JPH11220892A5 - - Google Patents

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Publication number
JPH11220892A5
JPH11220892A5 JP1998074700A JP7470098A JPH11220892A5 JP H11220892 A5 JPH11220892 A5 JP H11220892A5 JP 1998074700 A JP1998074700 A JP 1998074700A JP 7470098 A JP7470098 A JP 7470098A JP H11220892 A5 JPH11220892 A5 JP H11220892A5
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JP
Japan
Prior art keywords
vibration
vibrating body
actuator according
displacements
contact
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Granted
Application number
JP1998074700A
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Japanese (ja)
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JP4077923B2 (en
JPH11220892A (en
Filing date
Publication date
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Priority to JP07470098A priority Critical patent/JP4077923B2/en
Priority claimed from JP07470098A external-priority patent/JP4077923B2/en
Priority to US09/197,425 priority patent/US6404104B1/en
Priority to EP98309728A priority patent/EP0923144A3/en
Priority to KR1019980051198A priority patent/KR100347124B1/en
Publication of JPH11220892A publication Critical patent/JPH11220892A/en
Publication of JPH11220892A5 publication Critical patent/JPH11220892A5/ja
Application granted granted Critical
Publication of JP4077923B2 publication Critical patent/JP4077923B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【0020】
【課題を解決するための手段】
本出願に係る第1の発明の目的を実現する振動型アクチュエータの第1の構成は、少なくとも異なる3方向の振動変位を発生させる振動発生手段を形成した振動体を有し、前記異なる3方向の振動変位のうち少なくとも2方向の振動変位を選択的に組み合わせた合成振動を発生させ、前記振動体と前記振動体に接触する接触体とを任意の方向に相対移動させたものである。
[0020]
[Means for solving the problem]
A first configuration of a vibration type actuator that realizes the object of the first invention of the present application has a vibrating body formed with vibration generating means that generates vibration displacements in at least three different directions, generates a composite vibration that selectively combines vibration displacements in at least two of the three different directions , and moves the vibrating body and a contact body that contacts the vibrating body relative to each other in any direction.

本出願に係る第1の発明の目的を実現する振動型アクチュエータの第3の構成は、前記振動発生手段は、前記振動体に互いに略直交する3軸方向の振動変位を独立に発生可能とするものであり、前記3軸方向の振動変位のうち少なくとも2軸方向の振動変位に時間的に位相差を与えて合成振動を発生させたものである。
In a third configuration of the vibration type actuator that realizes the object of the first invention of the present application, the vibration generating means is capable of independently generating vibration displacements in three axial directions that are approximately perpendicular to each other in the vibrating body, and a temporal phase difference is given to the vibration displacements in at least two axial directions out of the vibration displacements in the three axial directions to generate a composite vibration.

本出願に係る第1の発明の目的を実現する振動型アクチュエータの第16の構成は、前記振動体の前記略棒状部分の直径、前記略棒状部分に設けた中空内径あるいは形状を変化させることによって、振動体の固有振動数を調整したものである。
The sixteenth configuration of the vibration type actuator that realizes the object of the first invention of the present application is one in which the natural frequency of the vibrating body is adjusted by changing the diameter of the approximately rod-shaped portion of the vibrating body, the inner diameter or shape of the hollow provided in the approximately rod-shaped portion .

Claims (20)

