JPH11277351A - Linear motion table - Google Patents

Abstract

(57) [Problem] To provide a linear motion table capable of moving a movable table in a stable posture, which can be made thin even when the table width is large, and which can be easily adjusted at the time of assembly. A ball screw, a linear guide, and an air pad are provided between a moving table and a table base. The arrangement in the table width direction is centered on the ball screw 3,
The linear guide 4 was at both ends, and the air pad 6 was between the ball screw 3 and the linear guide 4. The air pad 6 blows air from the moving table 1 side toward the table base 2, and is fixed to the surface of the moving table 1 on the table base 2 side over the entire moving direction of the moving table 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-precision linear motion table used in a precision measuring device or a precision processing device.
The present invention relates to a technology that enables a table to move in a stable posture without being deformed by its own weight or the load of a load.

[0002]

2. Description of the Related Art As a conventional linear motion table, for example, there is one as shown in FIG. The translation table includes a moving table 1, a table base 2, a ball screw 3, and two linear guides 4. The ball screw 3 is provided at the center between the moving table 1 and the table base 2 in the table width direction (the direction perpendicular to the linear motion direction). The linear guides 4 are provided at both ends in the table width direction between the moving table 1 and the table base 2. On the moving table 1, a fixed body or a moving body (a moving table having a different moving direction) 5 is placed.

In such a linear motion table, the larger the table width, the larger the distance A from the width direction end of the moving table 1 to the mounting position of the linear guide 4 tends to be. When the moving object 5 is placed on the moving table 1 having a large table width and a large distance A, the position of the center of gravity of the moving table 1 moves with the movement of the moving object 5. The moving table 1 may be deformed. If the center of the ball screw 3 changes in the moving direction due to the deformation of the moving table 1, the moving table 1 may not be moved in a stable posture.

Here, if the thickness of the moving table 1 is increased in order to suppress the deformation of the moving table 1 as described above, the weight of the moving table increases, so that the linear guide 4, the ball screw 3, the motor, etc. Need to be large enough to withstand higher loads. As a result, the height B from the lower surface of the table base 2 to the upper surface of the moving table 1 also increases.

[0005] Further, as shown in FIG.
The linear guides 4 are arranged at both ends in the table width direction while the thickness of the linear guide 4 is kept as it is, and a rolling guide mechanism other than the linear guide 41 or the linear guide is further provided between the linear guide 4 and the ball screw 3. There is a linear motion table in which the moving table 1 can be moved in a stable posture. However, in such a linear motion table,
It is necessary to precisely adjust the height and the movement direction of the four guide mechanisms, and there is a problem that adjustment during assembly is very difficult.

[0006]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art. An object of the present invention is to provide a linear motion table in which the table hardly deforms and which can move the moving table in a stable posture, which can be made thin even when the table width is large, and which can be easily adjusted during assembly. And

[0007]

In order to solve the above-mentioned problems, the present invention provides a linear motion table having a feed transmission mechanism and a linear motion guide mechanism between a moving table and a table base. Linear guides are placed at or near the center in the table width direction, and linear guides are placed at both ends in the table width direction as linear motion guide mechanisms.The air pad that blows air from the moving table side toward the table base, In the arrangement between the guide,
A linear motion table fixed to a surface of a moving table on a table base side is provided.

According to this linear motion table, linear guides are arranged at both ends in the table width direction, and an air pad for blowing air from the moving table side toward the table base is provided between the linear guide and the feed transmission mechanism. It is provided. Therefore, by adjusting the air blowing pressure of the air pad according to the weight of the moving table and the weight of the object placed thereon, the distance between the moving table and the table base is made constant in the entire table width direction. Can be. Thus, even if the position of the center of gravity moves due to the movement of the moving body placed on the top, deformation of the moving table is less likely to occur.

The above operation can also be obtained by fixing the air pad to the table base and blowing air from the table base toward the moving table. However, as in the present invention, the air pad is fixed to the moving table. With this configuration, the installation length of the air pad can be minimized.

[0010]

Embodiments of the present invention will be described below. FIG. 1 is a schematic configuration diagram showing a linear motion table corresponding to an embodiment of the present invention. The linear motion table includes a moving table 1, a table base 2, a ball screw (feed transmission mechanism) 3, and two A linear guide (linear motion guide mechanism) 4 and two air pads 6 are provided. On the moving table 1, a moving table 5 whose moving direction is the table width direction of the moving table 1 is fixed.

