JPH11339558A - Anisotropic conductive adhesive and conductive connection structure - Google Patents
Anisotropic conductive adhesive and conductive connection structureInfo
- Publication number
- JPH11339558A JPH11339558A JP14440198A JP14440198A JPH11339558A JP H11339558 A JPH11339558 A JP H11339558A JP 14440198 A JP14440198 A JP 14440198A JP 14440198 A JP14440198 A JP 14440198A JP H11339558 A JPH11339558 A JP H11339558A
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- Japan
- Prior art keywords
- fine particles
- conductive fine
- hard
- conductive
- soft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
(57)【要約】
【課題】 軟質電極、硬質電極等の電極の種類によら
ず、これらの電極が形成された基板又は電気部品等を良
好に導電接合することができる異方性導電接着剤を提供
する。
【解決手段】 平均粒子径が0.3〜50μmの硬質導
電性微粒子と、前記硬質導電性微粒子よりも大きい軟質
導電性微粒子とを含む異方性導電接着剤であって、前記
硬質導電性微粒子の平均粒子径が前記軟質導電性微粒子
の平均粒子径の0.2〜0.95倍である異方性導電接
着剤。(57) Abstract: Anisotropic conductive adhesive capable of satisfactorily conductively joining a substrate or an electric component or the like on which these electrodes are formed, regardless of the type of electrodes such as soft electrodes and hard electrodes. I will provide a. An anisotropic conductive adhesive comprising hard conductive fine particles having an average particle diameter of 0.3 to 50 µm and soft conductive fine particles larger than the hard conductive fine particles, wherein the hard conductive fine particles Wherein the average particle diameter of the anisotropic conductive adhesive is 0.2 to 0.95 times the average particle diameter of the soft conductive fine particles.
Description
【0001】[0001]
【発明の属する技術分野】本発明は、電極が形成された
基板又は電気部品の接続に用いられる異方性導電接着
剤、及び、該異方性導電接着剤が用いられた導電接続構
造体に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an anisotropic conductive adhesive used for connecting a substrate or an electric component on which electrodes are formed, and a conductive connection structure using the anisotropic conductive adhesive. .
【0002】[0002]
【従来の技術】液晶ディスプレイ、パーソナルコンピュ
ータ、携帯通信機器等のエレクトロニクス製品におい
て、半導体素子等の小型電気部品を基板に電気的に接続
したり、基板同士を電気的に接続するため、いわゆる異
方性導電材料といわれるものが使用されている。また、
上記異方性導電材料のなかで、導電性微粒子をバインダ
ー樹脂に混合した異方性導電接着剤が広く用いられてい
る。2. Description of the Related Art In electronic products such as a liquid crystal display, a personal computer, and a portable communication device, a so-called anisotropic device is used to electrically connect small electric components such as semiconductor elements to a substrate or to electrically connect the substrates to each other. What is called an electrically conductive material is used. Also,
Among the anisotropic conductive materials, anisotropic conductive adhesives in which conductive fine particles are mixed with a binder resin are widely used.
【0003】上記異方性導電接着剤に用いる導電性微粒
子としては、有機基材粒子又は無機基材粒子の表面に金
属メッキを施したものや金属粒子が用いられてきた。こ
のような導電性微粒子は、例えば、特公平6−9677
1号公報、特開平4−36902号公報、特開平4−2
69720号公報、特開平3−257710号公報等に
開示されている。[0003] As the conductive fine particles used in the anisotropic conductive adhesive, those obtained by plating metal surfaces on organic base particles or inorganic base particles or metal particles have been used. Such conductive fine particles are described in, for example, Japanese Patent Publication No. 6-9677.
No. 1, JP-A-4-36902, JP-A-4-4-2
No. 69720, JP-A-3-257710 and the like.
【0004】また、このような導電性微粒子をバインダ
ー樹脂と混ぜ合わせてフィルム状又はペースト状にした
異方性導電接着剤は、例えば、特開昭63−23188
9号公報、特開平4−259766号公報、特開平3−
291807号公報、特開平5−75250号公報等に
開示されている。An anisotropic conductive adhesive formed by mixing such conductive fine particles with a binder resin to form a film or paste is disclosed in, for example, JP-A-63-23188.
9, JP-A-4-259766, JP-A-3-259766
No. 291807 and Japanese Patent Application Laid-Open No. 5-75250.
【0005】従来の異方性導電接着剤は、導電性微粒子
を構成する基材として、軟質基材又は硬質基材の一方の
みが使用されてきた。これは、電極が金バンプのような
軟質電極の場合、硬質基材を用いることにより電極に導
電性微粒子を食い込ませることができ、これにより信頼
性を確保することができるからである。電極に軟質材料
を用いた場合、軟質基材を用いると、圧着するときに基
材が破壊されやすく、充分な信頼性が得られないことが
ある。In the conventional anisotropic conductive adhesive, only one of a soft base and a hard base has been used as a base constituting the conductive fine particles. This is because, when the electrode is a soft electrode such as a gold bump, the conductive fine particles can be made to penetrate the electrode by using a hard base material, thereby ensuring reliability. When a soft material is used for the electrode, if a soft base material is used, the base material is easily broken at the time of pressure bonding, and sufficient reliability may not be obtained in some cases.
【0006】一方、ITO(Indium Tin O
xide)のような硬質電極を用いた場合には、軟質基
材を用いると、圧着時に弾性変形するため、電極を傷つ
けることなく、充分な接触面積を確保することができ、
信頼性を確保することができる。硬質電極に硬質基材を
用いた場合、圧着時に電極を傷つけ、導通不良が発生す
ることもある。On the other hand, ITO (Indium Tin O)
In the case where a hard electrode such as xide) is used, if a soft base material is used, since it is elastically deformed at the time of pressure bonding, a sufficient contact area can be secured without damaging the electrode,
Reliability can be ensured. When a hard base material is used for the hard electrode, the electrode may be damaged at the time of pressure bonding, and conduction failure may occur.
