JPH11238779A - Thin-type substrate carrying multiple joint robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a compact robot by making the turning diameter of arms small and simplifying the structures of a Z-axis and a Y-axis moving equipment. SOLUTION: This robot has a vertical turning arm body 3, which is rotatably supported on a base 2 and is able to turn in the vertical direction, and a horizontal turning arm body 4 which is rotatably supported on the rear end of the vertical turning arm body 3 and turntable in the horizontal direction. At the rear end of the horizontal turning arm body 4, a hand section 7 is so installed as to be turntable in the horizontal direction. The vertical turning arm body 3 has a first and a second vertical turning arm 31, 32, and the horizontal turning arm body 4 has a moving base 41 and arm bodies 50A, 50B which are arranged in two rows and are turned in the horizontal direction on the moving base 41. On each of the arm bodies 50A, 50B, a hand 71A (71B) of the hand section 7 is mounted.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a robot for transporting a thin substrate such as a wafer or a glass substrate,
The present invention relates to a thin substrate transfer articulated robot which enables a long stroke of a hand without moving a robot base.

[0002]

2. Description of the Related Art Generally, a thin work such as a silicon wafer or a glass substrate is used as a semiconductor chip and is processed or transported in a clean room. Therefore, a robot that transports a thin work is also installed in a clean room, and has a configuration in which a thin work is transported from a predetermined position to a position where the thin work is processed by having an arm body that can be turned in the horizontal direction. Conventionally, a transfer robot for a thin work has a hand unit that is disposed in a clean room and supports the thin work, and a drive unit that rotates or moves the hand unit up and down, and the drive unit is disposed in a machine base. Was configured to. A transfer robot 110 shown in FIG. 14 is generally well-known, and includes a machine base 111 and an arm body 112 that can rotate or move up and down with respect to the machine base 111 and bend and extend. And a hand 113 that is rotatable with respect to. The arm body 112 is 2
And a second arm 115 adjacent to the first arm 114, the first arm 114 being rotated with respect to the machine base 111 by a motor (not shown) arranged in the machine base 111. The driving force is transmitted by a pulley / belt (not shown), and the second arm 115 rotates with respect to the first arm 114 by transmitting the driving force. This arm body 112
And the robot 110 having the hand 113 can suck and move the thin work accommodated in the cassette (not shown) and move it linearly, so that the thin work can be taken out or taken in without making contact with both ends of the cassette. Become.

[0003]

However, since the conventional transfer robot is configured to linearly move the hand by bending and extending the two arms, the movement position of the hand is limited. Therefore, when there is a lot of processing of the work, or when the work is moved to a long distance in one process, a rail is installed below the robot, and the robot itself is moved along the rail. However, moving the robot itself not only requires a large space, but also increases the equipment cost. In order to solve this problem, while increasing the number of arms, attaching a motor to a part of each swivel part, securing a long stroke of the hand by increasing the degree of freedom of the trajectory of the arm, the movement of the robot itself We are trying to improve it.

However, when the arm is moved in the horizontal direction, the turning radius must be increased and the distance between the robot and the cassette or between the processing stages must be set large. It was connected. Further, the movement of the arm body (or the hand) in the Z-axis (vertical direction) is driven by a motor, a ball screw, a pulley, a belt, or the like, which complicates the apparatus and causes dust.

An object of the present invention is to solve the above-mentioned problems. A first object of the present invention is to eliminate the movement of the robot itself, move the hand over a long stroke, and reduce the turning radius of the arm to make the entire apparatus compact. A second object is to provide a robot capable of extremely reducing dust generation by eliminating a Z-axis driving device constituted independently, and an improved thin substrate transfer multi-joint for that purpose. The purpose is to provide a robot.

[0006]

The thin substrate transfer articulated robot according to the present invention is configured as follows to solve the above-mentioned problems. That is, a thin substrate transfer articulated robot configured to support a thin substrate and be transferable to the next step, wherein a horizontal swivel arm group that can turn horizontally and a vertical swivel arm that can turn vertically. A hand for supporting a thin substrate is disposed at a tip end of the horizontal swing arm group, and the vertical swing arm group is supported by a machine base and rotatably connected to the horizontal swing arm group. It is characterized by the following.