少なくとも異なる3方向の振動変位を発生させる振動発生手段を形成した振動体を有し、前記異なる3方向の振動変位のうち少なくとも2方向の振動変位を選択的に組み合わせた合成振動を発生させ、前記振動体と前記振動体に接触する接触体とを任意の方向に相対移動させたことを特徴とする振動型アクチュエータ。 A vibration actuator comprising a vibrating body formed with vibration generating means for generating vibration displacements in at least three different directions, generating a composite vibration by selectively combining vibration displacements in at least two of the three different directions , and causing relative movement between the vibrating body and a contact body in contact with the vibrating body in any direction. 前記振動体に発生させた前記合成振動は、前記振動体の駆動部に任意の方向の円または楕円運動を形成することを特徴とする請求項1に記載の振動型アクチュエータ。 2. The vibration actuator according to claim 1 , wherein the composite vibration generated in the vibrating body forms a circular or elliptical motion in any direction in the driving part of the vibrating body. 前記振動発生手段は、前記振動体に互いに略直交する3軸方向の振動変位を独立に発生可能とするものであり、前記3軸方向の振動変位のうち少なくとも2軸方向の振動変位に時間的に位相差を与えて合成振動を発生させたことを特徴とする請求項1または2記載の振動型アクチュエータ。 3. The vibration actuator according to claim 1, wherein the vibration generating means is capable of independently generating vibration displacements in three axial directions that are approximately perpendicular to each other in the vibrating body, and a time phase difference is given to vibration displacements in at least two axial directions among the vibration displacements in the three axial directions to generate a composite vibration. 前記振動発生手段は、縦方向振動と方向の異なる複数の横方向振動を励起する電気−機械エネルギー変換素子を有することを特徴とする特徴とする請求項1、2または3記載の振動型アクチュエータ。4. A vibration type actuator according to claim 1, wherein said vibration generating means has an electromechanical energy conversion element for exciting a plurality of lateral vibrations in directions different from the longitudinal vibration. 前記振動発生手段は、曲げ振動のみによって異なる3方向の振動変位を発生させる電気−機械エネルギー変換素子を有することを特徴とする請求項1、2または3記載の振動型アクチュエータ。4. A vibration actuator according to claim 1, wherein said vibration generating means comprises an electromechanical energy conversion element that generates vibration displacements in three different directions by bending vibration alone. 弾性体に少なくとも異なる3方向の振動変位を励起する電気−機械エネルギー変換素子を設けた振動体を有し、前記異なる3方向の振動変位のうち少なくとも2方向の振動変位を選択的に組み合わせた合成振動を発生させ、前記振動体と前記振動体に接触する接触体とを任意の方向に相対移動させた振動型アクチュエータであって、前記電気−機械エネルギー変換素子は異なる方向への振動変位に対して兼用する分極領域を有することを特徴とする振動型アクチュエータ。A vibration actuator having a vibrating body provided with an electromechanical energy conversion element that excites vibration displacements in at least three different directions in an elastic body, generating a composite vibration that selectively combines vibration displacements in at least two of the three different directions, and causing relative movement between the vibrating body and a contact body that contacts the vibrating body in any direction, wherein the electromechanical energy conversion element has a polarization region that can be used for vibration displacements in different directions. 前記振動体に発生させた前記合成振動は、前記振動体の駆動部に任意の方向の円または楕円運動を形成することを特徴とする請求項6記載の振動型アクチュエータ。7. The vibration actuator according to claim 6, wherein the composite vibration generated in the vibrating body forms a circular or elliptical motion in any direction in the driving part of the vibrating body. 前記振動発生手段は、前記振動体に互いに略直交する3軸方向の振動変位の少なくとも2軸方向の振動変位に時間的に位相差を与えて合成振動を発生させたことを特徴とする請求項6または7記載の振動型アクチュエータ。8. The vibration actuator according to claim 6, wherein the vibration generating means generates a composite vibration by giving a temporal phase difference to vibration displacements in at least two of three axial directions of the vibrating body that are substantially perpendicular to each other. 前記電気−機械エネルギー変換素子は、複数の分極領域を選択的に組み合わせることにより、前記振動体の駆動部に縦方向振動及び方向の異なる複数の横方向振動を発生させることを特徴とする請求項6、7または8記載の振動型アクチュエータ。9. A vibration actuator according to claim 6, 7 or 8, characterized in that the electromechanical energy conversion element generates longitudinal vibrations and multiple lateral vibrations of different directions in the driving section of the vibrating body by selectively combining multiple polarization regions. 前記弾性体は略棒状体に形成され、前記電気−機械エネルギー変換素子は少なくとも4分割に分極領域が形成されて前記略棒状体の軸方向位置で接合し、前記分極領域の少なくとも2つは2方向の振動変位の発生のために兼用するものであり、さらに兼用する分極領域に対しては振動の方向を変える為に、少なくとも1つには異なる位相の交番信号を与えることにより、前記弾性体を縦方向振動させる場合と、横方向振動させる場合とに切り換えたことを特徴とする請求項6、7、8または9記載の振動型アクチュエータ。