【0007】近年、電子機器や電子部品が小型化するに
ともない、基板等の配線が微細になるとともに、硬質電
極と軟質電極とが隣接することが多くなってきた。この
場合、従来の異方性導電接着剤を用いて導電接合を行う
と、軟質電極に使用すべき導電接着剤が硬質電極にはみ
出し、電極を傷つけてしまう等の不都合を生ずることが
あった。[0007] In recent years, as electronic devices and electronic components have become smaller, wirings on substrates and the like have become finer, and hard electrodes and soft electrodes have often become adjacent to each other. In this case, when the conductive bonding is performed using the conventional anisotropic conductive adhesive, the conductive adhesive to be used for the soft electrode may protrude into the hard electrode, causing a problem such as damaging the electrode.
【0008】[0008]
【発明が解決しようとする課題】本発明は、上記に鑑
み、軟質電極、硬質電極等の電極の種類によらず、これ
らの電極が形成された基板又は電気部品等を良好に導電
接合することができる異方性導電接着剤、及び、該異方
性導電接着剤が用いられた導電接続構造体を提供するこ
とを目的とする。SUMMARY OF THE INVENTION In view of the above, it is an object of the present invention to satisfactorily conductively join a substrate or an electric component or the like on which these electrodes are formed irrespective of the types of electrodes such as soft electrodes and hard electrodes. It is an object of the present invention to provide an anisotropic conductive adhesive capable of forming a conductive film, and a conductive connection structure using the anisotropic conductive adhesive.
【0009】[0009]
【課題を解決するための手段】本発明は、平均粒子径が
0.3〜50μmの硬質導電性微粒子と、上記硬質導電
性微粒子よりも大きい軟質導電性微粒子とを含む異方性
導電接着剤であって、上記硬質導電性微粒子の平均粒子
径が上記軟質導電性微粒子の平均粒子径の0.2〜0.
95倍であることを特徴とする異方性導電接着剤であ
る。以下に、本発明を詳述する。According to the present invention, there is provided an anisotropic conductive adhesive comprising: hard conductive fine particles having an average particle diameter of 0.3 to 50 μm; and soft conductive fine particles larger than the hard conductive fine particles. Wherein the average particle diameter of the hard conductive fine particles is 0.2 to 0.1 times the average particle diameter of the soft conductive fine particles.
This is an anisotropic conductive adhesive characterized by having a ratio of 95 times. Hereinafter, the present invention will be described in detail.
【0010】本発明は、平均粒子径が0.3〜50μm
の硬質導電性微粒子と、上記硬質導電性微粒子よりも大
きい軟質導電性微粒子とを含む異方性導電接着剤であ
る。本発明の異方性導電接着剤において、硬質導電性微
粒子と、それよりも大きい軟質導電性微粒子とを使用し
ているのは、以下のような理由による。すなわち、上記
異方性導電接着剤を用いて軟質電極を接合する場合に
は、硬質導電性微粒子が軟質電極に食い込むために充分
に信頼性を確保することができ、一方、硬質電極を接合
する場合においては、軟質導電性微粒子が変形し、硬質
電極と充分な接触面積をとり得るので、充分な信頼性を
確保することができるからである。さらに、上記硬質導
電性微粒子よりも上記軟質導電性微粒子が大きいため、
硬質電極を接合させる場合であっも、硬質導電性微粒子
が電極を傷つけることはない。In the present invention, the average particle size is 0.3 to 50 μm
Is an anisotropic conductive adhesive containing the hard conductive fine particles of the above and soft conductive fine particles larger than the hard conductive fine particles. The hard conductive fine particles and the soft conductive fine particles larger than the hard conductive fine particles are used in the anisotropic conductive adhesive of the present invention for the following reasons. That is, when joining a soft electrode using the anisotropic conductive adhesive, sufficient reliability can be ensured for hard conductive fine particles to bite into the soft electrode, while joining the hard electrode. In this case, the soft conductive fine particles are deformed and can have a sufficient contact area with the hard electrode, so that sufficient reliability can be ensured. Furthermore, because the soft conductive fine particles are larger than the hard conductive fine particles,
Even when a hard electrode is bonded, the hard conductive fine particles do not damage the electrode.
【0011】上記硬質導電性微粒子は、その平均粒子径
が0.3〜50μmである。0.3μm未満であると、
接合すべき電極面に導電性微粒子が接触しにくくなり、
電極間に隙間が生じて接触不良の原因となる場合があ
り、50μmを超えると、隣接する電極と接触しやすく
なり、電極間においてショートが発生しやすくなるため
上記範囲に限定される。より好ましくは、1〜7μmで
ある。The hard conductive fine particles have an average particle size of 0.3 to 50 μm. When it is less than 0.3 μm,
It becomes difficult for conductive fine particles to contact the electrode surface to be joined,
In some cases, a gap may be formed between the electrodes to cause a contact failure. When the thickness exceeds 50 μm, the electrode is easily brought into contact with an adjacent electrode, and a short circuit easily occurs between the electrodes. More preferably, it is 1 to 7 μm.
【0012】上記硬質導電性微粒子の平均粒子径は、上
記軟質導電性微粒子の平均粒子径の0.2〜0.95倍
である。0.2倍未満であると、電極を接合する際、潰
れた軟質導電性微粒子が邪魔をするため、硬質導電性微
粒子が軟質電極に充分に食い込みにくくなり、0.95
倍を超えると、硬質電極を接合する際に、上記硬質電極
が硬質導電性微粒子により傷つけられやすくなるため上
記範囲に限定される。好ましくは、0.3〜0.9倍で
あり、より好ましくは、0.4〜0.8倍であり、更に
好ましくは、0.5〜0.7倍である。The average particle diameter of the hard conductive fine particles is 0.2 to 0.95 times the average particle diameter of the soft conductive fine particles. When the ratio is less than 0.2 times, when the electrodes are joined, the crushed soft conductive fine particles hinder, so that the hard conductive fine particles are less likely to bite into the soft electrode, and 0.95 times.
