JPH11296233A5 - - Google Patents

Info

Publication number
JPH11296233A5
JPH11296233A5 JP1998097578A JP9757898A JPH11296233A5 JP H11296233 A5 JPH11296233 A5 JP H11296233A5 JP 1998097578 A JP1998097578 A JP 1998097578A JP 9757898 A JP9757898 A JP 9757898A JP H11296233 A5 JPH11296233 A5 JP H11296233A5
Authority
JP
Japan
Prior art keywords
valve opening
flow rate
flow
semiconductor manufacturing
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998097578A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11296233A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9757898A priority Critical patent/JPH11296233A/ja
Priority claimed from JP9757898A external-priority patent/JPH11296233A/ja
Publication of JPH11296233A publication Critical patent/JPH11296233A/ja
Publication of JPH11296233A5 publication Critical patent/JPH11296233A5/ja
Pending legal-status Critical Current

Links

JP9757898A 1998-04-09 1998-04-09 半導体製造装置における流量制御装置の異常検出方法 Pending JPH11296233A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9757898A JPH11296233A (ja) 1998-04-09 1998-04-09 半導体製造装置における流量制御装置の異常検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9757898A JPH11296233A (ja) 1998-04-09 1998-04-09 半導体製造装置における流量制御装置の異常検出方法

Publications (2)

Publication Number Publication Date
JPH11296233A JPH11296233A (ja) 1999-10-29
JPH11296233A5 true JPH11296233A5 (mo) 2006-02-02

Family

ID=14196137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9757898A Pending JPH11296233A (ja) 1998-04-09 1998-04-09 半導体製造装置における流量制御装置の異常検出方法

Country Status (1)

Country Link
JP (1) JPH11296233A (mo)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9772629B2 (en) * 2011-09-29 2017-09-26 Applied Materials, Inc. Methods for monitoring a flow controller coupled to a process chamber
CN111033103B (zh) * 2017-09-07 2020-11-13 东京流量仪器仪表株式会社 流量控制装置
CN110870694B (zh) * 2018-08-31 2022-12-23 佛山市顺德区美的电热电器制造有限公司 故障检测方法、装置、烹饪器具和计算机可读存储介质

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