A vibration actuator according to claim 6, 7, 8 or 9, characterized in that the elastic body is formed into a roughly rod-like body, the electromechanical energy conversion element is formed with polarized regions divided into at least four parts and joined at an axial position of the roughly rod-like body, at least two of the polarized regions are used for generating vibration displacement in two directions, and further, in order to change the direction of vibration for the polarized regions used for both purposes, an alternating signal of a different phase is applied to at least one of the polarized regions, thereby switching between vibrating the elastic body in a vertical direction and vibrating it in a horizontal direction. 前記弾性体は、略棒状体と略円板体とを組み合わせたものであることを特徴とする請求項6、7、8、9または10記載の振動型アクチュエータ。11. The vibration type actuator according to claim 6, 7, 8, 9 or 10, wherein the elastic body is a combination of a substantially rod-shaped body and a substantially disk-shaped body. 前記少なくとも異なる3方向の振動変位のうちの少なくとも2方向の振動変位を選択的に組み合わせた合成振動を発生させ、前記振動体と前記振動体に接触する接触体とを任意の方向に相対移動させたことを特徴とする請求項6、7、8、9、10または11記載の振動型アクチュエータ。12. A vibration actuator according to claim 6, 7, 8, 9, 10 or 11, characterized in that a composite vibration is generated by selectively combining vibration displacements in at least two directions out of the vibration displacements in at least three different directions, and the vibrating body and a contact body in contact with the vibrating body are moved relatively in any direction. 前記少なくとも3方向の振動変位の組み合わせの各成分の比率を変えることにより、前記振動体と前記振動体に接触する接触体とを任意の方向に相対移動させたことを特徴とする請求項1、2、3、4、5または12記載の振動型アクチュエータ。A vibration actuator according to claim 1, 2, 3, 4, 5 or 12, characterized in that the ratio of each component of the combination of vibration displacements in at least three directions is changed, thereby causing relative movement between the vibrating body and the contact body in contact with the vibrating body in any direction. 前記接触体の前記振動体との接触部を球面状に形成したことを特徴とする請求項1ないし13のいずれか一つに記載の振動型アクチュエータ。14. The vibration actuator according to claim 1, wherein the contact portion of the contact body that comes into contact with the vibrator is formed in a spherical shape. 前記振動体の少なくとも前記接触体と接触する駆動部を有する部分は略棒状に形成され、この略棒状部分には振動変位を拡大するための剛性を小さくした部分を設けたことを特徴とする請求項1ないし14のいずれか一つに記載の振動型アクチュエータ。A vibration actuator according to any one of claims 1 to 14, characterized in that at least a portion of the vibrating body having a drive part that comes into contact with the contact body is formed in an approximately rod-like shape, and this approximately rod-like portion is provided with a portion with reduced rigidity to expand vibration displacement. 前記振動体の前記略棒状部分の直径、前記略棒状部分に設けた中空内径あるいは形状を変化させることによって、振動体の固有振動数を調整したことを特徴とする請求項15記載の振動型アクチュエータ。 16. The vibration actuator according to claim 15 , wherein the natural frequency of the vibrating body is adjusted by changing the diameter of the approximately rod-shaped portion of the vibrating body, the inner diameter or shape of a hollow provided in the approximately rod- shaped portion. 前記振動体は、径方向外方に延びる支持用の腕部を備えた支持体を有することを特徴とする請求項1ないし16のいずれか一つに記載の振動型アクチュエータ。17. The vibration actuator according to claim 1, wherein the vibrator has a support body having supporting arms extending radially outward. 請求項1ないし17のいずれか一つに記載の振動型アクチュエータを多自由度の運動を行うアームの間接部に設けたことを特徴とする振動型駆動装置。18. A vibration type driving device comprising a vibration type actuator according to claim 1, provided at a joint of an arm that moves with multiple degrees of freedom. 前記アームの間接部に設けた振動型アクチュエータを遠隔操作により操作者の間接の動きに対応させて動作させる遠隔操作手段を有することを特徴とする請求項18記載の振動型駆動装置。19. The vibration type driving device according to claim 18, further comprising remote control means for remotely controlling the vibration type actuator provided at the joint of the arm to operate in response to the movement of the joint of an operator. 請求項1ないし17のいずれか一つに記載の振動型アクチュエータを多自由度の運動を行うアームの間接部に設け、腹腔鏡下手術用あるいはマイクロサージェリ用として用いることを特徴とする振動型駆動装置。18. A vibration type driving device characterized in that the vibration type actuator according to any one of claims 1 to 17 is provided at the joint of an arm that performs movement with multiple degrees of freedom, and is used for laparoscopic surgery or microsurgery.
JP07470098A 1997-11-27 1998-03-23 Vibration type actuator Expired - Fee Related JP4077923B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP07470098A JP4077923B2 (en) 1997-11-27 1998-03-23 Vibration type actuator
US09/197,425 US6404104B1 (en) 1997-11-27 1998-11-23 Vibration type actuator and vibration type driving apparatus
EP98309728A EP0923144A3 (en) 1997-11-27 1998-11-26 Vibration type actuator and vibration type driving apparatus
KR1019980051198A KR100347124B1 (en) 1997-11-27 1998-11-27 Vibration type acturator and vibration type driving apparatus

