JPH11242016A - Oxygen sensor for high temperature melt material - Google Patents

Oxygen sensor for high temperature melt material

Info

Publication number
JPH11242016A
JPH11242016A JP10060529A JP6052998A JPH11242016A JP H11242016 A JPH11242016 A JP H11242016A JP 10060529 A JP10060529 A JP 10060529A JP 6052998 A JP6052998 A JP 6052998A JP H11242016 A JPH11242016 A JP H11242016A
Authority
JP
Japan
Prior art keywords
temperature melt
oxygen sensor
melt
electrode
platinum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10060529A
Other languages
Japanese (ja)
Other versions
JP2952350B2 (en
Inventor
Masaru Yamashita
勝 山下
Yutaka Yamanaka
裕 山中
Junji Nishii
準治 西井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to JP10060529A priority Critical patent/JP2952350B2/en
Publication of JPH11242016A publication Critical patent/JPH11242016A/en
Application granted granted Critical
Publication of JP2952350B2 publication Critical patent/JP2952350B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide an oxygen sensor for a high temperature melt material which can be simply manufactured by precisely and stably measuring a potential caused by an oxidation-reduction state at a position to be measured in a high temperature melt material or particularly a glass melt liquid in an arbitrary gas atmosphere. SOLUTION: A reference electrode 2 has a columnar stabilized zirconia 21 formed with a recess 211 extended clown from an upper end face. A coiled spring-like platinum lead wire 5 having an outer diameter larger than an inner diameter of the recess is elastically radially reduced, inserted into the recess, and fixed in the recess. And, a measuring electrode has a conductive core wire for an electrode, cylindrical ceramics having gas barrier properties and nonconductivity to cover the core wire in an end exposed state at a position including an interface between the high temperature melt material and an atmospheric gas, and a ceramic cement having gas barrier properties and nonconductivity charged in a gap between the wire and the ceramics.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、ガラス等の高温融
体内部の酸素活量を高精度で測定する高温融体用酸素セ
ンサーに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an oxygen sensor for a high-temperature melt for measuring the oxygen activity inside a high-temperature melt such as glass with high accuracy.

【0002】[0002]

【従来の技術】ガラス融体の酸化還元状態は融体自身の
物性や最終製品の品質に大きな影響を与えるため、厳密
な制御が要求される。特に近年のオプトエレクトロニク
ス分野で多用されている液晶基板や種々の光学ガラスの
製造工程では、微小な泡を完全に清澄する必要がある
が、泡の発生、消滅は、ガラス融体における酸素ガスの
溶解度等と密接に関係していると考えられている。した
がって、融体の酸化還元状態を厳密に且つ長時間に亘っ
て制御することは極めて重要である。したがって、一般
に製品化されるガラスの溶融温度である1550℃前後
の高温に長時間耐え、且つ酸化還元状態に起因する電位
を厳密に測定できる酸素センサーの開発が求められてい
る。
2. Description of the Related Art Strict control is required because the redox state of a glass melt greatly affects the physical properties of the melt itself and the quality of a final product. In particular, in the manufacturing process of liquid crystal substrates and various optical glasses, which are frequently used in the field of optoelectronics in recent years, it is necessary to completely clarify fine bubbles, but the generation and disappearance of bubbles are caused by the generation of oxygen gas in the glass melt. It is considered to be closely related to solubility and the like. Therefore, it is extremely important to strictly control the redox state of the melt for a long time. Therefore, there is a need for the development of an oxygen sensor that can withstand a high temperature of about 1550 ° C., which is generally the melting temperature of commercially produced glass, for a long time and that can precisely measure the potential caused by the oxidation-reduction state.

【0003】高温融体中で使用可能な酸素センサーに関
する研究は古くから行われており、一般的には、基準電
極として固体電解質である安定化ジルコニア(イットリ
ア添加ジルコニア)、測定電極として白金をそれぞれ用
い、これらの電極間に生じる電位差から、酸化還元状態
を正確に反映する酸素活量を求めるものである。例え
ば、A.Lenhartらは、白金導線を点接触させ白
金ペーストで固定した円筒状安定化ジルコニアを基準電
極に用い、白金線を測定電極に用いたセンサーを提案し
ている(Glasrech.Ber.58(1985)139-147)。また、類似
のセンサーをH.M.Simonらも報告しており(Gl
asrech.Ber.61(1988)293-299)、製品製造用ガラス溶融
タンクでのオンライン計測も試みている。
Research on oxygen sensors that can be used in a high-temperature melt has been conducted for a long time. Generally, stabilized zirconia (yttria-added zirconia), which is a solid electrolyte, is used as a reference electrode, and platinum is used as a measurement electrode. The oxygen activity that accurately reflects the oxidation-reduction state is determined from the potential difference generated between these electrodes. For example, A. Lenhart et al. Have proposed a sensor using a cylindrical stabilizing zirconia point-contacted with a platinum paste and fixed with a platinum paste as a reference electrode, and using a platinum wire as a measurement electrode (Glasrech. Ber. 58 (1985) 139). -147). A similar sensor is also described by H.S. M. Simon et al. Also reported (Gl
asrech.Ber.61 (1988) 293-299), and online measurement in a glass melting tank for product production is also being attempted.

