JPH11337115A - Local air conditioning system for clean room - Google Patents

Abstract

(57) [Problem] To improve a chilled water piping system of a local air conditioning system of a clean room so that a layout change and expansion of a production line in a clean room can be flexibly performed by simple and short-term piping work. A water-cooled cooling coil (10a) is incorporated into a fan filter unit (10) for each of the constant-temperature zones (5) that require high-precision temperature control laid out separately in a clean room (2). In a local air-conditioning system in which chilled water is circulated and sent to control the temperature in the area with high accuracy, a primary chilled water header 14 connected to an external chilled water main pipe 13 and a ceiling in a clean room or a free access floor A chilled water piping system is constructed by the secondary chilled water header 16 distributed under the floor of the chilled water and the flexible tubes 15, 17 laid between the primary chilled water header / secondary chilled water header and the secondary chilled water header / cooling coil. And the secondary cold water header is movably installed in response to a layout change.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room for electronic, precision and semiconductor manufacturing in which a number of mini-environments requiring high-precision temperature control are installed in a room of a clean room. It relates to an air conditioning system.

[0002]

2. Description of the Related Art In a clean room described above, various manufacturing apparatuses are arranged in the clean room in accordance with the process steps. For example, in an area in which precision equipment such as an exposure apparatus installed in a clean room for semiconductor manufacturing is installed, In addition to high air cleanliness, high-precision constant temperature and humidity are required in terms of temperature and humidity.

Therefore, conventionally, apart from the air-conditioning equipment of the entire clean room, a zone (hereinafter, referred to as a "constant temperature zone") that requires high-precision temperature control laid out in the clean room in the form of a thermal chamber, a booth, a bench, or the like. A water-cooled cooling coil (dry coil) is installed in a fan filter unit (vertical laminar flow type or horizontal cross-flow type) that sends clean air to each constant-temperature zone. In general, a local air-conditioning system in which the flow rate of cold water to be adjusted is adjusted to control the temperature of the zone with respect to a set temperature with high accuracy is adopted.

In order to supply chilled water to the cooling coil, a branch pipe for guiding water that has been conventionally branched off from a chilled water main pipe connected to a chilled water supply source is provided inside a ceiling of a clean room.
Alternatively, the branch pipe is routed under the floor of the free access floor, and the branch pipe is directly connected to a cooling coil of a fan filter unit installed in a constant temperature zone to construct a cold water piping system.

[0005]

The conventional configuration of the chilled water piping system for constructing the local air-conditioning system of the clean room described above has a drawback that it cannot flexibly cope with a layout change of the production line in the clean room as described below. There is. (1) In recent years, since semiconductor manufacturing technology and production line automation have been progressing year by year, there is a tendency that layout of a production line in a clean room, model change of a manufacturing apparatus, and expansion are performed in a short cycle. With this layout change, the installation location of the mini-environment requiring local air conditioning also moves.

In view of this, according to the layout of the clean room equipment originally planned as described above, a chilled water supply pipe connected to the cooling coil is fixedly piped in the ceiling of the clean room or under the floor of the free access floor. If the location of the constant temperature zone changes in the clean room room due to the layout change or expansion of the production line, the design and construction of the chilled water supply piping system must be redone each time. Requires a lot of time and work, and the operation of the clean room is stopped during the construction.

[0007] (2) Although there is a strong demand for shortening the construction period for clean room facility construction, the layout of the final production line is often not determined by the user during construction, or the plan is changed during construction. In this case, the contractor of the clean room equipment must change the design of the chilled water piping system, change the piping at the site, and the like, which causes a delay in the construction period and an increase in cost.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has as its object to solve the above-mentioned problems, and to reduce the construction period and increase the cost with respect to a layout change or expansion of a production line in a clean room. It is an object of the present invention to provide a local air conditioning system for a clean room in which a chilled water piping system is improved so that it can be flexibly handled by simple piping work.

[0009]

According to the present invention, in order to achieve the above-mentioned object, a constant-temperature zone which requires high-precision temperature control laid out in a clean room is required. In a local air-conditioning system in which a water-cooled cooling coil is incorporated in a fan filter unit that sends clean air to the zone, and chilled water is circulated from the outside to the cooling coil to control the temperature in the area with high accuracy. A primary chilled water header connected to an external chilled water main pipe, a secondary chilled water header dispersedly disposed in the ceiling of a clean room or below a floor of a free access floor and connected to the cooling coil, a primary chilled water header and a secondary chilled water Construct a chilled water piping system with a flexible water guide tube laid between headers, and change the layout of the secondary chilled water header to a constant temperature zone. Response movably installed in the (claim 1) ones, in particular constituting a cold water piping system in the manner as follows follow.

