arrow 34, that is, in the vertical direction.

The vertical vibration here is substantially the same as the vibration about the axis 46 passing through the joint between the elastic deformation member 31 and the base 33. In such a vertical vibration, the reflecting mirror 30 bends because the inertial force applied in the vertical direction 53 in the direction of the axis 35 differs at each point in the direction of the axis 35. In the optical scanning device of the present embodiment,
There is a correction means for correcting this deflection.

The correcting means includes the piezoelectric film 3 on the reflection mirror 30.
6, 37. The correction means will be described later with reference to FIG. Wirings formed on the surface of the base 5 and the elastically deformable member 31 are connected to the piezoelectric film 32 and the piezoelectric films 36 and 37. The wiring 39 is connected to the piezoelectric films 36 and 37. The wiring 40 is connected to the piezoelectric film 32. The other end of each of the wires 39 and 40 is connected to a control means 42 via a connector 41 and a cable 43.

A voltage is applied to the piezoelectric film 32 by the control means 42 such that the piezoelectric film 32 expands and contracts at a frequency near the resonance frequency. The control means 4 also controls the piezoelectric films 36 and 38.
2 applies a voltage that corrects the deflection.

FIG. 11 is a view showing a component configuration of the reflection mirror 1. As shown in FIG. The reflection mirror 1 has a configuration in which two piezoelectric films 36 and 37 are adhered to upper and lower surfaces of a light and hard mirror base material 38. Although omitted in the figure, electrodes are arranged on the upper and lower surfaces of each of the piezoelectric films 36 and 37. The reflection means 44 is provided on the upper surface of the reflection mirror 30. Note that a configuration in which the upper surface electrode of the piezoelectric film 36 also functions as the reflecting means 44 may be employed.

The control means 42 calculates the amount of deflection by detecting the potential difference between the piezoelectric films 36 and 37, and applies an applied voltage for correcting the deflection to the electrodes of the piezoelectric films 36 and 37. Has become. Each piezoelectric film 36, 37
Expands and contracts in the direction of the axis 35 by the applied voltage. Due to this expansion and contraction, the reflection mirror 1 has a vertical direction 35 of the central axis 46.
Is corrected in the vertical direction 53. Regarding the configuration inside the control means 42 for controlling the piezoelectric films 36 and 37, the control means 8 of the first embodiment shown in FIG.
Therefore, the description is omitted.

In the above description, the piezoelectric films 36 and 37 are configured to perform both deflection detection and deflection correction. However, as in the second embodiment, the piezoelectric films for deflection detection and deflection correction are used. May be separately formed. FIG. 12 shows a component configuration diagram of the reflection mirror 30 when the deflection detecting piezoelectric film and the deflection correcting piezoelectric film are separately provided.

In FIG. 12, in addition to the components of the reflection mirror 30 shown in FIG. Electrodes are also arranged on the upper and lower surfaces of the piezoelectric film 45 so as not to contact the electrodes of the piezoelectric film 36.

The piezoelectric films 36 and 37 are piezoelectric films for deflection correction. The piezoelectric film 45 is a deflection detecting piezoelectric film that expands and contracts in the direction of the axis 35 like the other piezoelectric films 36 and 37. The control circuit 42 calculates the amount of deflection by detecting the potential difference of the piezoelectric film 45. Then, the voltage applied to the electrodes of the piezoelectric films 36 and 37 is controlled based on the calculated deflection amount. Control means 42 for controlling piezoelectric films 36, 37, 45
The internal configuration is almost the same as that of the control means 8 of the second embodiment shown in FIG.

When the deflection detecting piezoelectric film and the deflection correcting piezoelectric film are formed separately, real-time correction can be performed.

[0058]

According to the optical scanning device of the present invention, the reflecting surface of the reflecting mirror can be used effectively. As a result, the light beam to be scanned can be scanned by a reflection mirror having a substantially light beam area. Accordingly, even in an optical scanning device that scans a light beam having a large diameter, the mirror area may be approximately the same as the light beam, and it is possible to minimize a decrease in frequency and amplitude due to an increase in the size of the mirror.

According to the above effects, when the optical scanning device of the present invention is used for an image display device, light having a sufficient beam diameter can be presented to an observer, and a high-definition and beautiful image can be presented. You can do it.

[Brief description of the drawings]

FIG. 1 is a top perspective view showing the overall configuration of an optical scanning device according to a first embodiment.

FIG. 2 is a detailed view of a reflection mirror and an elastic deformation member of FIG. 1;

FIG. 3 is a component configuration diagram of a reflection mirror according to the first embodiment.

FIG. 4 is a detailed view of an elastic deformation member, a connector, and a cable portion of FIG. 1;

FIG. 5 is a block diagram of a control unit according to the first embodiment.

FIGS. 6A and 6B show a case where no deflection has occurred and FIG.
The figure which shows the electric potential difference in case the bending has arisen.

FIG. 7 is a detailed view of a reflection mirror and an elastic deformation member of the optical scanning device according to the second embodiment.

FIG. 8 is a view illustrating a component configuration of a reflection mirror according to a second embodiment.

FIG. 9 is a block diagram of a control unit according to the second embodiment.

FIG. 10 is a top perspective view showing the overall configuration of the optical scanning device according to the third embodiment.

FIG. 11 is a diagram illustrating a component configuration of a reflection mirror according to a third embodiment.

FIG. 12 is a view showing a component configuration of a reflection mirror different from FIG. 11 of the third embodiment.

FIG. 13 is a view for explaining the principle of generation of deflection.

[Explanation of symbols]

1, 30 Reflecting mirror 2, 31 Elastic deformation member 3a, 3b Electromagnet coil 4 Magnetic plate 5, 33 Base 6, 41 Connector 7, 43 Cable 8, 42 Control means 12a, 12b, 12c, 12d, 36, 37 Piezoelectric Film 13, 38 Mirror base material 14, 44 Reflecting means 16 Center of rotation 32 Piezoelectric film (driving means) 82 Deflection detecting means 83 Drive signal generating means 84 Voltage applying means

Claims (5)

[Claims] 1. An optical scanning device having a reflection mirror that scans light by rotating and oscillating, wherein the reflection mirror includes correction means for correcting deflection of the reflection mirror. . 2. The light according to claim 1, wherein said correcting means has a deflection detecting function for detecting deflection of said reflection mirror, and corrects deflection based on a detection result of said deflection detecting function. Scanning device. 3. A deflection detecting means having a deflection detecting function for detecting deflection of the reflecting mirror is provided on the reflecting mirror separately from the correcting means, and the correcting means detects a deflection result of the deflection detecting means. The optical scanning device according to claim 1, wherein the deflection of the reflection mirror is corrected based on the correction. 4. An optical scanning device according to claim 1, wherein said correction means comprises a piezoelectric means integrally provided on a back surface of said reflection means of said reflection mirror. 5. A reflecting mirror comprising a reflecting means on a flat plate, two pairs of piezoelectric means opposed to each other with a substrate disposed on the back side of the reflecting means interposed therebetween, and means for giving a deflection correction signal to the piezoelectric means. An optical scanning device comprising: