JPH11296352A - Processing apparatus, exposure apparatus and device manufacturing method - Google Patents

Abstract

(57) [Summary] (with correction) [Problem] To enable efficient version upgrade. SOLUTION: The information processing means calculates a memory capacity required for installation from a medium for version upgrade set in a drive device, and compares a remaining memory capacity of an external storage device with a memory capacity required for installation. Means for determining whether version upgrade is possible by
Means for comparing directories or files installed or present in a predetermined directory of the external storage device and the medium to extract a directory or file of the external storage device that does not have a match with that of the medium, and the extracted directory Or means for displaying a file on a display device, causing the input device to select a display, and, when it is determined that version upgrade is not possible, compressing or erasing the selected directory or file.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention relates to such a system that data and the like are frequently created / stored, and software must be frequently upgraded to add functions.
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing apparatus such as a semiconductor manufacturing apparatus or a personal computer, an exposure apparatus, and a device manufacturing method using the same, in which a version upgrade technique is improved.

[0002]

2. Description of the Related Art Conventionally, in a device manufacturing apparatus such as a semiconductor manufacturing apparatus or an information processing apparatus such as a personal computer, if the memory capacity of an external storage device on the processing apparatus becomes insufficient during the upgrade process, the upgrade process is performed. Is completed, the user is notified that the memory capacity is insufficient, and after each user sufficiently increases the memory capacity of the external storage device of the apparatus, the version upgrade process is performed again.

In a process of upgrading a semiconductor manufacturing apparatus or the like, during backup of a database,
When the version upgrade ends due to insufficient memory capacity of the external storage device, it takes much time to restore the database.

[0004]

However, according to the software version upgrade process in the conventional processing device, as described above, if the memory capacity of the external storage device of the processing device becomes insufficient during the version upgrade, the version upgrade is performed. Ends and notifies you that there is not enough memory,
In response to this, the user deletes unnecessary files / directories in the external storage device on the processing device side and performs the upgrade process again after securing a sufficient memory capacity, which is inefficient.

[0005] In a manufacturing apparatus operated by a plurality of users, unnecessary files and the like can be found only at a person in charge.
Files cannot be erased blindly, and each person in charge takes a lot of time to check for unnecessary files.

SUMMARY OF THE INVENTION An object of the present invention is to provide a processing apparatus, an exposure apparatus, and a device manufacturing method using the same, in which the version can be efficiently upgraded in view of the problems of the prior art.

[0007]

According to the present invention, a display device, an input device, an external storage device,
And a processing device provided with information processing means having a medium driving device, wherein the information processing means calculates a memory capacity required for installation from a medium for version upgrade set in the driving device, and Means for comparing the remaining memory capacity of the storage device with the memory capacity required for the installation to determine whether version upgrade is possible, and a directory or file (module) installed in a predetermined directory of the external storage device Means for comparing a directory or a file (module) existing in a predetermined directory of the medium with a directory or a file (module) existing in the external storage device and extracting a directory or a file of the external storage device that does not match the directory or the file of the medium. Directed Or display selection means for displaying a file on the display device and selecting the file by the input device, and means for compressing or erasing the selected directory or file when it is determined that version upgrade is not possible. It is characterized by.

According to this, when it is determined that the version upgrade is not possible, it is necessary to select unnecessary directories or files unnecessary for the version upgrade displayed by the display selection means and compress or delete them. Since a sufficient capacity may be ensured, the version upgrade process is performed efficiently.

[0009] The information processing means has means for registering the extracted directory or file in a registration file, and the display selection means reads out the directory or file registered in the registration file, and displays and selects the directory or file. be able to. Further, the information processing means includes means for displaying a directory structure in the external storage device on the display device, means for selecting a displayed directory or a file in the directory, and storing the selected directory or file in a registration file. And a means for compressing or erasing a file registered in the registration file when it is determined that version upgrade is not possible. Further, the information processing means includes means for registering an unnecessary file name or directory name input by the input device in a registration file, and a file registered in the registration file when it is determined that version upgrade is not possible. Means for compressing or erasing the data.