【0004】[0004]

【発明が解決しようとする課題】しかし、上記従来の酸
素センサーには以下のような問題点がある。すなわち、
基準電極である安定化ジルコニアと白金導線とは点接触
しているため、高温雰囲気に長時間さらされると両者の
熱膨張率差によって接触点が外れる恐れがある。また、
測定電極を融液内に浸漬すると、融液と雰囲気ガスとの
界面部分で局部電池が形成され、雰囲気ガス成分の微小
な変動によって測定電位に誤差が生じる。
However, the above-mentioned conventional oxygen sensor has the following problems. That is,
Since the stabilized zirconia, which is the reference electrode, and the platinum conductor are in point contact with each other, if they are exposed to a high-temperature atmosphere for a long time, there is a possibility that the contact point may be deviated due to a difference in thermal expansion coefficient between the two. Also,
When the measurement electrode is immersed in the melt, a local battery is formed at the interface between the melt and the atmosphere gas, and a slight variation in the atmosphere gas component causes an error in the measurement potential.

【0005】本発明は、高温融体、特にガラス融液中の
目的とする箇所での酸化還元状態に起因する電位を、任
意のガス雰囲気中で精密に且つ安定して測定することが
でき、且つ簡易に製作することができる高温融体用酸素
センサーを提供することを目的とする。
According to the present invention, it is possible to accurately and stably measure a potential caused by an oxidation-reduction state at a target portion in a high-temperature melt, particularly a glass melt, in an arbitrary gas atmosphere. It is another object of the present invention to provide a high-temperature melt oxygen sensor that can be easily manufactured.

【0006】[0006]

【課題を解決するための手段】本発明者は、上記のよう
な従来技術の問題を解決すべく鋭意研究を進めた結果、
以下の構成を有する酸素センサーにより上記問題点を解
決し得ることを見出した。
The inventor of the present invention has made intensive studies to solve the above-mentioned problems of the prior art.
It has been found that the above problem can be solved by an oxygen sensor having the following configuration.

【0007】すなわち、本発明は、基準電極及び測定電
極を高温融体に浸漬し該基準電極と該測定電極との電位
差から前記高温融体の酸素活量を測定する酸素センサー
であって、前記基準電極は、上端面から下方へ延びる凹
部が形成された柱状安定化ジルコニアを備え、前記凹部
内に、前記凹部の内径よりも大きな外径を有するコイル
スプリング状の白金導線が弾性的に縮径されて挿入され
該凹部内に固定されており、前記測定電極は、電極用導
電性芯線と、該芯線を前記高温融体及び雰囲気ガスの界
面を含む位置で且つ先端部露出状態で覆うガスバリア性
及び非導電性を有する筒状セラミックスと、該芯線及び
該筒状セラミックスの間隙に充填されたガスバリア性及
び非導電性を有するセラミックスセメントとを備えてい
ることを特徴とする高温融体用酸素センサーを提供する
ものである。
That is, the present invention is an oxygen sensor for immersing a reference electrode and a measurement electrode in a high-temperature melt and measuring the oxygen activity of the high-temperature melt from a potential difference between the reference electrode and the measurement electrode. The reference electrode includes a columnar stabilizing zirconia having a recess extending downward from the upper end surface, and a coil spring-shaped platinum conductive wire having an outer diameter larger than the inner diameter of the recess is elastically reduced in the recess. The measuring electrode has a gas barrier property that covers the conductive core wire for the electrode and the position including the interface between the high-temperature melt and the atmosphere gas and in an exposed state at the tip end. And a cylindrical ceramic having non-conductivity, and a ceramic cement having gas barrier properties and non-conductivity filled in the gap between the core wire and the cylindrical ceramic. There is provided a hot melt-body oxygen sensor.

【0008】好適には、前記柱状安定化ジルコニアの凹
部内面における前記白金導線との接触部に白金ペースト
が塗布される。
[0008] Preferably, a platinum paste is applied to a contact portion of the pillar-shaped stabilized zirconia with the platinum conductor on the inner surface of the concave portion.

【0009】また、前記筒状セラミックスの内径に対す
る前記芯線の外径の比が0.95以上1未満であること
が望ましい さらに、好適には、前記芯線は白金線とされ、前記筒状
セラミックスはアルミナからなり、前記セラミックスセ
メントはアルミナセメントとされる。
Preferably, the ratio of the outer diameter of the core wire to the inner diameter of the cylindrical ceramic is 0.95 or more and less than 1. More preferably, the core wire is a platinum wire, and the cylindrical ceramic is It is made of alumina, and the ceramic cement is alumina cement.

