JPH11304561A - Flow rate measuring apparatus - Google Patents
Flow rate measuring apparatusInfo
- Publication number
- JPH11304561A JPH11304561A JP10113673A JP11367398A JPH11304561A JP H11304561 A JPH11304561 A JP H11304561A JP 10113673 A JP10113673 A JP 10113673A JP 11367398 A JP11367398 A JP 11367398A JP H11304561 A JPH11304561 A JP H11304561A
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- sensor
- flow rate
- bubble
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims abstract description 44
- 238000001514 detection method Methods 0.000 claims abstract description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 5
- 239000000126 substance Substances 0.000 abstract description 12
- 239000012530 fluid Substances 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 11
- 238000004140 cleaning Methods 0.000 description 9
- 229920011301 perfluoro alkoxyl alkane Polymers 0.000 description 9
- 239000000243 solution Substances 0.000 description 8
- 238000002347 injection Methods 0.000 description 7
- 239000007924 injection Substances 0.000 description 7
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 230000002209 hydrophobic effect Effects 0.000 description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000005303 weighing Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920013653 perfluoroalkoxyethylene Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000010485 coping Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000001802 infusion Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、流量測定装置に関
し、特に小容量から大容量までの広い範囲の流量測定が
でき、且つ種々の薬液にも対応することのできる流量測
定装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flow rate measuring device, and more particularly to a flow rate measuring device capable of measuring a wide range of flow from a small volume to a large volume and capable of coping with various chemical solutions. .
【０００２】[0002]
【従来の技術】従来、ウエハ等の半導体基板や液晶表示
素子に用いるガラス基板等を洗浄する洗浄槽に洗浄液を
注入する際、洗浄液が純水や市水等のみの場合には、注
入する水量について正確に測定する必要は生じないが、
薬液で洗浄する場合には正確に計量して注入する必要が
生じる場合がある。例えば、ＳＰＭ洗浄の場合で、硫
酸：過酸化水素の割合を５：１にする場合とか、あるい
はＡＰＭ洗浄の場合で、アンモニア：過酸化水素：純水
の割合を１：４：２０にする場合などがある。これらの
場合には、その割合を正確に測定して洗浄槽の中に注入
することになる。このため、耐薬液性の高いＰＦＡ（４
ふっ化エチレン−パーフロオロアルコキシエチレン共重
合体）、ＰＴＦＥ（ポリ４ふっ化エチレン、商標名テフ
ロン）等を材質としたカルマン渦式の流量計や超音波流
量計等によって液量を測定する方法などが用いられてい
る。2. Description of the Related Art Conventionally, when a cleaning liquid is injected into a cleaning tank for cleaning a semiconductor substrate such as a wafer or a glass substrate used for a liquid crystal display device, the amount of water to be injected when the cleaning liquid is pure water or city water only. Does not need to be measured accurately,
When washing with a chemical solution, it may be necessary to accurately measure and inject. For example, in the case of SPM cleaning, the ratio of sulfuric acid: hydrogen peroxide is 5: 1, or in the case of APM cleaning, the ratio of ammonia: hydrogen peroxide: pure water is 1: 4: 20. and so on. In these cases, the ratio is accurately measured and injected into the cleaning tank. For this reason, PFA (4
A method of measuring the liquid volume with a Karman vortex flow meter or an ultrasonic flow meter made of ethylene fluoride-perfluoroalkoxyethylene copolymer), PTFE (polytetrafluoroethylene, trade name Teflon) or the like. Is used.