An exposure apparatus according to the present invention is controlled by information processing means of such a processing apparatus. Further, the device manufacturing method of the present invention is characterized in that a device is manufactured using such an exposure apparatus while appropriately upgrading the version by using the information processing means.

[0011]

FIG. 1 is a perspective view showing the appearance of a semiconductor manufacturing apparatus according to one embodiment of the present invention. This semiconductor manufacturing apparatus has a window system and is operated by operating a switch section of an operation panel section. As shown in FIG. 1, the semiconductor manufacturing apparatus includes a temperature control chamber 101 for controlling the environmental temperature of the apparatus main body, an EWS main body 106 disposed therein and having a CPU for controlling the apparatus main body, and a predetermined EWS display device 102 that displays the information of the EWS, monitor TV 105 that displays the image information obtained via the imaging means in the device main body, operation panel 103 for performing predetermined input to the device, keyboard 104 for EWS, and the like. It has a console unit. In the figure,
107 is an ON-OFF switch, 108 is an emergency stop switch, 109 is various switches, a mouse, etc., 110 is LA
N communication cable, 111 is an exhaust duct for generating heat from the console function, and 112 is an exhaust device for the chamber. The semiconductor manufacturing apparatus main body is installed inside the chamber 101. The EWS display 102 is of a thin flat type such as EL, plasma, liquid crystal, etc., is housed in the front of the chamber 101, and is connected to the EWS main body 106 by a LAN cable 110. The operation panel 103, the keyboard 104, the monitor TV 105, etc. are also provided in the chamber 101.
The console is installed on the front side, and console operation similar to the conventional console operation can be performed from the front side of the chamber 101.

FIG. 2 is a diagram showing the internal structure of the apparatus shown in FIG. FIG. 1 shows a stepper as a semiconductor manufacturing apparatus. In the drawing, reference numeral 202 denotes a reticle, and 203, a wafer. When a light beam emitted from a light source device 204 illuminates the reticle 202 through an illumination optical system 205, a pattern on the reticle 202 is exposed by a projection lens 206 to a photosensitive area on the wafer 203. Can be transferred to a layer. The reticle 202 is supported by a reticle stage 207 for holding and moving the reticle 202. Wafer 20
3 is exposed in a state where it is vacuum-sucked by the wafer chuck 291. The wafer chuck 291 is the wafer stage 2
09 allows movement in each axis direction. Reticle 202
A reticle optical system 281 for detecting the amount of displacement of the reticle is disposed above the reticle. Wafer stage 209
An off-axis microscope 282 is arranged adjacent to and above the projection lens 206. Off-axis microscope 28
Reference numeral 2 has a main function of detecting a relative position between an internal reference mark and an alignment mark on the wafer 203.

A reticle library 220 and a wafer carrier elevator 230, which are peripheral devices, are disposed adjacent to the stepper main body.
To the stepper body.

The chamber 101 is mainly composed of an air conditioner room 210 for controlling the temperature of air, a filter box 213 for filtering fine foreign matters and forming a uniform flow of clean air, and a booth 214 for shutting off the environment of the apparatus from the outside. It is configured. In the chamber 101, air whose temperature has been adjusted by the cooler 215 and the reheat heater 216 in the air conditioner room 210 is supplied into the booth 214 via the air filter g by the blower 217. The air supplied to the booth 214 is taken into the air conditioner room 210 again from the return port ra and circulates in the chamber 101. Normally, the chamber 101 is not strictly a complete circulation system. To maintain the inside of the booth 214 always at a positive pressure, about 10% of the circulating air amount outside the booth 214 is provided in the air conditioner room 210. The air is introduced from the outside air inlet oa via a blower. In this way, the chamber 101 can keep the environment temperature where the apparatus is placed at a constant level and keep the air clean.