[0007] This thin substrate transfer articulated robot also
The horizontal swing arm is configured to support the thin substrate and to be transportable to the next process, and has a horizontal swing arm group that can swing horizontally and a vertical swing arm group that can swing vertically. A hand for supporting the thin substrate is disposed at the tip of the group, and the vertical swing arm group is supported by the machine base and is rotatably connected to the horizontal swing arm group. A plurality of vertical pivot arms that pivot, one end of the vertical pivot arm being
A drive unit supported on the machine base is connected to the shaft, the drive unit supported by the machine base, and the horizontal swing arm group is swiveled in the horizontal direction. A plurality of horizontal swing arms, and a moving machine base provided with a drive unit for the horizontal swing arm, wherein the moving machine base is supported by the vertical swing arm group and supported by the vertical swing arm group. It is characterized by being driven by a device.

Preferably, at a starting position where the hand is placed on the machine base, the vertical swing arm on the side of the vertical swing arm group supported by the machine is substantially perpendicular to the machine base. What is necessary is just to be the thing arrange | positioned in the horizontal direction.

Further, at a starting position where the hand is placed on the machine, the vertical swing arm of the vertical swing arm group, which is supported by the machine, moves in a direction substantially perpendicular to the machine. It may be characterized by being arranged in.

[0010] Further, if the hand is provided with a thin substrate presence / absence sensor, and the hand is tiltably controlled in accordance with the storage state of the thin substrate stored in the cassette, the hand is further tilted. preferable.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings.

As shown in the perspective view of FIG. 1 and the front view of FIG. 2, a thin substrate transfer articulated robot (hereinafter referred to as a robot) 1 of this embodiment has a machine base 2 and one end supported by the machine base 2. A vertical swivel arm 3, a horizontal swivel arm 4 rotatably supported at the tip of the vertical swivel arm 3, and a hand unit 7 having one end pivotally supported by the horizontal swivel arm 4. It is configured.

The machine base 2 has two support plates 22 erected on a rectangular lower plate 21 with a gap therebetween, and a first shaft 23 is supported so as to penetrate the two support plates 22 in the horizontal direction. It is rotatably supported by the plate 22. A first motor 24 is connected to one end of the first shaft 23 via a speed reducer, and the first motor 24 is attached to one support plate 22.

The vertical swing arm body 3 comprises a first vertical swing arm 31 and a second vertical swing arm 32 formed in a hollow shape, and the front end (the right end side in FIG. 2) of the first vertical swing arm 31 is as described above. As shown in FIG. 3, it is inserted between the two support plates 22 of the machine base 2 and is fixed to the first shaft 23 so as to rotate vertically with respect to the support plate 22. . Therefore, the first vertical swing arm 31 is
It is rotated by the operation of the motor 24. 2, the front end of the second vertical swing arm 32 is connected to the rear end (the left end side in FIG. 2) of the first vertical swing arm 31, and the rear end of the second vertical swing arm 32 is located below the horizontal swing arm body 4 described later. It is connected to the mobile station 41 to be arranged. At the rear end of the first vertical swing arm 31, as shown in FIG. 4, a second shaft 34 connected via a reduction gear to a second motor 33 attached to the side surface of the first vertical swing arm 31. The first vertical swing arm 31 is pivotally supported via a bearing, and the second shaft 34 extends through the first vertical swing arm 31 to the side surface of the second vertical swing arm 32, It is fixed at the side of the vertical swing arm 32. As shown in FIG. 5, a third motor 35 attached to a side surface of the second vertical swing arm 32 is connected to a rear end of the second vertical swing arm 32 via a speed reducer.
The shaft 36 is pivotally supported via a bearing, and the third shaft 3
The reference numeral 6 penetrates through the second vertical arm 32 and is fixed to the mobile unit base 41 inside the mobile unit base 41. Therefore, the second vertical turning arm 32 is turned in the vertical direction by the second motor 34, and the mobile unit base 41 (the horizontal turning arm body 4) is turned by the third motor 36.

As shown in FIGS. 2 and 6, the horizontal swivel arm 4 forms a two-row arm 50 in the present embodiment, and has a mobile unit base 41 at the lower part. The mobile unit base 41 has a main body part 41a formed in a hollow shape and a mounting part 41b having a U-shaped cross section formed below the main body part 41a. The mounting portion 41b is supported by the second vertical swing arm 32 described above. In addition, 2
A support box 43 for rotating the column arm body 50 with respect to the mobile machine base 41 is rotatably supported by the main body 41a via a bearing 44, and the support box 43 is mounted on the main body 41a of the mobile machine base 41. It is connected to a fixedly supported rotating motor 45.