When the ratio is more than twice, when the hard electrode is joined, the hard electrode is easily damaged by the hard conductive fine particles, so that it is limited to the above range. Preferably, it is 0.3 to 0.9 times, more preferably 0.4 to 0.8 times, and still more preferably 0.5 to 0.7 times.
【0013】上記硬質導電性微粒子の材質は特に限定さ
れず、例えば、金、銀、パラジウム、ニッケル、銅、タ
ングステン、スズ等の金属、ハンダ等の合金、金属の混
合体金属同士の複合体、セラミックと金属との複合体等
が挙げられる。上記金属同士の複合体としては、金属粒
子にメッキ処理が施されたもの等が挙げられ、上記セラ
ミックと金属の複合体としては、例えば、セラミック粒
子表面に導電層が被覆形成されたもの等が挙げられる。The material of the hard conductive fine particles is not particularly limited, and examples thereof include metals such as gold, silver, palladium, nickel, copper, tungsten and tin, alloys such as solder, and mixtures of metals. A composite of a ceramic and a metal is exemplified. Examples of the composite of metals include those obtained by plating metal particles, and examples of the composite of ceramic and metal include, for example, those in which a conductive layer is formed by coating the surfaces of ceramic particles. No.
【0014】これらのなかでは、金属が好ましく、ま
た、接合時の信頼性を上げることができるという観点か
ら、金属粒子に貴金属メッキが施されたもの、特に金メ
ッキが施されたものがより好ましい。また、硬度が高い
という点から、ニッケル粒子を核とし、このニッケル粒
子にメッキ処理が施されたものが好ましい。Among these, metals are preferred, and from the viewpoint that the reliability at the time of joining can be improved, those in which noble metal plating is applied to metal particles, particularly those in which gold plating is applied, are more preferable. From the viewpoint of high hardness, it is preferable that nickel particles are used as nuclei and plated with the nickel particles.
【0015】上記硬質導電性微粒子は、CV値が40%
以下であるものが好ましい。ここで、CV値とは、下記
の式(1); CV値(%)=(σ/Dn)×100・・・・(1) (式中、σは、粒子径の標準偏差を表し、Dnは、数平
均粒子径を表す)で表される値である。上記標準偏差及
び数平均粒子径は、導電性微粒子100個を電子顕微鏡
で観察することにより得られる数値である。上記CV値
が40%を超えると、軟質導電性微粒子よりも大きな硬
質導電性微粒子が多数発生し、硬質電極を傷つける場合
がある。より好ましくは、20%以下である。The hard conductive fine particles have a CV value of 40%.
The following are preferred. Here, the CV value is the following formula (1); CV value (%) = (σ / Dn) × 100 (1) (where σ represents the standard deviation of the particle diameter, Dn is a number average particle diameter). The standard deviation and the number average particle diameter are numerical values obtained by observing 100 conductive fine particles with an electron microscope. If the CV value exceeds 40%, a large number of hard conductive fine particles larger than the soft conductive fine particles are generated, and the hard electrode may be damaged. More preferably, it is 20% or less.
【0016】上記硬質導電性微粒子は、アスペクト比が
1.3以下のものが好ましい。本明細書において、上記
アスペクト比とは、導電性微粒子100個を電子顕微鏡
で観察することにより得られる上記導電性微粒子の平均
長径を平均短径で割った値とする。上記アスペクト比が
1.3を超えると、導電性微粒子を介して電極同士を接
触させる際、電極に接触しない粒子が多数発生し導電抵
抗が大きくなったり、隣接電極間でのリーク現象が発生
しやすくなる。より好ましくは、1.1以下である。The hard conductive fine particles preferably have an aspect ratio of 1.3 or less. In the present specification, the aspect ratio is a value obtained by dividing the average major axis of the conductive fine particles obtained by observing 100 conductive fine particles with an electron microscope by the average minor axis. When the aspect ratio exceeds 1.3, when the electrodes are brought into contact with each other through the conductive fine particles, a large number of particles that do not come into contact with the electrodes are generated, and the conductive resistance increases, or a leak phenomenon occurs between adjacent electrodes. It will be easier. More preferably, it is 1.1 or less.
【0017】上記軟質導電性微粒子の材質は特に限定さ
れず、例えば、カーボン、高分子材料からなる粒子を核
とし、その表面に導電層が被覆形成されたもの等が挙げ
られる。上記軟質導電性微粒子は、K値が200〜80
0kgf/mm2 であるものが好ましい。The material of the soft conductive fine particles is not particularly limited, and examples thereof include those having particles made of carbon or a polymer material as nuclei and having a surface covered with a conductive layer. The soft conductive fine particles have a K value of 200 to 80.
It is preferably 0 kgf / mm 2 .
【0018】ここで、K値とは、下記の式(2); K値(kgf/mm2 )=(3/√2)×F×S-3/2×R-1/2・・・(2) (式中、Fは、20℃、10%圧縮変形における加重値
(kgf)、Sは、20℃における10%圧縮変位(m
m)、Rは半径(mm)を表す)で表される値である。Here, the K value is defined by the following equation (2): K value (kgf / mm 2 ) = (3 / √2) × F × S −3/2 × R −1/2. (2) (where F is the load value (kgf) at 20 ° C. and 10% compressive deformation, and S is the 10% compressive displacement (m
m) and R are values represented by a radius (mm).
【0019】上記K値が200kgf/mm2 未満であ
ると、上記硬質導電性微粒子により電極が傷つく可能性
があり、800kgf/mm2 を超えると、電極同士を
圧着する際に上記導電性微粒子が電極と充分に接触でき
ないことがある。[0019] When the K value is less than 200 kgf / mm 2, there is a possibility that the electrode is damaged by the hard conductive particles exceeds 800 kgf / mm 2, the above conductive fine particles at the time of crimping the electrode to each other In some cases, the electrode cannot be fully contacted.