The light source device 204 is provided with a suction port sa in preparation for cooling of an ultra-high pressure mercury lamp and generation of toxic gas when a laser is abnormal.
And an exhaust port ea, and a part of the air in the booth 214 is forcibly exhausted to factory equipment via a light source device 204 and a dedicated exhaust fan provided in the air conditioner room 210. Further, a chemical adsorption filter cf for removing chemical substances in the air is provided so as to be connected to the outside air introduction port oa and the return port ra of the air conditioner room 210, respectively.

FIG. 3 is a block diagram showing an electric circuit configuration of the apparatus shown in FIG. In the figure, reference numeral 321 denotes a main unit C built in the EWS main unit 106, which controls the entire apparatus.
It is a PU and comprises a central processing unit such as a microcomputer or a minicomputer. 322 is a wafer stage driving device, 323 is an alignment detection system such as the off-axis microscope 282 or the like, 324 is a reticle stage driving device, 325 is an illumination system such as the light source device 204 or the like, 326
Is a shutter driving device, 327 is a focus detection system, 32
Reference numeral 8 denotes a Z drive device, which is controlled by the main body CPU 321. 329 is the reticle transport device 2
21, a transfer system such as a wafer transfer device 231. 330
Is a console unit having the display 102, keyboard 104, graphic board, etc., for giving various commands and parameters relating to the operation of the exposure apparatus to the main body CPU 321. That is, it is for exchanging information with the operator. Reference numeral 332 denotes an external memory such as a hard disk, in which a database is constructed, in which various parameters and their management data, operator groups, and the like are recorded.

FIG. 4 is a block diagram showing a configuration of an information processing unit of the semiconductor manufacturing apparatus. As shown in the figure, this part includes an information processing device 401, an input device 402 such as a keyboard, a database 403 in which various parameters and their management data are recorded, a display device 404 such as a CRT, an external storage device 405, It is configured by a media device 406 such as an MO (magneto-optical disk) / FD (floppy disk).

The information processing apparatus 401 includes an operating system 407 for a semiconductor manufacturing apparatus, a media capacity calculation unit 408 for calculating the capacity of an installation medium, an external storage device memory calculation unit 409 for calculating the remaining memory of an external storage device, and a version upgrade. Version upgrade judging section 410 for judging whether or not it is possible, directory / file structure comparing section 41 for comparing directory / file structures
1. From the comparison of the directory / file structure, a directory / file registration unit 412 for registering different directories / files, a directory / file compression / deletion unit 413 for compressing / deleting the selected directory / file, a version upgrade process And a version upgrade process execution unit 414 that performs

An operating system 407 for a semiconductor manufacturing apparatus controls the processing of each unit (408 to 414) of the media capacity calculation unit 408 to the upgrade processing execution unit 414. Media capacity calculation unit 408
Calculates the media capacity set in the media device 406 such as MO / FD, and notifies the operating system 407 of the result. The external storage device memory calculation unit 409 calculates the current free space of the external storage device 405 included in the information processing device 401 and notifies the operating system 407 of the result.

The upgrade determination unit 410 determines the media capacity calculated by the media capacity calculation unit 408 managed by the operating system 407 and the information processing device 401 calculated by the external storage device memory calculation unit 409.
From the information on the current free space of the external storage device 405 of the operating system 407 based on the information on the current free space of the information processing device 401 using the media set in the media device 406 such as MO / FD. Notice.

Directory / file structure comparison unit 411
Is an MO / FD in which an external storage device 405 included in the processing device 401 and an installation medium are set.
The directory / file configuration of the media of the media device 406 such as a device is compared, and if a directory / file or the like that does not match is searched for on both sides, the information is notified to the directory / file registration unit 412. The directory / file registration unit 412 receives the information retrieved by the directory / file configuration comparison unit 411 and registers the information in a registration file shown in FIG.

Directory / file compression / deletion unit 41
3 reads the file registered by the directory / file registration unit 412 and displays the information on the display device 404. The directory / file registered in the directory / file registration unit 412 is compressed or deleted according to the selection of the displayed directory / file and the selection of compression / deletion of the selected directory / file. .

