JPH11297633A5 - - Google Patents

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Publication number
JPH11297633A5
JPH11297633A5 JP1998105140A JP10514098A JPH11297633A5 JP H11297633 A5 JPH11297633 A5 JP H11297633A5 JP 1998105140 A JP1998105140 A JP 1998105140A JP 10514098 A JP10514098 A JP 10514098A JP H11297633 A5 JPH11297633 A5 JP H11297633A5
Authority
JP
Japan
Prior art keywords
heater
coating treatment
vertical
relocating
vertical coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998105140A
Other languages
Japanese (ja)
Other versions
JPH11297633A (en
JP4327916B2 (en
Filing date
Publication date
Application filed filed Critical
Priority to JP10514098A priority Critical patent/JP4327916B2/en
Priority claimed from JP10514098A external-priority patent/JP4327916B2/en
Publication of JPH11297633A publication Critical patent/JPH11297633A/en
Publication of JPH11297633A5 publication Critical patent/JPH11297633A5/ja
Application granted granted Critical
Publication of JP4327916B2 publication Critical patent/JP4327916B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Claims (3)

装置本体の上部に設けられたヒータの熱を利用して、該ヒータ内に搬入された基板の皮膜処理を行うようにした縦型皮膜処理装置において、
前記ヒータを、前記装置本体において、前記装置本体の上部からその下方にかけて上下動させるヒータ可動手段を備えたことを特徴とする縦型皮膜処理装置。 A vertical coating treatment apparatus that utilizes heat from a heater provided on the upper part of the apparatus body to perform a coating treatment on a substrate carried into the heater ,
10. A vertical coating treatment apparatus comprising: a heater moving means for moving the heater up and down in the main body of the apparatus from the top to the bottom of the main body of the apparatus . 前記ヒータ可動手段は、前記基板を前記ヒータ内に搬入するボートエレベータを用いて構成されることを特徴とする請求項１記載の縦型皮膜処理装置。 2. The vertical film processing apparatus according to claim 1, wherein the heater moving means is configured using a boat elevator for carrying the substrate into the heater . 装置本体の上部に設けられたヒータの熱を利用して、該ヒータ内に搬入された基板の皮膜処理を行うようにした縦型皮膜処理装置の移設方法において、
前記装置の移設前に、前記ヒータを前記装置本体の上部から下方に移動させ、前記ヒータを前記下方に支持して前記装置を移設し、前記装置の移設後に、前記ヒータを前記装置本体の上部に移動させるようにしたことを特徴とする縦型皮膜処理装置の移設方法。 1. A method for transferring a vertical coating treatment apparatus that uses heat from a heater provided on an upper portion of the apparatus body to perform a coating treatment on a substrate carried into the heater , comprising:
A method for relocating a vertical coating treatment apparatus, characterized in that before relocating the apparatus, the heater is moved downward from the top of the apparatus body, the apparatus is relocated with the heater supported downward, and after relocating the apparatus, the heater is moved to the top of the apparatus body.
JP10514098A 1998-04-15 1998-04-15 Heater equipment structure in vertical film processing apparatus and method of moving vertical film processing apparatus Expired - Lifetime JP4327916B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10514098A JP4327916B2 (en) 1998-04-15 1998-04-15 Heater equipment structure in vertical film processing apparatus and method of moving vertical film processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10514098A JP4327916B2 (en) 1998-04-15 1998-04-15 Heater equipment structure in vertical film processing apparatus and method of moving vertical film processing apparatus

Publications (3)

Publication Number Publication Date
JPH11297633A JPH11297633A (en) 1999-10-29
JPH11297633A5 true JPH11297633A5 (en) 2005-10-13
JP4327916B2 JP4327916B2 (en) 2009-09-09

Family

ID=14399456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10514098A Expired - Lifetime JP4327916B2 (en) 1998-04-15 1998-04-15 Heater equipment structure in vertical film processing apparatus and method of moving vertical film processing apparatus

Country Status (1)

Country Link
JP (1) JP4327916B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4814038B2 (en) * 2006-09-25 2011-11-09 株式会社日立国際電気 Substrate processing apparatus and method for attaching / detaching reaction vessel
KR102763911B1 (en) * 2024-04-11 2025-02-10 (주) 예스티 A jig device and system for providing the detachment and installation of the heater unit and a high-pressure annealing device

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