【０００３】[0003]
【発明が解決しようとする課題】ところが、ＰＦＡ又は
ＰＴＦＥ製のカルマン渦式は一部の薬液（高粘度流体、
硫酸、リン酸）についてはカルマン渦が発生しないため
測定がおこなえず、またカルマン渦式の流量計は微量流
量（微流速）での渦が発生せず測定できない範囲があ
る。また、測定方式の異なる超音波流量計でも耐薬液性
の高いＰＦＡ又はＰＴＦＥ製のものがあるが、現状では
微量流量のおこなえる製品はない。また、校正用として
使用されている精度の高い電磁流量計は、液体が流れる
部分に電極を配置する必要があり、腐食性薬液には使用
することができない。このため、半導体関連の洗浄槽等
における薬液の注入には、予め秤量槽に薬液を入れて正
確に量を測ってから洗浄槽等に移し替えて混合させる方
法を用いている場合が多く、このため秤量槽の設置場所
等のスペースが必要であるばかりでなく、作業が煩雑と
なっていた。However, the Karman vortex type made of PFA or PTFE has some chemical solutions (high viscosity fluid,
(Sulfuric acid, phosphoric acid) cannot be measured because Karman vortices are not generated, and there is a range where Karman vortex flowmeters cannot be measured because vortices are not generated at a very small flow rate (fine flow velocity). Further, among the ultrasonic flow meters having different measurement methods, there are those made of PFA or PTFE having high chemical resistance, but at present, there is no product which can perform a minute flow rate. In addition, a high-precision electromagnetic flowmeter used for calibration requires an electrode to be disposed in a portion where a liquid flows, and cannot be used for a corrosive chemical solution. For this reason, the method of injecting a chemical solution into a semiconductor-related cleaning tank or the like often uses a method in which a chemical solution is put in a weighing tank in advance, the amount is accurately measured, and then transferred to the cleaning tank or the like and mixed. This not only requires space such as a place for installing a weighing tank, but also complicates the operation.
【０００４】本発明の目的は、小容量から大容量までの
広い範囲の流量測定ができ、且つ種々の薬液にも対応す
ることのできる流量測定装置の提供にある。An object of the present invention is to provide a flow rate measuring device capable of measuring a flow rate in a wide range from a small capacity to a large capacity and capable of handling various chemical solutions.
【０００５】[0005]
【課題を解決するための手段】上述課題を解決するため
に、本発明は、次のような手段を採用した。本発明の係
る流量測定装置は、一定の内径を有し、液体を通すパイ
プと、該パイプの内部を通る液体中に気泡を注入する気
泡注入手段と、該パイプの外側に配置され前記気泡注入
手段によって注入された気泡の通過を検出する第１のセ
ンサと、該パイプの外側で、かつ該第１のセンサの下流
側に配置され、前記気泡の通過を検出する第２のセンサ
と、前記第１及び第２のセンサからの検出信号に基づく
気泡の通過時間に基づき、パイプ内を通る液体の瞬時量
及び積算量を演算する演算手段とを備えたことを特徴と
している。In order to solve the above-mentioned problems, the present invention employs the following means. The flow rate measuring device according to the present invention has a pipe having a constant inner diameter, through which a liquid passes, a bubble injecting means for injecting bubbles into the liquid passing through the inside of the pipe, and the bubble injecting means disposed outside the pipe. A first sensor for detecting the passage of bubbles injected by the means, a second sensor disposed outside the pipe and downstream of the first sensor, for detecting passage of the bubbles, A calculating means for calculating an instantaneous amount and an integrated amount of the liquid passing through the pipe based on the passage time of the bubble based on the detection signals from the first and second sensors.
【０００６】なお、この場合に、前記パイプは、本体材
質がテフロンＰＦＡ又は石英ガラスで構成し、且つ第
１、２のセンサは光センサとすることが好ましい。な
お、前記第１、２のセンサを、超音波センサあるいは静
電容量センサとしてもよい。In this case, it is preferable that the main body of the pipe is made of Teflon PFA or quartz glass, and the first and second sensors are optical sensors. The first and second sensors may be an ultrasonic sensor or a capacitance sensor.