When the directory / file compression / deletion unit 413 compresses or deletes a directory / file to increase the memory of the external storage device 405 of the information processing device 401, the version upgrade processing execution unit 414 determines whether or not to upgrade again. The unit 410 determines again whether or not the version can be upgraded. If the version can be upgraded as a result, the version upgrade process is executed.

FIG. 5 shows an external storage device 405 of the processing device 401 and a media device 4 such as an MO / FD device in the processing of the directory / file structure comparison unit 411.
FIG. 14 is a diagram showing a state in which a comparison result of a directory / file with a medium set to 06 is displayed on a display device 404. In the figure, reference numeral 501 denotes a directory display area, and 502 denotes a file display area. When a directory displayed in the directory display area 501 is selected, files in the selected directory are displayed in the file display area 502. 503, a compression button for compressing the selected file in the file display area 502; 504, a delete button for deleting the selected file in the file display area 502; 505, a file displayed in the file display area 502 An all-selection button for selecting all. FIG. 5 shows a state when the all-selection button 505 is pressed. 50
Reference numeral 6 denotes a registration file (directory) button for reading the registration file of FIG. 8 registered in the directory / file registration unit 412 and displaying the registered directory in the directory display area 501, respectively. By selecting one of the displayed directories, files in the selected directory can be displayed in the file display area 502. In FIG. 5, the user presses a registration file (directory) button 506 and presses a 2
This shows the state when the directory on the line is selected. 507
A registration file (file) button for reading the registration file of FIG. 8 registered in the directory / file registration unit 412 and displaying the registered file in the file display area 502, respectively.

Reference numeral 508 denotes a directory structure display button for displaying a directory structure in the external storage device 405 of the processing device 401 in the directory display area 501. Reference numeral 509 denotes a version upgrade start button. When this button is pressed after the capacity of the external storage device 405 has been increased by compressing / deleting the inconsistency information, the version upgrade determination unit 410 determines whether or not the version upgrade can be performed. If it can be performed, the version upgrade is started. If the version cannot be upgraded due to insufficient memory capacity, an error is displayed and the process returns to the state of FIG. 5
Reference numeral 10 denotes an end button for ending the directory / file display window of FIG. Reference numeral 511 denotes the displayed directory / file information in the display areas 501 and 50.
This is a scroll bar that scrolls the area when it does not fit in 2. Reference numeral 512 denotes a registration button. By operating the directory structure display button 508, directories / files in the external storage device 405 of the information processing apparatus 401 are displayed in the directory / file display areas 501 and 502, and the directories / files therein are displayed.
By selecting a file and pressing a registration button 512, the selected directory / file is registered in a registration file of FIG. 8 described later.

FIG. 6 is a flow chart showing the version upgrade process control in this semiconductor manufacturing apparatus. As shown in FIG.
When the installation media is set in the media device 406 such as an O / FD device and the upgrade process is started (step S101), the information processing device 401 calculates the installation media capacity by the media capacity calculation unit 408 (step S102). Next, the remaining memory of the external storage device 405 of the information processing device 401 is calculated by the external storage device memory calculation unit 409 (step S10).
3) The data calculated by the media capacity calculation unit 408 and the external storage device calculation unit 409 are checked by the version upgrade determination unit 410 (step S104), and the remaining memory of the external storage device 405 has a memory capacity that can be upgraded. If there is, the version upgrade process execution unit 414 executes the version upgrade process (step S110), and ends the process.

On the other hand, as a result of the check by the version upgrade judging section 410, if the remaining memory of the external storage apparatus 405 has a memory capacity that cannot be upgraded, the directory / file configuration comparing section 411 causes the external storage apparatus 405
Is compared with the directory / file configuration of the installation media set in the media device 406 (step S105), and different directories / files are registered in the registration file of FIG. 8 (step S106),
The screen of FIG. 5 is displayed (step S107). The directory / file selected on this screen is compressed / deleted according to the operation of the compression / delete buttons 503 and 504 (step S108). When the version upgrade start button 509 is pressed, the version upgrade process is performed again. The determination unit 410 determines whether the version can be upgraded, and repeats the processing procedure from step S104.