【0010】[0010]

【発明の実施の形態】以下、添付図面を参照しつつ本発
明の実施形態について説明する。図1は、本発明の一実
施形態に係る高温融体用酸素センサーの使用状態の一例
を示す概略図である。図1に示すように、本発明に係る
高温融体用酸素センサー1は、基準電極2、測定電極
3、電圧計4、白金導線5、白金線6を備えている。酸
素センサー1で溶液7内の酸素活量を測定するに際し、
基準電極2を融液7内に浸漬し、測定電極3を融液7内
の酸素活量を測定する場所に浸漬する。これにより生じ
る両電極2、3間の電位差をそれぞれ白金導線5、白金
線6を介して電圧計4で測定することにより測定電極3
近傍の酸素活量を算出する。なお、基準電極2は、融液
7表面近傍に浸漬するのが望ましい。これは、浸漬体積
を少なくすることにより、ジルコニアの溶解速度を低下
させ、基準電極2の寿命をより長くするためである。
Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a schematic view showing an example of a usage state of an oxygen sensor for a high-temperature melt according to an embodiment of the present invention. As shown in FIG. 1, an oxygen sensor 1 for a high-temperature melt according to the present invention includes a reference electrode 2, a measurement electrode 3, a voltmeter 4, a platinum conductor 5, and a platinum wire 6. When measuring the oxygen activity in the solution 7 with the oxygen sensor 1,
The reference electrode 2 is immersed in the melt 7, and the measurement electrode 3 is immersed in the melt 7 at a location where the oxygen activity is measured. The potential difference between the two electrodes 2 and 3 caused by this is measured by a voltmeter 4 via a platinum lead wire 5 and a platinum wire 6, respectively.
Calculate the nearby oxygen activity. The reference electrode 2 is desirably immersed near the surface of the melt 7. This is because, by reducing the immersion volume, the dissolution rate of zirconia is reduced, and the life of the reference electrode 2 is prolonged.

【0011】図2は、酸素センサー1を構成する基準電
極2の縦断面図である。図2に示すように、基準電極2
を構成する円柱状安定化ジルコニア21は、上端部分に
円形断面を有する凹部211が形成されている。白金導
線5の先端は、凹部211の内径よりも大きな外径を有
するコイルスプリング状とされており、弾性的に縮径さ
せて凹部211内に挿入した状態で凹部211内面と密
着する。さらに、白金導線5と安定化ジルコニア21間
の電気抵抗を低下させるため、白金導線5と凹部211
との接触部全面に白金ペースト22を塗布し、該ペース
トに接触させて白金導線5を凹部211内面に固着させ
ている。かかる構成により、円柱状安定化ジルコニア2
1における融液7への浸漬部分から白金導線5との接触
部分までの距離が短縮されるため、円柱状安定化ジルコ
ニア21の上下方向の温度差によって生じる熱起電力の
影響を低減し得る。
FIG. 2 is a longitudinal sectional view of the reference electrode 2 constituting the oxygen sensor 1. As shown in FIG.
Is formed with a concave portion 211 having a circular cross section at an upper end portion. The distal end of the platinum conductive wire 5 is in the form of a coil spring having an outer diameter larger than the inner diameter of the concave portion 211, and comes into close contact with the inner surface of the concave portion 211 in a state of being elastically reduced in diameter and inserted into the concave portion 211. Further, in order to reduce the electric resistance between the platinum conductor 5 and the stabilized zirconia 21, the platinum conductor 5 and the recess 211 are formed.
A platinum paste 22 is applied to the entire surface of the contact portion, and the platinum conductive wire 5 is fixed to the inner surface of the concave portion 211 by making contact with the paste. With this configuration, the columnar stabilized zirconia 2
Since the distance from the portion immersed in the melt 7 to the contact portion with the platinum conductor 5 in 1 is shortened, the effect of the thermoelectromotive force caused by the vertical temperature difference of the cylindrical stabilized zirconia 21 can be reduced.