(1) The primary chilled water header and the secondary chilled water header each comprise a set of a forward header and a return header each having a plurality of branch connection ports, and each secondary chilled water header is provided at an entrance of the forward header. A flow control valve is connected, and a cooling water supply amount required for maintaining the temperature in the constant temperature zone is supplied to the cooling coil through the flow control valve (claim 2). (2) A temperature sensor is provided for each of the constant temperature zones laid out in the clean room, and a temperature sensor is provided based on the detection signal of the temperature sensor.
By controlling the flow control valve connected to the secondary chilled water header, the temperature of the constant temperature zone is controlled with high accuracy (claim 3).

According to the above configuration, even if the constant temperature zone requiring local air conditioning is moved from the initial position to another location due to a layout change of a production line in a clean room, etc. The chilled water header is moved to the vicinity of the constant temperature zone together with the flexible water guide tube connected to the header, and then connected to the cooling coil incorporated in the fan filter unit, or the cooling coil is distributed and deployed from the beginning. By connecting to the nearest secondary chilled water header that has been set aside, it is possible to flexibly respond without the need for extensive piping replacement work, and the work accompanying this change can be completed in a short time.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below based on the illustrated embodiment. FIG. 1 is a configuration diagram of an entire clean room equipped with a local air conditioning system, and FIG. 2 is a chilled water piping system diagram of the local air conditioning system. First, in FIG. 1, 1 is a building, 2 is a clean room constructed in the building 1, 3 is its ceiling (suspended ceiling panel), 4 is a free access floor, 5 is a hanging wall (vinyl curtain or (Stand-alone partition wall) A constant temperature zone defined by 5a that requires high-precision temperature control, 6 is a manufacturing device installed in the constant temperature zone 5, 7 is an air conditioner for outside air treatment, and 8 is a clean room arranged in a return duct. 2 is a cooling coil (dry coil) for air conditioning the general space, 9 is a fan filter unit arranged on the ceiling corresponding to the general space of the clean room 2, and 10 is a cooling coil arranged on the ceiling side corresponding to the constant temperature zone 5 A built-in fan filter unit, 10a is a water-cooled cooling coil (dry coil), 12 is a cooling main pipe 13 communicating with an external cold water supply source and the fan. Between the cooling coil 10a of the emission filter unit 10 is a cold water piping system built with pipe in the ceiling of the clean room 2 so as to communicate. 13a, 13
b is a forward pipe and a return pipe of the cold water main pipe 13, respectively.

Here, a chilled water piping system 12 of the local air conditioning system is connected to a chilled water main pipe 13 and installed in a corner of the ceiling of the clean room 2,
A flexible water guide tube (such as a vinyl tube) 15 is connected between the secondary chilled water header 14 and the secondary chilled water header 16, which is distributed and installed in the ceiling of the clean room 2, the secondary chilled water header 16, and the fan A flexible tube 17 is connected between the cooling unit 10a and the cooling coil 10a built in the filter unit 10. Also, the secondary cold water header 16
Is mounted on a ceiling wall of the building 1 or the like so as to be freely movable via a hook so that the installation position can be freely changed according to the position of the constant temperature zone 5 laid out in the clean room 2 as described later. I have. The length of the flexible water guide tube 15 is set in advance with a margin in consideration of the moving range of the secondary cold water header 16.

As shown in FIG. 2, the primary chilled water header 14 is connected to a secondary chilled water header 16 through 10 to 20.
Outgoing header 14a, return header 1 having a branch connection port of
4b as a set. Also, the secondary cold water header 16
Is a forward header 1 having 5 to 6 branch connection ports for each unit.
6a and return path header 16b as a set, and a flow control valve 18 is connected to the entrance of the forward path header 16a for each base, and based on a detection signal of a temperature sensor 19 arranged in each constant temperature zone 5,
The flow control valve 18 is controlled to maintain the temperature of the constant temperature zone 5 with respect to the set temperature with high accuracy.