If it is not possible to secure a memory capacity for upgrading even if different directories / files are compressed / deleted, the directory configuration display button 508 is operated on the screen shown in FIG.
5 The directory structure (including files) inside is displayed, and among the directories / files not registered in the registration file, further unnecessary directories / files are selected, and the processing procedure after step S108 is repeated.
When the end button 510 is pressed in step S109,
The process ends without executing the version upgrade process.

FIG. 7 is a diagram exemplifying a directory structure of the external storage device 405 and a directory structure in the installation medium. Reference numeral 701 denotes a directory structure of the external storage device 405 on the information processing device 401 side, and 702 denotes a directory structure in the installation medium. It is a directory structure.

FIG. 8 is a diagram exemplifying the contents of a file in which different directories / files are registered in the process of comparing the directory structure of the external storage device 405 on the information processing device 401 side with the directory structure in the installation medium. . "D:" at the beginning of the line means that the directory itself shown in that line does not exist on the installation medium, that is, the directory was created by the user without permission, and in the process of step S107 in FIG. 6, FIG. Is displayed in the display area 501. “F:” means that the file itself indicated in the line does not exist on the installation medium, that is, the file was created by the user without permission, and in the process of step S107 in FIG. It is displayed in the display area 502.

Incidentally, even in the case of a processing apparatus having no window system, the same processing can be performed except for the processing of selecting from a window.

Next, a description will be given of an example of device manufacturing in which the above-described semiconductor manufacturing apparatus can be used. FIG. 9 shows a flow of manufacturing micro devices (semiconductor chips such as ICs and LSIs, liquid crystal panels, CCDs, thin-film magnetic heads, micromachines, etc.). In step 31 (circuit design), a device pattern is designed. Step 32 is a process for making a mask on the basis of the designed pattern. On the other hand, in step 33 (wafer manufacture), a wafer is manufactured using a material such as silicon or glass. Step 3
4 (wafer process) is called a pre-process, and an actual circuit is formed on the wafer by lithography using the prepared mask and wafer. The next step 35 (assembly) is called a post-process, and is a process of forming a semiconductor chip using the wafer manufactured in step 34,
It includes processes such as an assembly process (dicing and bonding) and a packaging process (chip encapsulation). In step 36 (inspection), inspections such as an operation confirmation test and a durability test of the semiconductor device manufactured in step 35 are performed. Through these steps, a semiconductor device is completed and shipped (step 37).

FIG. 10 shows a detailed flow of the wafer process. Step 41 (oxidation) oxidizes the wafer's surface. In step 42 (CVD), an insulating film is formed on the wafer surface. In step 43 (electrode formation), electrodes are formed on the wafer by vapor deposition. In step 44 (ion implantation), ions are implanted into the wafer. Step 4
In step 5 (resist processing), a resist is applied to the wafer.
In step 46 (exposure), the circuit pattern of the mask is printed on a plurality of shot areas of the wafer by printing using the above-described exposure apparatus or exposure method. Step 47
In (development), the exposed wafer is developed. Step 48
In (etching), portions other than the developed resist image are scraped off. In step 49 (resist removal), unnecessary resist after etching is removed. By repeating these steps, multiple circuit patterns are formed on the wafer.

According to this, it is possible to manufacture a large-sized device which was conventionally difficult to manufacture at low cost.

[0035]

As described above, according to the present invention, when the external storage device runs out of memory capacity at the time of version upgrade, unnecessary directories or files are unnecessary for version upgrade displayed by the display selection means. What is necessary is just to select a proper one and compress or delete it to secure the necessary capacity, so that the upgrade process can be performed smoothly without interruption.

In addition, an unnecessary directory or file is registered in a registration file in advance, or
By selecting and registering an unnecessary directory or file name from the displayed directory or the files in the directory, if it is determined that the version upgrade is not possible, these are compressed or deleted and the memory of the external storage device is stored. The capacity can be increased and the version upgrade process can be performed smoothly without interruption.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a semiconductor manufacturing apparatus according to an embodiment of the present invention.

