JPH11242345A5 - - Google Patents

Info

Publication number
JPH11242345A5
JPH11242345A5 JP1998043107A JP4310798A JPH11242345A5 JP H11242345 A5 JPH11242345 A5 JP H11242345A5 JP 1998043107 A JP1998043107 A JP 1998043107A JP 4310798 A JP4310798 A JP 4310798A JP H11242345 A5 JPH11242345 A5 JP H11242345A5
Authority
JP
Japan
Prior art keywords
resist film
silylated layer
polymer
formation method
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998043107A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11242345A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP10043107A priority Critical patent/JPH11242345A/ja
Priority claimed from JP10043107A external-priority patent/JPH11242345A/ja
Priority to US09/212,412 priority patent/US6331378B1/en
Publication of JPH11242345A publication Critical patent/JPH11242345A/ja
Publication of JPH11242345A5 publication Critical patent/JPH11242345A5/ja
Pending legal-status Critical Current

Links

JP10043107A 1998-02-25 1998-02-25 パターン形成方法 Pending JPH11242345A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10043107A JPH11242345A (ja) 1998-02-25 1998-02-25 パターン形成方法
US09/212,412 US6331378B1 (en) 1998-02-25 1998-12-16 Pattern forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10043107A JPH11242345A (ja) 1998-02-25 1998-02-25 パターン形成方法

Publications (2)

Publication Number Publication Date
JPH11242345A JPH11242345A (ja) 1999-09-07
JPH11242345A5 true JPH11242345A5 (2) 2004-07-08

Family

ID=12654622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10043107A Pending JPH11242345A (ja) 1998-02-25 1998-02-25 パターン形成方法

Country Status (1)

Country Link
JP (1) JPH11242345A (2)

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