【0012】本実施形態において、円柱状安定化ジルコ
ニア21は、長さ50mm、外径5mmとされている。
凹部211の内径は、小さすぎると白金導線5の挿入及
び白金ペースト22での固着が困難となるため、安定化
ジルコニア21の外径の30%以上とすることが好まし
く、40%以上とするのがより好ましい。また、逆に大
きすぎると凹部211周壁の肉厚が薄くなり測定中に破
損するおそれがあるため、安定化ジルコニア21の外径
の80%以下とすることが好ましく、70%以下とする
のがより好ましい。また、安定化ジルコニア21の破損
を避けるため、凹部211の深さは、後述のアルミナ管
23に挿入される安定化ジルコニア21の部分の長さよ
りも浅いことが好ましい。このような観点から、本実施
形態における凹部211は、内径3mm、深さ10mm
とされている。また、白金導線5の直径は、小さすぎる
と凹部211内壁に対する白金導線5のコイルスプリン
グ状先端の押圧力が弱くなり固定が不十分となるため、
凹部211の内径の5%以上とするのが好ましく、10
%以上とするのがより好ましい。逆に大きすぎると白金
導線5の先端をスプリング状に加工することが困難とな
るため、凹部211の内径の40%以下とすることが好
ましく、30%以下とするのがより好ましい。本実施形
態において、白金導線5は直径0.5mmとされ、その
先端部は外径3.1mmのコイルスプリング状に成形さ
れている。
In this embodiment, the columnar stabilized zirconia 21 has a length of 50 mm and an outer diameter of 5 mm.
If the inner diameter of the concave portion 211 is too small, it becomes difficult to insert the platinum conductive wire 5 and fix it with the platinum paste 22. Therefore, the inner diameter is preferably 30% or more, more preferably 40% or more, of the outer diameter of the stabilized zirconia 21. Is more preferred. On the other hand, if it is too large, the wall thickness of the peripheral wall of the concave portion 211 becomes thin and may be damaged during the measurement. Therefore, the outer diameter of the stabilized zirconia 21 is preferably 80% or less, more preferably 70% or less. More preferred. Further, in order to avoid breakage of the stabilized zirconia 21, the depth of the concave portion 211 is preferably smaller than the length of the portion of the stabilized zirconia 21 inserted into the alumina tube 23 described later. From such a viewpoint, the concave portion 211 in the present embodiment has an inner diameter of 3 mm and a depth of 10 mm.
It has been. On the other hand, if the diameter of the platinum wire 5 is too small, the pressing force of the coil spring-shaped tip of the platinum wire 5 against the inner wall of the recess 211 becomes weak, and the fixing is insufficient.
Preferably, the inner diameter is not less than 5% of the inner diameter of the concave portion 211.
% Is more preferable. Conversely, if it is too large, it becomes difficult to process the tip of the platinum conductive wire 5 into a spring shape. Therefore, it is preferable to set the inner diameter of the recess 211 to 40% or less, and more preferably 30% or less. In the present embodiment, the platinum conductive wire 5 has a diameter of 0.5 mm, and the tip is formed in a coil spring shape having an outer diameter of 3.1 mm.

【0013】また、安定化ジルコニア21の上端面から
下方12mmの部分は、内径5mm、外径8mm、長さ
600mmのアルミナ管23に挿入され、ジルコニアセ
メント24を介してアルミナ管23に固着されている。
アルミナ管23は、凹部211と白金導線5との接触部
近傍が融液7上部のガスの影響を受けないようにするた
めに設けられている。なお、アルミナ管23は、空気を
浸透させず電気絶縁性及び耐熱性を有する他の材料から
なる管とすることもできる。さらに、ジルコニアセメン
ト24を透過してくる融液7上部のガスの影響を低減
し、凹部211と白金導線5との接触面近傍を空気雰囲
気で満たすため、空気注入管25が設けられている。本
実施形態では、空気注入管25は、外径3mm、内径2
mm、長さ600mmのアルミナ管とされている。
A portion 12 mm below the upper end face of the stabilized zirconia 21 is inserted into an alumina tube 23 having an inner diameter of 5 mm, an outer diameter of 8 mm and a length of 600 mm, and is fixed to the alumina tube 23 via a zirconia cement 24. I have.
The alumina tube 23 is provided so that the vicinity of the contact portion between the recess 211 and the platinum conductor 5 is not affected by the gas above the melt 7. The alumina tube 23 may be a tube made of another material that does not allow air to permeate and has electrical insulation and heat resistance. Further, an air injection pipe 25 is provided to reduce the influence of the gas above the melt 7 permeating the zirconia cement 24 and to fill the vicinity of the contact surface between the recess 211 and the platinum conductor 5 with an air atmosphere. In the present embodiment, the air injection pipe 25 has an outer diameter of 3 mm and an inner diameter of 2 mm.
mm and an alumina tube having a length of 600 mm.