【作用】本発明は、上述のように構成したので、流量を
測定するための液体をパイプの中を通過させ、気泡注入
手段によってパイプ中を通過する液体に気泡を注入す
る。気泡はパイプ中を液体と同一の速度で流れていき、
先ず第１のセンサで検出される。さらに流れて、第２の
センサでも検出される。これら第１，２のセンサが検出
した検出信号は演算手段に送られて、その時間差とパイ
プの径からパイプ内を流れる液体の瞬時流量が演算され
る。さらに、この瞬時流量に、流入開始から終了までの
時間を掛けることによって積算流量を演算することがで
きる。また、パイプを流れる液体の流量が時々変化する
ような場合には、流入開始から終了までの間に気泡を多
数回注入して、瞬時量を積算するようにしてもよい。な
お、液体を通すパイプの材質をＰＦＡあるいは石英ガラ
スで構成し、且つ第１、２のセンサをパイプの外部に設
置しているので、液体の種類を問わず流量を測定するこ
とができることになる。According to the present invention, as described above, the liquid for measuring the flow rate is passed through the pipe, and bubbles are injected into the liquid passing through the pipe by the bubble injection means. Bubbles flow through the pipe at the same speed as the liquid,
First, it is detected by the first sensor. It flows further and is also detected by the second sensor. The detection signals detected by these first and second sensors are sent to the calculating means, and the instantaneous flow rate of the liquid flowing in the pipe is calculated from the time difference and the diameter of the pipe. Further, the integrated flow rate can be calculated by multiplying the instantaneous flow rate by the time from the start to the end of the inflow. If the flow rate of the liquid flowing through the pipe changes from time to time, bubbles may be injected many times from the start to the end of the inflow to integrate the instantaneous amount. Since the material of the pipe through which the liquid passes is made of PFA or quartz glass, and the first and second sensors are installed outside the pipe, the flow rate can be measured regardless of the type of the liquid. .
【０００７】[0007]
【発明の実施の形態】以下、図面を参照して、本発明に
係る流量測定装置の実施の形態について説明する。図１
は、本発明の実施の形態を模式図として示したものであ
る。流量測定装置１０は、図に示すように、内径が一定
の円筒形状のパイプ１２を有しており、該パイプ１２は
フッ素樹脂であるＰＦＡ（４ふっ化エチレン−パーフロ
オロアルコキシエチレン共重合体）で構成されていて、
液体を流入させる液体入口１２ａと液体を流出させる液
体出口１２ｂとを備えている。また、パイプ１２の液体
入口１２ａの近傍、すなわち流路の上流側には、該パイ
プ１２内に気泡を注入させる注入器具１４が取り付けら
れており、該注入器具１４は疎水性膜１６と逆止弁１８
を介してマスフローコントローラ２０と連通している。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a flow measuring device according to an embodiment of the present invention. FIG.
1 is a schematic diagram showing an embodiment of the present invention. As shown in the figure, the flow rate measuring device 10 has a cylindrical pipe 12 having a constant inner diameter, and the pipe 12 is made of PFA (ethylene tetrafluoride-perfluoroalkoxyethylene copolymer) which is a fluororesin. Is composed of
A liquid inlet 12a through which liquid flows in and a liquid outlet 12b through which liquid flows out are provided. In addition, near the liquid inlet 12a of the pipe 12, that is, on the upstream side of the flow path, an injection device 14 for injecting air bubbles into the pipe 12 is attached. Valve 18
Through the mass flow controller 20.
【０００８】また、該マスフローコントローラ２０に
は、所定の気体を封入したボンベ、例えば窒素ガス等の
ボンベが接続されていて、コントローラ２０の操作よ
り、所望の量のガスを逆止弁１８、疎水性膜１６を介し
てパイプ１２内に注入することができる。なお、パイプ
１２内を通る液体は、疎水性膜１６、逆止弁１８からな
る逆流防止装置によって、マスフローコントローラ２０
側には流入しないようになっている。なお、上記ＰＦＡ
の代わりに内部が見える透明性のある石英ガラス製のパ
イプにしてもよい。透明性のある材質で薬液に侵されな
いものなら他のものでもよい。A cylinder filled with a predetermined gas, for example, a cylinder such as nitrogen gas, is connected to the mass flow controller 20. Can be injected into the pipe 12 through the conductive film 16. The liquid passing through the pipe 12 is supplied to the mass flow controller 20 by the backflow prevention device including the hydrophobic film 16 and the check valve 18.