A hollow base 51 for supporting the two-row arm unit 50 is disposed above the mobile unit base 41, and the above-described support box 43 is fixed to the base 51 so that the base 51 can rotate together with the support box 43. It is formed. Further, in the base 51, hand movement motors 52A and 52B for driving the respective arm bodies 50A and 50B are arranged. The cross-sectional view shown in FIG. 6 shows one arm body 50A, and the other arm body 50B has the same configuration. The arm body 50A has a first horizontal turning arm 53A and a second horizontal turning arm 54A, and is configured to be rotatable at a node thereof, and is connected to the second horizontal turning arm 54 above the second horizontal turning arm 54A. The hand 71A of the hand unit 7 is disposed so as to be rotatable. The hand 71B attached above the other arm body 50B
Is formed above the hand 71A so as not to interfere with the hand 71B when the wafer W sucked by the hand 71A moves.

The first horizontal revolving arm 53A is formed in a hollow shape, and is fixed to a fourth shaft 55A connected to the front end of the first horizontal revolving arm 52A from the hand moving motor 52A via a speed reducer so as to rotate together therewith. In the horizontal swing arm 53A, a first pulley 56A is rotatably supported by the first horizontal swing arm 53A around a fourth shaft 55A. At the rear end of the first horizontal swing arm 53A, a first horizontal swing arm 53 is provided.
5A, the fifth shaft 57A is erected so as to be fixedly supported by the first horizontal pivot arm 53A.
The horizontal swing arm 54A extends to the inside of the front end.
A second pulley 58A is arranged around the fifth shaft 57A in the first horizontal swing arm 53A so as to be fixed to the wall of the second horizontal swing arm 54A, and is disposed between the first pulley 56A and the second pulley 57A. Is wound around the belt 59A. Then, the second horizontal swing arm 54A rotates with respect to the first horizontal swing arm 53A together with the second pulley 57A. In the second horizontal turning arm 54A of the fifth shaft 57A, a third pulley 60A is fixed around the fifth shaft 57A.
Fourth pivotally supported at the rear end of the horizontal swing arm 54A
A belt 62A is wound around a pulley 61A and arranged. The fourth pulley 61A is fixed at its upper part to a hand 71A disposed above the second horizontal turning arm 54A, and the hand 71A rotates with the fourth pulley 61A with respect to the second horizontal turning arm 54A.

The hand unit 7 is provided with the arm body 50A as described above.
And a hand 71B disposed above the arm body 50B. As shown in FIG. 7, each hand (71A / 71B) is connected to a fourth pulley (61A / 61B). Base part (72A / 72) to be connected
B) and the adsorbing sections (73A and 73B).
3A and 73B) are formed with a plurality of suction holes (73A and 73B) for sucking a wafer.
A. 74B) is connected to a vacuum device (not shown) via a piping member (not shown). In addition, the original part (72A
B) is provided with a wafer detection sensor (75A / 75B) so as to direct a light beam to the suction section (73A / 73B). The wafer detection sensor (75A / 75B) moves the hand (71A or 71B) up and down when a cassette (not shown) is faced up, and senses the presence / absence of a wafer by sensing two places on the end face of the wafer stored in the cassette. And the storage state of the wafer.

In this embodiment, the horizontal swivel arm 4 has two
Although the column arm body 50 is employed, it is needless to say that the single column arm body may be employed.

As shown in FIG. 8, the robot 1 configured as described above has a first position (position at which operation is started) P1 in which the mobile machine base 41 is disposed immediately above the machine base 2, and the first position P1. 1 The vertical swing arm 31 is located substantially horizontally with respect to the machine base 2. In the robot 1 of this embodiment, the length of the first vertical swing arm 31 is longer than the length from the floor on which the machine base 2 is arranged to the center position of the first shaft 23, and
When the turning of the vertical turning arm 31 is performed upward and moves sequentially along the processing stage, as shown in a simplified diagram of FIG. 9, the first turning arm 31 and the second turning arm 32 The trajectory of the node, that is, the second axis 34, turns upward with respect to the center of rotation of the first vertical turning arm 31, that is, the first axis 23 arranged on the machine base 2.