【0014】図3は、酸素センサー1を構成する測定電
極3の縦断面図である。図3に示すように、測定電極3
を構成する白金線6は、直径1.0mmとされ、先端の
電位測定部分は、融液7との接触面積を広げるため、外
径20mmの螺旋状に成形されている。白金線6は、特
に融液7と雰囲気ガス8との界面付近で局部電池が形成
されやすいため、融液7に浸漬する先端部分以外を絶縁
体31で覆うことにより電気的に絶縁されている。本実
施形態では、絶縁体31は、高温の融液7によって浸食
されにくいセラミックスである、内径1.1mm、外径
3mmの焼結性の高い高純度アルミナ管とされている。
このように構成した測定電極3は、融液7に浸漬する時
間や融液7の組成、温度に依存するが、例えば、140
0℃のソーダ石灰ガラス融液の場合、肉厚3mm程度の
アルミナ管で200時間以上の連続測定が可能である。
さらに、長時間の測定をすれば、アルミナ管31と白金
線6との間隙に融液7が浸透し、アルミナ管31内のガ
スとの界面で局部電池が形成されるおそれがある。これ
を避けるには、アルミナ管31と白金線6との間隙への
融液7及びガスの侵入を遮断するのが望ましく、本実施
形態では、絶縁性に優れたセラミックスセメント32が
充填されている。本実施形態では、セラミックスセメン
ト32としては、アルミナ管31と熱膨張率が近いアル
ミナセメントを使用し、充填後温度1200℃で3時間
焼結されている。なお、アルミナ管31の内径に対する
白金線6の外径の比は、小さいとセラミックスセメント
32を充填しても間隙に融液7が侵入するおそれがある
ため、0.95以上で、できる限り1に近いことが望ま
しい(本実施形態のアルミナ管31と白金線6はこの条
件を満足する)。
FIG. 3 is a longitudinal sectional view of the measuring electrode 3 constituting the oxygen sensor 1. As shown in FIG.
Has a diameter of 1.0 mm, and the potential measurement portion at the tip is formed in a spiral shape with an outer diameter of 20 mm in order to increase the contact area with the melt 7. Since a local battery is easily formed around the interface between the melt 7 and the atmospheric gas 8, the platinum wire 6 is electrically insulated by covering the portion other than the tip portion immersed in the melt 7 with the insulator 31. . In the present embodiment, the insulator 31 is a high-purity alumina tube with a high sinterability having an inner diameter of 1.1 mm and an outer diameter of 3 mm, which is a ceramic that is not easily eroded by the high-temperature melt 7.
The measuring electrode 3 configured in this manner depends on the time of immersion in the melt 7, the composition of the melt 7, and the temperature.
In the case of a soda-lime glass melt at 0 ° C., continuous measurement for 200 hours or more is possible with an alumina tube having a thickness of about 3 mm.
Furthermore, if the measurement is performed for a long time, the melt 7 permeates into the gap between the alumina tube 31 and the platinum wire 6, and a local battery may be formed at the interface with the gas in the alumina tube 31. In order to avoid this, it is desirable to block the infiltration of the melt 7 and gas into the gap between the alumina tube 31 and the platinum wire 6. In the present embodiment, the ceramic cement 32 having excellent insulation properties is filled. . In the present embodiment, as the ceramic cement 32, an alumina cement having a coefficient of thermal expansion close to that of the alumina tube 31 is used, and sintered at a temperature of 1200 ° C. for 3 hours after filling. If the ratio of the outer diameter of the platinum wire 6 to the inner diameter of the alumina tube 31 is small, the melt 7 may enter the gap even if the ceramic cement 32 is filled. (Alumina tube 31 and platinum wire 6 of the present embodiment satisfy this condition).

【0015】図4は、上記の酸素センサー1を、組成が
Na2Oを20(mol%)、CaOを10(mol%)、Si
2を70(mol%)含む1200℃〜1350℃のガラ
ス融液中に浸漬し、電極間電位、すなわち酸素活量の変
動を測定した結果を示す。図4において、(A)は、測
定電極3を融液7内部に浸漬した場合、(B)は、
(A)と同一の条件で繰り返し測定した結果を示す。ま
た、(C)は、測定電極3を融液7の表面近傍に浸漬し
た場合の測定結果を示す。図4に示すように、酸素セン
サー1は、融液の温度変動及び雰囲気ガスの酸素濃度変
動に対して再現性よく敏感に応答した。これは、融液の
温度変動や雰囲気ガスの酸素濃度変動によって生じる融
液内の酸素活量変動を検出できることを意味し、測定値
が雰囲気ガスの酸素濃度変動に直接影響されているので
はない。このことは、後述する図5の(a)の測定結果
との対比からより明らかである。また、(C)の測定値
は、ほぼ雰囲気酸素濃度と等しく、これは、融液内表面
近傍の酸素活量を測定可能であることを意味する。従っ
て、融液の深さ方向での酸素活量の差異も検出可能であ
る。
FIG. 4 shows the oxygen sensor 1 having a composition of 20 (mol%) of Na 2 O, 10 (mol%) of CaO,
The results of immersion in a glass melt at 1200 ° C. to 1350 ° C. containing 70 (mol%) of O 2 and measurement of the potential between electrodes, that is, the change in oxygen activity are shown. In FIG. 4, (A) shows a case where the measuring electrode 3 is immersed in the melt 7;
The result of repeated measurement under the same conditions as (A) is shown. (C) shows a measurement result when the measurement electrode 3 is immersed near the surface of the melt 7. As shown in FIG. 4, the oxygen sensor 1 responded with good reproducibility to the temperature fluctuation of the melt and the oxygen concentration fluctuation of the atmospheric gas. This means that fluctuations in oxygen activity in the melt caused by fluctuations in the temperature of the melt or fluctuations in the oxygen concentration of the atmosphere gas can be detected, and the measured values are not directly affected by the fluctuations in the oxygen concentration of the atmosphere gas. . This is more apparent from the comparison with the measurement result of FIG. Further, the measured value of (C) is almost equal to the atmospheric oxygen concentration, which means that the oxygen activity near the inner surface of the melt can be measured. Therefore, a difference in the oxygen activity in the depth direction of the melt can be detected.