It does not flow into the side. The above PFA
Instead, a transparent quartz glass pipe whose inside can be seen may be used. Other materials may be used as long as they are transparent and are not affected by the chemical.
【０００９】また、パイプ１２のマスフローコントロー
ラ２０が取り付けられた位置より下流側（液体の流れる
方向）の位置に、一定の距離を隔てて光センサからなる
第１のセンサ２２と同じく第２のセンサ２４とがそれぞ
れ配設されている。そして、これらのセンサ２２，２４
の検出信号は流量演算コントローラ２６に入力するよう
に構成されていて、該流量演算コントローラ２６では、
第１のセンサ２２からの検出信号と第２のセンサ２４か
らの検出信号との時間差及びパイプ１２の径から、パイ
プ１２内を通過する液体の流量を演算して流量表示計２
６ａで瞬時流量と積算流量のいずれも表示することがで
きるようになっている。さらに、外部にもこれらの演算
結果を出力できるように構成されている。A second sensor, like the first sensor 22 composed of an optical sensor, is located at a predetermined distance from the pipe 12 at a position downstream (in the direction in which the liquid flows) from the position where the mass flow controller 20 is attached. 24 are provided respectively. Then, these sensors 22, 24
Is configured to be input to the flow rate calculation controller 26. In the flow rate calculation controller 26,
From the time difference between the detection signal from the first sensor 22 and the detection signal from the second sensor 24 and the diameter of the pipe 12, the flow rate of the liquid passing through the pipe 12 is calculated and the flow indicator 2
6a, both the instantaneous flow rate and the integrated flow rate can be displayed. Furthermore, it is configured such that these calculation results can be output to the outside.
【００１０】なお、本発明にいう、演算手段は上記の流
量演算コントローラ２６に相当し、気泡注入手段は上記
の注入器具１４、疎水性膜１６、逆止弁１８、マスフロ
ーコントローラ２０に相当し、演算手段は流量演算コン
トローラに相当する。In the present invention, the calculating means corresponds to the above-mentioned flow rate calculating controller 26, and the bubble injecting means corresponds to the above-mentioned injecting device 14, hydrophobic membrane 16, check valve 18, and mass flow controller 20, The calculation means corresponds to a flow rate calculation controller.
【００１１】実際の流量の測定は、先ずパイプ１２の液
体入口１２ａから液体をパイプ内径断面積一杯に流入さ
せ、マスフローコントローラ２０を操作してパイプ１２
内を流れる液体中に気泡３０を注入する。気泡３０は、
液体の流れと等速でパイプ１２内を上流側から下流側に
移動するので、最初は第１のセンサ２２で通過が検出さ
れ、続いて第２のセンサ２４で検出される。第１のセン
サ２２と第２のセンサ２４との離間距離は、予め決めら
れており、パイプ１２の内径も分かっているので、気泡
３０が通過する時間差によって流量演算コントローラ２
６は瞬時流量を演算することができる。To measure the actual flow rate, first, liquid is allowed to flow through the liquid inlet 12a of the pipe 12 to fill the entire cross-sectional area of the pipe, and the mass flow controller 20 is operated to operate the pipe 12
Bubbles 30 are injected into the liquid flowing inside. Bubbles 30
Since the fluid moves from the upstream side to the downstream side in the pipe 12 at the same speed as the flow of the liquid, the passage is first detected by the first sensor 22 and subsequently detected by the second sensor 24. The separation distance between the first sensor 22 and the second sensor 24 is predetermined, and the inner diameter of the pipe 12 is also known.
6 can calculate the instantaneous flow rate.