【0020】上記軟質導電性微粒子は、CV値が10%
以下であるものが好ましい。上記CV値が10%を超え
ると、粒子径が不揃いとなるため、導電性微粒子を介し
て電極同士を接触させる際、電極に接触しない粒子の割
合が大きくなり、隣接電極間でのリーク現象が発生しや
すくなる。より好ましくは、5%以下である。The soft conductive fine particles have a CV value of 10%.
The following are preferred. If the CV value exceeds 10%, the particle diameters become uneven, so that when the electrodes are brought into contact with each other via the conductive fine particles, the ratio of the particles that do not come into contact with the electrodes becomes large, and the leakage phenomenon between the adjacent electrodes is reduced. More likely to occur. More preferably, it is 5% or less.
【0021】上記軟質導電性微粒子は、アスペクト比が
1.1以下のものが好ましい。上記アスペクト比が1.
1を超えると、導電性微粒子を介して電極同士を接触さ
せる際、電極に接触しない粒子が多数発生し、導電抵抗
が大きくなったり、隣接電極間でのリーク現象が発生し
やすくなる。より好ましくは、1.05以下である。The soft conductive fine particles preferably have an aspect ratio of 1.1 or less. When the above aspect ratio is 1.
When the ratio exceeds 1, when the electrodes are brought into contact with each other via the conductive fine particles, a large number of particles that do not come into contact with the electrodes are generated, and the conductive resistance is increased, and a leak phenomenon between adjacent electrodes is likely to occur. More preferably, it is 1.05 or less.
【0022】本発明において、硬質導電性微粒子に対す
る軟質導電性微粒子の重量比(軟質導電性微粒子/硬質
導電性微粒子)は、1/3〜3/1であるのが好まし
い。上記重量比が1/3未満の場合や3/1を超えた場
合、電極の接続時に電気容量が充分に確保されないこと
がある。In the present invention, the weight ratio of the soft conductive fine particles to the hard conductive fine particles (soft conductive fine particles / hard conductive fine particles) is preferably 1/3 to 3/1. If the weight ratio is less than 1/3 or exceeds 3/1, sufficient electrical capacity may not be ensured when connecting the electrodes.
【0023】上記異方性導電接着剤は、通常、上記硬質
導電性微粒子及び上記軟質導電性微粒子が絶縁性樹脂中
に分散されたものである。本明細書において、上記異方
性導電接着剤とは、異方性導電膜、異方性導電ペース
ト、異方性導電インキを含むものをいうものとする。The anisotropic conductive adhesive is usually one in which the hard conductive fine particles and the soft conductive fine particles are dispersed in an insulating resin. In the present specification, the anisotropic conductive adhesive refers to a material containing an anisotropic conductive film, an anisotropic conductive paste, and an anisotropic conductive ink.
【0024】上記異方性導電接着剤を構成するバインダ
ー樹脂としては特に限定されず、例えば、アクリレート
樹脂、エチレンー酢酸ビニル樹脂、スチレンーブタジエ
ンブロック共重合体等の熱可塑性樹脂;グリシジル基を
有するモノマーやオリゴマーとイソシアネート等の硬化
剤との反応により得られる硬化性樹脂組成物等の熱や光
によって硬化する組成物等が挙げられる。The binder resin constituting the anisotropic conductive adhesive is not particularly limited. For example, a thermoplastic resin such as an acrylate resin, an ethylene-vinyl acetate resin, a styrene-butadiene block copolymer; a monomer having a glycidyl group And a composition curable by heat or light, such as a curable resin composition obtained by the reaction of a polymer or oligomer with a curing agent such as isocyanate.
【0025】上記異方性導電接着剤中の硬質導電性微粒
子の含有量は、2〜50重量%が好ましく、軟質導電性
微粒子の含有量は、1〜40重量%が好ましい。The content of the hard conductive fine particles in the anisotropic conductive adhesive is preferably 2 to 50% by weight, and the content of the soft conductive fine particles is preferably 1 to 40% by weight.
【0026】上記異方性導電接着剤により接続される対
象物としては、例えば、表面に電極部が形成された基
板、半導体等の電気部品等が挙げられる。上記基板は、
フレキシブル基板とリジッド基板とに大別される。上記
フレキシブル基板としては、例えば、50〜500μm
の厚みの樹脂シートが挙げられる。上記樹脂シートの材
質としては、例えば、ポリイミド、ポリアミド、ポリエ
ステル、ポリスルホン等が挙げられる。The object to be connected by the anisotropic conductive adhesive includes, for example, a substrate having an electrode formed on the surface thereof, and an electric component such as a semiconductor. The substrate is
It is roughly divided into a flexible substrate and a rigid substrate. As the flexible substrate, for example, 50 to 500 μm
Resin sheet having a thickness of Examples of the material of the resin sheet include polyimide, polyamide, polyester, and polysulfone.
【0027】上記リジッド基板は、樹脂製のものとセラ
ミック製のものとに大別される。上記樹脂製のものとし
ては、例えば、ガラス繊維強化エポキシ樹脂、フェノー
ル樹脂、セルロース繊維強化フェノール樹脂等が挙げら
れる。上記セラミック製のものとしては、例えば、二酸
化ケイ素、アルミナ、ガラス等が挙げられる。The rigid substrates are roughly classified into those made of resin and those made of ceramic. Examples of the above-mentioned resin include glass fiber reinforced epoxy resin, phenol resin, cellulose fiber reinforced phenol resin and the like. Examples of the ceramic material include silicon dioxide, alumina, and glass.
【0028】上記基板の構成は特に限定されず、単層の
ものであってもよく、単位面積当たりの電極数を増加さ
せるために、例えば、複数の層が形成され、スルーホー
ル形成等の手段により、これらの層が相互に電気的に接
続されている多層基板であってもよい。The structure of the substrate is not particularly limited, and may be a single layer. In order to increase the number of electrodes per unit area, for example, a plurality of layers are formed, Accordingly, a multilayer substrate in which these layers are electrically connected to each other may be used.