【0016】また、前記ガラス融液の温度を1350℃
〜1400℃の高温領域とした場合にも、雰囲気ガスの
酸素濃度変動に直接左右されるのではなく、融液への雰
囲気ガスの影響を検出でき、正確な電位差測定が可能で
あった。
The temperature of the glass melt is 1350 ° C.
Even in a high temperature range of up to 1400 ° C., the influence of the atmosphere gas on the melt could be detected without being directly influenced by the oxygen concentration fluctuation of the atmosphere gas, and accurate potential difference measurement was possible.

【0017】図5は、酸素センサーを、アンチモンとし
てSb23を1(mol%)含有し、Na2Oを20(mol
%)、CaOを10(mol%)、SiO2を70(mol%)含
むガラス融液中に浸漬し、融液内の酸素活量の変動を測
定した結果を示す。図5において、(a)は、図3に示
す測定電極3によって測定した結果、(b)は、図3に
示すアルミナ管31で覆われていない白金線6で測定し
た結果を示す。この場合、融液中のアンチモンの作用に
より、雰囲気ガスの酸素濃度変動に基づく融液内の酸素
活量変動はほとんど無いと考えられる。図に示すよう
に、(a)の測定値は、雰囲気ガスの酸素濃度変動の影
響をほとんど受けていない。これは、図3に示す測定電
極3による測定値が、雰囲気ガスの酸素濃度変動に直接
影響されないことを意味する。また、(b)の測定値
は、融液と雰囲気ガスとの界面付近で局部電池が形成さ
れやすいため、雰囲気ガスの酸素濃度変動に直接影響さ
れている。
FIG. 5 shows that the oxygen sensor contains 1 (mol%) of Sb 2 O 3 as antimony and 20 (mol%) of Na 2 O.
%), 10 (mol%) of CaO, and 70 (mol%) of SiO 2 were immersed in a glass melt, and the results of measuring the fluctuation of the oxygen activity in the melt are shown. In FIG. 5, (a) shows the result of measurement with the measurement electrode 3 shown in FIG. 3, and (b) shows the result of measurement with the platinum wire 6 not covered with the alumina tube 31 shown in FIG. In this case, it is considered that there is almost no change in the oxygen activity in the melt due to the change in the oxygen concentration of the atmosphere gas due to the action of antimony in the melt. As shown in the figure, the measured value of (a) is hardly affected by the change in the oxygen concentration of the atmospheric gas. This means that the value measured by the measurement electrode 3 shown in FIG. 3 is not directly affected by the change in the oxygen concentration of the atmospheric gas. Further, the measured value (b) is directly affected by the change in the oxygen concentration of the atmosphere gas because a local battery is easily formed near the interface between the melt and the atmosphere gas.

【0018】また、図6に示すように、測定電極3を、
内径1.6mmのアルミナ管31、外径1.5mmの白
金線6で構成し、アルミナ管31と白金線6の間隙にア
ルミナセメントを充填しないものとした。この測定電極
3を用いて融液の酸素活量測定をしたところ、この間隙
に空気が流通するため、融液との界面で局部電池を形成
し、安定した電位差測定ができなかった。
As shown in FIG. 6, the measuring electrode 3 is
An alumina tube 31 having an inner diameter of 1.6 mm and a platinum wire 6 having an outer diameter of 1.5 mm were used, and the gap between the alumina tube 31 and the platinum wire 6 was not filled with alumina cement. When the oxygen activity of the melt was measured using the measurement electrode 3, air flowed through the gap, and a local battery was formed at the interface with the melt, and stable potential difference measurement could not be performed.

【0019】[0019]

【発明の効果】このように、本発明に係る酸素センサー
によれば、基準電極として上端面から下方へ延びる凹部
を形成した柱状安定化ジルコニアを用い、該凹部に該凹
部の内径よりも大きな外径を有するスプリング状の白金
導線を弾性的に縮径して挿入し該凹部内に固定する構成
としたため、従来の酸素センサーに比し、安定化ジルコ
ニアと白金導線の熱膨張率差の影響を受けにくい安定し
た測定ができるとともに、簡易に製作することも可能で
ある。
As described above, according to the oxygen sensor of the present invention, the columnar stabilized zirconia having the concave portion extending downward from the upper end surface is used as the reference electrode, and the outer diameter of the concave portion is larger than the inner diameter of the concave portion. Since the spring-shaped platinum conductor having a diameter is elastically reduced in diameter and inserted and fixed in the recess, the influence of the difference in thermal expansion coefficient between the stabilized zirconia and the platinum conductor compared to the conventional oxygen sensor is reduced. Stable measurement that is difficult to receive is possible, and it is also possible to manufacture easily.