【００１２】例えば、パイプの内径をＲｃｍ、第１のセ
ンサ２２と第２のセンサ２４との離間距離をＬ[ｃｍ]、
気泡３０の通過時間差がｔ[ｓｅｃ]とすると、１[ｓｅ
ｃ]当たりの瞬時流量Ａ[ｃｍ３]は、 Ａ＝π（Ｒ／２）２×Ｌ／ｔ[ｃｍ３] となる。この状態をＴ秒間連続させた場合の積算流量を
Ｂ[ｃｍ３]とすれば、 Ｂ＝｛π（Ｒ／２）２×Ｌ／ｔ｝×Ｔ[ｃｍ３] となる。For example, the inner diameter of the pipe is Rcm, the distance between the first sensor 22 and the second sensor 24 is L [cm],
Assuming that the transit time difference of the bubble 30 is t [sec], 1 [sec]
The instantaneous flow rate A [cm 3 ] per c] is A = π (R / 2) 2 × L / t [cm 3 ]. If the integrated flow rate when this state is continued for T seconds is B [cm 3 ], B = {π (R / 2) 2 × L / t} × T [cm 3 ].
【００１３】なお、上記の場合は、パイプ１２中を通過
する液体の流速は一定で変化が無いものとして演算され
たものであるが、流速が変化する可能性がある場合に
は、気泡３０を所定の間隔をおいて注入し、時々刻々と
瞬時流量を求めて、積算流量を演算するようにしてもよ
い。In the above case, the flow rate of the liquid passing through the pipe 12 is calculated as being constant and unchanged, but if the flow rate is likely to change, the bubble 30 is removed. The injection may be performed at predetermined intervals, and the instantaneous flow rate may be obtained every moment to calculate the integrated flow rate.
【００１４】また、流量が微量の場合には、気泡３０の
大きさを制御して、パイプ１２内を流れる液体を注入し
た気泡３０で分割し、気泡３０と気泡３０に挟まれた液
体の移動を測定するようにするとよい。When the flow rate is very small, the size of the bubble 30 is controlled so that the liquid flowing through the pipe 12 is divided by the injected bubble 30, and the bubble 30 and the movement of the liquid sandwiched by the bubble 30 are moved. Should be measured.
【００１５】なお、上記実施の形態では、第１のセンサ
２２，第２のセンサ２４は光センサを用いているが、パ
イプ１２の外側から気泡３０の通過を検出できる静電容
量式センサや超音波センサを用いてもよい。この場合の
静電容量式センサの使用方法は、パイプ１２の外側に対
向して電極を配置し、気泡の通過による電極間の静電容
量の変化をとらえる構成となり、超音波センサの場合は
液体と気泡との超音波伝達速度の差により気泡の通過を
検出する構成となる。In the above embodiment, the first sensor 22 and the second sensor 24 use optical sensors. However, a capacitance type sensor that can detect the passage of bubbles 30 from the outside of the pipe 12 or a super sensor is used. A sound wave sensor may be used. The method of using the capacitance type sensor in this case is such that electrodes are arranged to face the outside of the pipe 12 and the change in capacitance between the electrodes due to the passage of air bubbles is captured. In this configuration, the passage of bubbles is detected based on the difference in ultrasonic transmission speed between the air bubbles and the bubbles.
【００１６】[0016]
【発明の効果】以上説明したように、本発明によると、
小容量から大容量までの広い範囲の流量測定ができ、且
つセンサが液体に接しないので種々の薬液にも対応する
ことができる。また、工場に設置されている大きな薬液
タンクからじかに秤量注入ができるので、秤量槽を設置
する必要がなくスペースを有効利用することができる。As described above, according to the present invention,
The flow rate can be measured in a wide range from a small capacity to a large capacity, and since the sensor does not come into contact with the liquid, it can be used for various chemicals. In addition, since weighing can be directly performed from a large chemical solution tank installed in a factory, it is not necessary to install a weighing tank, and the space can be effectively used.