From the first position P1, the first vertical turning arm 31 is turned clockwise with respect to the base 2 by the first motor 24 and the second motor 33, and the second vertical turning arm 32 is moved from the first position P1. Pivots counterclockwise with respect to the first vertical pivot arm 31 to move the hand unit 7 to the second position P2 facing the front of the unprocessed cassette (not shown). At this time, the mobile unit base 41 is rotated by the third motor 35 with respect to the second vertical turning arm 32 such that the upper surface thereof (that is, the upper surface of each hand 71) maintains a horizontal plane.

Next, in order to detect the presence or absence of the wafer W stored in the unprocessed cassette, the first motor 24
By operating the motor 33 again, the first vertical turning arm 31 and the second vertical turning arm 32 are turned, and the moving machine base 41 is moved to the position P of the uppermost wafer W stored in the unprocessed cassette.
The wafer is reciprocated from 2 to the position P3 of the lowermost wafer. Then, the robot 1 confirms the presence of the wafer W.
Operates the hand movement motor 52A to move one hand 71A forward, and turns the first horizontal turning arm 53A and the second horizontal turning arm 54A to move the hand 71A straight toward the unprocessed cassette so as to move the wafer 71A. The robot 1 that has sucked the wafer W and returned to the original position by suctioning the wafer W with the hand 71A,
The hand 71A is moved to the front of the first processing stage among the plurality of processing stages arranged at positions facing the pre-processing cassette with the robot 1 interposed therebetween. Then, the wafer W
Is mounted on the first processing stage, the robot 1 again moves the hand unit to the front of the pre-processing cassette, sucks the next wafer W with any hand, moves to the front of the first processing stage, and waits. I do. When the processing is completed in the first processing stage, the hand that does not suck the wafer W is moved to the first processing stage, the wafer W is taken out, and the hand that is sucking the wafer W is moved to the first processing stage. The wafer W is moved to the stage and the next wafer W is mounted on the processing stage.
When the processed wafer is moved to the second processing stage or the processed cassette, the robot moves the hand to the front of the pre-processing cassette, sucks the wafer W, and then returns to the front of the first processing stage. stand by. And
This operation is repeated.

As described above, the Z-axis movement (up and down movement) and the Y-axis movement (movement to the front of the cassette or the processing stage) of the mobile machine base 41 are performed by the rotation of the vertical swing arm 3, and the X-axis movement ( The telescopic movement of the hand) is performed by turning the horizontal turning arm body 4. Therefore, unlike the conventional robot, the motor for driving the Z-axis, the ball screw, the belt and the pulley can be omitted, and the machine base can be simplified.

When the wafer W stored in the unprocessed cassette is arranged to be inclined with respect to the horizontal direction, the third motor 35 is operated so as to match the inclination of the wafer W, and By rotating the hand 41 with respect to the second vertical swing arm 32, the hand can be taken out while being tilted. Further, the hand can be inverted and the wafer W can be sucked below the hand.

A robot 81 shown in FIG. 10 is of a second embodiment, and is pivotally supported by a machine base 82 and horizontally pivoted above the vertical swing arm 83 as in the above-described embodiment. An arm body 84 and a hand unit 92 are arranged. As shown in FIG. 11, the robot 81 of this embodiment has a machine base 82 formed in a housing and rotates the first vertical swing arm 85 of the vertical swing arm body 82 in the machine base 82 with respect to the robot 1 described above. The difference is that the moving first motor 87 is housed, and that the rear end of the second vertical turning arm 86 is rotatably connected to the side surface of the mobile base 91 formed in the housing. Further, the mounting position of the second motor 88 is different from the first vertical turning arm 31 in the robot 1 of the above-described embodiment.
The robot 81 is attached to the second vertical swing arm 86 side. Therefore, the second shaft 88a connected to the shaft of the second motor 88 is fixed to the first vertical turning arm 85 and the outer case 88b of the second motor 88
Is fixed to the second vertical swing arm 86, and the second motor 8
The outer case 88b of the second motor 88 rotates together with the second vertical turning arm 86 with respect to the second shaft 88a fixed by the operation of FIG.

The structure of the two-row arm and the hand of the horizontal turning arm 84 is the same as that of the robot 1.

In the robot 81 configured as described above, when the mobile machine base 91 is at the first position P1 disposed immediately above the machine base, the first vertical swing arm 85 and the second vertical swing arm 86 Are all configured to hang vertically to the machine base 82. In the robot 81 of this embodiment, the length of the first vertical swing arm 85 is shorter than the length from the floor on which the machine base 82 is disposed to the center position of the first shaft 87a, and extends along the processing stage. When moving sequentially, as shown in the simplified diagram of FIG.
The trajectory of the vertical pivot arm 85 with the second vertical pivot arm 86, that is, the trajectory of the second axis 88a, is below the pivot center of the first vertical pivot arm 85, that is, the first axis 87a arranged on the machine base 82, The first vertical turning arm 85 and the second vertical turning arm 86 are turned so as to be folded.