【0020】また、測定電極をセラミックスで覆い、該
測定電極と該セラミックスとの間隙をセラミックスセメ
ントで充填する構成としたため、融体と雰囲気ガスの界
面における局部電池の形成を防止し、測定値の誤差を抑
制することが可能である。
Further, since the measuring electrode is covered with ceramics and the gap between the measuring electrode and the ceramics is filled with ceramic cement, formation of a local battery at the interface between the melt and the atmosphere gas is prevented, and the measured value is reduced. It is possible to suppress errors.

【0021】したがって、本発明に係る酸素センサーに
よれば、高温融体中の局所領域における酸素活量の精密
測定が可能である。
Therefore, the oxygen sensor according to the present invention enables precise measurement of oxygen activity in a local region in a high-temperature melt.

【図面の簡単な説明】[Brief description of the drawings]

【図1】図1は、本発明の一実施形態に係る高温融体用
酸素センサーの使用状態の一例を示す概略図である。
FIG. 1 is a schematic view showing an example of a usage state of an oxygen sensor for a high-temperature melt according to an embodiment of the present invention.

【図2】図2は、図1に示す酸素センサーを構成する基
準電極の縦断面図である。
FIG. 2 is a vertical sectional view of a reference electrode included in the oxygen sensor shown in FIG.

【図3】図3は、図1に示す酸素センサーを構成する測
定電極の縦断面図である。
FIG. 3 is a longitudinal sectional view of a measurement electrode constituting the oxygen sensor shown in FIG. 1;

【図4】図4は、図1に示す酸素センサーを、高温ガラ
ス融液中に浸漬し、酸素活量の変動を測定した結果の一
例を示す。
FIG. 4 shows an example of a result obtained by immersing the oxygen sensor shown in FIG. 1 in a high-temperature glass melt and measuring a change in oxygen activity.

【図5】図5は、酸素センサーを、アンチモンを含有す
る高温ガラス融液中に浸漬し、酸素活量の変動を測定し
た結果の一例を示す。
FIG. 5 shows an example of a result obtained by immersing an oxygen sensor in a high-temperature glass melt containing antimony and measuring a change in oxygen activity.

【図6】図6は、本発明に係る酸素センサーと比較する
ために用いた基準電極の縦断面図である。
FIG. 6 is a longitudinal sectional view of a reference electrode used for comparison with the oxygen sensor according to the present invention.

【符号の説明】[Explanation of symbols]

1 酸素センサー 2 基準電極 3 測定電極 4 電圧計 5 白金導線 6 白金線 7 融体 8 雰囲気ガス 21 安定化ジルコニア 22 白金ペースト 23 アルミナ管 24 ジルコニアセメント 25 空気注入管 31 アルミナ管 32 アルミナセメント 211 凹部 DESCRIPTION OF SYMBOLS 1 Oxygen sensor 2 Reference electrode 3 Measurement electrode 4 Voltmeter 5 Platinum lead wire 6 Platinum wire 7 Melt 8 Atmospheric gas 21 Stabilized zirconia 22 Platinum paste 23 Alumina tube 24 Zirconia cement 25 Air injection tube 31 Alumina tube 32 Alumina cement 211 Recess

【手続補正書】[Procedure amendment]

【提出日】平成11年3月29日[Submission date] March 29, 1999

【手続補正1】[Procedure amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】請求項1[Correction target item name] Claim 1

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【手続補正2】[Procedure amendment 2]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0007[Correction target item name] 0007