【0029】上記電気部品としては特に限定されず、例
えば、トランジスタ、ダイオード、IC、LSI等の半
導体等の能動部品;抵抗、コンデンサ、水晶振動子等の
受動部品等が挙げられる。上記基板又は電気部品の表面
に形成される電極の形状としては特に限定されず、例え
ば、縞状、ドット状、任意形状のもの等が挙げられる。The electric components are not particularly limited, and include, for example, active components such as semiconductors such as transistors, diodes, ICs, and LSIs; and passive components such as resistors, capacitors, and crystal oscillators. The shape of the electrode formed on the surface of the substrate or the electric component is not particularly limited, and examples thereof include a stripe shape, a dot shape, and an arbitrary shape.
【0030】上記電極の材質としては、例えば、金、
銀、銅、ニッケル、パラジウム、カーボン、アルミニウ
ム、ITO等が挙げられる。接触抵抗を低減させるため
に、銅、ニッケル等の上に更に金が被覆された電極を用
いることができる。上記電極の厚みは、0.1〜100
μmであることが好ましく、上記電極の幅は、1〜50
0μmであることが好ましい。As the material of the electrode, for example, gold,
Silver, copper, nickel, palladium, carbon, aluminum, ITO and the like can be mentioned. In order to reduce the contact resistance, an electrode in which gold is further coated on copper, nickel, or the like can be used. The thickness of the electrode is 0.1 to 100.
μm, and the width of the electrode is 1 to 50 μm.
It is preferably 0 μm.
【0031】上記異方性導電接着剤を用いた接着方法と
しては、例えば、表面に電極が形成された基板又は電気
部品の上に、上記異方性導電膜からなる異方性導電接着
剤を配置し、その上に、他の基板又は電気部品の電極を
置き、加熱、加圧する方法が挙げられる。上記異方性導
電膜の代わりに異方性導電ペーストを所定量用い、スク
リーン印刷やディスペンサー等の印刷手段により、異方
性導電ペーストからなる異方性導電接着剤の層を形成す
ることもできる。上記加熱、加圧には、ヒーターが付い
た圧着機やボンディングマシーン等が用いられる。上記
異方性導電接着剤の塗工膜厚は、10〜数百μmが好ま
しい。As the bonding method using the anisotropic conductive adhesive, for example, an anisotropic conductive adhesive comprising the anisotropic conductive film is provided on a substrate or an electric component having electrodes formed on the surface. There is a method of arranging, placing an electrode of another substrate or an electric component thereon, heating and pressing. By using a predetermined amount of an anisotropic conductive paste in place of the anisotropic conductive film, a layer of an anisotropic conductive adhesive made of an anisotropic conductive paste can be formed by printing means such as screen printing or a dispenser. . For the above-mentioned heating and pressurizing, a crimping machine equipped with a heater, a bonding machine or the like is used. The coating film thickness of the anisotropic conductive adhesive is preferably from 10 to several hundred μm.
【0032】本発明の異方性導電接着剤は、軟質導電性
微粒子と、その平均粒子径が0.3〜50μmで、上記
軟質導電性微粒子の平均粒子径に対して0.2〜0.9
5倍の平均粒子径を有する硬質導電性微粒子とを含むの
で、軟質電極を接合する場合には、上記硬質導電性微粒
子が軟質電極に食い込み、充分に信頼性を確保すること
ができ、一方、硬質電極を接合する場合には、軟質導電
性微粒子が変形し、硬質電極と充分に接触し、充分に信
頼性を確保することができる。また、硬質導電性微粒子
よりも軟質導電性微粒子が大きいため、硬質電極を接合
させる場合であっても、硬質導電性微粒子が電極を傷つ
けることはない。The anisotropic conductive adhesive of the present invention has soft conductive fine particles and an average particle diameter of 0.3 to 50 μm, and is 0.2 to 0.2 μm based on the average particle diameter of the soft conductive fine particles. 9
Since it contains hard conductive fine particles having an average particle diameter of 5 times, when bonding a soft electrode, the hard conductive fine particles bite into the soft electrode, and sufficient reliability can be secured. When the hard electrode is joined, the soft conductive fine particles are deformed and come into sufficient contact with the hard electrode, so that sufficient reliability can be ensured. Further, since the soft conductive fine particles are larger than the hard conductive fine particles, the hard conductive fine particles do not damage the electrodes even when bonding the hard electrodes.
【0033】従って、本発明の異方性導電接着剤は、形
成されている電極の硬さによらず、表面に電極が形成さ
れた種々の基板、半導体等の電気部品等を良好に接合す
ることができ、隣接する電極間でのリーク現象も殆ど発
生しない。また、接合の際の電流容量を大きくとること
ができる。上記基板又は電気部品の電極部同士が、上記
異方性導電接着剤等を用いて接続された導電接続構造体
もまた、本発明の一つである。Therefore, the anisotropic conductive adhesive of the present invention satisfactorily joins various substrates having electrodes formed on its surface, electric parts such as semiconductors, etc., regardless of the hardness of the formed electrodes. And a leak phenomenon between adjacent electrodes hardly occurs. Further, the current capacity at the time of joining can be increased. The present invention also includes a conductive connection structure in which the electrodes of the substrate or the electric component are connected to each other by using the anisotropic conductive adhesive or the like.
【0034】[0034]
【実施例】以下に実施例を掲げて本発明を更に詳しく説
明するが、本発明はこれら実施例のみに限定されるもの
ではない。The present invention will be described in more detail with reference to the following examples, but the present invention is not limited to these examples.