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP9-326381 1997-11-27
JP32638197 1997-11-27
JP07470098A JP4077923B2 (en) 1997-11-27 1998-03-23 Vibration type actuator

Publications (3)

Publication Number Publication Date
JPH11220892A JPH11220892A (en) 1999-08-10
JPH11220892A5 true JPH11220892A5 (en) 2005-09-08
JP4077923B2 JP4077923B2 (en) 2008-04-23

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JP07470098A Expired - Fee Related JP4077923B2 (en) 1997-11-27 1998-03-23 Vibration type actuator

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Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4724904B2 (en) * 2000-08-11 2011-07-13 株式会社ニコン Vibration actuator
JP2004129458A (en) 2002-10-07 2004-04-22 Canon Inc Vibration-type actuator control device, vibration-type actuator system, and vibration-type actuator control method
JP4490232B2 (en) * 2004-10-14 2010-06-23 日本電信電話株式会社 Multi-degree-of-freedom drive mechanism
JP4731977B2 (en) 2005-04-22 2011-07-27 キヤノン株式会社 Optical equipment
JP4788451B2 (en) 2006-04-10 2011-10-05 株式会社豊田自動織機 Vibration actuator
JP4780770B2 (en) 2006-04-10 2011-09-28 株式会社豊田自動織機 Vibration actuator
JP5211463B2 (en) 2006-10-13 2013-06-12 株式会社豊田自動織機 Vibration actuator
JP5183108B2 (en) * 2007-06-25 2013-04-17 キヤノン株式会社 Control device for vibration wave drive device
JP5316045B2 (en) * 2009-02-09 2013-10-16 株式会社豊田自動織機 Support mechanism for vibration actuator
GB2479557B (en) * 2010-04-14 2012-04-11 Alan Wilkinson Magnetic tip with trace for paintless dent removal rod
JP5618085B2 (en) * 2011-02-15 2014-11-05 上野 敏幸 3-axis spherical motor
JP5484522B2 (en) * 2012-06-14 2014-05-07 キヤノン株式会社 Vibration wave drive
CN106527292B (en) * 2016-12-26 2023-07-28 中国工程物理研究院总体工程研究所 Control method and control device of multi-piezoelectric ceramic exciter parallel combination system
CN111251285B (en) * 2020-03-25 2023-10-27 南京航空航天大学 A piezoelectric driven two-degree-of-freedom deep-sea manipulator and its driving method

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