With this configuration, the chilled water supplied from the chilled water source to the outgoing header 14a of the primary chilled water header 14 via the chilled water main pipe 13 is supplied to the water guide tube 15, the flow control valve 18, the outgoing header 16a of the secondary chilled water header 16, and The air flowing through the flexible coil 17 to the cooling coil 10a of the fan filter unit 10 and sent to the constant temperature zone 5 is air-conditioned. Then, the cold water flowing out of the cooling coil 10a returns to the cold water source through the return path of the cold water piping system 12 and the cold water main pipe 13. In the state where the local air conditioning is performed, the temperature sensor 19
The temperature of the constant temperature zone 5 is monitored, and the flow rate control valve 18 is controlled based on the detected temperature to adjust the flow rate of the chilled water flowing through the cooling coil 10a to control the temperature of the constant temperature zone 5 with respect to the set temperature with high accuracy. I do.

On the other hand, when the installation location of the constant temperature zone 5 is changed in accordance with the layout change and expansion of the production line in the clean room, the secondary chilled water header 1 is adjusted accordingly.
6 is connected to the cooling coil 10a of the fan filter unit 10 after being moved to the vicinity of the relocated constant temperature zone 5 while being connected to the flexible water guide tube 15, or distributed from the beginning. The cooling coil 10a is connected here using the nearest secondary cold water header 5 that has been set. As a result, the layout can be flexibly changed and expanded without the need for extensive piping replacement work, and the work accompanying this change can be completed in a short time.

In the illustrated embodiment, the vertical laminar flow system is taken as an example, and the cold water piping system 12 of the local air conditioning system is laid in the ceiling of the clean room 2. By laying it in the space under the floor, it is possible to start up the cold water pipe from under the floor and connect it to the cooling coil of the horizontal cross flow fan filter unit equipped in the mini-environment.

[0018]

As described above, according to the structure of the present invention, the primary cooling water pipe system for supplying cold water to the water-cooled cooling coil of the local air-conditioning system installed in the clean room is connected to the external cold water main pipe. A chilled water header, a secondary chilled water header that is distributed and installed in the ceiling of the clean room or below the floor of the free access floor and connected to the cooling coil, and a flexible pipe laid between the primary chilled water header and the secondary chilled water header. By constructing a chilled water piping system for local air conditioning with water guide tubes and arranging the secondary chilled water header so that it can be moved in accordance with the layout change of the constant temperature zone, the layout of the production line can be changed and expanded. It can be flexibly handled, and large-scale, such as redoing the production and construction of the cold water piping system according to the layout change as in the conventional configuration Plumbing without requiring, shortening the construction period, as well as attained the savings of the construction cost.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of an entire clean room equipped with a local air conditioning system according to an embodiment of the present invention.

FIG. 2 is a chilled water piping system diagram of the local air conditioning system in FIG.

[Explanation of symbols]

 2 Clean Room 3 Ceiling 4 Free Access Floor 5 Constant Temperature Zone 6 Manufacturing Equipment 10 Fan Filter Unit with Built-in Cooling Coil 10a Water Cooling Cooling Coil 12 Cold Water Piping System 13 Cold Water Main Pipe 14 Primary Cold Water Header 15 Flexible Water Conducting Tube 16 Secondary Cold Water Header 17 Flexible tube 18 Flow control valve 19 Temperature sensor

Claims (3)

[Claims] 1. A local air-conditioning system for a constant-temperature zone requiring high-precision temperature control, which is laid out in a room of a clean room. Water-cooling is performed for a fan filter unit for sending clean air to each constant-temperature zone. A cooling water system incorporating a chilled water and circulating chilled water from the outside to the cooling coil to control the temperature in the area with high accuracy. A primary chilled water header connected to an external chilled water main pipe, and a clean room Cold water piping with a secondary chilled water header connected to the cooling coil by being distributed and installed in the ceiling or below the floor of the free access floor, and a flexible water guide tube laid between the primary chilled water header and the secondary chilled water header. A system is constructed, and the secondary chilled water header is movably installed in accordance with a layout change of the constant temperature zone. Nrumu local air-conditioning system. 2. The local air conditioning system according to claim 1, wherein the primary chilled water header and the secondary chilled water header each comprise a set of a forward header and a return header each having a plurality of branch connection ports, and each of the secondary chilled water headers. A local air-conditioning system for a clean room, wherein a flow control valve is connected to an entrance of an outward header for each header. 3. The local air conditioning system according to claim 2, wherein a temperature sensor is provided for each of the constant temperature zones laid out in the clean room, and a temperature sensor is provided based on a detection signal of the temperature sensor.
A local air conditioning system for a clean room, wherein a flow control valve connected to a secondary chilled water header is controlled.