【0035】実施例1 平均粒子径8μm、K値350kgf/mm2 、アスペ
クト比1.05、CV値5%の架橋ポリスチレン重合体
に0.05μmの厚さの金メッキを施した軟質導電性微
粒子と、平均粒子径4μm、アスペクト比1.1、CV
値20%のニッケルに金メッキを施した硬質導電性微粒
子とを、それぞれその含有量が5重量%になるように、
エポキシ樹脂及びアクリル樹脂の混合物をトルエンに溶
解させたバインダー溶液に混合、分散させた。Example 1 Soft conductive fine particles obtained by subjecting a crosslinked polystyrene polymer having an average particle diameter of 8 μm, a K value of 350 kgf / mm 2 , an aspect ratio of 1.05, and a CV value of 5% to a gold plating of 0.05 μm in thickness were prepared. , Average particle diameter 4 μm, aspect ratio 1.1, CV
Hard conductive fine particles plated with gold on nickel having a value of 20%, so that the content thereof is 5% by weight,
A mixture of an epoxy resin and an acrylic resin was mixed and dispersed in a binder solution dissolved in toluene.
【0036】次に、上記工程により得られた導電性微粒
子分散溶液を離型フィルム上に一定厚みに塗布し、トル
エンを蒸発させ、異方性導電膜を作製した。膜厚は15
μmであった。次に、ガラス基板(ITO電極:厚み
0.3μm、配線幅50μm、電極ピッチ100μm、
金バンプ電極:厚み3μm、配線幅50μm、電極ピッ
チ100μm、ITO電極と金バンプ電極の間の幅10
0μm)に得られた異方性導電膜を貼り付け、この上に
同じガラス基板を重ね合わせ、加熱、加圧して導電接続
構造体を作製し、接続抵抗値を測定した。Next, the conductive fine particle dispersion obtained in the above step was applied on a release film to a constant thickness, and toluene was evaporated to prepare an anisotropic conductive film. The film thickness is 15
μm. Next, a glass substrate (ITO electrode: thickness 0.3 μm, wiring width 50 μm, electrode pitch 100 μm,
Gold bump electrode: thickness 3 μm, wiring width 50 μm, electrode pitch 100 μm, width 10 between ITO electrode and gold bump electrode
(0 μm), the same anisotropic conductive film was laminated thereon, and the same glass substrate was overlaid thereon, and heated and pressed to form a conductive connection structure, and the connection resistance value was measured.
【0037】その結果、この導電接続構造体の接続抵抗
値は充分に低く、隣接する電極間の線間絶縁性は充分保
たれていた。また、−20〜100℃の冷熱サイクルを
1000回行ったが、特に問題は発生しなかった。As a result, the connection resistance value of this conductive connection structure was sufficiently low, and the line insulation between adjacent electrodes was sufficiently maintained. The cooling / heating cycle at -20 to 100 ° C. was performed 1,000 times, but no particular problem occurred.
【0038】実施例2 平均粒子径4μm、アスペクト比1.1、CV値20%
のニッケルに金メッキを施した硬質導電性微粒子の代わ
りに、平均粒子径が3μm、アスペクト比1.3、CV
値20%のニッケルに金メッキを施した硬質導電性微粒
子を使用したほかは、実施例1と同様に導電接続構造体
を作製し、接続状態を調査した。Example 2 Average particle size 4 μm, aspect ratio 1.1, CV value 20%
In place of the hard conductive fine particles obtained by plating gold on nickel, the average particle size is 3 μm, the aspect ratio is 1.3, and the CV
A conductive connection structure was prepared in the same manner as in Example 1 except that hard conductive fine particles obtained by applying gold plating to nickel having a value of 20% were used, and the connection state was examined.
【0039】その結果、この導電接続構造体の接続抵抗
値は、実施例1の場合の導電接続構造体より軟質電極
(金バンプ電極)での接続抵抗は大きいものの、実使用
上問題のない程度に低く、隣接する電極間の線間絶縁性
は、充分に保たれていた。また、−20〜100℃の冷
熱サイクルを1000回行ったが、特に問題は発生しな
かった。As a result, the connection resistance value of the conductive connection structure is higher than that of the conductive connection structure of the first embodiment, although the connection resistance at the soft electrode (gold bump electrode) is higher than that of the conductive connection structure of the first embodiment. And the insulation between lines between adjacent electrodes was sufficiently maintained. The cooling / heating cycle at -20 to 100 ° C. was performed 1,000 times, but no particular problem occurred.
【0040】実施例3 平均粒子径4μm、アスペクト比1.1、CV値20%
のニッケルに金メッキを施した硬質導電性微粒子の代わ
りに、平均粒子径7μm、アスペクト比1.1、CV値
30%のニッケルに金メッキを施した硬質導電性微粒子
を使用したほかは、実施例1と同様に導電接続構造体を
作製し、接続状態を調査した。Example 3 Average particle diameter 4 μm, aspect ratio 1.1, CV value 20%
Example 1 was replaced by gold-plated hard conductive fine particles having an average particle size of 7 μm, an aspect ratio of 1.1, and a CV value of 30% instead of the gold-plated hard conductive fine particles of Example 1. A conductive connection structure was prepared in the same manner as described above, and the connection state was examined.
【0041】その結果、この導電接続構造体の接続抵抗
値は、実施例1の場合の導電接続構造体より硬質電極
(ITO電極)での接続抵抗は大きいものの、実使用上
問題のない程度に低く、隣接する電極間の線間絶縁性
は、充分に保たれていた。また、−20〜100℃の冷
熱サイクルを1000回行ったが、特に問題は発生しな
かった。As a result, the connection resistance value of the conductive connection structure is higher than that of the conductive connection structure of the first embodiment, although the connection resistance at the hard electrode (ITO electrode) is higher than that of the conductive connection structure of Example 1. It was low, and the line insulation between adjacent electrodes was sufficiently maintained. The cooling / heating cycle at -20 to 100 ° C. was performed 1,000 times, but no particular problem occurred.