The ball screw 3 is provided at the center between the moving table 1 and the table base 2 in the table width direction. The linear guides 4 are provided at both ends in the table width direction between the moving table 1 and the table base 2.

The air pad 6 blows air from the moving table 1 side toward the table base 2.
In the arrangement between the ball screw 3 and the linear guide 4 in the table width direction, the length direction of the moving table 1 (moving direction)
The entire moving table 1 is fixed to a surface on the table base 2 side. On the surface of the air pad 6 on the table base 2 side, a large number of air outlets are provided at uniform intervals over the entire length direction. Further, a pressure adjusting valve or a flow rate adjusting valve is provided at an air inlet (not shown) of each air pad 6, so that the amount of air introduced can be adjusted.

Accordingly, the distance between the moving table 1 and the table base 2 can be reduced by adjusting the amount of air introduced into the air pad 6 according to the weight of the moving tables 1 and 5 and the weight of an object placed thereon. It can be made constant throughout the moving direction of the moving table 1 in the entire table width direction. Thereby, even if the position of the center of gravity of the moving table 1 changes due to the movement of the moving table 5, the moving table 1 is less likely to be deformed. As a result, the center height of the ball screw 3 hardly changes, so that the moving table 1 can be moved in a stable posture.

Further, if the air pad 6 is arranged closer to the ball screw 3 than the intermediate position between the ball screw 3 and the linear guide 4, even if the moving table 1 is deformed, the height of the center of the ball screw 3 is reduced. This is preferable because the change can be minimized.

The air pad 6 restricts the movement between the moving table 1 and the table base 2 in the direction perpendicular to the surface of the moving table 1, but restricts the movement of the moving table 1 in the moving direction. Because it is not a thing,
It is not necessary to adjust the moving direction of the moving table 1 in accordance with the linear guide 4. Further, even when the table width is large, it is not necessary to increase the thickness of the moving table 1, so that the height B from the lower surface of the table base 2 to the upper surface of the moving table 1 can be reduced.

As described above, according to the linear motion table of this embodiment, even if the position of the center of gravity moves due to the movement of the movement table 5, the deformation of the movement table 1 hardly occurs. You can move. In addition, adjustment at the time of assembly is easy, and even when the table width is large, the thickness can be reduced.

In the above embodiment, a ball screw is used as the feed transmission mechanism, but the feed transmission mechanism used in the present invention is not limited to this. The number of air pads is set so that the distance between the moving table and the table base is constant over the entire width of the table according to the size and weight of the moving table, the weight of an object placed on the moving table, and the like. A plurality may be provided between the linear guide and the feed transmission mechanism.

Further, in the above embodiment, the air pad is installed in the entire moving direction of the moving table. However, the configuration of the present invention is not limited to this, and the air pad of a predetermined length is provided along the moving direction. A plurality may be installed at intervals.

The XY table in which the linear motion tables of the present invention are stacked and integrated so that the moving directions are orthogonal to each other is thinner and has a larger moving range than the conventional XY table having the same accuracy.

[0020]

As described above, according to the present invention,
The moving table can be moved in a stable posture even if the center of gravity moves due to the movement of the moving object placed on the top, etc., and it can be made thin even when the table width is large, and adjustment during assembly is easy. A linear motion table can be obtained.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram showing a linear motion table corresponding to an embodiment of the present invention.

FIG. 2 is a schematic configuration diagram showing a conventional example of a linear motion table.

FIG. 3 is a schematic configuration diagram showing another conventional example of a linear motion table.

[Explanation of symbols]

 Reference Signs List 1 moving table 2 table base 3 ball screw (feed transmission mechanism) 4 linear guide (linear guide mechanism) 5 moving body (moving table) 6 air pad 41 linear guide

Claims (1)

[Claims] 1. A linear motion table having a feed transmission mechanism and a linear motion guide mechanism between a moving table and a table base, wherein the feed transmission mechanism is disposed at or near the center in the table width direction. Linear guides are arranged at both ends in the table width direction, and an air pad that blows air from the moving table side toward the table base is arranged between the feed transmission mechanism and the linear guide, on the table base side of the moving table. A linear motion table fixed to a surface.