【図１】本発明に係る流量測定装置の実施形態を模式的
に示す図である。FIG. 1 is a diagram schematically showing an embodiment of a flow measuring device according to the present invention.
１０ 流量測定装置 １２ パイプ １４ 注入器具 １６ 疎水性膜 １８ 逆止弁 ２０ マスフローコントローラ ２２ 第１のセンサ ２４ 第２のセンサ ２６ 流量演算コントローラ ３０ 気泡 DESCRIPTION OF SYMBOLS 10 Flow measuring device 12 Pipe 14 Injection instrument 16 Hydrophobic membrane 18 Check valve 20 Mass flow controller 22 First sensor 24 Second sensor 26 Flow calculation controller 30 Bubble
─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成１１年３月９日[Submission date] March 9, 1999
【手続補正１】[Procedure amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】特許請求の範囲[Correction target item name] Claims
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【特許請求の範囲】[Claims]
【手続補正２】[Procedure amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００５[Correction target item name] 0005
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【０００５】[0005]
【課題を解決するための手段】上述課題を解決するため
に、本発明は、次のような手段を採用した。本発明の係
る流量測定装置は、一定の内径を有し、ＰＦＡ又は石英
ガラスで構成され液体を通すパイプと、該パイプに取り
付けられパイプ内に気泡を注入する注入器具、該注入器
具に連通し、該注入器具に所望量のガスを注入するマス
フローコントローラ、該マスフローコントローラと注入
器具との間に介在する疎水性膜及び逆止弁で構成される
気泡注入手段と、該パイプの外側に配置され前記気泡注
入手段によって注入された気泡の通過を検出する第１の
センサと、該パイプの外側で、かつ該第１のセンサの下
流側に配置され、前記気泡の通過を検出する第２のセン
サと、前記第１及び第２のセンサからの検出信号に基づ
く気泡の通過時間に基づき、パイプ内を通る液体の瞬時
量及び積算量を演算する演算手段とを備えたことを特徴
としている。In order to solve the above-mentioned problems, the present invention employs the following means. Flow measuring device of the present invention has a constant inner diameter, PFA or quartz
A pipe made of glass through which liquid passes, and
Injection device for injecting air bubbles into attached pipe, said injector
Mass that communicates with the device and injects the desired amount of gas into the infusion device.
Flow controller, mass flow controller and injection
Consists of a hydrophobic membrane and a check valve interposed between the device and the device
A bubble injecting means, a first sensor arranged outside the pipe for detecting passage of bubbles injected by the bubble injecting means, and a gas sensor arranged outside the pipe and downstream of the first sensor; A second sensor for detecting the passage of the bubble, and an operation for calculating an instantaneous amount and an integrated amount of the liquid passing through the pipe based on the passage time of the bubble based on detection signals from the first and second sensors. Means.
【手続補正３】[Procedure amendment 3]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００６[Correction target item name] 0006
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【０００６】なお、この場合に、第１、２のセンサは光
センサとすることが好ましい。なお、前記第１、２のセ
ンサを、超音波センサとしてもよい。本発明は、上述の
ように構成したので、流量を測定するための液体をパイ
プの中を通過させ、気泡注入手段によってパイプ中を通
過する液体に気泡を注入する。気泡はパイプ中を液体と
同一の速度で流れていき、先ず第１のセンサで検出され
る。さらに流れて、第２のセンサでも検出される。これ
ら第１，２のセンサが検出した検出信号は演算手段に送
られて、その時間差とパイプの径からパイプ内を流れる
液体の瞬時流量が演算される。さらに、この瞬時流量
に、流入開始から終了までの時間を掛けることによって
積算流量を演算することができる。また、パイプを流れ
る液体の流量が時々変化するような場合には、流入開始
から終了までの間に気泡を多数回注入して、瞬時量を積
算するようにしてもよい。なお、液体を通すパイプの材
質をＰＦＡあるいは石英ガラスで構成し、且つ第１、２
のセンサをパイプの外部に設置しているので、液体の種
類を問わず流量を測定することができることになる。In this case, the first and second sensors are optical
Preferably, it is a sensor. The first and second sections
The sensor may be an ultrasonic sensor. Since the present invention is configured as described above, the liquid for measuring the flow rate is passed through the pipe, and bubbles are injected into the liquid passing through the pipe by the bubble injection means. The bubbles flow through the pipe at the same speed as the liquid, and are first detected by the first sensor. It flows further and is also detected by the second sensor. The detection signals detected by these first and second sensors are sent to the calculating means, and the instantaneous flow rate of the liquid flowing in the pipe is calculated from the time difference and the diameter of the pipe. Further, the integrated flow rate can be calculated by multiplying the instantaneous flow rate by the time from the start to the end of the inflow. If the flow rate of the liquid flowing through the pipe changes from time to time, bubbles may be injected many times from the start to the end of the inflow to integrate the instantaneous amount. The pipe through which the liquid passes is made of PFA or quartz glass.