【0042】実施例4 平均粒子径8μm、K値350kgf/mm2 、アスペ
クト比1.05、CV値5%の架橋ポリスチレン重合体
に0.05μmの厚さの金メッキを施した軟質導電性微
粒子の代わりに、平均粒子径8μm、K値1000kg
f/mm2 、アスペクト比1.1、CV値10%の架橋
アクリロニトリル重合体に0.05μmの厚さの金メッ
キを施した軟質導電性微粒子を使用したほかは、実施例
1と同様に導電接続構造体を作製し、接続状態を調査し
た。Example 4 Soft conductive fine particles obtained by plating a crosslinked polystyrene polymer having an average particle diameter of 8 μm, a K value of 350 kgf / mm 2 , an aspect ratio of 1.05 and a CV value of 5% with a gold plating of 0.05 μm in thickness. Instead, average particle size 8μm, K value 1000kg
Conductive connection in the same manner as in Example 1 except that soft conductive fine particles having a thickness of 0.05 μm applied to a crosslinked acrylonitrile polymer having an f / mm 2 , an aspect ratio of 1.1, and a CV value of 10% were used. A structure was manufactured and the connection state was investigated.
【0043】その結果、この導電接続構造体の接続抵抗
値は、実施例1の場合の導電接続構造体より硬質電極
(ITO電極)での接続抵抗は大きいものの、実使用上
問題のない程度に低く、隣接する電極間の線間絶縁性
は、充分に保たれていた。また、−20〜100℃の冷
熱サイクルを1000回行ったが、特に問題は発生しな
かった。As a result, the connection resistance value of this conductive connection structure was higher than that of the conductive connection structure of the first embodiment, although the connection resistance at the hard electrode (ITO electrode) was higher than that of the conductive connection structure of Example 1. It was low, and the line insulation between adjacent electrodes was sufficiently maintained. The cooling / heating cycle at -20 to 100 ° C. was performed 1,000 times, but no particular problem occurred.
【0044】比較例1 平均粒子径が4μm、アスペクト比1.1、CV値20
%のニッケルに金メッキを施した硬質導電性微粒子の代
わりに、平均粒子径が1μm、アスペクト比1.5、C
V値20%のニッケルに金メッキを施した硬質導電性微
粒子を使用したほかは、実施例1と同様に導電接続構造
体を作製し、接続状態を調査した。その結果、隣接する
電極間の線間絶縁性は、充分に保たれていたが、軟質電
極で一部導通不良が観測された。Comparative Example 1 The average particle diameter was 4 μm, the aspect ratio was 1.1, and the CV value was 20.
% Of nickel, gold-plated hard conductive fine particles, average particle diameter is 1 μm, aspect ratio 1.5, C
A conductive connection structure was prepared in the same manner as in Example 1, except that hard conductive fine particles obtained by plating gold on nickel having a V value of 20% were used, and the connection state was examined. As a result, the line insulation between the adjacent electrodes was sufficiently maintained, but poor conduction was partially observed in the soft electrodes.
【0045】比較例2 平均粒子径が4μm、アスペクト比1.1、CV値20
%のニッケルに金メッキを施した硬質導電性微粒子の代
わりに、平均粒子径が8μm、アスペクト比1.1、C
V値45%のニッケルに金メッキを施した硬質導電性微
粒子を使用したほかは、実施例1と同様に導電接続構造
体を作製し、接続状態を調査した。その結果、隣接する
電極間の線間絶縁性は、充分に保たれていたが、−20
〜100℃の冷熱サイクルを1000回行ったところ、
硬質電極で一部導通不良が観測された。Comparative Example 2 The average particle diameter was 4 μm, the aspect ratio was 1.1, and the CV value was 20.
% Nickel instead of gold-plated hard conductive fine particles, the average particle diameter is 8 μm, the aspect ratio is 1.1, C
A conductive connection structure was prepared and the connection state was examined in the same manner as in Example 1, except that hard conductive fine particles obtained by plating gold on nickel having a V value of 45% were used. As a result, the insulation between lines between adjacent electrodes was sufficiently maintained.
After 1000 cycles of cooling and heating at ~ 100 ° C,
Some conduction failure was observed in the hard electrode.
【0046】[0046]
【発明の効果】本発明の異方性導電接着剤は、上述の構
成よりなるので、軟質電極、硬質電極等の電極の種類に
よらず、これらの電極が形成された基板又は電気部品等
を良好に導電接合することができる。また、本発明の導
電接続構造体は、上述の構成よりなるので、接続抵抗が
低く、接続時の電流容量が大きく、接続が安定してい
て、リーク現象を起こさない導電接続構造体を提供する
ことができる。As described above, the anisotropic conductive adhesive of the present invention has the above-mentioned structure, so that a substrate or an electrical component or the like on which these electrodes are formed can be used regardless of the kind of electrodes such as soft electrodes and hard electrodes. Good conductive bonding can be achieved. Further, since the conductive connection structure of the present invention has the above-described configuration, the present invention provides a conductive connection structure having low connection resistance, large current capacity at the time of connection, stable connection, and free from a leak phenomenon. be able to.
Claims (10)
電性微粒子と、前記硬質導電性微粒子よりも大きい軟質
導電性微粒子とを含む異方性導電接着剤であって、前記
硬質導電性微粒子の平均粒子径が前記軟質導電性微粒子
の平均粒子径の0.2〜0.95倍であることを特徴と
する異方性導電接着剤。1. An anisotropic conductive adhesive comprising hard conductive fine particles having an average particle diameter of 0.3 to 50 μm and soft conductive fine particles larger than the hard conductive fine particles, wherein the hard conductive fine particles An anisotropic conductive adhesive, wherein the average particle size of the fine particles is 0.2 to 0.95 times the average particle size of the soft conductive fine particles.
7μmであり、かつ、前記硬質導電性微粒子の平均粒子
径は、軟質導電性微粒子の平均粒子径の0.3〜0.9
倍であることを特徴とする請求項1記載の異方性導電接
着剤。2. The hard conductive fine particles have an average particle diameter of 1 to 2.