The robot 101 of the third embodiment shown in FIG.
The first vertical turning arm 31 and the second vertical turning arm 32 are arranged in a substantially horizontal direction at the initial position, similarly to the robot 1, and the mobile base 91 operates as shown in FIG. Do.

Therefore, the robot 1 according to the first embodiment and the robot 101 according to the third embodiment are configured such that the nodes of the first vertical turning arm 31 and the second vertical turning arm 32 are turned above the starting point of the first vertical turning arm 31. Therefore, there is no limitation on the operation range of the Z-axis height position within the entire length range of the arm, and the robot 81 of the second embodiment can easily draw a linear trajectory of the mobile unit base and can simplify the control. Further, in any type of robot, movement of the Y axis (movement of the mobile unit base)
Can be moved in a straight line on the machine base by the vertical swivel arm body, so that the space between the machine and the processing stage installed or the space between the machine and the cassette installed can be shortened.

The configuration of each part in each mode, for example, the connection structure between each shaft and each arm, the mounting structure of the belt and the pulley, or the type of bearing, etc., does not change the gist of the present invention. Design changes are possible.

Further, the thin substrate is not limited to the wafer, but may be a glass substrate, or any other thin plate.

[0032]

According to the present invention, a thin substrate transfer articulated robot is configured to support a thin substrate and transfer it to the next step. A vertical swing arm group capable of swinging in a vertical direction, a hand for supporting a thin substrate is disposed at a tip end of the horizontal swing arm group, and the vertical swing arm group is supported by a machine base and the horizontal swing is performed. It is rotatably connected to the arm group. The movement of the Z-axis and the Y-axis of the hand is performed by turning the vertical turning arm group, and the X-axis movement is performed by turning the horizontal turning arm group. Therefore, the Z-axis driving device of the hand which has been conventionally arranged can be eliminated, and the robot itself can be made compact. In addition, since the Y-axis movement of the hand is performed by the vertical swivel arm group, it is a leap compared with the conventional robot. A long stroke can be assured, and even in a transfer system in which many processing stages are arranged, it is possible to make the system compact without increasing the turning in the X-axis direction. Further, since the hand can be tilted with respect to the horizontal direction, even if the wafer stored in the cassette is tilted, it can be sucked and transferred. Further, since the hand can be inverted, the wafer can be transported while being sucked from the upper surface.

This thin substrate transfer articulated robot also
The horizontal swing arm is configured to support the thin substrate and to be transportable to the next process, and has a horizontal swing arm group that can swing horizontally and a vertical swing arm group that can swing vertically. A hand for supporting the thin substrate is disposed at the tip of the group, the vertical swing arm group is supported by the machine base, and is rotatably connected to the horizontal swing arm group. One end of one of the vertical swing arms is fixed to a shaft that is horizontally rotatably arranged on the machine base, and the vertical swing arm is attached to the shaft. A driving device supported by a machine base is connected, and the horizontal swing arm group includes a plurality of horizontal swing arms that swing in a horizontal direction, and a mobile machine base including a drive unit for the horizontal swing arm. The table is the vertical swing arm group And it is configured to be driven by a supported drive in the vertical pivot arm group together is rotatably supported.

The movement of the Z-axis and the Y-axis of the hand is performed by turning the vertical turning arm group, and the X-axis movement is performed by turning the horizontal turning arm group. Therefore, the Z-axis driving device of the hand which has been conventionally arranged can be eliminated, and the robot itself can be made compact. In addition, since the Y-axis movement of the hand is performed by the vertical swivel arm group, it is a leap compared with the conventional robot. A long stroke can be assured, and even in a transfer system in which many processing stages are arranged, it is possible to make the system compact without increasing the turning in the X-axis direction. Further, since the hand can be tilted with respect to the horizontal direction, even if the wafer stored in the cassette is tilted, it can be sucked and transferred. Further, since the hand can be inverted, the wafer can be transported while being sucked from the upper surface.