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0007】すなわち、本発明は、基準電極及び測定電
極をガラス融液に浸漬し該基準電極と該測定電極との電
位差から前記ガラス融液の酸素活量を測定する酸素セン
サーであって、前記基準電極は、上端面から下方へ延び
る凹部が形成された柱状安定化ジルコニアを備え、該柱
状安定化ジルコニアの前記凹部より下方の部分は、前記
ガラス融液への浸漬時に、該凹部底面を前記ガラス融液
面から離反し得るように長くされ、前記凹部内に、前記
凹部の内径よりも大きな外径を有するコイルスプリング
状の白金導線が弾性的に縮径されて挿入され該凹部内に
固定されており、前記測定電極は、電極用導電性芯線
と、該芯線を前記ガラス融液及び雰囲気ガスの界面を含
む位置で且つ先端部露出状態で覆うガスバリア性及び非
導電性を有する筒状セラミックスと、該芯線及び該筒状
セラミックスの間隙に充填されたガスバリア性及び非導
電性を有するセラミックスセメントとを備えていること
を特徴とする高温融体用酸素センサーを提供するもので
ある。
That is, the present invention relates to an oxygen sensor for immersing a reference electrode and a measurement electrode in a glass melt and measuring the oxygen activity of the glass melt from a potential difference between the reference electrode and the measurement electrode. the reference electrode is provided with a columnar stabilized zirconia recesses are formed extending downward from the upper end surface, pillar
The portion of the shape-stabilized zirconia below the recess is the
When immersed in the glass melt, the bottom surface of the concave portion is
Is lengthened As can be separated from the surface, in the recess, is fixed to the large coil spring-shaped platinum wire having an outer diameter is inserted is elastically reduced in diameter in the recess than the inner diameter of the recess The measurement electrode is a conductive core wire for an electrode, a cylindrical ceramic having a gas barrier property and a non-conductive property that covers the core wire at a position including an interface between the glass melt and the atmospheric gas and in a state in which a tip end is exposed, It is an object of the present invention to provide an oxygen sensor for a high-temperature melt, comprising: a core wire; and a ceramic cement having a gas barrier property and a non-conductivity filled in a gap between the cylindrical ceramics.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 基準電極及び測定電極を高温融体に浸漬
し該基準電極と該測定電極との電位差から前記高温融体
の酸素活量を測定する酸素センサーであって、前記基準
電極は、上端面から下方へ延びる凹部が形成された柱状
安定化ジルコニアを備え、前記凹部内に、前記凹部の内
径よりも大きな外径を有するコイルスプリング状の白金
導線が弾性的に縮径されて挿入され該凹部内に固定され
ており、前記測定電極は、電極用導電性芯線と、該芯線
を前記高温融体及び雰囲気ガスの界面を含む位置で且つ
先端部露出状態で覆うガスバリア性及び非導電性を有す
る筒状セラミックスと、該芯線及び該筒状セラミックス
の間隙に充填されたガスバリア性及び非導電性を有する
セラミックスセメントとを備えていることを特徴とする
高温融体用酸素センサー。
1. An oxygen sensor for immersing a reference electrode and a measurement electrode in a high-temperature melt and measuring the oxygen activity of the high-temperature melt from a potential difference between the reference electrode and the measurement electrode, wherein the reference electrode is A column-shaped stabilizing zirconia having a concave portion extending downward from the upper end surface is provided, and a coil spring-shaped platinum conductive wire having an outer diameter larger than the inner diameter of the concave portion is elastically reduced in diameter and inserted into the concave portion. The measurement electrode is fixed in the concave portion, and the measurement electrode includes a conductive core wire for an electrode, and a gas barrier property and a non-conductive property that cover the core wire at a position including the interface between the high-temperature melt and the atmosphere gas and in a state where the tip is exposed. An oxygen sensor for a high-temperature melt, comprising: a cylindrical ceramic having: a core ceramic; and a ceramic cement having a gas barrier property and a non-conductivity filled in a gap between the core wire and the cylindrical ceramic. Sir.
【請求項2】 前記柱状安定化ジルコニアの凹部内面に
おける前記白金導線との接触部に白金ペーストを塗布し
たことを特徴とする請求項1に記載の高温融体用酸素セ
ンサー。
2. The oxygen sensor for a high-temperature melt according to claim 1, wherein a platinum paste is applied to a contact portion of the pillar-shaped stabilized zirconia with the platinum conductor on an inner surface of the concave portion.
【請求項3】 前記筒状セラミックスの内径に対する前
記芯線の外径の比が0.95以上1未満であることを特
徴とする請求項1又は2に記載の高温融体用酸素センサ
ー。
3. The oxygen sensor for a high-temperature melt according to claim 1, wherein a ratio of an outer diameter of the core wire to an inner diameter of the cylindrical ceramic is 0.95 or more and less than 1.
【請求項4】 前記芯線は白金線であり、前記筒状セラ
ミックスはアルミナからなり、前記セラミックスセメン
トはアルミナセメントであることを特徴とする請求項1
から3のいずれかに記載の高温融体用酸素センサー。
4. The method according to claim 1, wherein the core wire is a platinum wire, the cylindrical ceramic is made of alumina, and the ceramic cement is alumina cement.
4. The oxygen sensor for a high-temperature melt according to any one of items 1 to 3.
JP10060529A 1998-02-24 1998-02-24 Oxygen sensor for high temperature melt Expired - Lifetime JP2952350B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10060529A JP2952350B2 (en) 1998-02-24 1998-02-24 Oxygen sensor for high temperature melt

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Publication Number Publication Date
JPH11242016A true JPH11242016A (en) 1999-09-07
JP2952350B2 JP2952350B2 (en) 1999-09-27

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Country Link
JP (1) JP2952350B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102066275B1 (en) * 2013-02-28 2020-01-14 주식회사 미래와도전 Electrode structure

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53144392U (en) * 1977-04-19 1978-11-14
JPS5775561U (en) * 1980-10-28 1982-05-10
JPS57160657U (en) * 1981-03-27 1982-10-08

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53144392U (en) * 1977-04-19 1978-11-14
JPS5775561U (en) * 1980-10-28 1982-05-10
JPS57160657U (en) * 1981-03-27 1982-10-08

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