7 μm, and the average particle size of the hard conductive fine particles is 0.3 to 0.9 of the average particle size of the soft conductive fine particles.
2. The anisotropic conductive adhesive according to claim 1, wherein said adhesive is doubled.
導電性微粒子の平均粒子径の0.4〜0.8倍であるこ
とを特徴とする請求項1又は2記載の異方性導電接着
剤。3. The anisotropic conductive material according to claim 1, wherein the hard conductive fine particles have an average particle size of 0.4 to 0.8 times the average particle size of the soft conductive fine particles. adhesive.
導電性微粒子の平均粒子径の0.5〜0.7倍であるこ
とを特徴とする請求項1、2又は3記載の異方性導電接
着剤。4. The anisotropic material according to claim 1, wherein the average particle diameter of the hard conductive fine particles is 0.5 to 0.7 times the average particle diameter of the soft conductive fine particles. Conductive adhesive.
質導電性微粒子は、K値が200〜800kgf/mm
2 の材料からなるものであることを特徴とする請求項
1、2、3又は4記載の異方性導電接着剤。5. The hard conductive fine particles are made of metal, and the soft conductive fine particles have a K value of 200 to 800 kgf / mm.
The anisotropic conductive adhesive according to claim 1, 2, 3 or 4, wherein it is made of second material.
下、アスペクト比が1.3以下であり、軟質導電性微粒
子は、CV値が10%以下、アスペクト比が1.1以下
であることを特徴とする1、2、3、4又は5記載の異
方性導電接着剤。6. The hard conductive fine particles have a CV value of 40% or less and an aspect ratio of 1.3 or less, and the soft conductive fine particles have a CV value of 10% or less and an aspect ratio of 1.1 or less. The anisotropic conductive adhesive according to 1, 2, 3, 4, or 5, wherein:
微粒子は、金メッキが施されていることを特徴とする請
求項1、2、3、4、5又は6記載の異方性導電接着
剤。7. The anisotropic conductive adhesive according to claim 1, wherein the hard conductive fine particles and / or the soft conductive fine particles are plated with gold. .
としていることを特徴とする請求項1、2、3、4、
5、6又は7記載の異方性導電接着剤。8. The hard conductive fine particles having nickel particles as nuclei.
The anisotropic conductive adhesive according to 5, 6, or 7.
粒子の重量比(軟質導電性微粒子/硬質導電性微粒子)
は、1/3〜3/1であることを特徴とする請求項1、
2、3、4、5、6、7又は8記載の異方性導電接着
剤。9. The weight ratio of soft conductive fine particles to hard conductive fine particles (soft conductive fine particles / hard conductive fine particles).
Is 1/3 to 3/1, wherein
The anisotropic conductive adhesive according to 2, 3, 4, 5, 6, 7, or 8.
士が、請求項1、2、3、4、5、6、7、8又は9記
載の異方性導電接着剤により接続されていることを特徴
とする導電接続構造体。10. An electrode part constituting a substrate or an electric component is connected to each other by the anisotropic conductive adhesive according to claim 1, 2, 3, 4, 5, 6, 7, 8 or 9. A conductive connection structure characterized by the above-mentioned.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14440198A JPH11339558A (en) | 1998-05-26 | 1998-05-26 | Anisotropic conductive adhesive and conductive connection structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14440198A JPH11339558A (en) | 1998-05-26 | 1998-05-26 | Anisotropic conductive adhesive and conductive connection structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11339558A true JPH11339558A (en) | 1999-12-10 |
Family
ID=15361318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14440198A Withdrawn JPH11339558A (en) | 1998-05-26 | 1998-05-26 | Anisotropic conductive adhesive and conductive connection structure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11339558A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003253239A (en) * | 2002-02-28 | 2003-09-10 | Hitachi Chem Co Ltd | Method for connecting circuit and adhesive therefor |
| JP2006030385A (en) * | 2004-07-13 | 2006-02-02 | Shin Etsu Polymer Co Ltd | Photosensitive conductive paste |
| JP2009084510A (en) * | 2007-10-02 | 2009-04-23 | Sekisui Chem Co Ltd | Adhesive |
| JP2010174096A (en) * | 2009-01-28 | 2010-08-12 | Fujikura Kasei Co Ltd | Anisotropic conductive adhesive |
| KR20120124470A (en) | 2010-02-01 | 2012-11-13 | 소니 케미카루 앤드 인포메이션 디바이스 가부시키가이샤 | Anisotropic conductive film, bonded body and connection method |
| WO2015162931A1 (en) * | 2014-04-24 | 2015-10-29 | タツタ電線株式会社 | Metal-coated resin particles and electroconductive adhesive in which same are used |
-
1998
- 1998-05-26 JP JP14440198A patent/JPH11339558A/en not_active Withdrawn
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003253239A (en) * | 2002-02-28 | 2003-09-10 | Hitachi Chem Co Ltd | Method for connecting circuit and adhesive therefor |
| JP2006030385A (en) * | 2004-07-13 | 2006-02-02 | Shin Etsu Polymer Co Ltd | Photosensitive conductive paste |
| JP2009084510A (en) * | 2007-10-02 | 2009-04-23 | Sekisui Chem Co Ltd | Adhesive |
| JP2010174096A (en) * | 2009-01-28 | 2010-08-12 | Fujikura Kasei Co Ltd | Anisotropic conductive adhesive |
| KR20120124470A (en) | 2010-02-01 | 2012-11-13 | 소니 케미카루 앤드 인포메이션 디바이스 가부시키가이샤 | Anisotropic conductive film, bonded body and connection method |
| WO2015162931A1 (en) * | 2014-04-24 | 2015-10-29 | タツタ電線株式会社 | Metal-coated resin particles and electroconductive adhesive in which same are used |
| JP2015210883A (en) * | 2014-04-24 | 2015-11-24 | タツタ電線株式会社 | Metal-coated resin particles and conductive adhesive using the same |
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