Since the sensor is installed outside the pipe, the flow rate can be measured regardless of the type of liquid.
Claims (4)
と、 該パイプの内部を通る液体中に気泡を注入する気泡注入
手段と、 該パイプの外側に配置され前記気泡注入手段によって注
入された気泡の通過を検出する第１のセンサと、 該パイプの外側で、かつ該第１のセンサの下流側に配置
され、前記気泡の通過を検出する第２のセンサと、 前記第１及び第２のセンサからの検出信号に基づく気泡
の通過時間に基づき、パイプ内を通る液体の瞬時量及び
積算量を演算する演算手段とを備えたことを特徴とする
流量測定装置。1. A pipe having a constant inner diameter and through which a liquid passes, bubble injecting means for injecting bubbles into the liquid passing through the inside of the pipe, and a bubble injecting means arranged outside the pipe and injected by the bubble injecting means. A first sensor for detecting the passage of the bubble, a second sensor disposed outside the pipe and downstream of the first sensor, and for detecting the passage of the bubble; A flow rate measuring device comprising: a calculating means for calculating an instantaneous amount and an integrated amount of the liquid passing through the pipe based on a passage time of the bubble based on a detection signal from the second sensor.
英ガラスで構成されていることを特徴とする請求項１に
記載の流量測定装置。2. The flow measuring device according to claim 1, wherein the pipe has a main body made of PFA or quartz glass.
ことを特徴とする請求項１に記載の流量測定装置。3. The flow measuring device according to claim 1, wherein the first and second sensors are optical sensors.
又は静電容量センサであることを特徴とする請求項１に
記載の流量測定装置。4. The flow measuring device according to claim 1, wherein the first and second sensors are an ultrasonic sensor or a capacitance sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10113673A JP2941255B1 (en) | 1998-04-23 | 1998-04-23 | Flow measurement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10113673A JP2941255B1 (en) | 1998-04-23 | 1998-04-23 | Flow measurement device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2941255B1 JP2941255B1 (en) | 1999-08-25 |
| JPH11304561A true JPH11304561A (en) | 1999-11-05 |
Family
ID=14618274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10113673A Expired - Fee Related JP2941255B1 (en) | 1998-04-23 | 1998-04-23 | Flow measurement device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2941255B1 (en) |
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| JP2010145422A (en) * | 2001-11-26 | 2010-07-01 | Emerson Electric Co | Coriolis flowmeter |
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|---|---|---|---|---|
| JP2010145422A (en) * | 2001-11-26 | 2010-07-01 | Emerson Electric Co | Coriolis flowmeter |
| JP2010156712A (en) * | 2001-11-26 | 2010-07-15 | Emerson Electric Co | Coriolis flowmeter and manufacturing thereof |
| WO2010032804A1 (en) * | 2008-09-17 | 2010-03-25 | アークレイ株式会社 | Analysis device and analysis method |
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| Publication number | Publication date |
|---|---|
| JP2941255B1 (en) | 1999-08-25 |
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