Further, at the starting position where the hand is placed on the machine base, the vertical swing arm on the side of the vertical swing arm group supported by the machine is moved substantially horizontally with respect to the machine base. The vertical swing arm is swung above the machine base, and is operated without restriction on the operating range of the Z-axis height position within the entire length range of the vertical swing arm, and the hand is moved to the machine base. If the vertical swing arm on the side of the vertical swing arm group supported by the machine at the operation start position arranged above is arranged in a direction substantially perpendicular to the machine, the mobile machine Can be easily drawn and the control can be simplified.

Further, in this robot, even if the thin substrate stored in the cassette is stored in an inclined state, the state is detected by the presence / absence sensor arranged on the hand, and the hand is tilted in accordance with the thin substrate. be able to.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a robot according to one embodiment of the present invention.

FIG. 2 is a partial front sectional view of FIG. 1;

FIG. 3 is a sectional view taken along the line III-III in FIG. 1;

FIG. 4 is a sectional view taken along line IV-IV of FIG.

FIG. 5 is a sectional view taken along line VV of FIG. 1;

FIG. 6 is a sectional view showing one arm body of the horizontal swing arm body in FIG. 1;

FIG. 7 is a view showing a hand of the robot in FIG. 1;

FIG. 8 is a front view showing the operation of the robot of FIG. 1;

FIG. 9 is a simplified diagram of FIG.

FIG. 10 is a perspective view showing another type of robot.

FIG. 11 is a side sectional view of the robot of FIG. 8;

FIG. 12 is a simplified diagram showing the operation of the robot in FIG. 8;

FIG. 13 is a perspective view showing a robot according to still another embodiment.

FIG. 14 shows a conventional robot.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Thin board transfer articulated robot 2 ... Machine base 3 ... Vertical turning arm (vertical turning arm group) 4 ... Horizontal turning arm (horizontal turning arm group) 7 ... Hand part 23 ... First axis 24 ... First motor DESCRIPTION OF SYMBOLS 31 ... 1st vertical revolving arm 32 ... 2nd vertical revolving arm 33 ... 2nd motor 34 ... 2nd axis 35 ... 3rd motor 36 ... 3rd axis 41 ... Mobile stand 53 ... 1st horizontal revolving arm 54 ... 2nd Horizontal swing arm 71 ... Hand

Claims (5)

[Claims] 1. A thin substrate transfer articulated robot configured to support a thin substrate and transfer it to the next step, comprising: a horizontal swivel arm group that can be swiveled in a horizontal direction; and a vertical swivel that can be swiveled in a vertical direction. An arm group, a hand for supporting a thin substrate is disposed at a tip end of the horizontal swing arm group, and the vertical swing arm group is supported by a machine base and rotatably connected to the horizontal swing arm group. A thin-substrate transfer articulated robot characterized in that: 2. A thin substrate transfer articulated robot configured to support a thin substrate and transfer it to a next step, comprising: a horizontal rotation arm group capable of rotating in a horizontal direction; and a vertical rotation capable of rotating in a vertical direction. An arm group, a hand for supporting a thin substrate is disposed at a tip end of the horizontal swing arm group, and the vertical swing arm group is supported by a machine base and rotatably connected to the horizontal swing arm group. The vertical swing arm group includes a plurality of vertical swing arms that swing vertically, and one end of one of the vertical swing arms is arranged on the machine base so as to be horizontally swingable. A drive device supported by the machine base is connected to the shaft, and the horizontal swing arm group includes a plurality of horizontal swing arms that swing horizontally, and a drive unit of the horizontal swing arm. Equipped with mobile units The thin substrate transfer articulated robot, wherein the mobile unit base is pivotally supported by the vertical swing arm group and driven by a driving device supported by the vertical swing arm group. 3. A vertical pivot arm on a side of the vertical pivot arm group supported by the machine at a starting position where the hand is placed on the machine, and a vertical pivot arm in a substantially horizontal direction with respect to the machine. The multi-jointed robot for transporting a thin substrate according to claim 1 or 2, wherein 4. A vertical turning arm on a side of the vertical turning arm group supported by the machine at a starting position where the hand is arranged on the machine in a direction substantially perpendicular to the machine. The multi-jointed robot for transporting a thin substrate according to claim 1 or 2, wherein 5. The hand according to claim 2, further comprising a thin substrate presence / absence sensor disposed on the hand, and controlling the hand to be tiltable in accordance with a stored state of the thin substrate stored in a cassette. Articulated robot that transports thin substrates.