FIG. 2 is a diagram showing the internal structure of the device of FIG.

FIG. 3 is a block diagram showing an electric circuit configuration of the device shown in FIG.

FIG. 4 is a block diagram showing a configuration of an information processing device part of the device of FIG. 1;

FIG. 5 is a diagram showing a state in which a directory / file comparison result in the configuration of FIG. 4 is displayed.

FIG. 6 is a flowchart showing version upgrade processing control in the configuration of FIG. 4;

7 is a diagram showing a directory configuration of an external storage device of the processing device side and a directory configuration in an installation medium in the configuration of FIG. 4;

8 is a diagram exemplifying registration of different directories / files in a process of comparing a directory configuration of an external storage device of the processing device side and a directory configuration in an installation medium in the configuration of FIG. 4;

FIG. 9 is a flowchart illustrating an example of manufacturing a device that can use the apparatus or method of the present invention.

FIG. 10 is a flowchart showing a detailed flow of a wafer process in FIG. 9;

[Explanation of symbols]

101: temperature control chamber, 102: display device for EWS, 103: operation panel, 104: keyboard for EWS, 105: monitor TV, 106: EWS body, 10
7: ON-OFF switch, 108: emergency stop switch, 109: various switches, mouse, etc. 110: LAN
Communication cable, 111: exhaust duct, 112: exhaust device, 202: reticle, 203: wafer, 204: light source device, 205: illumination optical system, 206: projection lens, 20
7: reticle stage, 209: wafer stage, 21
0: air conditioner room, 213: filter box, 214: booth, 217: blower, 281: reticle microscope, 28
2: Off-axis microscope, 321: Main body CPU, 32
5: illumination system, 326: shutter drive device, 327: focus detection system, 328: Z drive device, 329: transport system,
330: console unit, 331: console CP
U, 332: external memory, 401: information processing device, 40
2: input device, 403: database, 404: display device, 405: external storage device, 406: media device, 5
01: directory display area, 502: file display area, 503: compression button, 504: delete button, 50
5: select all button, 506: registered file (directory) button, 507: registered file (file) button, 508: directory structure display button, 509: upgrade start button, 510: end button,
511: scroll bar, 512: registration button, g: air filter, cf: chemical adsorption filter, oa: outside air introduction port, ra: return port.

Claims (6)

[Claims] 1. A processing device comprising information processing means having a display device, an input device, an external storage device, and a medium driving device, wherein the information processing means is a medium for version upgrade set in the driving device. Means for calculating a memory capacity required for installation from the server; means for comparing the remaining memory capacity of the external storage device with the memory capacity required for the installation to determine whether or not version upgrade is possible; A directory or a file installed in a predetermined directory of the device is compared with a directory or a file existing in a predetermined directory of the medium, and a directory or a file of the external storage device that matches the directory or the file of the medium is determined. Means to extract the missing Display selection means for displaying the issued directory or file on the display device and selecting it by the input device; and means for compressing or erasing the selected directory or file when it is determined that version upgrade is not possible. A processing device comprising: 2. The information processing means includes means for registering the extracted directory or file in a registration file, and the display selection means reads and displays the directory or file registered in the registration file. The processing apparatus according to claim 1, wherein the processing device is selected. 3. The information processing means includes: means for displaying a directory structure in the external storage device on the display device; means for selecting a displayed directory or a file in the directory; And means for compressing or erasing a file registered in the registration file when it is determined that version upgrade is not possible. The processing device according to the above. 4. The information processing means registers an unnecessary file name or directory name input by the input device in a registration file, and registers the unnecessary file name or directory name in the registration file when it is determined that version upgrade is not possible. 4. The processing apparatus according to claim 1, further comprising: means for compressing or erasing a file. 5. An exposure apparatus controlled by the information processing means of the processing apparatus according to claim 1. 6. A device manufacturing method using the exposure apparatus according to claim 5, and manufacturing a device while appropriately upgrading the version by an information processing means thereof.